JPS61175424A - Clean room - Google Patents

Clean room

Info

Publication number
JPS61175424A
JPS61175424A JP60015510A JP1551085A JPS61175424A JP S61175424 A JPS61175424 A JP S61175424A JP 60015510 A JP60015510 A JP 60015510A JP 1551085 A JP1551085 A JP 1551085A JP S61175424 A JPS61175424 A JP S61175424A
Authority
JP
Japan
Prior art keywords
clean room
air
outside
internal part
double structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60015510A
Other languages
Japanese (ja)
Other versions
JPH0443142B2 (en
Inventor
Kenichiro Saito
斉藤 研一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aoki Construction Co Ltd
Original Assignee
Aoki Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoki Construction Co Ltd filed Critical Aoki Construction Co Ltd
Priority to JP60015510A priority Critical patent/JPS61175424A/en
Publication of JPS61175424A publication Critical patent/JPS61175424A/en
Publication of JPH0443142B2 publication Critical patent/JPH0443142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To enable to shut off perfectly the inside of a room from the outside by a method wherein a clean room is structured in air tight manner by forming each floor, wall and ceiling having respective double structure provided with a hollow internal part, an air pressure inside of each double structure is kept higher than that of the outside. CONSTITUTION:A clean room 10 is formed of a floor 11, a wall 12 and a ceiling 13, those three parts are structured by attaching an outer side plate 15 to an inner side plate 16 with adequate space by a connecting member 17, thus, the clean room 10 is formed in air tight manner by a double structure provided with a hollow internal part 18, the internal part 18 is connected to an air supplying source 19, the air pressure in the internal part 18 in kept higher than that of the outside by supplying a pressurized air. By utilizing a transparent plate such as a transparent acrylic resin plate and the like for the outer side plate 15 and the inner side plate 16, the inside of the clean room 10 can be lightened and observed from the outside. The air pressure in the internal part 18 is sufficient by adding 15mm H2O to the atmospheric pressure, further, the safety can be improved more by supplying a sterilized gas instead of the air into the internal part 18.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、エレクトロニクス産業等で無塵至として使用
される工業用クリーンルーム(ICR)およびバイオテ
クノロジーにおいて生物学的に清潔な室として使用され
るバイオクリーンルーム(BCR)に関するものである
Detailed Description of the Invention (Industrial Application Field) The present invention is applicable to industrial clean rooms (ICRs) used as dust-free rooms in the electronics industry, etc., and as biologically clean rooms in biotechnology. This relates to bio-clean rooms (BCR).

(従来の技術) 第3図は従来のバイオクリーンルームの一例を示す平断
面図であり、図中1はバイオクリーンルームの室内(ホ
ットエリア)、2はその周囲の隔壁、3は三つに仕切ら
れている入室用隔室、4はバイオクリーンルーム1およ
び入室用隔室3を囲繞するように設けた回り廊下(セミ
ホットエリア)5はこの回り廊下4の外壁、6はバイオ
クリーンルーム1内に設置したグローブボックスである
(Prior art) Fig. 3 is a plan cross-sectional view showing an example of a conventional bioclean room. 4 is a circular corridor (semi-hot area) surrounding the bio-clean room 1 and the entrance compartment 3, 5 is the outer wall of this circular corridor 4, and 6 is a glove installed inside the bio-clean room 1. It's a box.

しかして従来のバイオクリーンルーム1は、室内のバイ
オハザード(微生物学的危険性)を防止するため、気圧
調整装置7等によってバイオクリーンルーム1内の気圧
を外部気圧より低くすることによって、バイオクリーン
ルーム1内の有害な物質や菌等が外部に漏出しないよう
にしていた。
However, in order to prevent indoor biohazards (microbiological dangers), the conventional bioclean room 1 uses a pressure regulator 7 or the like to lower the pressure inside the bioclean room 1 than the outside pressure. This was to prevent harmful substances and bacteria from leaking outside.

(発明が解決しようとする問題点) しかしながら従来のバイオクリーンルーム1の隔壁2は
一重構造であったため、完全な隔離がむずかしいことと
、万一隔壁2の外へ有害な物質や菌が漏出した場合を考
慮してバイオクリーンルーム1を回り底下4で囲繞して
、この部分をセミホットエリアとしていた。
(Problems to be solved by the invention) However, since the partition wall 2 of the conventional bioclean room 1 had a single layer structure, complete isolation is difficult, and in the unlikely event that harmful substances or bacteria leak outside the partition wall 2. Taking this into consideration, the bio-clean room 1 was surrounded by the bottom 4, making this part a semi-hot area.

このため従来のバイオクリーンルーム設備は多くの面積
を必要とすると共に、遮蔽の不確実性のためにグローブ
ボックス6を設置しなければならないから、これらの点
からも費用が嵩むという問題点があった。
For this reason, conventional bioclean room equipment requires a large area, and a glove box 6 must be installed due to the uncertainty of shielding, which also increases costs. .

さらに上述のようにバイオクリーンルーム1内の気圧を
負圧にすると、空の人出に際してのドアの開閉が、内外
の気圧差によって困難を伴うと共に、排水等のバックア
ップ現象等が生ずるため至内での作業に種々な支障を与
えるという問題点があった。
Furthermore, if the air pressure inside the bio-clean room 1 is set to negative pressure as described above, opening and closing the door when emptying the room will be difficult due to the difference in air pressure between the inside and outside, and backup phenomena such as drainage will occur, making it extremely difficult to open and close the door. There was a problem in that it caused various hindrances to the work of people.

(問題点を解決するための手段) 上述の目的を達成するため本発明においては、クリーン
ルームを形成する床、壁および天井を、内部を中空にし
た二重構造としてクリーンルームを気密に構成し、この
二重構造の内部の気圧を外部の気圧より高くしてクリー
ンルームを構成する。
(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention configures the clean room as an airtight double structure in which the floor, walls and ceiling forming the clean room are hollow. A clean room is constructed by making the pressure inside the double structure higher than the pressure outside.

(作 用) 上述のように本発明においては、クリーンルームを形成
する床、壁および天井を、内部を中空にした二重構造と
してクリーンルームを気密に構成し、この二重構造の内
部の気圧を外部の気圧より高くしたから、万一クリーン
ルームの床、壁および天井に穴または隙間等がおいても
、二重構造の内部の気圧が高いため、二重構造の内部の
空気がクリーンルーム内または外部に流出することはあ
っても、クリーンルーム内または外部の空気が二重構造
の内部に侵入することは全くないから、いずれにしても
クリーンルームの内部と外部を完全に遮蔽することがで
きる。従って外部の塵埃がクリーンルーム内に侵入する
ことはないし、またクリーンルーム内の有害な物質や菌
等が外部に漏出するおそれもなくなる。
(Function) As described above, in the present invention, the floor, walls, and ceiling forming the clean room are configured as a double structure with a hollow interior to make the clean room airtight, and the air pressure inside the double structure is transferred to the outside. Even if there are holes or gaps in the floor, walls, or ceiling of the clean room, the air pressure inside the double structure is high and the air inside the double structure will not leak into the clean room or outside. Although it may leak out, air from inside or outside the clean room will never enter the double structure, so in any case, the inside and outside of the clean room can be completely shielded. Therefore, external dust will not enter the clean room, and there will be no fear that harmful substances, bacteria, etc. inside the clean room will leak outside.

(実施例) 以下、第1図および第2図について本発明の詳細な説明
する。図中10はクリーンルーム、11(第2図参照)
はその床、12は壁、13は天井、14(第1図参照)
は三つに仕切った入室用隔室である。
(Example) The present invention will be described in detail below with reference to FIGS. 1 and 2. In the figure, 10 is a clean room, and 11 (see Figure 2)
is the floor, 12 is the wall, 13 is the ceiling, 14 (see Figure 1)
is a separate room for entry divided into three parts.

本実施例においては、クリーンルーム10を形成する床
11、壁12および天井13を、それぞれ外側板15と
内側板16とを適当な間隔をおいて連結部材17により
連結することにより内部18を中空にした二重構造とし
てクリーンルーム10を気密に構成し、この二重構造の
内部18を圧力空気供給1i19に接続して、圧力空気
を送給することにより、二重構造の内部18の空気圧を
外部の空気圧より高くして保持するようにする。
In this embodiment, the floor 11, walls 12, and ceiling 13 that form the clean room 10 are connected by connecting members 17 with the outer panel 15 and inner panel 16 spaced apart at appropriate intervals, thereby making the interior 18 hollow. The clean room 10 is airtightly configured as a double structure, and the inside 18 of this double structure is connected to a pressure air supply 1i19 to supply pressurized air, thereby transferring the air pressure in the inside 18 of the double structure to the outside. Make sure to hold it higher than the air pressure.

なお20(第2図参照)はクリーンルーム10全体を支
承する支承版、21はクリーンルーム10内の床版であ
る。
Note that 20 (see FIG. 2) is a support plate that supports the entire clean room 10, and 21 is a floor plate inside the clean room 10.

また壁12および天井13を形成する外側板15と内側
板16を、必要に応じて透明アクリル樹脂板等の透明板
とすれば、クリーンルーム10の内部を外部から照明や
観察ができるため便利である。
Furthermore, if the outer plate 15 and inner plate 16 forming the walls 12 and ceiling 13 are made of transparent plates such as transparent acrylic resin plates as necessary, it is convenient because the interior of the clean room 10 can be illuminated and observed from the outside. .

また二重構造の内部18の気圧は、大気圧+15+em
HzO程度であればよい。さらにこの内部18内に空気
の代りに滅菌ガスを供給すれば安全性が一層向上する。
In addition, the pressure inside the double structure 18 is atmospheric pressure + 15 + em
It is sufficient if it is about HzO. Furthermore, if a sterilizing gas is supplied into the interior 18 instead of air, safety will be further improved.

(発明の効果) 上述のように本発明においては、クリーンルーム10を
形成する床11、壁12および天井13を、内部18を
中空にした二重構造としてクリーンルーム10を気密に
構成し、この二重構造の内部18の気圧を外部の気圧よ
り高くしたから、万一クリーンルーム10の床11、壁
12および天井13に穴または隙間等がおいても、二重
構造の内部18の気圧が高いため、二重構造の内部18
の空気がクリーンルーム10内または外部に流出するこ
とはあっても、クリーンルーム10内または外部の空気
が二重構造の内部18に侵入することは全くないから、
いずれにしてもクリーンルーム10の内部と外部を完全
に遮蔽することができる。従って外部の塵埃がクリーン
ルーム10内に侵入することはないし、またクリーンル
ーム10内の有害な物質や菌等が外部に漏出するおそれ
もなくなる。したがって本発明によれば、クリーンルー
ム10内の清浄が確実に保てるし、またバイオハザード
防止機能も確実になるという効果が得られる。
(Effects of the Invention) As described above, in the present invention, the floor 11, walls 12, and ceiling 13 forming the clean room 10 are configured as a double structure in which the interior 18 is hollow, and the clean room 10 is airtightly constructed. Since the air pressure inside the structure 18 is higher than the outside air pressure, even if there are holes or gaps in the floor 11, walls 12, and ceiling 13 of the clean room 10, the air pressure inside the double structure 18 will be high. Double structure interior 18
Although air may flow out into the clean room 10 or outside, the air inside the clean room 10 or outside never enters the double-structured interior 18.
In any case, the inside and outside of the clean room 10 can be completely shielded. Therefore, external dust will not enter the clean room 10, and there will be no fear that harmful substances, bacteria, etc. inside the clean room 10 will leak outside. Therefore, according to the present invention, the cleanliness within the clean room 10 can be maintained reliably, and the biohazard prevention function can also be ensured.

またバイオハザード防止機能が向上するため、従来のよ
うにグローブボックスをクリーンルーム10内に設置す
る必要がなくなり、スーツラボが可能となるから、作業
が容易になる上に、費用も低減する。
Furthermore, since the biohazard prevention function is improved, there is no need to install a glove box in the clean room 10 as in the past, and a suit laboratory becomes possible, which not only simplifies work but also reduces costs.

また本発明によれば、従来のようにクリーンルーム内を
減圧することなく、大気圧でよいから、クリーンルーム
に対する人出に際してのドアの開閉が容易になると共に
、排水のバックアップ現象も生じないため、作業性が著
しく向上する。
Furthermore, according to the present invention, atmospheric pressure can be used instead of reducing the pressure inside the clean room as in the past, making it easier to open and close the door when people enter the clean room, and there is no back-up phenomenon of drainage, making it easier to carry out work. performance is significantly improved.

さらに本発明によれば、従来のようにクリーンルームの
周囲に回り廊下等の余分のスペースを設けてセミホット
エリアとする必要がないから、クリーンルームの設置面
積を著しく軽減することができるので、その会費用も大
巾に低減できるという効果が得られる。
Furthermore, according to the present invention, there is no need to create an extra space such as a corridor around the clean room to create a semi-hot area as in the past, so the installation area of the clean room can be significantly reduced. This has the effect of significantly reducing the

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明クリーンルームの一例を示す平断面図、 第2図は第1図のA−A断面図、 第3図は従来のバイオクリーンルームの一例を示す平断
面図である。 10・・・クリーンルーム 11・・・床12・・・壁
       13・・・天井14・・・入室用隔室 
  15・・・外側板16・・・内側板     17
・・・連結部材18・・・二重構造の内部 19・・・
圧力空気供給源特許出願人   株式会社 青木建設 第3図
FIG. 1 is a cross-sectional plan view showing an example of the clean room of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a cross-sectional plan view showing an example of a conventional bio-clean room. 10...Clean room 11...Floor 12...Wall 13...Ceiling 14...Entry compartment
15...Outer plate 16...Inner plate 17
...Connecting member 18...Inside of double structure 19...
Pressure air supply source patent applicant Aoki Construction Co., Ltd. Figure 3

Claims (1)

【特許請求の範囲】[Claims] 1、クリーンルームを形成する床、壁および天井を、内
部を中空にした二重構造としてクリーンルームを気密に
構成し、この二重構造の内部の気圧を外部の気圧より高
くしたことを特徴とするクリーンルーム。
1. A clean room characterized in that the floor, walls, and ceiling forming the clean room are airtightly configured as a double structure with a hollow interior, and the air pressure inside this double structure is higher than the air pressure outside. .
JP60015510A 1985-01-31 1985-01-31 Clean room Granted JPS61175424A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60015510A JPS61175424A (en) 1985-01-31 1985-01-31 Clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60015510A JPS61175424A (en) 1985-01-31 1985-01-31 Clean room

Publications (2)

Publication Number Publication Date
JPS61175424A true JPS61175424A (en) 1986-08-07
JPH0443142B2 JPH0443142B2 (en) 1992-07-15

Family

ID=11890807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60015510A Granted JPS61175424A (en) 1985-01-31 1985-01-31 Clean room

Country Status (1)

Country Link
JP (1) JPS61175424A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000027351A (en) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd Clean room
JP2000027474A (en) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd Clean room
JP2003035044A (en) * 2001-07-23 2003-02-07 Nippon Soda Co Ltd Decomposing treating facility for persistent halogen compound
JP2013050248A (en) * 2011-08-30 2013-03-14 Shimizu Corp Clean room
JP2013092325A (en) * 2011-10-27 2013-05-16 Dai-Dan Co Ltd Room pressure control method at start of air-conditioning operation
DE102012020200A1 (en) * 2012-10-16 2014-04-17 Schilling Engineering GmbH Cleanroom limiting unit

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000027351A (en) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd Clean room
JP2000027474A (en) * 1998-07-09 2000-01-25 Sanko Metal Ind Co Ltd Clean room
JP2003035044A (en) * 2001-07-23 2003-02-07 Nippon Soda Co Ltd Decomposing treating facility for persistent halogen compound
JP2013050248A (en) * 2011-08-30 2013-03-14 Shimizu Corp Clean room
JP2013092325A (en) * 2011-10-27 2013-05-16 Dai-Dan Co Ltd Room pressure control method at start of air-conditioning operation
DE102012020200A1 (en) * 2012-10-16 2014-04-17 Schilling Engineering GmbH Cleanroom limiting unit
EP2722456A3 (en) * 2012-10-16 2016-09-28 Schilling Engineering GmbH Cleanroom barrier unit
EP2722456B1 (en) 2012-10-16 2021-04-07 Schilling Engineering GmbH Cleanroom barrier unit

Also Published As

Publication number Publication date
JPH0443142B2 (en) 1992-07-15

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