JP2012533063A - プローブカード - Google Patents
プローブカード Download PDFInfo
- Publication number
- JP2012533063A JP2012533063A JP2012519454A JP2012519454A JP2012533063A JP 2012533063 A JP2012533063 A JP 2012533063A JP 2012519454 A JP2012519454 A JP 2012519454A JP 2012519454 A JP2012519454 A JP 2012519454A JP 2012533063 A JP2012533063 A JP 2012533063A
- Authority
- JP
- Japan
- Prior art keywords
- circuit board
- probe card
- connector
- card according
- space transformer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06727—Cantilever beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2009-0062161 | 2009-07-08 | ||
KR1020090062161A KR101120987B1 (ko) | 2009-07-08 | 2009-07-08 | 프로브 카드 |
PCT/KR2010/002540 WO2011004956A1 (fr) | 2009-07-08 | 2010-04-22 | Carte de test |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2012533063A true JP2012533063A (ja) | 2012-12-20 |
Family
ID=43429366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012519454A Pending JP2012533063A (ja) | 2009-07-08 | 2010-04-22 | プローブカード |
Country Status (6)
Country | Link |
---|---|
US (1) | US20120081140A1 (fr) |
JP (1) | JP2012533063A (fr) |
KR (1) | KR101120987B1 (fr) |
CN (1) | CN102473662A (fr) |
SG (1) | SG176767A1 (fr) |
WO (1) | WO2011004956A1 (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8841931B2 (en) * | 2011-01-27 | 2014-09-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Probe card wiring structure |
JP5798435B2 (ja) | 2011-03-07 | 2015-10-21 | 日本特殊陶業株式会社 | 電子部品検査装置用配線基板およびその製造方法 |
JP5777997B2 (ja) * | 2011-03-07 | 2015-09-16 | 日本特殊陶業株式会社 | 電子部品検査装置用配線基板およびその製造方法 |
US20120300423A1 (en) * | 2011-05-26 | 2012-11-29 | International Business Machines Corporation | Interconnect formation under load |
TWI428608B (zh) | 2011-09-16 | 2014-03-01 | Mpi Corp | 探針測試裝置與其製造方法 |
KR101442354B1 (ko) | 2012-12-21 | 2014-09-17 | 삼성전기주식회사 | 예비 공간 변환기 및 이를 이용하여 제조된 공간 변환기, 그리고 상기 공간 변환기를 구비하는 반도체 소자 검사 장치 |
US20150061719A1 (en) * | 2013-09-05 | 2015-03-05 | Soulbrain Eng Co., Ltd. | Vertical probe card for micro-bump probing |
CN109721023B (zh) * | 2019-01-03 | 2020-08-28 | 北京先通康桥医药科技有限公司 | 一种柔性传感器阵列、触诊探头及其制备方法 |
US10914757B2 (en) * | 2019-02-07 | 2021-02-09 | Teradyne, Inc. | Connection module |
CN116908500B (zh) * | 2023-09-12 | 2023-12-01 | 上海泽丰半导体科技有限公司 | 一种通用测试平台探针塔的拆装方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020053734A1 (en) * | 1993-11-16 | 2002-05-09 | Formfactor, Inc. | Probe card assembly and kit, and methods of making same |
US6441629B1 (en) * | 2000-05-31 | 2002-08-27 | Advantest Corp | Probe contact system having planarity adjustment mechanism |
US6906539B2 (en) * | 2000-07-19 | 2005-06-14 | Texas Instruments Incorporated | High density, area array probe card apparatus |
US6677771B2 (en) | 2001-06-20 | 2004-01-13 | Advantest Corp. | Probe contact system having planarity adjustment mechanism |
KR100473430B1 (ko) * | 2002-07-04 | 2005-03-10 | 주식회사 파이컴 | 수직형 프로브 카드 |
JP2005010052A (ja) * | 2003-06-19 | 2005-01-13 | Japan Electronic Materials Corp | プローブカード |
KR100806736B1 (ko) * | 2007-05-11 | 2008-02-27 | 주식회사 에이엠에스티 | 프로브 카드 및 그 제조방법 |
KR100791945B1 (ko) * | 2007-08-23 | 2008-01-04 | (주)기가레인 | 프로브 카드 |
-
2009
- 2009-07-08 KR KR1020090062161A patent/KR101120987B1/ko active IP Right Grant
-
2010
- 2010-04-22 WO PCT/KR2010/002540 patent/WO2011004956A1/fr active Application Filing
- 2010-04-22 US US13/322,416 patent/US20120081140A1/en not_active Abandoned
- 2010-04-22 SG SG2011091303A patent/SG176767A1/en unknown
- 2010-04-22 JP JP2012519454A patent/JP2012533063A/ja active Pending
- 2010-04-22 CN CN2010800292921A patent/CN102473662A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2011004956A1 (fr) | 2011-01-13 |
KR101120987B1 (ko) | 2012-03-06 |
US20120081140A1 (en) | 2012-04-05 |
SG176767A1 (en) | 2012-01-30 |
CN102473662A (zh) | 2012-05-23 |
KR20110004635A (ko) | 2011-01-14 |
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