JP2013050248A - Clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To surely prevent the entry of a chemical substance into a room, and to reduce a cost imposed on a chemical unit by improving partitioning performance and air tightness with respect to an outside air.SOLUTION: There is provided a clean room 1 in which the inside of the room R is covered with a double-wall body composed of an inner wall 2 and an outer wall 3, a pressurization zone S surrounded by the inner wall 2 and the outer wall 3 is formed, the air tightness in the room R is improved by filling the pressurization zone S with chemical outside air E0 which is supplied by an air purification device 10, and the flow-in of air into the room from the outside can surely be prevented.

Description

  The present invention relates to a clean room.

A conventional clean room provided in a liquid crystal panel manufacturing factory or the like is generally provided for the purpose of removing dust particles. In such a clean room, air containing fine dust particles is filtered by a high-performance filter to remove fine particles of 0.1 μm or more.
In addition, it is necessary to prevent molecular contaminants contained in the air from entering from the outside. In these factories, for example, various filters are provided in the casing to clean the air from the outside. A machine is installed.

  Some clean rooms have a front room that leads to the clean room through its doorway. This anterior chamber prevents the contaminated air from flowing into the clean room from the outside by maintaining the indoor pressure at a predetermined differential pressure with respect to the indoor pressure of the clean room and the external atmospheric pressure (for example, Patent Documents). 1).

Japanese Patent Laid-Open No. 10-132346

However, the conventional clean room has the following problems.
In other words, in the liquid crystal panel manufacturing process, there are processes that are extremely sensitive to chemical substances, and there is a problem that the quality of the chemical substances in the air in the clean room in the process deteriorates and the production efficiency decreases. It was.
In order to realize high chemical clean performance, it is necessary to increase the amount of outside air and the amount of internal circulation air, which increases the cost, and there is room for improvement in that respect.

  The present invention has been made in view of the above-described problems, and can reliably prevent the entry of chemical substances into the room, and can improve the partition performance and airtight performance against the outside air, thereby increasing the cost of the chemical unit. An object of the present invention is to provide a clean room capable of reducing the amount of waste.

  In order to achieve the above object, in the clean room according to the present invention, the room is covered with a double wall, so that a space is formed between the walls, and the space is filled with clean air. It is a feature.

  In the present invention, the wall surface and ceiling covering the interior of the clean room can be doubled, and the space between the doubled rooms is filled with clean air, so that the airtightness of the room is also improved, and the room is exposed from the outside of the clean room. It is possible to reliably prevent the inflow of air. Therefore, the chemical substance can be prevented from entering the room. This double structure increases the partition performance and airtightness, so the number and operating time of the chemical removal equipment for external air treatment and internal circulation that have been installed in the past can be suppressed, and the running cost is reduced. There is an advantage that it can be reduced, and an excellent clean room can be realized.

  In the clean room according to the present invention, the pressure in the space is preferably set higher than the pressure outside the double wall body.

  In this case, since the space between the two layers is in a pressurized state, it is possible to reliably prevent outside air (chemical substance) from entering the room through the space. it can.

  Moreover, in the clean room which concerns on this invention, it is preferable that the chemical filter unit is installed in the room.

  In the present invention, since a chemical substance can be removed by a chemical filter unit even in a clean room, a more excellent clean room can be realized.

According to the clean room of the present invention, the interior of the room is covered with double walls, and the space between the walls is filled with clean air, so that a pressurized zone is formed in the space, and from the outside to the room. Intrusion of chemical substances can be reliably prevented.
In addition, by increasing the partition performance and airtight performance with respect to the outside air, it is possible to suppress the increase in the amount of outside air and the amount of internal circulation air, so that the cost for the chemical unit can be reduced.

It is a top view which shows the outline | summary of the clean room by embodiment of this invention. It is a side view of the clean room shown in FIG.

  Hereinafter, a clean room according to an embodiment of the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 and 2, the clean room 1 according to the present embodiment is an example of a liquid crystal panel factory, for example, has a rectangular shape in plan view, and extends along the longitudinal direction at the center in the short side direction. The product stock area 1B and the return area 1C are provided on both sides in the width direction across the transport path 1A. The return area 1C is disposed at both ends and the center in the longitudinal direction, and has an opening 1a only on the conveyance path 1A side. In addition, a ceiling chamber 1D communicating with each of the conveyance path 1A and the return area 1C is provided in the ceiling portion of the clean room 1. Further, a product delivery port 1E having an opening shutter 1b is provided at an inlet portion arranged on one end side in the longitudinal direction of the transport path 1A.

  In the clean room 1, a double wall structure including an inner wall 2 and an outer wall 3, that is, a space covering the room R surrounded by the inner wall 2 is formed by the outer wall 3. The space (pressurization zone S) surrounded by the inner wall 2 and the outer wall 3 is filled with the chemical outside air E0 (clean air) cleaned by the air cleaning device 10 shown in FIG. Here, the chemical outside air E0 is the outside air that has been subjected to the chemical treatment by the air cleaning device 10 at, for example, about 5 times per hour.

The conveyance path 1A is a portion where the conveyance carriage 5 shown in FIG. 2 travels.
The air flowing through the product stock area 1B is taken in from the conveyance path 1A, and the air that has passed through the product stock area 1B and the conveyance path 1A is exhausted to the outside of the inner wall 2 (pressurization zone S). The air flowing through the return area 1C is taken in from the conveyance path 1A, and the chemical outside air E0 cleaned by the air cleaning device 10 is also taken in and sent to the ceiling chamber 1D. In each return area 1C, a chemical filter unit 4 is provided for internal circulation removal with respect to the air in the return area 1C.
Further, the delivery port 1E prevents the intrusion of organic matter into the transport path 1A by the opening shutter 1b.

  The air cleaning device 10 is disposed outside the clean room 1 (outside the outer wall 3), and supplies the chemical outside air E0 to the pressurization zone S and the return area 1C of the chamber R via the duct 6.

  As shown in FIG. 2, specifically, the air cleaning device 10 is an external air conditioner that removes contaminants in the outside air and adjusts the temperature and humidity of the outside air. A casing 11 in which a blow-out opening 13 for blowing air is formed, various filters and the like disposed in the casing 11, and disposed in the casing 11. Air is introduced into the casing 11 from the intake opening 12 and the blow-out opening And a fan 14 for blowing air out of the air.

  In the casing 11, in order from the upstream side of the intake port 12, a cooling coil 15 that cools air entering from the outside, a hot water coil 16 that heats the air, and a water film so as to block the air flow path in the casing 11. Water film humidifier 17 that removes water-soluble contaminants in the air, reheat coil 18 that reheats the air, fan 14 described above, molecular contaminants in the air (chemical contaminants) An organic removal chemical filter 19 and a high efficiency filter (HEPA (High Efficiency Particulate Air)) 20 are disposed.

  The clean room 1 thus provided has a configuration in which a space (pressurization zone S) covering the chamber R (inner wall 2) is formed outside the inner wall 2 constituting the chamber R, and the chemical outside air E0 is filled in the pressurization zone S. It has become. That is, the pressure in the pressurizing zone S into which the chemical outside air E0 has been introduced can be made larger than the pressure outside the outer wall 3, and the outside air can be prevented from entering the clean room 1 (inside the outer wall 3). Can do.

  Further, as a method for reducing the chemical substances in the air in the clean room 1, the outside air E0 is introduced into the return area 1C by the air cleaning device 10, and the internal circulation is performed by the chemical filter unit 4 provided in the return area 1C. It is a method of removing.

Next, the operation of the clean room 1 having the above-described configuration will be described below.
As shown in FIGS. 1 and 2, the wall surface and the ceiling covering the inside of the room R of the clean room 1 can be doubled, and the pressurized outside zone E0 is filled in the pressurized zone S between the doubled, The airtight performance in the room R is also improved, and the inflow of air from the outside of the clean room 1 into the room can be reliably prevented. Therefore, the chemical substance can be prevented from entering the chamber R.

Note that the return area 1C and the ceiling chamber 1D are under negative pressure, and it is a condition that air from the outside easily enters, but by providing the pressurized zone S filled with the chemical outside air E0 as a double structure as described above. Since the chemical outside air E0 in the pressurizing zone S enters the return area 1C and the ceiling chamber 1D, the chemical substance is prevented from entering the chamber R.
For example, in the present embodiment, the target indoor concentration when the conventional chemical countermeasures are taken as in the past is 100 μg · C / m ³ , whereas it is suppressed to 30 μg · C / m ³ or less. It is possible.

This double structure increases the partition performance and airtightness, so the number and operating time of the chemical removal equipment for external air treatment and internal circulation that have been installed in the past can be suppressed, and the running cost is reduced. There is an advantage that it can be reduced, and an excellent clean room 1 can be realized.
In addition, a chemical filter unit 4 is installed in the return area 1C, and chemical substances can be removed by the chemical filter unit 4 even in the clean room 1, thereby performing indoor clean circulation. An excellent clean room 1 can be realized.

As described above, in the clean room according to the present embodiment, the inside of the room R is covered with the double wall bodies (the inner wall 2 and the outer wall 3), and the chemical outside air S is placed in the pressure zone S between the wall bodies 2, 3. It is possible to reliably prevent the intrusion of chemical substances from the outside into the room.
In addition, by increasing the partition performance and airtight performance with respect to the outside air, it is possible to suppress the increase in the amount of outside air and the amount of internal circulation air, so that the cost for the chemical unit can be reduced.

The embodiment of the clean room according to the present invention has been described above. However, the present invention is not limited to the above embodiment, and can be appropriately changed without departing from the scope of the present invention.
For example, in the present embodiment, the configuration is such that the chemical outside air E0 is introduced into the return area 1C from the air cleaning device 10 or the delivery port 1E is provided, but such a configuration may be omitted.

Moreover, the structure of the air purification apparatus 10 is not restrict | limited to this Embodiment. That is, it is possible to set an appropriate configuration and arrangement of the fan 14, the cooling coil 15, the organic removal chemical filter 19, the high-performance filter 20, and the like disposed in the casing 11.
In addition, it is possible to appropriately replace the components in the above-described embodiments with known components without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 Clean room 1A Conveyance path 1B Product stock area 1C Return area 1D Ceiling chamber 1E Product delivery port 2 Inner wall 3 Outer wall 4 Chemical filter unit 5 Carriage cart 6 Duct 10 Air purifier E0 Chemical outside air (clean air)
R room S Pressurization zone (space)

Claims (3)

  A clean room characterized in that a space is formed between the walls by covering the room with a double wall and the space is filled with clean air.   The clean room according to claim 1, wherein the pressure in the space is higher than the pressure outside the double wall body. The clean room according to claim 1, wherein a chemical filter unit is installed in the chamber.

Images