JP2012251218A - Oblique vapor deposition apparatus, method for manufacturing screen, and device for changing conveying direction - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus that can selectively vapor deposit a vapor deposition material on a part of uneven parts when using a lengthy sheet having a plurality of uneven parts in at least one surface thereof.SOLUTION: The oblique vapor deposition apparatus performs oblique vapor deposition on the lengthy sheet W1 having the plurality of uneven parts in at least one surface thereof while the one surface is aligned along a vertical plane including a vertical direction and a conveying direction is aligned along a horizontal direction in the vertical plane. The oblique vapor deposition apparatus 1 includes: a first conveying direction changing part 20 for allowing the lengthy sheet W1 with the one surface aligned along a plane other than the vertical plane or with the conveying direction aligned along a direction other than a horizontal direction in the vertical plane, to be aligned so that the one surface is aligned along the vertical plane and the conveying direction is aligned along a horizontal direction in the vertical plane; and an oblique vapor deposition part 40 disposed in the subsequent stage of the first conveying direction changing part 20 and obliquely vapor depositing the vapor deposition material on a part of the uneven parts.

Description

  The present invention relates to an oblique deposition apparatus, a screen manufacturing method, and a transfer direction changing apparatus.

  Conventionally, a vapor deposition apparatus that performs vapor deposition on a long sheet is widely known (for example, see Patent Document 1). According to the conventional vapor deposition apparatus, it is possible to perform stable vapor deposition over one entire surface of the long sheet.

JP-A-11-323552

  However, in the conventional vapor deposition apparatus, when a long sheet having a plurality of concave and convex portions on at least one surface is used, there is a problem that the vapor deposition material cannot be selectively deposited on a part of the concave and convex portions.

  Therefore, the present invention has been made to solve the above problem, and when a long sheet having a plurality of uneven portions on at least one surface is used, a vapor deposition material is selectively applied to a part of the uneven portions. It aims at providing the vapor deposition apparatus which can vapor-deposit. It is another object of the present invention to provide a method for producing a screen using the above oblique deposition apparatus. Furthermore, it aims at providing the conveyance direction change apparatus which can suppress the twist of a elongate sheet when changing a conveyance direction.

  By the way, as a vapor deposition apparatus that selectively deposits a vapor deposition material on a part of the concavo-convex portion, an oblique vapor deposition unit that deposits a vapor deposition material from an oblique direction with respect to an object (in the case of the present invention, a long sheet). A vapor deposition apparatus is conceivable (see FIG. 3 described later). In such an oblique deposition unit, it is preferable to perform deposition in a state where the surface is along a vertical plane including the vertical direction and the transport direction is along the horizontal direction in the vertical plane (so-called “standing”). From the viewpoint of transport stability, it is preferable to transport the long sheet in a state in which the surface is along a plane perpendicular to the vertical direction (so-called “lay down”). If it is made to stand, it occupies a large volume, so that the oblique vapor deposition section cannot be applied as it is to a vapor deposition apparatus such as a conventional vapor deposition apparatus. Therefore, as a result of intensive studies based on the above points, the inventors of the present invention have conceived an oblique vapor deposition apparatus including components that change the conveying direction of a long sheet, and have completed the present invention. The present invention comprises the following components.

[1] The oblique vapor deposition apparatus of the present invention is a long sheet having a plurality of uneven portions on at least one surface, the one surface is along a vertical plane including a vertical direction, and the conveying direction is the vertical plane. An oblique vapor deposition apparatus that performs oblique vapor deposition in a state along a horizontal direction inside, wherein the one surface is along a plane other than the vertical plane, or a conveyance direction is a direction other than the horizontal direction within the vertical plane. A first conveyance direction changing unit that causes the one surface to be along the vertical plane and a conveyance direction to be along a horizontal direction in the vertical plane, and the first conveyance direction changing unit. And an oblique vapor deposition part that obliquely vapor deposits the vapor deposition material on a part of the uneven part.

  For this reason, the oblique vapor deposition apparatus of the present invention includes an oblique vapor deposition portion that obliquely deposits the vapor deposition material on a part of the uneven portion, and therefore, a long sheet having a plurality of uneven portions on at least one surface is used. In this case, the oblique deposition apparatus is capable of selectively depositing a deposition material on a part of the uneven portion.

  Moreover, according to the oblique vapor deposition apparatus of the present invention, one surface is a long sheet along a plane other than the vertical plane, or the conveyance direction is along a direction other than the horizontal direction in the vertical plane. A long sheet in a standing state is provided in order to include a first transport direction changing unit that is along the vertical plane and the conveyance direction is along the horizontal direction in the vertical plane (the long sheet is in a standing state). It becomes possible to carry out oblique vapor deposition on a long sheet that is conveyed to the oblique vapor deposition section and stood up.

  In the present invention, the term “vertical direction (direction along gravity)” includes not only a strict vertical direction but also a direction that can be treated as a vertical direction in practice. The same applies to “horizontal direction (perpendicular to gravity)”, “vertical”, and “parallel”, and includes directions that can be treated as “horizontal direction”, “vertical”, or “parallel” in practice.

  The “long sheet having a plurality of concave and convex portions on at least one surface” used for oblique vapor deposition is used, for example, when manufacturing a projection screen that reflects mainly projection light from a projector toward a user. (See Embodiment 1 described later.) The oblique vapor deposition apparatus of the present invention can be suitably used in the application for producing the screen as described above (that is, as a vapor deposition apparatus for producing a projection screen).

[2] In the oblique vapor deposition apparatus of the present invention, the transport direction of the long sheet transported along the surface perpendicular to the vertical direction is set to the direction of the first transport direction changing unit. It is preferable to further include a pre-stage transport direction changing unit that changes toward the front.

  By adopting such a configuration, in order to change the conveyance direction in the first conveyance direction change unit and the first conveyance direction change unit, the long sheet will be put in a state of being laid down in stages, As a result, it becomes possible to suppress the twisting of the long sheet when the long sheet is made to stand.

  Note that “twisting of the long sheet” means that the shape of the long sheet including the concavo-convex portion on one surface is twisted due to the change in the conveying direction.

[3] In the oblique deposition apparatus of the present invention, the front-stage transport direction changing unit has a rotation axis perpendicular to the transport direction of the long sheet before and after passing through the front-stage transport direction changing unit. It is preferable to provide a front-stage transport direction changing roller.

  With such a configuration, it is possible to easily and stably change the conveyance direction of the long sheet.

[4] In the oblique vapor deposition apparatus of the present invention, the first transport direction changing unit is an oblique rotation axis with respect to the transport direction of the long sheet before and after passing through the first transport direction changing unit. It is preferable to include a first low friction roller having a low surface frictional force.

  By the way, in the 1st conveyance direction change part, in order to change a conveyance direction so that a long sheet may be bent, it will be in the state from which the advancing direction differs in one end and the other end of a long sheet, and the twist of a long sheet It may cause. However, since the first low-friction roller having a low surface friction force is provided by adopting the above-described configuration, when changing the conveyance direction of the long sheet, one end and the other end of the long sheet It is possible to alleviate the difference in the advancing direction and to suppress the twisting of the long sheet when changing the conveyance direction.

[5] In the oblique deposition apparatus of the present invention, the first transport direction changing unit is along the one surface of the long sheet before passing through the first transport direction changing unit, and in the horizontal direction. A first horizontal axis rotating part comprising a plurality of first horizontal axis rotating bodies having a rotating axis along the vertical axis, and a plurality of first vertical axes having a rotating axis along the vertical direction arranged after the first horizontal axis rotating part It is also preferable to include a first vertical axis rotating unit made of a rotating body.

  By adopting such a configuration, the first horizontal axis rotating unit composed of a plurality of first horizontal axis rotating bodies and the first vertical axis rotating unit composed of a plurality of first vertical axis rotating bodies are provided. When changing the conveyance direction of the sheet, it is possible to alleviate the difference in the traveling direction between one end of the long sheet and the other end, and to suppress the twist of the long sheet when changing the conveyance direction. Become.

  In addition, with the above-described configuration, the long sheet first contacts the first horizontal axis rotating unit including the plurality of first horizontal axis rotating bodies, and then includes the plurality of first vertical axis rotating bodies. The first horizontal axis rotating body that rotates along the conveyance direction of the long sheet before the change in the conveyance direction and the rotation along the conveyance direction of the long sheet after the change in the conveyance direction in order to contact the first vertical axis rotation unit. The long sheet comes into contact with the first vertical shaft rotating body in a stepwise manner, and as a result, it is possible to further suppress twisting of the long sheet when the long sheet is made to stand. Become.

  Since the first horizontal axis rotator has a rotation axis along the horizontal direction, the first horizontal axis rotator becomes a rotator that performs so-called “vertical rotation”. The same applies to a second horizontal axis rotating body to be described later. Further, since the first vertical axis rotating body has a rotating shaft in the vertical direction, it becomes a rotating body that performs so-called “lateral rotation”. The same applies to a second vertical axis rotating body to be described later.

[6] In the oblique vapor deposition apparatus of the present invention, the first transport direction changing unit is an oblique rotation shaft with respect to the transport direction of the long sheet before and after passing through the first transport direction changing unit. It is also preferable to include a first oblique rotation unit including a plurality of first oblique rotation bodies having

  By adopting such a configuration, since the first oblique rotation unit including a plurality of first oblique rotation bodies is provided, when changing the conveyance direction of the long sheet, one end and the other end of the long sheet It is possible to alleviate the difference in the advancing direction and to suppress the twisting of the long sheet when changing the conveyance direction.

[7] The oblique vapor deposition apparatus of the present invention preferably further includes a second conveyance direction changing unit that changes the conveyance direction of the long sheet from the oblique vapor deposition unit toward the constituent elements in the subsequent stage. .

  By adopting such a configuration, it becomes possible to convey the long sheet that has been obliquely vapor-deposited in the oblique vapor deposition section toward the subsequent components.

  The “rear-stage component” refers to a component arranged at the subsequent stage of the second transport direction changing unit. As such a component, for example, another transport direction change unit (a later-stage transport direction to be described later) Part) and a winding roller can be used.

[8] In the oblique vapor deposition apparatus of the present invention, the transport direction of the long sheet from the second transport direction changing unit is changed, and the long sheet is placed with respect to the vertical direction on the one surface. It is preferable to further include a rear-stage transport direction changing unit that is along a vertical plane.

  By adopting such a configuration, in order to change the conveyance direction in the second conveyance direction change unit and the subsequent conveyance direction change unit, it will be in a state where the long sheet is laid down from a state of standing in stages, As a result, it is possible to suppress twisting of the long sheet when the long sheet is erected from the standing state.

[9] In the oblique deposition apparatus of the present invention, the rear conveyance direction changing unit has a rotation axis perpendicular to the conveyance direction of the long sheet before and after passing through the rear conveyance direction changing unit. It is preferable to provide a back | latter stage conveyance direction change roller.

  By setting it as such a structure, it becomes possible to change the conveyance direction of a long sheet easily and stably, and to make the long sheet lie down.

[10] In the oblique vapor deposition apparatus of the present invention, the second transport direction changing unit is inclined with respect to the transport direction of the long sheet before and after passing through the second transport direction changing unit. It is preferable to include a second low friction roller having a low frictional force on the surface.

  By adopting such a configuration, since the second low friction roller having a low surface frictional force is provided, when changing the conveying direction of the long sheet from the oblique vapor deposition section, one end of the long sheet and It is possible to alleviate the difference in the traveling direction with respect to the other end, and to suppress the twisting of the long sheet when the conveyance direction is changed.

[11] In the oblique deposition apparatus of the present invention, the second transport direction changing unit includes a second vertical axis rotating unit composed of a plurality of second vertical axis rotating bodies having a rotating axis along the vertical direction, and the first A plurality of second horizontals arranged at the rear stage of the two vertical axis rotation units, having a rotation axis along the one surface of the long sheet after passing through the second conveyance direction changing unit and along the horizontal direction. It is also preferable to include a second horizontal axis rotating unit made of a shaft rotating body.

  By adopting such a configuration, since the second vertical axis rotating unit composed of a plurality of second vertical axis rotating bodies and the second horizontal axis rotating unit composed of a plurality of second horizontal axis rotating bodies are provided, it is oblique. When changing the conveyance direction of the long sheet from the vapor deposition section, the long sheet is used to relieve the difference in the traveling direction between one end and the other end of the long sheet and to change the conveyance direction of the long sheet. It becomes possible to suppress the twisting of the sheet.

  Further, with the configuration as described above, the long sheet first contacts the second vertical axis rotating unit including the plurality of second vertical axis rotating bodies, and then includes the plurality of second horizontal axis rotating bodies. The second vertical axis rotating body that rotates along the conveyance direction of the long sheet before the change in the conveyance direction and the rotation along the conveyance direction of the long sheet after the change in the conveyance direction to contact the second horizontal axis rotating unit With the second horizontal axis rotating body, it is possible to further suppress twisting of the long sheet when changing the conveyance direction.

[12] In the oblique vapor deposition apparatus of the present invention, the second transport direction changing section is inclined with respect to the transport direction of the long sheet before and after passing through the second transport direction changing section. It is also preferable to include a second oblique rotation unit that includes a plurality of second oblique rotation bodies having

  By adopting such a configuration, since the second oblique rotation unit composed of a plurality of second oblique rotation bodies is provided, when changing the conveyance direction of the long sheet from the oblique vapor deposition unit, one of the long sheets It is possible to alleviate the difference in the advancing direction between the other end and the other end, and to suppress the twisting of the long sheet when the conveying direction is changed.

[13] In the method for producing a screen of the present invention, a vapor deposition reflective layer is selectively formed on a part of the uneven portion in a long sheet having a plurality of uneven portions on at least one surface and serving as a base material of the screen. A method for producing a screen, comprising: obliquely depositing a deposition material on a part of the concavo-convex portion of the long sheet using the oblique deposition apparatus of the present invention to form the deposited reflective layer. It is characterized by including.

  According to the method for producing a screen of the present invention, since the oblique deposition apparatus of the present invention is used, the vapor deposition material is obliquely vapor-deposited on a part of the concavo-convex portion of the long sheet, and includes a step of forming a vapor deposition reflective layer. It becomes possible to easily manufacture a projection screen that can reflect projection light from the projector (particularly projection light projected from an oblique direction) mainly toward the user.

  “Evaporation of the deposition material obliquely on a part of the concavo-convex part” means, for example, when the concavo-convex part has a chevron shape, vapor deposition is performed on all or a part of one region divided by the peaks in the chevron shape. This refers to oblique deposition of materials. Further, in the case where the concavo-convex portion is composed of a combination of substantially hemispherical concave portions (so-called microlenses), it means that the vapor deposition material is obliquely deposited on a part of the substantially hemispherical shape.

[14] A transport direction changing device according to the present invention is a transport direction changing device used for transporting a long sheet, the surface of the long sheet before passing through the transport direction changing device or the transport direction changing unit. A horizontal axis rotating part composed of a plurality of horizontal axis rotating bodies having a rotation axis along the horizontal direction along the surface of the long sheet after passing, and a plurality of vertical axis rotations having a rotation axis along the vertical direction And a vertical axis rotating unit comprising a body.

  According to the conveying direction changing device of the present invention, since the horizontal axis rotating unit and the vertical axis rotating unit are provided, when changing the conveying direction of the long sheet, the one end and the other end of the long sheet It becomes possible to alleviate the difference in the traveling direction and to suppress the twisting of the long sheet when changing the conveying direction.

  Further, according to the conveyance direction changing device of the present invention, the long sheet first contacts the horizontal axis rotating unit composed of a plurality of horizontal axis rotating bodies having a rotation axis along the horizontal direction, and then rotates along the vertical direction. Since it is in contact with the vertical axis rotating part consisting of a plurality of vertical axis rotating bodies having axes or in the reverse order, it rotates along the conveyance direction of the long sheet before the conveyance direction is changed. The long sheet when changing the conveying direction by the horizontal axis rotating body or the vertical axis rotating body and the vertical axis rotating body or the horizontal axis rotating body rotating along the conveying direction of the long sheet after changing the conveying direction. Twist can be further suppressed.

The figure shown in order to demonstrate the oblique vapor deposition apparatus 1 which concerns on Embodiment 1. FIG. The figure shown in order to demonstrate the elongate sheet | seat W1 in Embodiment 1. FIG. The figure shown in order to demonstrate the oblique vapor deposition part 40 in Embodiment 1. FIG. FIG. 3 is a partially enlarged cross-sectional view of the screen SCR in the first embodiment. 3 is a flowchart of a screen manufacturing method according to the first embodiment. The figure shown in order to demonstrate the oblique vapor deposition apparatus 2 which concerns on Embodiment 2. FIG. The figure shown in order to demonstrate the 1st horizontal axis rotation part 82 in Embodiment 2. FIG. The figure shown in order to demonstrate the 1st horizontal axis rotating body 83 in Embodiment 2. FIG. The figure shown in order to demonstrate the 1st perpendicular axis | shaft rotation part 86 in Embodiment 2. FIG. The figure shown in order to demonstrate the oblique vapor deposition apparatus 3 which concerns on Embodiment 3. FIG. The figure shown in order to demonstrate the 1st diagonal rotation part (front stage conveyance direction change part 100) in Embodiment 3. FIG. The figure shown in order to demonstrate the 1st diagonal rotation body 102 in Embodiment 3. FIG. The figure shown in order to demonstrate the elongate sheet | seat W2 in the modification 1. FIG. The figure shown in order to demonstrate the elongate sheet | seat W3 in the modification 2. FIG.

  Hereinafter, an oblique vapor deposition apparatus, a method for manufacturing a screen, and a transfer direction changing apparatus according to the present invention will be described based on embodiments shown in the drawings.

[Embodiment 1]
FIG. 1 is a view for explaining an oblique deposition apparatus 1 according to the first embodiment. 1A is a perspective view of the oblique deposition apparatus 1, FIG. 1B is a front view of the oblique deposition apparatus 1, and FIG. 1C is a side view of the oblique deposition apparatus 1. FIG. . The arrows in FIG. 1 indicate the conveyance direction of the long sheet W1.
FIG. 2 is a view for explaining the long sheet W1 in the first embodiment. FIG. 2A is a plan view showing one unit of the long sheet W1, and FIG. 2B is a partially enlarged sectional view showing a part of the A1-A1 section of FIG. 2A in an enlarged manner. . In FIG. 2, for the sake of explanation, the number of uneven portions is reduced and the uneven portions are enlarged. The same applies to FIG. 3, FIG. 4, FIG. 13 and FIG. 14 described later.

FIG. 3 is a diagram for explaining the oblique deposition unit 40 according to the first embodiment. FIG. 3A is a front cross-sectional view showing the inside of the oblique vapor deposition section 40, and FIG. 3B is a side cross-sectional view showing the inside of the oblique vapor deposition section 40. The arrows in FIG. 3 indicate the vapor deposition material M scattered from the vapor deposition source 44.
FIG. 4 is a partially enlarged cross-sectional view of the screen SCR in the first embodiment. FIG. 4 is a schematic diagram, and shows a large thickness of the deposited vapor deposition material M.

  In the drawings for explaining the oblique deposition apparatus and its constituent elements, three directions orthogonal to each other are set in the x-axis direction (in FIG. 1, the long sheet W1 is changed from the first transport direction changing unit 20 to the second transport direction changing unit 60 , The horizontal direction in the vertical plane, the y-axis direction (direction parallel to the paper surface in FIG. 1B and perpendicular to the x-axis), and the z-axis direction (perpendicular to the paper surface in FIG. 1B). And a direction perpendicular to the x-axis).

First, the configuration of the oblique deposition apparatus 1 according to the first embodiment will be described.
In the oblique vapor deposition apparatus 1 according to the first embodiment, as shown in FIG. 1, a long sheet W1 having a plurality of concave and convex portions on one surface (the surface shown in FIG. 2A) has one surface vertical. An oblique vapor deposition apparatus that performs oblique vapor deposition along a vertical plane including a direction and a horizontal direction in the vertical plane, the first-stage conveyance direction changing unit and the first conveyance direction change Unit 20, auxiliary roller units 30, 50, oblique vapor deposition unit 40, second transport direction changing unit 60, and rear transport direction changing unit 70. The oblique vapor deposition apparatus 1 according to Embodiment 1 is a so-called batch-type oblique vapor deposition apparatus, and the conveyance of the long sheet W1 is stopped for each vapor deposition. In addition, the oblique vapor deposition apparatus of the present invention is not limited to the above, and for example, a continuous vapor deposition type oblique vapor deposition apparatus can be used.

  In the oblique vapor deposition apparatus 1, the long sheet W <b> 1 is conveyed as indicated by an arrow displayed in FIG. 1. Although illustration and detailed description are omitted, in the first embodiment, the front stage of the oblique deposition apparatus 1 includes, for example, a feeding roller that feeds the long sheet W1 and the rear stage of the oblique deposition apparatus 1. For example, there is a winding roller that winds the long sheet W1. The feeding roller and the take-up roller are installed so that the rotation axis is along the horizontal direction.

The uneven | corrugated | grooved part in the elongate sheet | seat W1 consists of several mountain shape which has a saw-tooth shaped cross-sectional shape, as shown in FIG.
The long sheet W1 used in the first embodiment has a pattern in which one unit of the long sheet W1 shown in FIG.
In the long sheet W <b> 1 used in the first embodiment, the mountain shape is formed along a straight line (a solid line in the rectangle of FIG. 2A) when viewed from the user. In addition, in the oblique vapor deposition apparatus of the present invention, vapor deposition can be performed on a long sheet on which various uneven portions are formed according to what is manufactured, without being limited to the long sheet W1.

  In Embodiment 1, the oblique deposition apparatus 1 has a wider chevron shape (a region having a gentler inclination angle among regions separated by peaks in the chevron shape when the chevron shape is a cross-sectional shape). A vapor deposition material M is selectively deposited on a part (see FIGS. 3 and 4). As shown in a screen manufacturing method described later, the screen in the state shown in FIG. 4 is a screen SCR manufactured by the screen manufacturing method according to the first embodiment.

  As the long sheet, those made of various materials can be used according to the purpose. Examples of those that can be suitably used include those that can easily form the concave and convex portions of the vapor deposition surface by press molding or transfer by a mold (for example, those made of a thermoplastic resin or the like). .

  The first-stage transport direction changing unit 10 changes the transport direction of the long sheet W1 whose one surface is transported along a surface perpendicular to the vertical direction (conveyed in a lying state) to the first transport direction. Change towards the part 20. As shown in FIG. 1, the front-stage transport direction changing unit 10 includes two front-stage transport directions having a rotation axis perpendicular to the transport direction of any long sheet W1 before and after passing through the front-stage transport direction changing unit 10. Change rollers 12 and 14 are provided. The front-stage conveyance direction changing rollers 12 and 14 are rotated by a rotational force applying device (not shown) (for example, a rotation motor) to convey the long sheet W1.

  In the first embodiment, the front conveyance direction changing unit 10 changes the conveyance direction of the long sheet W1 by 90 degrees upward. For this reason, as shown in FIG. 1, the long sheet W <b> 1 has one surface along the vertical plane and the conveying direction along a direction other than the horizontal direction (vertical direction) in the vertical plane.

  In the first embodiment, the first transport direction changing unit 20 includes a long sheet W1 whose one surface is along the vertical plane and whose transport direction is in a direction other than the horizontal direction in the vertical plane. Along the vertical plane, the conveyance direction is set along the horizontal direction in the vertical plane (the state is made to stand).

  The first conveying direction changing unit 20 has a rotation axis that is oblique to the conveying direction of any long sheet W1 before and after passing through the first conveying direction changing unit 20, and has a low surface frictional force. A friction roller is provided. In the first embodiment, the first low-friction roller has a rotation axis that intersects at 45 ° with respect to the conveyance direction of any long sheet W1 before and after passing through the first conveyance direction changing unit 20. As the first low friction roller, for example, a rotary roller having a surface coated with a low friction resin such as polytetrafluoroethylene can be used.

  The auxiliary roller part 30 is arrange | positioned between the 1st conveyance direction change part 20 and the oblique vapor deposition part 40, and assists conveyance of the elongate sheet W1. The auxiliary roller unit 30 includes auxiliary rollers 32 and 34. The auxiliary rollers 32 and 34 are rotated by a rotational force applying device (not shown) (for example, a rotary motor).

The oblique vapor deposition unit 40 is arranged at the rear stage of the first transport direction changing unit 20 and obliquely deposits the vapor deposition material M on a part of the uneven portion. Therefore, oblique vapor deposition is performed on the long sheet W1 in a state where one surface is along the vertical plane. As shown in FIG. 3, the oblique deposition unit 40 includes a vacuum chamber 42, a deposition source 44, and vacuum holding units 46 and 48.
The vacuum chamber 42 keeps the inside in an environment suitable for vapor deposition (for example, a low pressure environment of 10 ⁻² Pa to 10 ⁻³ Pa) during vapor deposition. The vapor deposition source 44 and the vacuum holding units 46 and 48 are disposed in the vacuum chamber 42. The vacuum chamber 42 includes a vacuum pump and an exhaust device (not shown).

  The vapor deposition source 44 is disposed obliquely below the long sheet W1 (see FIG. 3B), and accommodates and heats the vapor deposition material M during vapor deposition. Note that various materials can be used as the evaporation material depending on the purpose, and for example, a metal or an inorganic dielectric can be used. In the first embodiment, the vapor deposition material M is made of aluminum. Although a detailed description is omitted, the vapor deposition source 44 includes a crucible for accommodating the vapor deposition material M and an electron gun (an apparatus for emitting an electron beam) for heating the vapor deposition material M. In the first embodiment, the vapor deposition material M in the crucible is heated by the electron beam from the electron gun, and the vapor deposition material M in the form of fine particles is discharged into the vacuum chamber 42.

  In the oblique vapor deposition section 40 in the first embodiment, as shown in FIG. 3, one vapor deposition source 44 is used, but the present invention is not limited to this. Any number of vapor deposition sources can be used according to the size of the oblique vapor deposition section or the long sheet.

  The vacuum holding units 46 and 48 are opened when the long sheet W1 is conveyed, and are closed at the time of vapor deposition, thereby keeping the inside of the vacuum chamber 42 in an environment suitable for vapor deposition at the time of vapor deposition.

  As illustrated in FIG. 1, the auxiliary roller unit 50 is disposed between the oblique vapor deposition unit 40 and the second transport direction changing unit 60 and assists the transport of the long sheet W <b> 1. The auxiliary roller unit 50 includes auxiliary rollers 52 and 54. The auxiliary rollers 52 and 54 are rotated by a rotational force applying device (not shown) (for example, a rotary motor).

  The second transport direction changing unit 60 changes the transport direction of the long sheet W1 from the oblique vapor deposition unit 40 toward the subsequent component (in this case, the rear transport direction changing unit 70). The second conveyance direction change unit 60 has a rotation axis that is oblique to the conveyance direction of any long sheet W1 before and after passing through the second conveyance direction change unit 60, and has a low surface frictional force. A friction roller is provided.

In the first embodiment, the second low friction roller has a rotation axis that intersects at 45 ° with respect to the conveyance direction of any long sheet W1 before and after passing through the second conveyance direction changing unit 60. As the second low friction roller, a rotary roller having a surface coated with a low friction resin such as polytetrafluoroethylene can be used.
For this reason, in the first embodiment, the same type of components are used in the first transport direction changing unit 20 and the second transport direction changing unit 60.

The rear conveyance direction changing unit 70 changes the conveyance direction of the long sheet W1 from the second conveyance direction changing unit 60 so that the one side of the long sheet W1 is along a plane perpendicular to the vertical direction. (Long sheet is laid down). The rear-stage transport direction changing unit 70 includes two rear-stage transport direction changing rollers 72 and 74 having a rotation axis perpendicular to the transport direction of any long sheet W1 before and after passing through the rear-stage transport direction changing section 70. . The latter-stage conveyance direction changing rollers 72 and 74 are rotated by a rotational force applying device (for example, a rotation motor) (not shown) to convey the long sheet W1. In the first embodiment, the rear conveyance direction changing unit 70 changes the conveyance direction by 90 ° in the horizontal direction.
For this reason, in the first embodiment, the same type of components are used in the upstream transport direction changing unit 10 and the downstream transport direction changing unit 70.

Next, a method for manufacturing the screen according to the first embodiment will be described.
FIG. 5 is a flowchart of the screen manufacturing method according to the first embodiment.

In the manufacturing method of the screen according to the first embodiment, the vapor deposition reflective layer R is selectively formed on a part of the concavo-convex portion in the long sheet having a plurality of concavo-convex portions on one surface and serving as the base material of the screen. A method for manufacturing a screen, which includes a long sheet preparation step S1 and a vapor deposition step S2, as shown in FIG.
The long sheet preparation step S1 is a step of preparing the long sheet W1. For the preparation of the long sheet W1, a general method can be used. For example, an uneven portion on one surface (a sawtooth-shaped chevron shape in the first embodiment) is formed by press molding or transfer by a mold. Thus, the long sheet W1 can be prepared.

  The vapor deposition step S2 is a step in which the vapor deposition material M is obliquely vapor-deposited on a part of the concavo-convex portion of the long sheet W1 using the oblique vapor deposition device 1 according to the first embodiment to form the vapor deposition reflection layer R. Specifically, the oblique vapor deposition apparatus 1 is used, and the wider one of the chevron shape (the region with the gentler inclination angle among the regions divided by the peaks in the chevron shape when the chevron shape is a cross-sectional shape). The vapor deposition material M is selectively vapor deposited on a part thereof, and the vapor deposition material M is used as a vapor deposition reflective layer R (see FIG. 4). Thereafter, the screen SCR can be manufactured by cutting out the long sheet W1 for each unit.

  Next, effects of the oblique deposition apparatus 1 and the screen manufacturing method according to the first embodiment will be described.

  According to the oblique deposition apparatus 1 according to the first embodiment, since the oblique deposition unit 40 that obliquely deposits the vapor deposition material M on a part of the concavo-convex portion is provided, a long shape having a plurality of concavo-convex portions on at least one surface. When a sheet is used, an oblique deposition apparatus capable of selectively depositing a deposition material on a part of the concavo-convex portion is obtained.

  Moreover, according to the oblique vapor deposition apparatus 1 which concerns on Embodiment 1, the long sheet | seat W1 in which one surface follows planes other than a vertical plane, or a conveyance direction follows directions other than the horizontal direction in a vertical plane, One surface is along the vertical plane, and the conveyance direction is along the horizontal direction in the vertical plane (the long sheet is in a standing state). The long sheet can be conveyed to the oblique vapor deposition section and oblique vapor deposition can be performed on the standing long sheet.

  Moreover, according to the oblique vapor deposition apparatus 1 which concerns on Embodiment 1, the conveyance direction of the elongate sheet W1 with which one surface is conveyed along a surface perpendicular | vertical with respect to a perpendicular direction is changed to the 1st conveyance direction change part 20. From the state in which the long sheet is laid down in stages in order to change the transport direction between the front transport direction changing unit and the first transport direction changing unit. As a result, it is possible to suppress twisting of the long sheet when the long sheet is laid from the laid state.

  In addition, according to the oblique deposition apparatus 1 according to the first embodiment, the front conveyance direction changing unit 10 rotates perpendicular to the conveyance direction of any long sheet W1 before and after passing through the front conveyance direction changing unit 10. Since the first-stage transport direction changing rollers 12 and 14 having the shaft are provided, the transport direction of the long sheet can be changed easily and stably.

  Moreover, according to the oblique vapor deposition apparatus 1 which concerns on Embodiment 1, the 1st conveyance direction change part 20 is diagonal also with respect to the conveyance direction of any long sheet W1 which passes the 1st conveyance direction change part 20. Since the first low-friction roller having a rotation axis and a low frictional force on the surface is provided, when changing the conveyance direction of the long sheet, the difference in the traveling direction between one end and the other end of the long sheet It is possible to alleviate the problem and to suppress the twisting of the long sheet when the conveyance direction is changed.

  In addition, according to the oblique vapor deposition apparatus 1 according to the first embodiment, the second conveyance direction changing unit 60 that changes the conveyance direction of the long sheet W1 from the oblique vapor deposition unit 40 toward the constituent elements in the subsequent stage is provided. Therefore, it is possible to convey the long sheet that has been obliquely vapor-deposited by the oblique vapor deposition unit toward the subsequent components.

  Moreover, according to the oblique vapor deposition apparatus 1 which concerns on Embodiment 1, the conveyance direction of the elongate sheet W1 from the 2nd conveyance direction change part 60 is changed, and one surface is made into a perpendicular direction. In order to change the conveyance direction between the second conveyance direction changing unit and the latter conveyance direction changing unit, the long sheet is made to stand in a stepwise manner because the latter conveyance direction changing unit 70 is provided so as to be along a vertical plane. As a result, it becomes possible to suppress twisting of the long sheet when the long sheet is erected from the state where the long sheet is erected.

  Further, according to the oblique deposition apparatus 1 according to the first embodiment, the rear-stage transport direction changing unit 70 rotates perpendicular to the transport direction of any long sheet W1 before and after passing through the rear-stage transport direction changing unit 70. Since the rear conveyance direction changing rollers 72 and 74 having the shaft are provided, the conveyance direction of the long sheet can be changed easily and stably, and the long sheet can be laid down.

  Further, according to the oblique deposition apparatus 1 according to the first embodiment, the second transport direction changing unit 60 is oblique with respect to the transport direction of any long sheet W1 before and after passing through the second transport direction changing unit 60. When the direction of conveying the long sheet from the oblique vapor deposition section is changed, the one end of the long sheet and the other end of the long sheet are provided. It is possible to alleviate the difference in the traveling direction from the end and to suppress the twisting of the long sheet when the conveyance direction is changed.

  According to the method for manufacturing a screen according to the first embodiment, the vapor deposition material M is obliquely vapor-deposited on a part of the concavo-convex portion of the long sheet W1 using the oblique vapor deposition apparatus 1 according to the first embodiment. The projection screen that can reflect the projection light from the projector (particularly the projection light projected from the oblique direction) mainly toward the user is easy. Can be manufactured.

[Embodiment 2]
FIG. 6 is a view for explaining the oblique deposition apparatus 2 according to the second embodiment. 6A is a perspective view of the oblique vapor deposition apparatus 2, FIG. 6B is a front view of the oblique vapor deposition apparatus 2, and FIG. 6C is a side view of the oblique vapor deposition apparatus 2. FIG. . The arrows in FIG. 6 indicate the conveyance direction of the long sheet W1.
FIG. 7 is a diagram for explaining the first horizontal axis rotating unit 82 in the second embodiment. 7A is a perspective view of the first horizontal axis rotating unit 82, FIG. 7B is a front view of the first horizontal axis rotating unit 82, and FIG. 7C is the first horizontal axis rotating unit. 82 is a side view of FIG.

FIG. 8 is a view for explaining the first horizontal axis rotating body 83 in the second embodiment. 8A is a perspective view of the first horizontal axis rotator 83, FIG. 8B is a front view of the first horizontal axis rotator 83, and FIG. 8C is the first horizontal axis rotator. 83 is a side view of FIG.
FIG. 9 is a diagram for explaining the first vertical axis rotation unit 86 in the second embodiment. 9A is a perspective view of the first vertical axis rotating unit 86, FIG. 9B is a front view of the first vertical axis rotating unit 86, and FIG. 9C is the first vertical axis rotating unit. 86 is a side view of FIG.

  The oblique vapor deposition apparatus 2 according to the second embodiment basically has the same configuration as the oblique vapor deposition apparatus 1 according to the first embodiment, but the first conveyance direction changing unit and the second conveyance direction changing unit have the same configuration. This is different from the oblique deposition apparatus 1 according to the first embodiment. That is, in the oblique vapor deposition apparatus 2 according to the second embodiment, as shown in FIG. 6, the first transport direction changing unit 80 includes a first horizontal axis rotating unit 82 and a first vertical axis rotating unit 86, The two transport direction changing unit 90 includes a second vertical axis rotating unit 92 and a second horizontal axis rotating unit 96.

  As shown in FIGS. 6 to 8, the first horizontal axis rotating unit 82 is perpendicular to the conveying direction of the long sheet W1 before passing through the first conveying direction changing unit 82, and rotates along the horizontal direction. It consists of 13 first horizontal axis rotators 83 each having a shaft 83ax. As shown in FIG. 8, the first horizontal axis rotator 83 includes a rotatable rotating portion 84 and a fixed fixing portion 85, and has a wheel-like shape as a whole. As the first horizontal axis rotating body 83, for example, a ball bearing can be used. The 13 first horizontal axis rotating bodies 83 are fixed so as to be arranged at an angle of 45 ° between the fixed portions 85.

  In the rotating portion 84 of the first horizontal axis rotating body 83, the portion that contacts the long sheet W1 is chamfered, and the angle of the chamfering is 45 ° with respect to the rotation axis. The first horizontal axis rotating body 83 and the long sheet W1 are in contact with each other obliquely (at 45 ° with respect to the rotation axis of the first horizontal axis rotating body 83). The same applies to the first vertical axis rotating body 87, the second vertical axis rotating body 93, and the second horizontal axis rotating body 97. In the second embodiment, the first horizontal axis rotating body 83, the first vertical axis rotating body 87, the second vertical axis rotating body 93, the second horizontal axis rotating body 97, and the long sheet W1 are in contact with each other obliquely. With the above configuration, the long sheet W1 is damaged at the corners of the first horizontal axis rotating body 83, the first vertical axis rotating body 87, the second vertical axis rotating body 93, and the second horizontal axis rotating body 97. It is possible to prevent this.

  As shown in FIGS. 6 and 9, the first vertical axis rotation unit 86 is arranged at the rear stage of the first horizontal axis rotation unit 82 and has 13 rotation axes 87 ax (not shown) along the vertical direction. 1 vertical axis rotating body 87. The first vertical axis rotator 87 has the same configuration as that of the first horizontal axis rotator 83 except for the orientation, and therefore a detailed description thereof is omitted, but includes a rotating part 88 and a fixing part 89. The 13 first vertical axis rotating bodies 87 are fixed so as to be arranged at an angle of 45 ° between the fixed portions 89.

  The second vertical axis rotating unit 92 includes thirteen second vertical axis rotating bodies 93 (not shown) having a rotating shaft 93ax (not shown) along the vertical direction. The second vertical axis rotation unit 92 has the same configuration as the first vertical axis rotation unit 86 except for the orientation. Since the second vertical axis rotator 93 has the same configuration as the first horizontal axis rotator 83 except for its orientation, a detailed description thereof will be omitted, but the rotating part 94 and the fixing part 95 (both of which are not shown). ). The 13 second vertical axis rotating bodies 93 are fixed so as to be arranged at an angle of 45 ° between the fixing portions 95.

  The second horizontal axis rotating unit 96 is disposed downstream of the second vertical axis rotating unit 92, is perpendicular to the conveying direction of the long sheet W1 after passing through the second conveying direction changing unit 96, and is in the horizontal direction. Are formed of 13 second horizontal axis rotating bodies 97 (not shown) having rotating shafts 97ax (not shown). The second horizontal axis rotating unit 96 has the same configuration as the first horizontal axis rotating unit 82 except for the orientation. Since the second horizontal axis rotator 97 has the same configuration as the first horizontal axis rotator 83, a detailed description thereof will be omitted. However, the second horizontal axis rotator 97 includes a rotating part 98 and a fixing part 99 (both not shown). . The 13 second horizontal axis rotating bodies 97 are fixed so as to be arranged at an angle of 45 ° between the fixed portions 99.

  The first transport direction changing unit 80 and the second transport direction changing unit 90 in the oblique vapor deposition device 2 are both transport direction changing devices used for transporting the long sheet W1 and have a plurality of rotation axes along the horizontal direction. It is a conveyance direction change apparatus which concerns on this invention provided with the horizontal axis | shaft rotation part which consists of a horizontal axis | shaft rotation body, and the vertical axis | shaft rotation part which consists of a some vertical axis | shaft rotation body which has a rotating shaft along a perpendicular direction.

  As described above, the oblique deposition apparatus 2 according to the second embodiment is different from the oblique deposition apparatus 1 according to the first embodiment in the configuration of the first transport direction changing unit and the second transport direction changing unit. In order to provide an oblique vapor deposition unit 40 for oblique vapor deposition of the vapor deposition material M, a long sheet having a plurality of concave and convex portions on at least one surface is provided as in the oblique vapor deposition apparatus 1 according to the first embodiment. When used, the oblique deposition apparatus is capable of selectively depositing a deposition material on a part of the uneven portion.

  Further, according to the oblique deposition apparatus 2 according to the second embodiment, the first horizontal axis rotating unit 82 including the plurality of first horizontal axis rotating bodies 83 and the first vertical including the plurality of first vertical axis rotating bodies 87. Since the shaft rotating unit 86 is provided, when changing the conveyance direction of the long sheet, the difference in the traveling direction between one end and the other end of the long sheet is alleviated, and the length when changing the conveyance direction It is possible to suppress twisting of the length sheet.

  In addition, according to the oblique deposition apparatus 2 according to the second embodiment, the long sheet W1 first contacts the first horizontal axis rotating unit 82 including the plurality of first horizontal axis rotating bodies 83, and then the plurality of first A first horizontal axis rotating body that rotates along the conveying direction of the long sheet before the change of the conveying direction and the length after the changing of the conveying direction in order to contact the first vertical axis rotating unit 86 composed of one vertical axis rotating body 87. The long sheet comes into contact with the first vertical axis rotating body rotating along the conveying direction of the long sheet in a stepwise manner, and as a result, the long sheet is twisted when the long sheet is made to stand. Can be further suppressed.

  Further, according to the oblique deposition apparatus 2 according to the second embodiment, the second vertical axis rotating unit 92 including the plurality of second vertical axis rotating bodies 93 and the second horizontal axis including the plurality of second horizontal axis rotating bodies 97. Since the shaft rotation unit 96 is provided, when changing the conveyance direction of the long sheet from the oblique vapor deposition unit, the difference in the traveling direction between one end of the long sheet and the other end is alleviated, It becomes possible to suppress twisting of the long sheet when the sheet conveyance direction is changed.

  Further, according to the oblique deposition apparatus 2 according to the second embodiment, the long sheet W1 first comes into contact with the second vertical axis rotating unit 92 including the plurality of second vertical axis rotating bodies 93, and then the plurality of second A second vertical axis rotator that rotates along the conveyance direction of the long sheet before the change in the conveyance direction and the length after the change in the conveyance direction in order to contact the second horizontal axis rotation unit 96 including the two horizontal axis rotators 97 With the second horizontal axis rotating body that rotates along the conveyance direction of the long sheet, it is possible to further suppress twisting of the long sheet when the conveyance direction is changed.

  In addition, since the oblique vapor deposition apparatus 2 which concerns on Embodiment 2 has the structure similar to the oblique vapor deposition apparatus 1 which concerns on Embodiment 1 except the structure of a 1st conveyance direction change part and a 2nd conveyance direction change part, it implemented. Of the effects of the oblique vapor deposition apparatus 1 according to the first aspect, the corresponding effects are provided as they are.

  According to the transport direction changing device (the first transport direction changing unit 80 and the second transport direction changing unit 90) according to the second embodiment, the horizontal axis rotating unit (the first horizontal axis rotating unit 82 and the second horizontal axis rotating unit 96). ) And the vertical axis rotation unit (the first vertical axis rotation unit 86 and the second vertical axis rotation unit 92), when changing the conveyance direction of the long sheet, the one end of the long sheet and the other It is possible to alleviate the difference in the traveling direction from the end and to suppress the twisting of the long sheet when the conveyance direction is changed.

  Further, according to the conveyance direction changing device according to the second embodiment, the long sheet W1 first comes into contact with a horizontal axis rotating unit including a plurality of horizontal axis rotating bodies having rotation axes along the horizontal direction, and then in the vertical direction. In contact with the vertical axis rotating part composed of a plurality of vertical axis rotating bodies having a rotating axis along the axis, or in the reverse order, along the conveying direction of the long sheet before the conveying direction is changed. The length when changing the conveyance direction by the horizontal axis rotating body or vertical axis rotating body rotating in the direction and the vertical axis rotating body or horizontal axis rotating body rotating in the conveyance direction of the long sheet after changing the conveyance direction. It becomes possible to further suppress the twist of the length sheet.

[Embodiment 3]
FIG. 10 is a view for explaining the oblique deposition apparatus 3 according to the third embodiment. 10A is a perspective view of the oblique vapor deposition apparatus 3, FIG. 10B is a front view of the oblique vapor deposition apparatus 3, and FIG. 10C is a side view of the oblique vapor deposition apparatus 3. FIG. . The arrows in FIG. 10 indicate the conveyance direction of the long sheet W1.
FIG. 11 is a diagram illustrating the first oblique rotation unit (first conveyance direction change unit 100) according to the third embodiment. FIG. 11A is a perspective view of the first oblique rotation unit, FIG. 11B is a front view of the first oblique rotation unit, and FIG. 11C is a side view of the first oblique rotation unit. .
FIG. 12 is a view for explaining the first oblique rotating body 102 in the third embodiment. 12A is a perspective view of the first oblique rotating body 102, FIG. 12B is a view of the first oblique rotating body 102 viewed from a direction perpendicular to the rotation axis 102ax, and FIG. It is a figure which sees the 1st diagonal rotation body 102 from the direction in alignment with rotating shaft 102ax.

  The oblique vapor deposition apparatus 3 according to the third embodiment basically has the same configuration as the oblique vapor deposition apparatus 1 according to the first embodiment, but the configurations of the first conveyance direction changing unit and the second conveyance direction changing unit are the same. This is different from the oblique deposition apparatus 1 according to the first embodiment. That is, in the oblique deposition apparatus 3 according to the third embodiment, as shown in FIG. 10, the first transport direction changing unit 100 includes a first oblique rotation unit, and the second transport direction changing unit 110 is a second oblique rotation. A part.

  As shown in FIGS. 10 and 11, the first oblique rotation unit has 13 rotation axes 102ax that are oblique to the conveyance direction of any long sheet W1 before and after passing through the first conveyance direction change unit 100. The first oblique rotating body 102. As shown in FIG. 12, the first oblique rotating body 102 includes a rotatable rotating portion 103 and a fixed fixing portion 104, and has a wheel shape as a whole. For example, a ball bearing can be used as the first oblique rotating body 102. The thirteen first oblique rotating bodies 102 have a rotation axis of 45 ° with respect to the conveying direction of any long sheet W1 before and after passing through the first conveying direction changing unit 100, and each of the fixing units 104 is fixed to each other. Are fixed so that their rotation axes coincide.

  As shown in FIGS. 10 and 11, the second oblique rotation unit has an oblique rotation axis 112ax (not shown) with respect to any conveyance direction of the long sheet W1 before and after passing through the second conveyance direction changing unit 110. .) 13 thirteen second obliquely rotating bodies 112 (reference numerals are not shown). Since the second oblique rotating body 112 has the same configuration as that of the first oblique rotating body 102 except for the orientation, detailed description thereof is omitted, but the rotating portion 113 and the fixing portion 114 (both of which are not shown in the figure). Have. The 13 second oblique rotating bodies 112 have a rotation axis of 45 ° with respect to the conveying direction of any long sheet W1 before and after passing through the second conveying direction changing unit 110, and each of the fixing units 114 is fixed to each other. The rotation axes are fixed so as to coincide with each other.

  As described above, the oblique deposition apparatus 3 according to the third embodiment is different from the oblique deposition apparatus 1 according to the first embodiment in the configuration of the first transport direction changing unit and the second transport direction changing unit. In order to provide an oblique vapor deposition unit 40 for oblique vapor deposition of the vapor deposition material M, a long sheet having a plurality of concave and convex portions on at least one surface is provided as in the oblique vapor deposition apparatus 1 according to the first embodiment. When used, the oblique deposition apparatus is capable of selectively depositing a deposition material on a part of the uneven portion.

  In addition, according to the oblique deposition apparatus 3 according to the third embodiment, since the first oblique rotation unit including the plurality of first oblique rotation bodies 102 is provided, when changing the conveyance direction of the long sheet, the long sheet It is possible to alleviate the difference in the traveling direction between the one end and the other end of the sheet, and to suppress the twisting of the long sheet when the conveying direction is changed.

  Further, according to the oblique vapor deposition apparatus 3 according to the third embodiment, since the second oblique rotation unit including the plurality of second oblique rotation bodies 112 is provided, the conveyance direction of the long sheet from the oblique vapor deposition unit is changed. Sometimes, the difference in the traveling direction between one end and the other end of the long sheet can be alleviated, and twisting of the long sheet can be suppressed when the conveying direction is changed.

  The oblique deposition apparatus 3 according to the third embodiment has the same configuration as the oblique deposition apparatus 1 according to the first embodiment except for the configuration of the first transport direction changing unit and the second transport direction changing unit. Of the effects of the oblique vapor deposition apparatus 1 according to the first aspect, the corresponding effects are provided as they are.

  As mentioned above, although this invention was demonstrated based on said embodiment, this invention is not limited to said embodiment. The present invention can be carried out in various modes without departing from the spirit thereof, and for example, the following modifications are possible.

(1) The components of the oblique vapor deposition apparatus described in the above embodiments, the number of long sheets, the material, the shape, and the like are exemplifications, and can be changed within a range not impairing the effects of the present invention. For example, although the front conveyance direction changing unit, the rear conveyance direction changing unit, and the auxiliary roller unit are all described as including two rollers, it may include one roller, or three or more rollers. It may be provided.

(2) In the above embodiments, the long sheet W1 as shown in FIG. 2 is used, but the present invention is not limited to this. FIG. 13 is a view for explaining the long sheet W2 in the first modification. FIG. 13A is a plan view showing one unit of the long sheet W2, and FIG. 13B is a partially enlarged sectional view showing a part of the A2-A2 section of FIG. 13A in an enlarged manner. . FIG. 14 is a view for explaining the long sheet W3 in the second modification. FIG. 14A is a plan view showing one unit of the long sheet W3, and FIG. 14B is a partially enlarged sectional view showing a part of the A3-A3 section of FIG. 14A in an enlarged manner. . In the present invention, for example, a long sheet as shown in FIG. 13 (long sheet W2 having a pattern in which one unit shown in FIG. 13A is connected in the horizontal direction of the paper) or a long sheet as shown in FIG. A sheet (a long sheet W3 having a pattern in which one unit shown in FIG. 14A is connected in the horizontal direction of the sheet) may be used.

(3) In the above embodiments, the second transport direction changing unit and the subsequent transport direction changing unit 70 are used. However, the present invention is not limited to this. The second conveyance direction changing unit and the rear conveyance direction changing unit may not be provided. In this case, for example, the long sheet is wound up in place of the second conveyance direction changing unit and the rear conveyance direction changing unit. A long sheet winding unit may be provided.

(4) In each of the above embodiments, the same type of component (roller or rotating body) is used in the first transport direction changing unit and the second transport direction changing unit, but the present invention is not limited to this. Absent. Different components in the first transport direction changing unit and the second transport direction changing unit (for example, a combination of the first transport direction changing unit 20 in the first embodiment and the second transport direction changing unit 90 in the second embodiment ) May be used. In each of the above embodiments, the same type of components are used for both the front conveyance direction changing unit and the rear conveyance direction changing unit, but the present invention is not limited to this. Different components may be used in the upstream transport direction changing unit and the downstream transport direction changing unit.

(5) In the above embodiments, the front transport direction changing unit 10 and the rear transport direction changing unit 70 are used, but the present invention is not limited to this. In this case, for example, a feeding roller for feeding out the long sheet may be provided instead. Moreover, it is not necessary to provide a back | latter stage conveyance direction change part, and in this case, for example, a take-up roller for winding a long sheet can be provided instead.

(6) The angle of rotation axis and the arrangement angle of each component described in the above embodiments are examples, and can be changed within a range not impairing the effects of the present invention.

(7) In the above embodiments, the auxiliary roller portions 30 and 50 disposed before and after the oblique vapor deposition portion 40 are used, but the present invention is not limited to this. The auxiliary roller part may not be used. Further, more auxiliary roller portions may be used. Furthermore, you may use the auxiliary | assistant roller part arrange | positioned in a different position (For example, before and after a 1st conveyance direction change part, and between a front | former conveyance direction change part and a 1st conveyance direction change part).

(8) In the first embodiment, the screen manufacturing method of the present invention has been described by taking the screen manufacturing method including the long sheet preparation step S1 and the vapor deposition step S2 as an example. However, the present invention is limited to this. is not. The screen manufacturing method of the present invention may include various processes using a known method (for example, a post-treatment process and a finishing process after the vapor deposition process) in addition to the above processes.

(9) In the second embodiment, the case where the transport direction changing device of the present invention is applied to the oblique vapor deposition device 2 of the present invention has been described as an example. However, the present invention is not limited to this. The transport direction changing device of the present invention can be applied to various devices (such as a long sheet transport device) as long as it includes a component that changes the transport direction of a long sheet.

(10) In each of the above embodiments, the pre-stage transport direction changing unit that changes the transport direction of the long sheet W1 by 90 ° is used. However, the present invention is not limited to this. You may use the pre-stage conveyance direction change part which changes the conveyance direction of a elongate sheet to angles other than 90 degrees. In this case, since the long sheet is directed to the first conveyance direction changing portion with one surface along an oblique plane, the one surface is along a plane other than the vertical plane, and the conveyance direction is within the vertical plane. It will be along a direction other than the horizontal direction. In this case, the angle of the first transport direction changing unit (the angle of the rotation axis of the roller when having a roller. The arrangement angle of the rotating bodies when having a plurality of rotating bodies) is the same as the angle of the first transport direction changing unit. The angle is other than 45 ° with respect to the conveying direction of any long sheet before and after passing. As described above, the first transport direction changing unit in the present invention is a long sheet whose one surface is along a plane other than the vertical plane and whose transport direction is in a direction other than the horizontal direction in the vertical plane. The surface may be along the vertical plane, and the conveyance direction may be along the horizontal direction in the vertical plane. The same applies to the rear conveyance direction changing unit.

(11) In each of the above embodiments, one surface is along the vertical plane, and the long sheet is along the direction other than the horizontal direction in the vertical plane, and one surface is along the vertical plane, and The first transport direction changing unit that causes the transport direction to follow the horizontal direction in the vertical plane is used, but the present invention is not limited to this. One side is along a plane other than the vertical plane, and the conveyance direction is a long sheet along the horizontal direction in the vertical plane. One side is along the vertical plane, and the conveyance direction is the horizontal direction in the vertical plane. You may make it follow. For example, when the long sheet is in a state where "one side is along a plane other than the vertical plane and the conveyance direction is along the horizontal direction in the vertical plane", for example, the long sheet is in a sleeping state, The case where the conveyance direction is the same as the conveyance direction of the long sheet | seat in the inside of an oblique vapor deposition part can be mentioned. In this case, the first conveyance direction changing unit is configured to stand the long sheet by twisting the long sheet without changing the conveyance direction of the long sheet (for example, including a plurality of rollers that change the angle). )

1, 2, 3... Oblique deposition apparatus, 10... Previous transport direction change unit, 12, 14... Previous transport direction change roller, 20, 80, 100... First transport direction change unit, 30, 50. 32, 34, 52, 54 ... auxiliary roller, 40 ... oblique vapor deposition section, 42 ... vacuum chamber, 44 ... vapor deposition source, 46, 48 ... vacuum holding section, 60, 90, 110 ... second transport direction changing section, 70 ... latter stage conveyance direction changing unit, 72, 74 ... latter stage conveyance direction changing roller, 82 ... first horizontal axis rotating part, 83 ... first horizontal axis rotating body, 83ax, 102ax ... rotating axis, 84, 88, 103 ... rotating part , 85, 89, 104... Fixed part, 86... First vertical axis rotating part, 87... Second vertical axis rotating body, 92. Diagonal rotator, M ... deposition material, R ... deposition reflective layer, SC ... screen, W1, W2, W3 ... long sheet

Claims (14)

On a long sheet having a plurality of concave and convex portions on at least one surface, oblique vapor deposition is performed in a state where the one surface is along a vertical plane including a vertical direction and the transport direction is along a horizontal direction in the vertical plane. An oblique vapor deposition apparatus,
The one surface is along a plane other than the vertical plane, or the conveyance direction is a long sheet along a direction other than the horizontal direction in the vertical plane, the one surface is along the vertical plane, and is conveyed. A first transport direction changing unit that causes the direction to follow the horizontal direction in the vertical plane;
An oblique vapor deposition apparatus, comprising: an oblique vapor deposition unit that is disposed downstream of the first transfer direction changing unit and obliquely vapor deposits a vapor deposition material on a part of the uneven portion. The oblique vapor deposition apparatus according to claim 1,
The apparatus further includes a preceding conveyance direction changing unit that changes the conveyance direction of the long sheet conveyed along a plane perpendicular to the vertical direction of the one side toward the first conveyance direction changing unit. An oblique deposition apparatus characterized by that. The oblique vapor deposition apparatus according to claim 2,
The front transport direction changing unit includes a front transport direction changing roller having a rotation axis perpendicular to the transport direction of the long sheet before and after passing through the front transport direction changing unit. Method of vapor deposition. In the oblique vapor deposition apparatus according to any one of claims 1 to 3,
The first transport direction changing unit is
A first low-friction roller having a rotational axis oblique to the conveying direction of the long sheet before and after passing through the first conveying direction changing unit and having a low surface frictional force is provided. Oblique vapor deposition equipment. In the oblique vapor deposition apparatus according to any one of claims 1 to 3,
The first transport direction changing unit is
A first horizontal axis rotating unit comprising a plurality of first horizontal axis rotating bodies having a rotation axis along the one surface of the long sheet before passing through the first conveying direction changing unit and along the horizontal direction. When,
An oblique vapor deposition apparatus comprising: a first vertical axis rotating unit including a plurality of first vertical axis rotating bodies arranged at a stage subsequent to the first horizontal axis rotating unit and having a rotation axis along a vertical direction. In the oblique vapor deposition apparatus according to any one of claims 1 to 3,
The first transport direction changing unit is
A first oblique rotation unit comprising a plurality of first oblique rotation bodies having an oblique rotation axis with respect to any conveyance direction of the long sheet before and after passing through the first conveyance direction changing unit, Oblique vapor deposition equipment. In the oblique vapor deposition apparatus according to any one of claims 1 to 6,
The oblique vapor deposition apparatus further comprising a second conveyance direction changing unit configured to change a conveyance direction of the long sheet from the oblique vapor deposition unit toward a subsequent component. The oblique vapor deposition apparatus according to claim 7,
A rear-stage conveyance direction change unit that changes the conveyance direction of the long sheet from the second conveyance direction change unit so that the long sheet is along a plane perpendicular to the vertical direction. An oblique deposition apparatus, further comprising: The oblique vapor deposition apparatus according to claim 8,
The rear conveyance direction changing unit includes a rear conveyance direction changing roller having a rotation axis perpendicular to the conveyance direction of the long sheet before and after passing through the latter conveyance direction changing unit. Method of vapor deposition. In the oblique vapor deposition apparatus according to any one of claims 7 to 9,
The second transport direction changing unit is
A second low-friction roller having a rotational axis oblique to the conveying direction of the long sheet before and after passing through the second conveying direction changing unit and having a low surface frictional force is provided. Oblique vapor deposition equipment. In the oblique vapor deposition apparatus according to any one of claims 7 to 9,
The second transport direction changing unit is
A second vertical axis rotating unit comprising a plurality of second vertical axis rotating bodies having a rotation axis along the vertical direction;
A plurality of second shafts arranged at the rear stage of the second vertical axis rotation unit, having a rotation axis along the one surface of the long sheet after passing through the second conveyance direction change unit and along the horizontal direction. An oblique vapor deposition apparatus comprising: a second horizontal axis rotating unit including two horizontal axis rotating bodies. In the oblique vapor deposition apparatus according to any one of claims 7 to 9,
The second transport direction changing unit is
A second oblique rotation unit comprising a plurality of second oblique rotation bodies each having an oblique rotation axis with respect to any conveyance direction of the long sheet before and after passing through the second conveyance direction change unit, Oblique vapor deposition equipment. In a long sheet having a plurality of uneven portions on at least one surface and serving as a base material for a screen, a method for producing a screen in which a vapor deposition reflective layer is selectively formed on a part of the uneven portions,
Using the oblique vapor deposition apparatus according to any one of claims 1 to 12, including a step of forming the vapor deposition reflective layer by obliquely vapor depositing a vapor deposition material on a part of the uneven portion of the long sheet. A method for producing a screen characterized by the above. A conveying direction changing device used for conveying a long sheet,
A plurality of horizontal axes along the surface of the long sheet before passing through the transport direction changing device or the surface of the long sheet after passing through the transport direction changing unit and having a rotation axis along the horizontal direction A horizontal axis rotating part composed of a rotating body;
A conveyance direction changing device comprising: a vertical axis rotating unit including a plurality of vertical axis rotating bodies having a rotation axis along the vertical direction.

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