JP2013032234A - Substrate parting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To expose an electrode terminal on a unit substrate by reducing the number of scribe processes.SOLUTION: At a section crossing a seal for adhesion, upper and lower scribe lines are made to coincide, and a scribe process is carried out, and after crossing the seal for adhesion, the scribe process is carried out at different positions, and at a section crossing the seal for adhesion again, the scribe lines are made to coincide again, and the scribe process is made to end, and a mother board is parted along the scribe line. Thus, it is possible to expose an electrode terminal by carrying out only one-time scribe process for each of the upper and lower parts.

Description

  The present invention relates to a substrate cutting method in which a mother substrate such as a liquid crystal is cut from both sides to divide the substrate into unit functional substrates while exposing electrode terminals.

  Conventionally, in a flat panel display (FPD) such as a liquid crystal display panel or a liquid crystal projector substrate, a mother glass substrate is bonded together in a manufacturing process, and then divided into a single panel of a predetermined size. For dividing a brittle material substrate such as a mother glass substrate, there are a scribing process and a breaking process, and a scribing apparatus is used in the scribing process. In manufacturing an FPD, a single mother substrate is scribed, and a plurality of panel substrates are taken out by a breaking process.

  For example, as disclosed in Patent Documents 1 and 2, the scribe device can move in a horizontal direction relative to a table on which a brittle material substrate that is a mother substrate is placed and held, and the brittle material substrate. And a scribing head that is also movable in the vertical direction. A wheel holder that rotatably holds the scribing wheel is attached to the lower end of the scribe head.

  As shown in FIGS. 1, 2A, and 2B, a mother substrate 100 for a liquid crystal display panel has a CF substrate 101 that is a first substrate on which a plurality of color filters are patterned, a plurality of TFTs, and electrode terminals that are patterned. The TFT substrate 102, which is the second substrate, is bonded to each other with a sealing material enclosing a liquid crystal in between. Since the electrode terminal region of the TFT substrate 102 is a region where signal lines are connected between the internal TFT and the external device, it must be exposed to the outside at the final stage of the division.

  A plurality of unit substrates are formed in advance on the mother substrate 100, and each unit substrate is provided with an annular sealing material for enclosing the liquid crystal and enclosing the liquid crystal therein. In addition to the sealing material for enclosing the liquid crystal, an adhesive seal 103 for bonding the two glass substrates is provided so that the pieces generated when the mother substrate is divided are not scattered. For example, as shown in FIG. 1, the adhesive seal 103 is partially provided between the outer peripheral edge of the liquid crystal mother panel and each unit substrate.

WO2008-149515 WO2009-154022

  When scribing such a mother substrate in the x-axis direction, as shown in the enlarged lower right circular portion of FIG. 1 in FIG. Need to be exposed. Therefore, the scribing line L1 of the upper CF substrate 101 and the scribing line L2 of the lower TFT substrate 102 are scribed while being shifted by an amount sufficient to expose the electrode terminals, and each unit panel is divided along the scribing line. .

  However, when only the CF substrate 101 is scribed along the scribe line L1, and only the TFT substrate 102 is scribed along the scribe line L2, the adhesive seal 103 partially remains between the scribe lines L1 and L2. Therefore, there is a problem that the upper CF substrate 101 and the lower TFT substrate 102 remain adhered and the electrode terminals cannot be exposed.

  Therefore, when dividing this substrate, first, only the upper CF substrate 101 is scribed along the scribe line L1, and then the CF substrate 101 and the TFT substrate 102 are simultaneously scribed along the scribe line L2, as shown in FIG. 2B. To do. At this point, unnecessary portions outside the scribe line L2 are cut off. Then, scribing is performed along the end surface of the panel in the y-axis direction by the scribe line L10, and when divided, the right edge portion is cut off, and unnecessary portions of the CF substrate 101 are further cut off to expose the electrode terminals of the TFT substrate 102. be able to.

  However, in such a method, scribing is required twice in the x-axis direction, and there is a problem that it takes time and effort to scribe and break.

  The present invention provides a substrate cutting method that can easily expose electrode terminals on each unit substrate by simplifying scribing in the x-axis direction.

  In order to solve this problem, the substrate cutting method according to the first invention is characterized in that scribe lines are formed on both sides of a mother substrate formed by bonding the first and second substrates with an adhesive seal provided on the outer peripheral edge. A substrate cutting method for forming and cutting a plurality of unit substrates by cutting along a formed scribe line, the method comprising: forming a first scribe line across the adhesive seal on the first substrate And forming a second scribe line across the adhesive seal on the second substrate, and at least a portion crossing the adhesive seal viewed from a direction perpendicular to the surface of the mother substrate. The first and second scribe lines are formed at the same position, and the portion inside the adhesive seal is viewed from a direction perpendicular to the surface of the mother substrate. Wherein the different positions first, and forms a second scribe line.

  In the substrate cutting method according to the second invention, a scribe line is formed by forming scribe lines on both sides of a mother substrate formed by bonding the first and second substrates together with an adhesive seal provided on the outer peripheral edge. A substrate cutting method for cutting a plurality of unit substrates by cutting along a line along the first substrate, forming a first scribe line across the adhesive seal on the first substrate, and forming the first substrate on the second substrate. Forming a second scribe line across the adhesive seal, and at least in a portion crossing the adhesive seal, the first and second at the same position when viewed from a direction perpendicular to the surface of the mother substrate. The first and second scribing lines are formed at positions different from each other in a direction perpendicular to the surface of the mother substrate in a portion inside the adhesive seal. It is intended to form a live line.

  Here, the first and second scribe lines may be scribed using a high penetration type scribing wheel.

  In the substrate cutting method according to the third invention, a scribe line is formed by forming scribe lines on both sides of a mother substrate formed by bonding the first and second substrates together with an adhesive seal provided on the outer peripheral edge. A substrate dividing method of cutting out a plurality of unit substrates by dividing along a line, wherein a first scribe line that crosses the adhesive seal is formed on the first substrate; and Pressing a portion of the surface facing the first scribe line to break the first substrate along the first scribe line; and traversing the adhesive seal to the second substrate Forming a second scribe line, and pressing a portion of the surface of the first substrate facing the second scribe line so that the second substrate is moved to the second substrate. Breaking along the scribe line, and forming the first and second scribe lines at the same position when viewed from a direction perpendicular to the surface of the mother substrate at least in a portion crossing the adhesive seal. At the same time, the first and second scribe lines are formed at different positions when viewed from the direction perpendicular to the surface of the mother substrate in the inner portion of the adhesive seal.

  According to the present invention having such characteristics, scribing is performed by aligning the scribe lines of the upper and lower substrates from the outside of the mother substrate to the inside of the adhesive seal, and the electrodes on each unit substrate are inside the adhesive seal. Scribe to expose the terminals. And it divides along this scribe line. If it carries out like this, the effect that it can scribe and divide | segment by reducing the frequency | count of scribe is acquired.

FIG. 1 is a view showing an example of a mother substrate that is scribed and divided by a conventional scribing apparatus. FIG. 2A is a diagram showing a scribe position at an end of the mother board when scribing with a conventional scribing apparatus. FIG. 2B is an arrow view from the A direction of the mother substrate to be scribed. FIG. 3 is a front view of the substrate cutting apparatus for realizing the substrate cutting method according to the embodiment of the present invention. FIG. 4 is a diagram showing an example of a mother board that is a target of board division according to the present embodiment. FIG. 5 is a block diagram showing the configuration of the substrate cutting apparatus according to this embodiment. FIG. 6 is a diagram showing a scribe line of the mother substrate when scribing by the substrate cutting apparatus according to this embodiment. FIG. 7A is a diagram showing a scribe position at the lower right end of the mother substrate. FIG. 7B is an arrow view from the direction A of the mother substrate. FIG. 8A is a diagram showing a scribe position at the lower left end of the mother substrate. FIG. 8B is an arrow view from the B direction of the mother substrate. FIG. 9A is a diagram showing a scribe line in the lower right portion of the mother substrate by the scribe method according to another embodiment of the present invention. FIG. 9B is a diagram showing a scribe line in the lower right portion of the mother board by the scribe method according to still another embodiment of the present invention. FIG. 10 is a diagram showing a process of scribing and dividing using the normal scribing wheel of the present invention.

  FIG. 3 is a front view of the substrate cutting apparatus 1 for realizing the substrate cutting method according to the embodiment of the present invention. The substrate cutting apparatus 1 includes an upstream table 11 and a downstream table 12 on which the mother substrate 50 is placed. The upstream table 11 and the downstream table 12 are movable along the horizontal direction indicated by the arrow Y1. The substrate cutting apparatus 1 includes an upper scribe mechanism 13 and a lower scribe mechanism 14 disposed between the tables 11 and 12 in order to scribe a mother substrate 50 formed by bonding the first and second substrates. .

  Next, the upper scribe mechanism 13 will be described. The upper scribe mechanism 13 has a pair of pillars (not shown), and a guide bar 20 is installed on the pair of pillars above the upstream table 11 and the downstream table 12 so as to straddle the conveyed mother substrate 50. Yes. A pair of rails 21 is formed on the lower surface of the guide bar 20. The guide bar 20 is provided with a scribe portion 30 slidably along the rail 21 in a direction perpendicular to the paper surface of FIG. The scribe unit 30 is provided for scribing the upper substrate (first substrate) 51 out of the two substrates constituting the mother substrate 50, and is a movable body 31 that can move freely along the rail 21. have. A rail is provided on the lower surface of the moving body 31 along the direction of the arrow Y2, and the moving body 32 is provided so as to be movable in the direction of the arrow Y2 by the motor M1. A pedestal 33 is fixed to the moving body 32, and a scribe head 34 is attached to the pedestal 33 so as to be movable in the direction of the arrow Z1 (vertical direction) by a motor M2 and a ball screw. A wheel holder 36 that rotatably supports the scribing wheel 35 is provided at the lower end of the scribe head 34. The wheel holder 36 can be rotated around an axis perpendicular to the surface of the upper substrate 51 by a bearing (not shown) so that the direction of the scribing wheel 35 can be freely changed.

  Next, the lower scribe mechanism 14 will be described. A scribe portion 40 is provided on the base 22 so as to be slidable along the rail 23 in a direction perpendicular to the paper surface of FIG. The scribe unit 40 is provided for scribing the lower substrate (second substrate) 52 of the two substrates constituting the mother substrate 50. The scribe unit 40 has the same configuration as the scribe unit 30 described above, and is disposed so as to face the scribe unit 30. The scribe unit 40 includes a moving body 41 that can freely move along the rail 23. A rail is provided on the upper surface of the moving body 41 along the direction of the arrow Y3, and the moving body 42 is provided so as to be movable in the direction of the arrow Y3 by the motor M3. A pedestal 43 is fixed to the moving body 42, and a scribe head 44 is attached to the pedestal 43 so as to be movable in the direction of the arrow Z2 (vertical direction) by a motor M4 and a ball screw. A wheel holder 46 for rotatably supporting the scribing wheel 45 is provided at the upper end of the scribe head 44. The wheel holder 46 can be rotated around an axis perpendicular to the surface of the lower substrate 52 by a bearing (not shown) so that the direction of the scribing wheel 45 can be freely changed.

  The scribing wheels 35 and 45 simultaneously scribe the upper substrate 51 and the lower substrate 52 that constitute the mother substrate 50 along the lines to be scribed. As the scribing wheels 35 and 45 of the present embodiment, a high penetration type scribing wheel disclosed in Japanese Patent No. 3074143 is used. In this scribing wheel, a plurality of small protrusions are formed on a V-shaped cutting edge along the circumference of the disc-shaped wheel. If scribing is performed using the scribing wheels 35 and 45, deep vertical cracks reaching the inner surfaces of the upper substrate 51 and the lower substrate 52 can be formed.

  In addition, the substrate cutting apparatus is provided with a pair of CCD cameras 62a and 62b which are disposed on the upper table 11 and the downstream table 12 and determine the position of the mother substrate 50.

  FIG. 4 is a diagram illustrating an example of a mother substrate 50 that is cut by the substrate cutting apparatus 1. The mother substrate 50 is a bonded substrate such as a liquid crystal mother panel, for example, and as shown in FIG. 4, nine unit substrates 54a to 54i are arranged in a lattice pattern with their sides aligned. As in the conventional example, an adhesive seal 53 is affixed between the upper substrate 51 and the lower substrate 52 on the mother substrate 50. The adhesive seal 53 is provided between the outer peripheral portion of the mother substrate 50 and each unit substrate, and prevents chips generated when the mother substrate 50 is divided.

  Next, the configuration of the controller of the substrate cutting apparatus 1 will be described using a block diagram. FIG. 5 is a block diagram of the controller of the substrate cutting apparatus 1. In this figure, outputs from the two CCD cameras 62 a and 62 b are given to the control unit 72 via the image processing unit 71 of the controller 70. The input unit 73 is for inputting data on the scribe of the mother board. The transport driving unit 74 drives a transport unit that transports the substrate in the Y direction. Motor control units 75 a to 75 d are connected to the control unit 72. The motor drive units 75a to 75d drive the motors M1 to M4, respectively. The table driving unit 76 drives the upstream table 11 and the downstream table 12 respectively. A monitor 77 and a data holding unit 78 are connected to the control unit 72. The data holding unit 78 holds data related to the scribe planned lines L1 to L15 for scribing the mother board 50. This data is input by the input unit 73 while confirming the input on the monitor 77. The control unit 72 controls the position of the table and each motor at the timing described later based on the data of the scheduled scribe line.

  6 to 8B are diagrams for explaining the substrate cutting method according to the present embodiment. As shown in FIG. 6, the mother substrate 50 is provided with planned scribe lines L1 to L9 in the X-axis direction and planned scribe lines L10 to L15 in the Y-axis direction. Here, an enlarged view of a circular portion indicated by a one-dot chain line in the lower right of FIG. 6 is shown in FIG. 7A, and an arrow view from the direction A is shown in FIG. 7B. As shown in FIG. 6, scribing is performed from the outer side of the mother substrate 50 to the inner side of the adhesive seal 53 by aligning the upper and lower scribe lines L1, L2. Then, after passing through the inner end portion of the adhesive seal 53, the motor M3 is driven to move the moving body 42 in the direction perpendicular to the paper surface while shifting the movable body 42 by a fixed distance in the right direction indicated by the arrow Y3 in FIG. The substrate 50 is moved vertically to the vicinity of the end of the substrate 50. At this time, since the shaft of the wheel holder 46 is rotatably held by the ball bearing, the direction of the blade edge can be changed by the caster effect by changing the moving direction of the scribe head, and the scribe line can be meandered. Such an operation is called a copying operation here. By this copying operation, the lower scribe line L2 is displaced from the scribe line L1 as shown in FIG. 7A and meanders to the outside of the electrode terminal of the substrate, and thereafter, the scribe line L2 is scribed in parallel with the scribe line L1. The distance d on the surface of the substrate between the scribe lines L1 and L2 is set to a distance sufficient to expose the electrode terminals of the bonded substrate. Further, at the left end shown in FIG. 6, as shown in FIGS. 8A and 8B, at the inner end of the adhesive seal 53, the scribe line L2 is meandered again by the copying operation to coincide with the scribe line L1. Then, the adhesive seal 53 is passed in a matched state, and the scribing of the scribe lines L1 and L2 is finished. The scribe lines L1 and L2 are first and second scribe lines, respectively. Next, the end portions of the three adjacent unit substrates 54g, 54h, and 54i are simultaneously scribed from above and below along the scribe line L3 at the same upper and lower positions.

  In the present embodiment, since the scribing wheels 35 and 45 are of high penetration type, vertical cracks having depths reaching the inner surfaces of the upper substrate 51 and the lower substrate 52 can be formed. For this reason, if the scribe line is formed, the division is substantially completed along the scribe line. Accordingly, the electrode terminals of the three unit substrates 54g to 54i can be exposed and divided.

  In this way, the strip-shaped substrate in which the unit substrates 54g, 54h, 54i are continuous is scribed along the scribe lines L10 to L15 at the same time, and the unit substrates are divided. In this way, the number of scribes in the x-axis direction can be reduced as compared with the conventional example, and the scribe can be made efficient. Here, for the sides where the electrode terminals of the unit substrates 54g to 54i are exposed, it is sufficient to simultaneously scribe along the scribe lines L1 and L2. Therefore, the number of scribes in the x-axis direction can be reduced as compared with the conventional example, and the scribe can be made efficient.

  The unit substrates 54d, 54e, 54f are similarly scribed from above and below by the two scribe lines L4, L5. At this time, since the scribe lines L4 and L5 do not intersect with the adhesive seal 53, the two scribe lines L4 and L5 are always scribed in parallel at a distance d exposing the electrode terminals from the unit substrate. Next, the end portions of the three adjacent unit substrates 54d, 54e, 54f are simultaneously scribed from above and below along the scribe line L6 at the same position in the upper and lower sides.

  In this way, the strip-shaped substrate in which the unit substrates 54d, 54e, and 54f are connected is scribed along the scribe lines L10 to L15 at the same time in the vertical direction to divide each unit substrate.

  The unit substrates 54a, 54b and 54c are similarly scribed from above and below by the two scribe lines L7 and L8. At this time, since the scribe lines L7 and L8 and the adhesive seal 53 do not intersect with each other, the two scribe lines L7 and L8 are always scribed in parallel at a distance d exposing the electrode terminals from the unit substrate. Next, the end portions of the three adjacent unit substrates 54a, 54b, 54c are simultaneously scribed from above and below along the scribe line L9 at the same upper and lower positions.

  In this way, the strip-shaped substrate in which the unit substrates 54a, 54b, 54c are continuous is scribed along the scribe lines L10 to L15 at the same time, and the unit substrates are divided.

  In the copying operation described above, the scribe line L2 is meandered as shown in FIGS. 7A and 8A. Instead, as shown in FIG. 9A, the lines L1 and L2 are made to coincide on the outside of the adhesive seal 53, and the upper substrate 51 is scribed along the side of the unit substrate by meandering the scribe line L1 by a copying operation. The scribe line L2 may be moved straight as it is. Further, as shown in FIG. 9B, the scribing lines L1 and L2 are aligned, the scribing is started from the outside of the mother substrate, the scribing is finished to the inside of the adhesive seal 53, and then the scribing lines L1 and L2 are respectively meandered by copying operation. You can let them scribe.

  In the above-described embodiment, as shown in FIG. 3, a scribing apparatus that can simultaneously scribe from both upper and lower surfaces of a bonded substrate is used. Alternatively, a scribing device that can scribe only from one surface can be used. In this case, a step of inverting the substrate by scribe on the upper surface and scribe on the lower surface of each scribe line of the mother substrate 50 shown in FIG. 6 is required.

  In the embodiment described above, the scribing wheel is a high penetration type scribing wheel. Instead of this, a normal scribing wheel may be used, and the substrate may be divided by breaking after scribing. FIG. 10 is a schematic view showing a process of dividing a bonded substrate using this normal scribing wheel. In this case, as shown in FIGS. 10A and 10B, first, a first scribe line is formed on a necessary portion of the upper substrate 51, and is inverted as shown in FIG. 10C. Next, the upper substrate 51 is divided along the first scribe line by pressing a portion of the lower substrate 52 facing the first scribe line. Next, the lower substrate 52 is scribed. In this case, as shown in FIG. 10 (d), a second scribe line is formed from the outer side of the mother substrate to the inner side of the adhesive seal so as to coincide with the first scribe line of the upper substrate 51, and then copied. The scribing wheel is moved by the operation, and scribing is performed from the end of the unit substrate to the position where the electrode terminal is exposed while meandering the second scribe line. As shown in FIG. 10E, other parts are also scribed. Further, as shown in FIG. 10 (f), the substrate is inverted and the substrate 52 is broken and separated. In this way, the mother substrate can be divided into unit substrates at the break portion. In this case, since the breakage and the separation are performed without using a highly penetrating scribing wheel, the accuracy of the divided end face can be improved.

  The present invention can be suitably used for an apparatus for cutting out a unit substrate having electrode terminals from a bonded mother substrate.

DESCRIPTION OF SYMBOLS 1 Board | substrate cutting apparatus 11 Upstream table 12 Downstream table 13 Upper scribe mechanism 14 Lower scribe mechanism 20 Guide bar 21,23 Rail 30,40 Scribe part 34,44 Scribe head 35,45 Scribing wheel 36,46 Wheel holder 50 Mother board 51 Upper side Substrate 52 Lower substrate 53 Adhesive seal 54a to 54i Unit substrate

Claims (4)

A plurality of unit substrates are formed by forming scribe lines on both surfaces of a mother substrate formed by bonding the first and second substrates together with an adhesive seal provided on the outer peripheral edge, and dividing along the formed scribe lines. A substrate cutting method for cutting out
Forming a first scribe line across the adhesive seal on the first substrate;
Forming a second scribe line across the adhesive seal on the second substrate,
The first and second scribe lines are formed at the same position when viewed from a direction perpendicular to the surface of the mother substrate at least in a portion crossing the adhesive seal, and in the portion inside the adhesive seal, the first and second scribe lines are formed. A substrate cutting method, wherein the first and second scribe lines are formed at different positions when viewed from a direction perpendicular to a surface of a mother substrate. A plurality of unit substrates are formed by forming scribe lines on both surfaces of a mother substrate formed by bonding the first and second substrates together with an adhesive seal provided on the outer peripheral edge, and dividing along the formed scribe lines. A substrate cutting method for cutting out
Forming a first scribe line across the adhesive seal on the first substrate, and forming a second scribe line across the adhesive seal on the second substrate;
The first and second scribe lines are formed at the same position when viewed from a direction perpendicular to the surface of the mother substrate at least in a portion crossing the adhesive seal, and in the portion inside the adhesive seal, the first and second scribe lines are formed. A substrate cutting method, wherein the first and second scribe lines are formed at different positions when viewed from a direction perpendicular to a surface of a mother substrate.   The substrate cutting method according to claim 1, wherein the first and second scribe lines are formed using a high penetration type scribing wheel. A plurality of unit substrates are formed by forming scribe lines on both surfaces of a mother substrate formed by bonding the first and second substrates together with an adhesive seal provided on the outer peripheral edge, and dividing along the formed scribe lines. A substrate cutting method for cutting out
Forming a first scribe line across the adhesive seal on the first substrate;
Breaking the first substrate along the first scribe line by pressing a portion of the surface of the second substrate facing the first scribe line;
Forming a second scribe line across the adhesive seal on the second substrate;
Pressing a portion of the surface of the first substrate facing the second scribe line to break the second substrate along the second scribe line;
The first and second scribe lines are formed at the same position when viewed from a direction perpendicular to the surface of the mother substrate at least in a portion crossing the adhesive seal, and in the portion inside the adhesive seal, the first and second scribe lines are formed. A substrate cutting method, wherein the first and second scribe lines are formed at different positions when viewed from a direction perpendicular to a surface of a mother substrate.

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