JP2012204805A - ボンディングワイヤ - Google Patents
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- JP2012204805A JP2012204805A JP2011070942A JP2011070942A JP2012204805A JP 2012204805 A JP2012204805 A JP 2012204805A JP 2011070942 A JP2011070942 A JP 2011070942A JP 2011070942 A JP2011070942 A JP 2011070942A JP 2012204805 A JP2012204805 A JP 2012204805A
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Abstract
【解決手段】リンを含有する銅を主成分とする芯材10の外周をパラジウムからなる外層20で被覆し、該外層の外周を有機被膜層30で被覆したボンディングワイヤであって、
前記有機被膜層の最表面では炭素の濃度が50at%を超え、該炭素の濃度が20at%を超える領域の深さが0.2nm以上2.0nm以下であり、前記有機被膜層の最表面における窒素と硫黄の濃度の合計が1at%以上5at%以下であることを特徴とする。
【選択図】図1
Description
前記有機被膜層の最表面では炭素の濃度が50at%を超え、該炭素の濃度が20at%を超える領域の深さが0.2nm以上2.0nm以下であり、前記有機被膜層の最表面における窒素と硫黄の濃度の合計が1at%以上5at%以下であることを特徴とする。
20 外層
30 有機被膜層
40 ボンディングワイヤ
50 ボール
60 シリコンチップ
70 アルミニウム電極
71 パッド
80 パラジウムめっき付きリード
Claims (4)
- リンを含有する銅を主成分とする芯材の外周をパラジウムからなる外層で被覆し、該外層の外周を有機被膜層で被覆したボンディングワイヤであって、
前記有機被膜層の最表面では炭素の濃度が50at%を超え、該炭素の濃度が20at%を超える領域の深さが0.2nm以上2.0nm以下であり、前記有機被膜層の最表面における窒素と硫黄の濃度の合計が1at%以上5at%以下であることを特徴とするボンディングワイヤ。 - 前記芯材が含有するリンの濃度が、1〜150質量ppmであることを特徴とする請求項1に記載のボンディングワイヤ。
- 金属元素の総計に対するパラジウムの濃度が50at%以上の領域の厚さが、50〜250nmであることを特徴とする請求項1又は2に記載のボンディングワイヤ。
- 前記有機被膜層は、アミド基又はスルホン基を有する有機物から構成されることを特徴とする請求項1乃至3のいずれか一項に記載のボンディングワイヤ。
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JP2011070942A JP2012204805A (ja) | 2011-03-28 | 2011-03-28 | ボンディングワイヤ |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104134644A (zh) * | 2013-04-02 | 2014-11-05 | 田中电子工业株式会社 | 球焊用稀贵金属银合金丝 |
CN104835798A (zh) * | 2015-03-30 | 2015-08-12 | 山东科大鼎新电子科技有限公司 | 一种抗氧化键合铜丝及其制备方法 |
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Cited By (4)
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CN104134644A (zh) * | 2013-04-02 | 2014-11-05 | 田中电子工业株式会社 | 球焊用稀贵金属银合金丝 |
CN104134644B (zh) * | 2013-04-02 | 2017-04-12 | 田中电子工业株式会社 | 球焊用稀贵金属银合金丝 |
CN104835798A (zh) * | 2015-03-30 | 2015-08-12 | 山东科大鼎新电子科技有限公司 | 一种抗氧化键合铜丝及其制备方法 |
CN104835798B (zh) * | 2015-03-30 | 2017-07-04 | 山东科大鼎新电子科技有限公司 | 一种抗氧化键合铜丝的制备方法 |
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