JP2012526653A - Substrate processing system - Google Patents

Abstract

The present invention relates to a substrate processing system, and more particularly, to a substrate processing system having antifouling means for preventing contamination inside a chamber due to diffusion of an organic compound in the process of coating the substrate with an organic compound.
A substrate processing system according to the present invention injects an organic substance onto a substrate inside a chamber, and includes a cooling plate in which a cooling passage through which a coolant circulates away from the substrate is formed. A pump connection in which a spray trap for preventing diffusion of the organic matter that has fallen out without being coated on the substrate, and a cooling trap is provided at the lower outer portion of the chamber, and a branch or bent portion is formed in a direction crossing the extending longitudinal direction A coating module having a pump connected to the spray unit through a tube, and irradiating the substrate coated with the organic matter with an ultraviolet ray through an ultraviolet lamp, and disposed between the substrate and the ultraviolet lamp. And a curing module having a heating coil for heating the transmission window.
[Selection] Figure 1

Description

The present invention relates to a substrate processing system, and more particularly to a substrate processing system having antifouling means for preventing contamination inside a chamber due to diffusion of an organic compound in the process of coating the substrate with an organic compound.

An organic light emitting diode (hereinafter referred to as “OLED”) is a light emitting diode having a light emitting layer made of a thin film organic compound (conjugated polymer), and emits light by passing a current through the fluorescent organic compound. Take advantage of the electroluminescence phenomenon that takes place. This kind of OLED generally realizes color mainly by three-color (red, green, blue) independent pixel system, color conversion system (CCM), color filter system, etc., and is an organic substance contained in the light emitting material used In accordance with the amount of OLED, it is roughly classified into low molecular OLED and high molecular OLED. In addition, according to a drive system, it divides roughly into a manual type drive system (passive matrix; PM) and an active type drive system (active matrix; AM).

Recently, OLEDs have been mainly used for displays of small devices such as mobile phones and digital cameras, and can be made into rollable rolls when the OLED substrate material is changed from glass to film. Therefore, it is highly possible to use in various fields in the future.

For the manufacture of OLED, the organic compound as the light emitting layer is coated on the substrate in the form of a multilayer thin film, and oxygen and moisture are prevented from flowing into the organic light emitting layer from the outside. A sealing process for protecting the organic light emitting layer is required.

A conventional substrate processing system for manufacturing an OLED includes an alignment module for arranging substrates and arranging masks, a mask shield module, a coating module for injecting a liquid organic compound onto a substrate with a mask, and an organic compound coated in a thin film. A curing module for irradiating the substrate with ultraviolet rays and a cooling module for cooling the substrate that has been cured. Note that, on one side of the coating module, there are a pump as a pressure adjusting means for maintaining the inside of the chamber that provides the substrate processing space in a vacuum state, and an organic substance supply unit that supplies a liquid organic substance as a monomer. Connected.

However, in the conventional coating module, an injector that is provided inside the coating module chamber and injects an organic substance toward the substrate is connected to a simple shape such as a straight line with a pump outside the chamber. There has been a disadvantage that mechanical damage occurs due to clogging of the inner diameter of the pipe connecting the injector and the pump or contamination of the pump due to organic substances having the property of being easily condensed. In the conventional coating module, the organic matter that has fallen out without being coated on the substrate is likely to diffuse and condense inside the chamber, and as a result, the inner wall of the chamber is contaminated.

On the other hand, in the conventional curing module that cures the substrate coated with organic matter by irradiating the substrate that has passed through the coating module with ultraviolet rays, the temperature of the transmission window placed between the ultraviolet lamp and the substrate is higher than the temperature of the substrate. Since it is relatively low, there is an inconvenience that organic particles dropped off from the substrate stick to the upper surface of the transmission window. That is, there is a disadvantage that the transmission window is contaminated with an organic substance and the transmittance for transmitting ultraviolet rays is lowered, thereby causing uneven curing on the substrate.

In order to eliminate the above-mentioned disadvantages, the present invention provides a substrate processing system having an antifouling means for preventing contamination inside a chamber due to diffusion of an organic compound in the process of coating the substrate with an organic compound for manufacturing an OLED. To do.

In order to achieve the above-described object, a substrate processing system according to the present invention includes a chamber having a processing space, and sprays organic matter onto the substrate within the chamber, and diffuses the organic matter that has fallen off without being coated on the substrate. An injection unit having a cooling plate to prevent, a pump located at the lower outside of the chamber and connected to the injection unit via a pump connection pipe with a cooling trap, and a first supply unit for supplying organic matter to the injection unit And a second supply unit for supplying a coolant to the injection unit and the cooling trap.

The substrate processing system according to the present invention includes a chamber having a processing space, at least one ultraviolet lamp provided in the chamber for irradiating the substrate with ultraviolet rays, a lamp housing for housing the ultraviolet lamps, A transmission window attached to the open upper portion of the lamp housing and transmitting ultraviolet rays emitted from the ultraviolet lamp toward the substrate; and a heating coil attached to the lamp housing along the periphery of the transmission window; A power supply unit that supplies power to the ultraviolet lamp and the heating coil.

Furthermore, the substrate processing system according to the present invention injects an organic substance onto the substrate inside the chamber, and has a cooling plate in which a cooling passage through which a coolant circulates away from the substrate is formed. An injection part that prevents diffusion of the organic matter that has fallen out without being coated, and a pump connection pipe that is provided with a cooling trap at the outer lower portion of the chamber and that is branched or bent in a direction intersecting the extending longitudinal direction. A coating module having a pump connected to the spraying unit, and a substrate coated with the organic matter is irradiated with ultraviolet rays through an ultraviolet lamp, and a transmission window disposed between the substrate and the ultraviolet lamp. And a curing module having a heating coil for heating.

According to the present invention, in the coating module for injecting an organic substance toward the substrate in the chamber, the injection plate provided in the coating module is provided with a cooling plate for preventing the organic substance that has fallen off without being coated on the substrate. , Contamination inside the chamber can be suppressed as much as possible. Further, the pump connection pipe is clogged with organic matter and the pump by connecting the injection section and the pump via the pump connection pipe with a cooling trap, which is located at the lower outer portion of the chamber and has a branched or bent portion. Can prevent damage.

According to the present invention, in the curing module that cures the substrate, a heating coil is provided along the periphery of the transmission window, and the transmission window is heated to reduce the amount of organic matter falling off the substrate, The entire surface of the substrate can be uniformly cured while preventing contamination.

Thereby, through the substrate processing system having the coating module and the curing module with the antifouling means described above, the repair and replacement of parts caused by the diffusion and condensation of organic substances is suppressed as much as possible, and the process time for repair and replacement is shortened. In addition to reducing process costs, work productivity can be increased.

FIG. 1 is a diagram showing a configuration of a substrate processing system according to an embodiment of the present invention.

FIG. 2 is a diagram showing an internal configuration of the coating module according to the present invention.

FIG. 3 is a schematic perspective view of the injector body shown in FIG.

FIG. 4 is a perspective view of the pump connection pipe shown in FIG.

FIG. 5 is a perspective view showing the structure of the upper plate according to the present invention.

FIG. 6 is a perspective view showing a deformed structure of the upper plate according to the present invention.

FIG. 7 is a perspective view showing an ultraviolet ray generator of the curing module according to the present invention.

10: substrate
1000: substrate processing system,
1100: chamber,
1500: coating module,
1600: curing module,
2100: Pump part,
2180: Cooling trap,
2190: Organic matter storage unit,
2200: a first supply unit,
2300: second supply section,
3000: injection part
3500: cooling plate,
3512: Cooling passage,
4000: UV generation part
4100: Transmission window,
4500: Heating coil

  Hereinafter, a raw material supply unit, a thin film deposition apparatus, and a thin film deposition method according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments described below, and can be realized in various different forms. These embodiments merely complete the disclosure of the present invention and have ordinary knowledge. It is provided to fully inform those skilled in the art of the scope of the invention. In the drawings, the same reference numerals indicate the same components.

FIG. 1 is a diagram showing a configuration of a substrate processing system according to an embodiment of the present invention.

Referring to FIG. 1, a substrate processing system 1000 according to an embodiment of the present invention includes an alignment module 1300 and a mask shield module 1400 that arrange a mask after arranging the substrates 10, and a liquid organic material on the substrate 10 with a mask. The coating module 1500 provided with means for spraying and preventing internal contamination due to diffusion and condensation of the organic matter, and the organic matter M coated on the substrate 10 in a thin film form by curing with ultraviolet rays (UV) are cured. A curing module 1600 having a heating unit that reduces dropping of the organic matter M from the substrate, a cooling module 1700 that cools the substrate 10 that has been cured, and a controller that controls driving of a plurality of components that form the substrate processing system 1000 ( (Not shown). Although not shown, the substrate processing system 1000 according to an embodiment of the present invention includes a substrate transfer unit for horizontally transferring the substrate 10 outside or inside the chamber 1100.

In the substrate processing system 1000 according to the present embodiment, a plurality of components, that is, the alignment module 1300, the mask shield module 1400, the coating module 1500, the curing module 1600, the cooling module 1700, and the like are along the direction in which the substrate processing process is performed. However, they may be connected by a cluster system in which a plurality of components are arranged radially, or may be connected by various other systems.

The plurality of components 1300, 1400, 1500, 1600, and 1700 included in the substrate processing system 1000 have independent and independent substrate processing spaces, and for this reason, the components are independent from other components. The chamber may be formed, or a plurality of internal spaces of the integral chamber may be defined.

A gate part 1200 is formed on one or both sides of the chamber 1100 to control the substrate 10 that is carried into the chamber 1100 or carried out of the chamber 1100. The control unit is controlled in conjunction with the substrate transfer unit.

In the substrate processing system 1000 according to the present embodiment, the process of loading and unloading the substrate 10 will be described as an example. When the substrate processing process in the coating module 1500 is completed, the external gate 1200a is opened with a time difference set in the control unit. Opening and closing of 1200f and internal gates 1200b, 1200c, 1200d, and 1200e is controlled, and the substrate 10 positioned in the coating module 1500 is transferred to the curing module 1600 for the next process and positioned in the mask shield module 1400. Substrate processing steps in which the substrate 10 is continuously transferred, such as a subsequent substrate (not shown) being transferred to the coating module 1500, are performed. As described above, since the substrate 10 is continuously transferred in the plurality of components 1300, 1400, 1500, 1600, and 1700, the time required for the substrate processing step is shortened. Of course, one substrate is loaded into the plurality of components 1300, 1400, 1500, 1600, 1700 and carried out after all the substrate processing steps are performed, and then a new subsequent substrate is transferred to the components 1300, Control may be performed so that the substrate is processed by being loaded into 1400, 1500, 1600, and 1700.

2 is a view showing an internal configuration of the coating module according to the present invention, FIG. 3 is a schematic perspective view of the injector body shown in FIG. 2, and FIG. 4 is a perspective view of the pump connecting pipe shown in FIG. FIG.

Referring to FIGS. 2 to 4, the coating module 1500 according to the present invention is unable to coat the substrate 10 by spraying an organic material onto the substrate 10 inside the chamber 1100 that provides a processing space of the substrate 10 and inside the chamber 1100. An injection unit 3000 having a cooling plate 3500 that prevents diffusion of the organic matter M that has dropped off, and a pump 2120a that is located at the lower outside of the chamber 1100 and is connected to the injection unit 3000 via a pump connection pipe 2150a with a cooling trap 2180, A first supply unit 2200 for supplying the organic substance M to the injection unit 3000 and a second supply unit 2300 for supplying a coolant to the injection unit 300 and the cooling trap 2180 are provided.

The injection unit 3000 includes an injector body 3100 in which an injection port 3110 and a suction port 3120 penetrating up and down the internal space of the vacant body are formed, and the first supply unit 2200 provided inside the injector body 3100. An injection nozzle 3300 for injecting the organic substance M supplied via the injection port 3110 onto the substrate 10, and an injection port door 3200 that drives along the inner peripheral surface of the injector body 3100 to open and close the injection port 3110. , And a cooling passage 3514 provided horizontally on the upper side of the injector along the transport direction (X direction) of the substrate 10 and through which the coolant supplied via the second supply unit 2300 circulates. The cooling plate 3500 is vertically supported outside the formed cooling plate 3500 and the injector, and the second supply unit 2300 and the cooling passage 3514 of the cooling plate 3500 are supported. A plurality of support rods 3400 coolant conveying passage 3410 formed therein that connects.

The injector body 3100 is formed from a cylindrical body having a circular vertical cross section whose upper and lower ends protrude so that deformation or breakage does not easily occur even when the internal pressure of the chamber 1100 changes to a vacuum state or an atmospheric pressure state. Thus, an injection port 3110 and a suction port 3120 are formed at the protruding upper and lower ends, respectively. The length L2 of the injector body 3100 is formed to be equal to or greater than the width W1 of the substrate 10 and does not form a region on the substrate 10 where organic substances are not ejected when the substrate 10 is transported. Here, the longitudinal direction in which the injector body 3100 extends intersects the traveling direction (X direction) of the substrate 10.

An injection nozzle 3300 is provided horizontally through the inside of the injector body 3100 along the longitudinal direction in which the injector body 3100 extends. The length L1 of the body of the injection nozzle 3300 is formed to be equal to or greater than the length L2 of the injector body 3100, and both ends of the injection nozzle 3300 protrude so as to straddle both side surfaces of the injector body 3100. As a modification, when both ends of the injection nozzle 3300 do not protrude from both side surfaces of the injector body 3100, an injection nozzle support (not shown) that can support the injection nozzle 3300 is provided inside the injector body 3100. The length L1 of the injection nozzle 3300 may be shortened.

The injection nozzle 3300 is provided outside the chamber 1100 and is connected to the first supply unit 2200 that supplies the organic matter, and the injection nozzle 3300 protrudes from the upper side of the injection solution storage portion 3310 and jets the organic matter. A slit 3320. The height H of the injection slit 3320 is smaller than the inner diameter r of the injector body 3100, and the topmost portion of the injection slit 3320 is formed adjacent to the injection port 3110.

The injection port door 3200 opens and closes the injection port 3110 formed in the injector body 3100, but is driven from the inner peripheral surface of the cylindrical injector body 3100, and thus is formed from a curved plate.

The ejection port door 3200 closes the ejection port 3110 when the substrate processing step is not performed, that is, when the organic matter M is not ejected from the ejection nozzle 3300, and the substrate 10 is carried into the coating module 1500 to be ejected. When transported to the upper side of 3000, the jet port 3110 is opened by rotating clockwise or counterclockwise along the inner peripheral surface of the injector body 3100. Thereafter, the liquid organic substance M is ejected toward the substrate 10 from the ejection slit 3320 of the ejection nozzle 3300 through the opened ejection port 3110. On the other hand, after the board | substrate 10 passed the upper side of the injection part 3000 and was further conveyed only the predetermined distance, the injection port door 3200 returns to an initial position, and closes the injection port 3110 again. Of course, when the substrate 10 reciprocates along the transport path above the ejection unit 3000, the ejection port 3110 is kept open until the substrate 10 finally passes through the ejection unit 3000. In order to drive the ejection port door 3200, an ejection port door driving unit is provided on one side of the injector body 3100, and the ejection port door driving unit is connected to the second supply unit 2300 and supplied with electric power. The On the other hand, the opening / closing operation of the injection port door 3200 is controlled by the control unit.

In the present embodiment, the injection port door 3200 is configured to rotate along the inner peripheral surface of the injector body 3100, but the injection port door 3200 rotates and moves along the outer peripheral surface of the injector body 3100. Needless to say, it may be configured as described above.

A pump unit 2100 having a pump connection pipe 2150 (2150a, 2150b) and a pump 2150 (2150a, 2150b), which is connected to the suction port 3120 of the injector body 3100, is disposed at the outer lower portion of the coating module 1500. In the present embodiment, the pump connection pipe 2150 includes a first pump connection pipe 2150a connected to the suction port 3120 penetrating the lower surface of the chamber 1100, a second pump connection pipe 2150b directly connected to the chamber 1100, The first pump connecting pipe 2150a, which is different from the conventional one, will be mainly described.

The first pump connection pipe 2150a is connected to the lower side of the suction port 3120 and extends in the direction perpendicular to the ground. The vertical connection pipe is provided with a cooling trap 2180 adjacent to the suction port 3120. A horizontal connecting pipe 2154 branched in a direction intersecting with the longitudinal direction of the vertical connecting pipe and including the first pump 2120a and an organic matter container 2190 arranged at the lower end of the vertical connecting pipe to collect the fallen organic substances. .

The first pump connecting pipe 2150a is not composed of a simple linear body whose extending longitudinal direction is perpendicular to the ground, and is provided with a branch portion, that is, a horizontal connecting pipe 2154 so as to intersect the extending longitudinal direction. The first pump 2120a is provided inside the horizontal connecting pipe 2154. In other words, in the present embodiment, the branch portion is formed so that the first pump 2120a can be disposed at a position off the longitudinal line of the first pump connection pipe 2150a. On the other hand, as a modification, a part of the first pump connection pipe 2150a, that is, the lowermost end may be bent in the horizontal direction, and the first pump 2120a may be disposed at the bent portion. In this case, the organic substance accommodating part 2190 described later is positioned above the bent part inside the first pump connecting pipe 2150a.

In this way, the organic matter sucked through the suction port 3120 is prevented from dropping directly onto the upper portion of the first pump 2120a, thereby contaminating the first pump 2120a with organic matter and mechanical damage due to the contamination. Can be prevented.

A cooling trap 2180 is provided at an upper portion of the first pump connection pipe 2150a, that is, a portion adjacent to the suction port 3120 to cool the inside of the first pump connection pipe 2150a.

The cooling trap 2180 is fitted into the cooling coil 2182 and the cooling coil 2182 in which the coolant supplied from the second supply unit 2300 circulates from one side of the vertical connection pipe of the first pump connection pipe 2150a. A plurality of cooling plates 2184 and a cooling coil 2182 for expanding the cooling region inside the vertical connection pipe and a sealing lid 2186 for positioning and fixing the cooling coil 2182 on the vertical connection pipe are provided. In order to prevent the pressure loss of the first pump connection pipe 2150a, a sealing process is performed between the circular hermetic lid 2186 and the first pump connection pipe 2150a. By providing the cooling trap 2180 in the upper part of the first pump connection pipe 2150a, the clogging phenomenon of the first pump connection pipe 2150a due to organic substances can be suppressed as much as possible.

The cooling coil 2182 is bent in multiple layers horizontally on the ground, and the cooling plate 2184 inserted into the cooling coil 2182 is tilted in the vertical direction with respect to the ground so that the organic matter falls along the first pump connection pipe 2150a. The organic matter can be cooled even more easily by expanding the contact area at.

At the lower end portion of the first pump connection pipe 2150a, an organic matter storage portion 2190 in which the organic matter cooled by the cooling trap 2180 falls and gathers is arranged.

The organic material storage unit 2190 is formed on one surface of the storage container 2192 placed in the inner lower space of the first pump connection pipe 2150a and the lower end of the first pump connection pipe 2150a to take out the storage container 2192 to the outside. And a container door (not shown) that can be opened and closed. Sealing is also applied between the container doorway and the first pump connection pipe 2150a to prevent pressure loss and leakage of organic substances to the outside of the first pump connection pipe 2150a.

In the present embodiment, the branch portion is formed only in the first pump connection pipe 2150a connected to the injection unit 3000 and the cooling trap 2180 is provided, but the second portion directly connected to the internal space of the chamber 1100 is provided. A branch portion may be formed in the pump connection pipe 2150b, and a cooling trap may be provided.

On the other hand, in this embodiment, as the pump 2120 (2120a, 2120b), a turbo molecular pump (turbo molecular pump), which is a mechanical vacuum pump that rotates pump blades at high speed to exhaust gas molecules in one direction; TMP) is used.

A cooling plate 3500 is placed on the upper end of the injector body 3100 horizontally along the traveling direction (X direction) of the substrate 10. For this purpose, a plurality of support bars 3400 are erected vertically from the inner lower surface of the chamber 1100 adjacent to the outer surface of the injector body 3100. In the present embodiment, the cooling plate 3500 has a rectangular shape, and four support rods 3400 are used to vertically support the corners of the lower surface of the cooling plate 3500.

In order to supply the coolant to the cooling means provided in the cooling plate 3500 and to discharge the coolant from the cooling means, the support rod 3400 supporting the cooling plate 3500 has a passage for supplying and discharging the coolant. Is formed.

Cooling means is provided inside the cooling plate 3500 so that the temperature of the cooling plate 3500 adjacent to the substrate 10 can be lowered. That is, when the organic particles sprayed toward the substrate 10 fall off without being coated on the substrate 10, the organic particles adhere to or adhere to the cooled cooling plate 3500 so that the organic particles are inside the chamber 1100. Minimize diffusion and condensation in space.

Hereinafter, the cooling plate 3500 will be described in detail with reference to FIGS. 5 and 6.

FIG. 5 is a perspective view showing a structure of the cooling plate according to the present invention, and FIG. 6 is a perspective view showing a modified structure of the cooling plate according to the present invention.

Referring to FIGS. 5 and 6, a cooling plate 3500 according to the present invention is mounted on the upper ends of a plurality of support rods 3400, and a vertical first through hole 3512 corresponding to an injection port 3110 is provided at the center of the fuselage. The lower plate 3510 formed on the entire inner surface of the upper surface corresponds to the first through hole 3512 and the cooling passage 3514 connected to the coolant conveying path 3410 on both sides of the first through hole 3512. A vertical second through hole 3522 is provided, and an upper plate 3520 attached to the upper surface of the lower plate 3510 is provided. Here, the cooling passage 3514 has a simple bent shape (see FIG. 5) in which the routes through which the coolant circulates do not overlap or a lattice shape (see FIG. 6) in which the routes through which the coolant circulates overlap.

The width W3 and length L3 of the first through-hole 3512 are determined by the size of the injection nozzle 3300. In general, however, the cross-sectional area of the first through-hole 3512 is the injection in order not to adversely affect the organic matter injection. The nozzle 3300 is formed larger than the open area of the ejection slit 3320.

The lower plate 3510 formed integrally may be defined with the first through hole 3512 as a reference like the upper plate 3520, and conversely, the upper plate 3520 is formed in the center like the lower plate 3510. The second through hole 3522 may be formed in an integrated shape. A cooling passage 3514 formed on the inner upper surface of the lower plate 3510 is connected to a coolant conveyance passage 3410 formed on a plurality of support rods 3400 that support corners of the lower plate 3510 so that the coolant can circulate. Is done. With one end of the coolant transfer path 3410 connected to the cooling path 3514, the other end of the coolant transfer path 3410 is connected to the second supply unit 2300 that supplies the coolant from the outside of the chamber 1100. .

The upper plate 3520 is made of a metal material having a high cooling efficiency, and thus is quickly cooled by the coolant circulating in the cooling passage 3512.

As shown in FIG. 5, the cooling passage 3512 may be formed in a simple bent shape in which the circulation paths do not overlap in the process of circulating the coolant, and as shown in FIG. 6, in the process of circulating the coolant. You may form in the grid | lattice form with which a circulation path overlaps.

The cooling plate 3500 is disposed at a location adjacent to the substrate 10, and the entire surface of the cooling plate 3500 is cooled, so that organic substances that cannot be coated on the substrate 10 and are diffused into the internal space of the chamber 1100 are concentrated in the cooling plate 3500. And condense. That is, the cooling plate 3500 can prevent the organic matter from being diffused into the internal space of the chamber 1100 and contaminating the inner wall of the chamber 1100. On the other hand, although not shown in the drawing, an accommodation portion that can accommodate the organic matter condensed along the periphery of the cooling plate 3500 may be provided, or an accommodation groove may be provided.

FIG. 7 is a perspective view showing an ultraviolet ray generator of the curing module according to one embodiment of the present invention.

Referring to FIG. 7, an ultraviolet generator 4000 according to an embodiment of the present invention includes at least one ultraviolet lamp 4200 that irradiates ultraviolet rays, and a lamp housing that houses the ultraviolet lamp 4200 and is open at the top. 4300, a transparent window 4100 that covers the open upper surface of the lamp housing 4300 and transmits the ultraviolet light emitted from the ultraviolet lamp 4200, a heating coil 4500 as an antifouling means surrounding the periphery of the transparent window 4100, and ultraviolet light A power supply unit 4400 that supplies power to the lamp 4200 and the heating coil 4500 is provided.

The ultraviolet lamp 4200 is placed long in the direction of the width W1 of the substrate 10 intersecting the direction in which the substrate 10 travels so that the entire surface of the substrate 10 can be irradiated with ultraviolet rays, and has a length L4 that is longer than the width W1 of the substrate 10. . At least one ultraviolet lamp 4200 is provided, but the curing efficiency of the substrate 10 can be increased as the number of ultraviolet lamps 4200 used increases. However, in this case, since the installation cost increases, the number of UV lamps 4200 used is determined in consideration of the size of the object to be cured, the processing speed, and the like.

The lamp housing 4300 for housing the ultraviolet lamp 4200 is formed in a quadrangular prism shape in the present embodiment, but can be manufactured in various shapes without being limited to the quadrangular prism shape. The upper end of the lamp housing 4300 is opened, and the lower surface of the lamp housing 4300 is placed on the inner bottom surface of the chamber of the curing module 1600.

A transmissive window 4100 is attached to the open upper end of the lamp housing 4300, and the ultraviolet light emitted from the ultraviolet lamp 4200 passes through the transmissive window 4100 and is irradiated onto the substrate 10.

The temperature of the transmissive window 4100 is increased by a heating unit that surrounds the periphery of the transmissive window 4100, that is, the heating coil 4500. Conventionally, there has been a case in which no heating means is provided in the transmission window, and organic substances are dropped from the substrate 10 and attached to the relatively low-temperature transmission window 4100. Thus, the organic matter dropped off on the upper surface of the transmission window 4100 worked as an obstruction to prevent the irradiation of ultraviolet rays, and the substrate 10 could not be uniformly cured.

On the other hand, in the present invention, the heating coil 4500 is provided around the transmission window 4100 of the ultraviolet ray generator 4000 to raise the temperature of the transmission window 4100 so that the organic matter falls from the substrate 10 to the upper surface of the transparent window 4100. Can be reduced. That is, by reducing contamination of the transmission window 4100, the entire surface of the substrate 10 can be uniformly irradiated with ultraviolet rays.

The substrate processing system according to the present invention described above includes a coating module with antifouling means and a curing module. In the substrate processing system, the coating module and the curing module according to the present invention may be applied individually or simultaneously.

Such a substrate processing system can minimize or prevent organic substances coated on the substrate from being diffused and condensed inside the chamber to contaminate the inside of the chamber, thereby improving the quality of the substrate. In addition to improving and shortening the substrate processing process, the cost for maintenance and replacement can be reduced to increase productivity.

As mentioned above, although this invention was demonstrated based on embodiment mentioned above and attached drawing, this invention is not limited to this, It is limited by the claim which is mentioned later. Therefore, those who have ordinary knowledge in this technical field can variously modify and modify the present invention without departing from the technical idea of the claims to be described later.

Claims (9)

A chamber having a processing space;
An injection unit having a cooling plate that injects organic matter onto the substrate inside the chamber and prevents diffusion of the organic matter that has fallen without being coated on the substrate;
A pump located at the outer lower portion of the chamber and connected to the injection unit via a pump connection pipe with a cooling trap;
A first supply unit for supplying an organic substance to the injection unit;
A second supply unit for supplying a coolant to the injection unit and the cooling trap;
A substrate processing system comprising: The injection unit is
An injector body formed with an injection port and a suction port penetrating the interior space of the body up and down, and an organic substance provided inside the injector body and supplied via the first supply unit; An injector comprising: an injection nozzle that injects the substrate through the injection nozzle; and an injection port door that opens and closes the injection port by driving along an inner peripheral surface of the injector body.
A cooling plate provided horizontally above the injector in the transport direction of the substrate and having a cooling passage in which a coolant supplied through the second supply unit circulates;
A plurality of support rods that support the cooling plate vertically outside the injector and have a coolant transport passage formed therein for connecting the second supply section and the cooling passage of the cooling plate;
A substrate processing system according to claim 1. The injector body is a cylindrical body having a circular vertical cross section with an upper end and a lower end protruding, and the length of the injector body is equal to or greater than the width of the substrate, The substrate processing system according to claim 2, wherein a longitudinal direction in which the injector body extends is a direction intersecting a traveling direction of the substrate. The cooling plate is
A vertical first through hole corresponding to the injection port, which is placed on the upper ends of the plurality of support rods, is formed in the center of the fuselage, and the coolant transport passage is formed on both sides of the first through hole. A lower plate in which the cooling passage to be connected is formed on the entire inner surface of the upper surface;
An upper plate that has a vertical second through hole corresponding to the first through hole and is attached to the upper surface of the lower plate;
With
The substrate processing system according to claim 2, wherein the cooling passage has a simple bent shape in which a route for circulating the coolant does not overlap or a lattice shape in which the route for circulating the coolant overlaps. The pump connecting pipe is
A vertical connecting pipe in which a longitudinal direction connected to the lower side of the suction port extends in a direction perpendicular to the ground, and the cooling trap is provided adjacent to the suction port;
A horizontal connecting pipe in which the pump is built by branching or bending in a direction crossing a longitudinal direction of the vertical connecting pipe;
An organic matter container that gathers and collects organic matter that has been deployed and dropped at the lower end of the vertical connecting pipe;
A substrate processing system according to claim 2. The cooling trap is
A cooling coil that is inserted inside from one side of the vertical connecting pipe and in which a coolant supplied from the second supply unit circulates;
A plurality of cooling plates fitted into the cooling coil to expand the cooling region;
The substrate processing system according to claim 5, further comprising: a hermetically sealed lid that positions and fixes the cooling coil to the vertical connection pipe. A chamber having a processing space;
At least one ultraviolet lamp provided inside the chamber for irradiating the substrate with ultraviolet rays;
A lamp housing for housing the ultraviolet lamp;
A transmission window attached to the open upper portion of the lamp housing and transmitting ultraviolet rays emitted from the ultraviolet lamp toward the substrate;
A heating coil attached to the lamp housing along the periphery of the transmission window;
A power supply unit for supplying power to the ultraviolet lamp and the heating coil;
A substrate processing system comprising:
An organic substance is sprayed onto the substrate inside the chamber, and a cooling passage in which a coolant circulates away from the substrate is provided in the interior of the chamber to disperse the organic substance that has fallen off without being coated on the substrate. And a pump connected to the injection unit via a pump connection pipe in which a cooling trap is provided at an outer lower portion of the chamber and a branch or bent portion is formed in a direction intersecting with the extending longitudinal direction. A coating module having,
A curing module having a heating coil for irradiating the substrate coated with the organic matter with an ultraviolet ray via an ultraviolet lamp, but heating a transmission window disposed between the substrate and the ultraviolet lamp;
A substrate processing system comprising: The substrate processing system according to claim 8, wherein the coating module and the curing module are connected by an inline method or a cluster method.