JP2012508818A5 - - Google Patents

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Publication number
JP2012508818A5
JP2012508818A5 JP2011536324A JP2011536324A JP2012508818A5 JP 2012508818 A5 JP2012508818 A5 JP 2012508818A5 JP 2011536324 A JP2011536324 A JP 2011536324A JP 2011536324 A JP2011536324 A JP 2011536324A JP 2012508818 A5 JP2012508818 A5 JP 2012508818A5
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JP
Japan
Prior art keywords
particulate material
opening
shaft
rotatable shaft
scraping means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2011536324A
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English (en)
Japanese (ja)
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JP5221772B2 (ja
JP2012508818A (ja
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Publication date
Priority claimed from US12/271,250 external-priority patent/US7972443B2/en
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Publication of JP2012508818A publication Critical patent/JP2012508818A/ja
Publication of JP2012508818A5 publication Critical patent/JP2012508818A5/ja
Application granted granted Critical
Publication of JP5221772B2 publication Critical patent/JP5221772B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011536324A 2008-11-14 2009-11-12 粒子材料の計量及びその気化 Active JP5221772B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/271,250 US7972443B2 (en) 2008-11-14 2008-11-14 Metering of particulate material and vaporization thereof
US12/271,250 2008-11-14
PCT/US2009/006082 WO2010056325A1 (en) 2008-11-14 2009-11-12 Metering of particulate material and vaporization thereof

Publications (3)

Publication Number Publication Date
JP2012508818A JP2012508818A (ja) 2012-04-12
JP2012508818A5 true JP2012508818A5 (https=) 2012-08-02
JP5221772B2 JP5221772B2 (ja) 2013-06-26

Family

ID=41479216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011536324A Active JP5221772B2 (ja) 2008-11-14 2009-11-12 粒子材料の計量及びその気化

Country Status (7)

Country Link
US (1) US7972443B2 (https=)
EP (1) EP2352857B1 (https=)
JP (1) JP5221772B2 (https=)
KR (1) KR101224564B1 (https=)
CN (1) CN102282289B (https=)
TW (1) TWI377260B (https=)
WO (1) WO2010056325A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7883583B2 (en) * 2008-01-08 2011-02-08 Global Oled Technology Llc Vaporization apparatus with precise powder metering
US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
DE102011051261A1 (de) * 2011-06-22 2012-12-27 Aixtron Se Verfahren und Vorrichtung zum Abscheiden von OLEDs insbesondere Verdampfungsvorrichtung dazu
CN106119781B (zh) 2016-07-27 2018-10-30 京东方科技集团股份有限公司 蒸发装置、蒸镀设备和蒸镀方法
CN110615295A (zh) * 2018-06-19 2019-12-27 曹荣华 动态供粉装置
CN110715697B (zh) * 2019-09-25 2021-02-09 北京控制工程研究所 一种带有密封结构的适用于微克级流量的流量测量组件
CN111206228A (zh) * 2020-02-28 2020-05-29 苏州泓沵达仪器科技有限公司 高效纳米真空蒸发源
KR20240012506A (ko) 2021-05-21 2024-01-29 메르크 파텐트 게엠베하 적어도 하나의 기능성 물질의 연속 정제 방법 및 적어도 하나의 기능성 물질의 연속 정제를 위한 디바이스

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US7972443B2 (en) * 2008-11-14 2011-07-05 Global Oled Technology Llc Metering of particulate material and vaporization thereof
US8062427B2 (en) * 2008-11-14 2011-11-22 Global Oled Technology Llc Particulate material metering and vaporization
US8048230B2 (en) * 2008-11-14 2011-11-01 Global Oled Technology Llc Metering and vaporizing particulate material

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