JP2012510630A - 水晶振動子を利用した圧力測定方法および装置 - Google Patents
水晶振動子を利用した圧力測定方法および装置 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 85
- 239000013078 crystal Substances 0.000 title claims abstract description 84
- 230000008569 process Effects 0.000 claims abstract description 54
- 239000012530 fluid Substances 0.000 claims abstract description 34
- 239000010453 quartz Substances 0.000 claims abstract description 34
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 34
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- 238000009530 blood pressure measurement Methods 0.000 description 9
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
- G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
オイル充填管400はカンチレバービームとみなすことができる。オイル充填管の内部の圧力は外部より高い。このことは管壁内に応力を生じさせる。管壁は応力に応答して非常にわずかであるが拡張する。水晶振動子は、管に堅く取り付けられる両端の2つの取り付け具で管に接触した状態で固定される。管の壁の長さの変化は結果として水晶振動子内に応力を生じさせる。従って、水晶振動子の共振周波数は管にかけられた圧力の関数として変化する。
ここでEはヤング率、εは歪み、Fは力、Aは面積、Loは管のオリジナル長さである。
ここで
σa:軸方向の応力
pi:管の内面圧
po:管の外面圧
ri:管の内面半径
ro:管の外面半径
ここで
σc:円周方向応力
r:r=rI(管の内面側)の場合の管壁内において最大応力のポイントの半径
電極は、2つの上面の電気接続および水晶振動子の裏面に接地板を形成するために水晶振動子表面に真空蒸着される。図8Aから図8Eにおいては圧力センサー組立品418が示される。組立品418はハウジング422を含み、かつオイル充填管400に接続する。図8Bに示される断面図の中で、水晶振動子420が水晶振動子420の対向端に配置される水結振動子取り付け具424および426で管400に取り付けられているところが示される。図8Cの平面図でより明瞭に図示されるように、水晶振動子420は、2つの切除領域436および438の間に輪郭が示される振動ビーム部分434に延伸される、電極430および432を含む。電気的接地440(図8Dに示される)が水晶振動子420の裏面に沿って設けられる。
小型であるため梱包費用を低減できること、
水晶振動子を含む機械的構成要素が安価であること、
測定が非挟み込み型であるため圧力ヘッドが不要であること、
信号が周波数にもとづくためアナログ・デジタル変換器が不要であること、
予測可能であるため温度評価が簡略化されていること、
オイルの動きがほとんどないため隔壁がより小型化できかつ応答がより短時間であること、
異なる管材料に応じて異なる範囲の最適化ができること、
非常に高圧の装置を作る潜在力があること、
小型で安価でかつ低電力であること
を含むいくつかの長所を有する。
Claims (31)
- プロセス流体の圧力を受けるように構成されたセンサー本体、および
前記センサー本体に取り付けられ、前記センサー本体によって受けられた前記圧力に関連する共振周波数を有する水晶振動子、および
前記水晶振動子の前記共振周波数を測定し、かつ前記水晶振動子の前記共振周波数に対応する関数として前記プロセス流体の前記圧力を示す出力を与えるように構成された回路、
を含む圧力センサー装置。 - 前記プロセス流体から前記センサー本体内を運ばれる充填液を絶縁するように構成された絶縁隔壁を含む、
請求項1に記載の装置。 - 前記センサー本体が長さを有し、かつ前記水晶振動子が軸方向の応力を検出するように構成された、
請求項1に記載の装置。 - 前記水晶振動子がビームの軸に沿った応力を検出するように構成された、
請求項1に記載の装置。 - ビームの軸が前記センサー本体の長手方向の軸に対してある角度をとる、
請求項4に記載の装置。 - 前記水晶振動子がATカットの水晶振動子を含む、
請求項1に記載の装置。 - 前記水晶振動子が、前記センサー本体に取り付けられた端部を有する細長い水晶振動子を含む、
請求項1に記載の装置。 - 前記水晶振動子が振動するビーム部分を含む、
請求項1に記載の装置。 - 前記センサー本体がわずかな曲率を有する細長い管を含む、
請求項1に記載の装置。 - 前記水晶振動子が音叉型の形態を含む、請求項1に記載の装置。
- 前記水晶振動子が、前記センサー本体に取り付けられた基部を有する、
請求項10に記載の装置。 - 前記水晶振動子の前記共振周波数が、前記センサー本体中の流体の密度に関連している、
請求項10に記載の装置。 - 前記水晶振動子の前記共振周波数が、前記水晶振動子から前記センサー本体に供給された音響エネルギーのエネルギーリークに関連している、
請求項10に記載の装置。 - 前記センサー本体が差圧センサーに接続する、
請求項1に記載の装置。 - 前記センサー本体が管内を絶縁する要素を跨いで接続される管を含み、前記センサー本体に取り付けられた第2水晶振動子をさらに含み、前記絶縁を跨いだ圧力の差を差圧とする
請求項13に記載の装置。 - 差圧がプロセス配管を経由する流れに関連している、
請求項15に記載の装置。 - 前記センサー本体が第2圧力センサーに接続されている、
請求項1に記載の装置。 - 前記第2圧力センサーに接続されている第2センサー本体を含み、かつ前記第2圧力センサーが、前記センサー本体中および前記第2センサー本体中の流体の前記圧力に関連している差圧を測定するように構成された、
請求項17に記載の装置。 - センサー本体中のプロセス流体の圧力を受けること、
前記センサー本体に取り付けられた水晶振動子をある周波数で共振させること、および
前記水晶振動子の共振周波数の変化を測定し、前記共振周波数の変化に基づいて前記プロセス流体の前記圧力に関連している出力を与えること、
を含む、
前記プロセス流体の圧力を測定する方法。 - 前記プロセス流体から前記センサー本体内を運ばれる充填液を絶縁するように絶縁隔壁を与えることを含む、
請求項19に記載の方法。 - 前記センサー本体が長さを有し、かつ前記圧力に応答して軸方向の応力を経験するように構成された、
請求項19に記載の方法。 - 前記水晶振動子が前記センサー本体のビームの軸に沿った応力を検出するように構成された、
請求項19に記載の方法。 - 前記ビームの軸が前記センサー本体の長手方向の軸に対してある角度をとる、
請求項22に記載の方法。 - 前記水晶振動子がATカットの水晶振動子を含む、
請求項19に記載の方法。 - 前記水晶振動子が、前記センサー本体に取り付けられた端部を有する細長い水晶振動子を含む、
請求項19に記載の方法。 - 前記水晶振動子が振動するビーム部分を含む、
請求項19に記載の方法。 - 前記水晶振動子が音叉型の形態を含む、
請求項19に記載の方法。 - 前記水晶振動子が、前記センサー本体に取り付けられた基部を有する、
請求項27に記載の方法。 - 前記水晶振動子の前記共振周波数が、前記センサー本体中の流体の密度に関連している、
請求項27に記載の方法。 - 前記水晶振動子の前記共振周波数が、前記水晶振動子から前記センサー本体に供給された音響エネルギーのエネルギーリークに関連している、
請求項27に記載の方法。 - 前記センサー本体が管内を絶縁する要素を跨いで接続された管を含む方法で、かつ、前記センサー本体に取り付けられた第2水晶振動子を与えることを含み、前記絶縁を跨いだ圧力の差を差圧とする、
請求項19に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US12/327,053 US7870791B2 (en) | 2008-12-03 | 2008-12-03 | Method and apparatus for pressure measurement using quartz crystal |
US12/327,053 | 2008-12-03 | ||
PCT/US2009/064705 WO2010065282A1 (en) | 2008-12-03 | 2009-11-17 | Method and apparatus for pressure measurement using quartz crystal |
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JP2012510630A true JP2012510630A (ja) | 2012-05-10 |
JP5713916B2 JP5713916B2 (ja) | 2015-05-07 |
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US (1) | US7870791B2 (ja) |
EP (1) | EP2359115B1 (ja) |
JP (1) | JP5713916B2 (ja) |
CN (1) | CN102232180B (ja) |
WO (1) | WO2010065282A1 (ja) |
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WO2014112350A1 (ja) * | 2013-01-17 | 2014-07-24 | パナソニック株式会社 | 圧力センサ |
KR20220053445A (ko) * | 2020-10-22 | 2022-04-29 | 국방과학연구소 | 수정미소저울 센서를 이용한 통신 장치, 방법, 컴퓨터 판독 가능한 기록매체 및 컴퓨터 프로그램 |
KR102405153B1 (ko) * | 2020-10-22 | 2022-06-07 | 국방과학연구소 | 수정미소저울 센서를 이용한 통신 장치, 방법, 컴퓨터 판독 가능한 기록매체 및 컴퓨터 프로그램 |
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