JP2012183615A - Jig for measurement, wire saw, and workpiece mounting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a jig for measurement and a wire saw, in which workability is improved and a working efficiency is improved thanks to no need of adjustment each time a workpiece is mounted on a workpiece support section, of the posture of the workpiece relative to the wire saw.SOLUTION: The wire saw includes: a workpiece support section 27 capable of adjusting the position around an axis extending in the vertical direction; and a jig for workpieces detachably attached to the workpiece support section 27 through a plurality of clamp fittings 30 having the positioning function. In place of the jig for workpieces, the jig for measurement 42 is provided to be detachably attached to the workpiece support section 27 through the clamp fittings 30. The jig for measurement 42 is equipped with a camera 44 for detecting the position of a wire 25 between main rollers of the wire saw. The position of the workpiece support section 27 is adjusted based on the position of the wire 25 detected by the camera 44, and the clamp fittings 30 are positioned to predetermined positions relative to the wire 25.

Description

  The present invention relates to a wire saw that cuts a workpiece made of a brittle material such as a semiconductor material or ceramic with a wire, and a measuring jig for measuring the position of the wire and a wire saw equipped with the measuring jig It is about.

  In general, in this type of wire saw, a wire is spirally wound at a predetermined pitch between a plurality of main rollers, and a slurry containing abrasive grains is supplied onto the wire while the wire travels in an extending direction. Note that when abrasive grains such as diamond are held on the wire, it is not necessary to supply slurry. The workpiece is pressed against the wire in a state in which the workpiece is adjusted to a predetermined positional relationship based on, for example, crystal orientation, and the workpiece is sliced in a predetermined positional relationship with the traveling direction of the wire. It is cut and processed.

  Conventionally, as a wire saw equipped with a workpiece orientation adjusting device for adjusting the positional relationship between a workpiece, for example, the crystal orientation of the workpiece and the traveling direction of the wire, a configuration as disclosed in, for example, Patent Document 1 is proposed. Has been. In this conventional configuration, a work support is supported on the frame so as to be rotatable around a support shaft in a horizontal plane, and a work support for projecting the work is provided on the lower surface of the work support. . The frame is provided with an adjusting member for adjusting the crystal orientation of the workpiece so as to coincide with the traveling direction of the wire. A differential reduction mechanism is provided between the adjustment member and the workpiece support base for decelerating and transmitting the adjustment amount of the adjustment member to the workpiece support base.

  And when cutting a workpiece | work, it is mounted | worn with the workpiece support body of the lower surface of a workpiece support stand in the state which the workpiece | work stuck on the support plate. In the mounted state of the workpiece, the crystal orientation is detected at the end face of the workpiece and the positional relationship between the crystal orientation of the workpiece and the traveling direction of the wire is adjusted by the workpiece orientation adjusting device.

  That is, in this type of wire saw, the workpiece is supported on the lower surface of the workpiece support base by a workpiece support structure as shown in FIGS. 10 and 11, for example. In this work support structure, a work support 52 is fixed to the lower surface of the work support 51, and a first support groove 52a having a triangular cross section and a second support groove 52b having a square cross section are opposed to the work support 52. Is formed. A support block 54 having a dovetail portion 54 a that can be engaged with the first support groove 52 a of the workpiece support 52 protrudes from the support plate 53 attached on the workpiece W. A lock member 55 that can be engaged with the dovetail portion 54a of the support block 54 is movably disposed in the second support groove 52b of the work support 52. A pair of fixing bolts 56 for pressing the lock member 55 toward the dovetail portion 54 a of the support block 54 is provided on the side surface of the work support 52.

  Then, with the dovetail part 54 a of the support block 54 inserted into the first support groove 52 a of the work support 52, the fixing bolt 56 is tightened, so that the lock member 55 moves toward the dovetail part 54 a of the support block 54. Pressed. By this pressing, the support block 54 is fixed to the work support 52 and the work W is mounted on the lower part of the work support 52.

Japanese Patent Laid-Open No. 9-141549

  However, in this conventional work support structure, the operator puts the upper body into the processing area of the wire saw and confirms the positional relationship between the wire and the work, that is, visually checks the contact state of the ant portion 54a with respect to the work support 52. It is necessary to fix the positioning while confirming with etc. For this reason, the work itself is not only a painful work but also the mounting position of the work W with respect to the work support 52 tilts as shown by the arrow in FIG. 10 or the length of the work W as shown by the arrow in FIG. An error in the mounting position of the workpiece W was likely to occur due to movement in the vertical direction or inclination. Each time the workpiece W is mounted on the workpiece support 52, it is necessary to detect the crystal orientation of the workpiece W in the mounted state and readjust the positional relationship between the crystal orientation of the workpiece and the traveling direction of the wire. In addition, there is a problem that workability is poor and processing efficiency is lowered.

  The present invention has been made paying attention to such problems existing in the prior art. The object is to provide a measuring jig and a wire saw that can improve workability and improve machining efficiency without the need to adjust the posture of the workpiece with respect to the wire each time the workpiece is mounted on the workpiece support. There is.

  In order to achieve the above object, in the invention relating to the measurement jig, in the measurement jig to be detachably attached to the work support portion of the wire saw whose position can be adjusted around the axis extending in the vertical direction, It is detachable through a plurality of clamp fittings having a positioning function with respect to the support portion, and is provided with detection means for detecting the position of the wire between the main rollers of the wire saw.

  Therefore, according to the present invention, when a wire is stretched between the main rollers at the time of exchanging the main roller, the measuring jig is provided via a plurality of clamp fittings having a positioning function with respect to the work support portion of the wire saw. Installing. At this time, highly accurate positioning is performed with respect to the work support portion without any mounting error. In this state, the position of the wire is detected by the detection means, and the position of the work support portion is adjusted around the axis extending in the vertical direction according to the detection result, so that the clamp fitting on the work support portion Set so that it is in a positional relationship. Then, when the workpiece is mounted on the workpiece support portion, the workpiece is fixed to the workpiece jig with the posture adjusted in advance, and the workpiece jig is attached to the workpiece support portion of the wire saw via the plurality of clamp fittings. Install. Also at this time, highly accurate positioning with reproducibility is performed without any mounting error with respect to the work support portion. For this reason, only by mounting | wearing a workpiece | work, a workpiece | work is positioned in the state in which the positional relationship of the workpiece | work and the traveling direction of a wire was adjusted with respect to the workpiece support part. Therefore, it is not necessary to adjust the posture of the workpiece with respect to the wire each time the workpiece is mounted on the workpiece support portion, and the workability can be improved and the machining efficiency can be improved.

In the measurement jig, the detection means may be configured to optically detect the wire.
In the measurement jig, the detection means may be configured to be displaceable in the wire extending direction.

  Further, in the invention related to the wire saw, in a wire saw including a work support portion whose position can be adjusted around an axis extending in the vertical direction, and a work jig detachably attached to the work support portion. The measurement jig according to any one of? 3 is provided, and the work jig is also detachable via a plurality of clamp fittings having a positioning function with respect to the work support portion. .

In the wire saw, the clamp fitting may be configured to regulate the vertical and lateral positions of the workpiece jig and the measurement jig.
The clamp fitting is preferably clamp driven by air pressure and spring force.

  As described above, according to the present invention, the position of the work support portion is adjusted by mounting the measurement jig, so that even when the work jig is mounted instead of the measurement jig after that, the mounting error is increased. The positioning of the workpiece with respect to the workpiece support part does not need to be adjusted every time the workpiece is mounted on the workpiece support, and the work efficiency is improved and the machining efficiency is improved. Demonstrate the effect of being able to.

The front view which shows the wire saw of one Embodiment. The principal part disassembled front view which expands and shows the workpiece | work support structure in the wire saw of FIG. The principal part disassembled side view of the workpiece | work support structure of FIG. The perspective view which shows the state which fixed the workpiece | work to the jig | tool for workpiece | work. The exploded sectional view which expands and shows the composition of the clamp metal fitting between a work support part and a work jig or a measurement jig. Sectional drawing which shows the operation state of the clamp metal fitting at the time of mounting | wearing the workpiece | work jig | tool or the measurement jig | tool with a workpiece | work support part. Sectional drawing which shows the operation state of the clamp metal fitting following FIG. The principal part front view which shows the state which mounted | wore the workpiece support part of the wire saw with the measuring jig of embodiment. The principal part side view of the measuring jig of FIG. The principal part front view which shows the workpiece | work support structure in the conventional wire saw. The principal part side view of the workpiece | work support structure of FIG.

Hereinafter, an embodiment of a wire saw and a measuring jig embodying the present invention will be described with reference to FIGS.
As shown in FIG. 1, in the wire saw of this embodiment, a column 23 is provided on a machine base 22 in a case 21. A plurality of (in the embodiment, a pair of) main rollers 24 are rotatably supported on the machine base 22, and wires 25 are installed at a predetermined pitch between the annular grooves arranged on the outer periphery of the main rollers 24. It is circulated in a shape. A saddle 26 is supported on the side of the column 23 above the wire 25 so as to be movable up and down. A work support portion 27 is supported on the lower surface of the saddle 26 via a rotary shaft 28 and a bearing 29 so that the position of the work support portion 27 can be adjusted around an axis extending in the vertical direction.

  As shown in FIGS. 1 to 3, a plurality of (four in the embodiment) clamp fittings 30 having a positioning function project from the lower surface of the work support portion 27. Then, one of a metal plate work jig 31 (see FIG. 4) and a measurement jig 42 described later is detachably attached to the lower surface of the work support portion 27 via the clamp fitting 30.

  In this embodiment, as a clamp fitting 30 having the positioning function, for example, a case where a pallet clamp “model SWT” manufactured by Cosmec Co., Ltd. is used is shown. As shown in FIG. 5, a plurality of concave portions 32 corresponding to the respective clamp fittings 30 are formed on the upper surface of the work jig 31, and a member to be clamped 33 that can be attached to and detached from the clamp fittings 30 is fitted in each concave portion 32. It is worn. The workpiece W is attached to the lower surface of the workpiece jig 31 via an interstitial material 34 made of synthetic resin with the crystal orientation adjusted in the circumferential direction, the horizontal direction, and the vertical direction.

  As shown in FIG. 5, the clamp metal fitting 30 is provided with a clamp case 35, a plurality of steel balls 36 that can be projected and retracted on the outer periphery of the clamp case 35, and a taper that is fitted on the outer periphery of the clamp case 35. A sleeve 37, a piston rod 38 disposed so as to be movable in the vertical direction in the clamp case 35, and a spring 39 for biasing the piston rod 38 in a direction to be retracted from the tip of the clamp case 35 are provided. The clamp case 35 and the piston rod 38 are formed with an air blow passage 40 for air blowing at the outer periphery of the taper sleeve 37 and the tip of the piston rod 38. The clamp case 35 is formed with a lock air passage 41 for supplying lock air onto the piston 38 a of the piston rod 38.

  As shown in FIG. 5, an upper end reference surface 33 a that can contact the seating surface 35 a on the clamp case 35 of the clamp fitting 30 is formed at the upper end of the clamped member 33 on the workpiece jig 31. . A taper reference surface 33 b to which the outer peripheral surface of the taper sleeve 37 of the clamp fitting 30 can be fitted is formed on the inner peripheral surface of the clamped member 33. On the inner peripheral surface of the clamped member 33, a convex portion 33c that can be engaged with the steel ball 36 of the clamp fitting 30 is provided.

  As shown in FIG. 5, when the workpiece jig 31 is removed from the workpiece support 27, air blow is performed from the air blow passage 40 to the outer periphery of the taper sleeve 37 and the tip of the piston rod 38. By this air blow, adhesion of foreign matters such as chips to the outer periphery of the taper sleeve 37 and entry of foreign matters from the tip of the piston rod 38 into the steel ball 36 are suppressed.

  When the workpiece jig 31 is mounted on the workpiece support portion 27 from this state, the tip end portion of the clamp case 35 and the taper sleeve 37 of the clamp fitting 30 are inserted into the clamped member 33 as shown in FIG. Thus, the tip of the piston rod 38 comes into contact with the inner bottom surface of the recess 32 of the workpiece jig 31. At this time, due to air blow from the air blow passage 40, between the seating surface 35a on the clamp case 35 and the upper end reference surface 33a of the clamped member 33, and the outer peripheral surface of the taper sleeve 37 and the taper reference surface 33b of the clamped member 33 A moderate gap is formed between the two. Then, foreign matters such as chips and cutting oil are removed from these gaps by air blow.

  Thereafter, when air blow from the air blow passage 40 is stopped and lock air is supplied from the lock air passage 41 onto the piston 38a of the piston rod 38, as shown in FIG. The piston rod 38 is pushed up by the force. For this reason, the steel ball 36 is moved on the rod outer peripheral surface from the inside of the concave portion 38b on the outer periphery of the piston rod 38, and the clamped member 33 is pushed up via the convex portion 33c. As a result, the upper end reference surface 33 a of the clamped member 33 is pressed against the seating surface 35 a of the clamp case 35, and the workpiece jig 31 is clamped to the workpiece support portion 27. At this time, due to the contact between the upper end reference surface 33a of the clamped member 33 and the seating surface 35a of the clamp case 35 and the contact between the taper reference surface 33b of the clamped member 33 and the outer peripheral surface of the taper sleeve 37, The vertical and lateral positions of the jig 31 are restricted.

  As shown in FIG. 8, when the wire 25 is stretched between the main rollers 24, for example, when the main saw 24 of the wire saw is replaced, the work support 27 of the wire saw is interposed via the clamp fitting 30. A measuring jig 42 is detachably mounted. On the upper surface of the measurement jig 42, a plurality of clamped members 33 that can be engaged with and disengaged from the clamp fittings 30 of the work support portion 27 are provided in the same manner as the work jig 31. A guide rail 43 is laid on the side surface of the measurement jig 42 so as to extend substantially in the left-right direction in FIG. 8, that is, in the extending direction of the workpiece W supported by the workpiece support portion 27. On the guide rail 43, a camera 44 as detection means is supported via a bracket 45 so as to be displaceable in the extending direction of the wire 25. The position of the wire 25 is optically detected by the camera 44.

Next, the operation of the wire saw and the measuring jig configured as described above will be described.
When the wire 25 is stretched between the main rollers 24, for example, when the main roller 24 of the wire saw is replaced, the measuring jig 42 is attached to the work support portion 27 on the lower surface of the saddle 26 via the clamp fitting 30. When mounted, the measuring jig 42 is positioned with high accuracy, for example, in units of μm with respect to the work support portion 27. In this state, the camera 44 optically detects the position of the wire 25 while the camera 44 is moved in the extending direction of the wire 25 along the guide rail 43 by the operator. Based on the position detection result of the wire 25, the position of the work support 27 is adjusted around the axis extending in the vertical direction via the rotation shaft 28, and the clamp fitting 30 on the work support 27 is connected to the wire 25. It is set to have a predetermined positional relationship.

  On the other hand, when processing the workpiece W with a wire saw, an interstitial material made of synthetic resin with the workpiece W adjusted on the lower surface of the workpiece jig 31 in the circumferential direction, horizontal direction and vertical direction. 34 is attached. When the workpiece jig 31 is attached to the workpiece support portion 27 on the lower surface of the saddle 26 via the clamp fitting 30, the workpiece jig 31 is also positioned with high accuracy and repeatability with respect to the workpiece support portion 27. Therefore, the workpiece W is accurately positioned and arranged with the crystal orientation adjusted with respect to the workpiece support 27. Therefore, it is not necessary to readjust the posture of the workpiece W with respect to the wire, that is, the orientation of the crystal orientation every time the workpiece W is mounted on the workpiece support portion 27.

  After that, when the processing of the workpiece W by the wire saw is started, the slurry including abrasive grains is supplied onto the wire 25 from a slurry supply device (not shown) while the wire 25 travels in the extension direction of itself by the rotation of the main roller 24. Is done. In this state, when the saddle 26 is lowered, the workpiece W is pressed against the wire 25, and the workpiece W is cut into slices with a predetermined positional relationship with the traveling direction of the wire 25.

Therefore, according to this embodiment, the following effects can be obtained.
(1) In this measuring jig and wire saw, when the wire 25 is stretched between the main rollers 24 when the main roller 24 is replaced, the work support 27 of the wire saw is interposed via the clamp fitting 30. A measuring jig 42 is attached. At this time, the measuring jig 42 is positioned with high accuracy with respect to the work support portion 27 without any mounting error. In this state, the position of the wire 25 is detected by the camera 44 as the detecting means, and the position of the work support 27 is adjusted around the axis extending in the vertical direction according to the detection result. The clamp fitting 30 is set so as to have a predetermined positional relationship with the wire 25. When the workpiece W is mounted on the workpiece support 27, the workpiece W is fixed with the crystal orientation adjusted in advance with respect to the workpiece jig 31, and the workpiece jig 31 is attached to the workpiece support 27 of the wire saw. It is mounted via the clamp fitting 30. Also at this time, the workpiece support 27 is positioned with high accuracy and repeatability without any mounting error. For this reason, the workpiece W is positioned with respect to the workpiece support portion 27 in a state in which the positional relationship between the workpiece W and the traveling direction of the wire 25 is adjusted. Therefore, it is not necessary for the operator to put the upper body into the wire saw and adjust the posture of the work W every time the work W is mounted on the work support portion 27, and only the camera 44 needs to be moved during measurement. Therefore, workability can be improved and processing efficiency can be improved.

  (2) In the measuring jig and the wire saw, the detection means is configured by a camera 44 that optically detects the wire 25, and the camera 44 is configured to be displaceable in the extending direction of the wire 25. For this reason, the position of the wire 25 can be optically properly detected by the camera 44.

  (3) In this measuring jig and wire saw, the clamp fitting 30 is configured to regulate the vertical and lateral positions of the work jig 31 and the measuring jig 42. For this reason, the work jig 31 or the measurement jig 42 is mounted in the vertical direction and the horizontal direction only by mounting the work jig 31 or the measurement jig 42 on the work support portion 27 via the clamp fitting 30. The position is regulated, and a highly accurate positioning with reproducibility can be repeated at a predetermined mounting position. In this positioning, the work jig 31 or the measurement jig 42 can be quickly and appropriately clamped by the air pressure and the spring force, the jigs 31 and 42 can be easily mounted, and the setup time Can be shortened.

(Example of change)
In addition, this embodiment can also be changed and embodied as follows.
In the embodiment, the detection means of the measurement jig 42 is constituted by means different from the camera 44, for example, a reflecting mirror. When a reflecting mirror is used as the detecting means, the wire 25 can be confirmed from the outside of the wire saw as in the camera 44.

  In the embodiment, the configurations of the clamp fitting 30 and the clamped member 33 are arbitrarily changed. For example, adopt a configuration in which the clamp fitting 30 and the clamped member 33 are fixed using magnetic attraction.

  The workpiece W is not limited to a single crystal material having a crystal orientation, but may be a polycrystalline material. The workpiece W is not limited to a cylindrical shape, and can be applied to cutting a block-shaped square workpiece.

  22 ... Machine stand, 23 ... Column, 24 ... Main roller, 25 ... Wire, 26 ... Saddle, 27 ... Work support part, 28 ... Support shaft, 30 ... Clamp metal fitting, 31 ... Work jig, 33 ... Clamped member 33a ... upper end reference surface, 33b ... taper reference surface, 35 ... clamp case, 35a ... seating surface, 37 ... taper sleeve, 38 ... piston rod, 42 ... measuring jig, 43 ... guide rail, 44 ... as detection means Camera, W ... work.

The present invention, a workpiece made of a brittle material such as semiconductor materials, ceramics and about the wire saw to cut through the wire, particularly, wire saw comprising measuring jig for measuring the position of the wire, the measurement jig, And a workpiece mounting method using a measuring jig .

In order to achieve the above object , according to a first aspect of the present invention, there is provided a measurement jig that is attached to and detached from a work support portion of a wire saw. The wire saw has a pair of main rollers and a wire stretched between the main rollers. The position of the workpiece support portion can be adjusted around an axis extending in the vertical direction . The measuring jig is attached to and detached from the work support portion via a plurality of clamp fittings having a positioning function . The measuring jig is provided with detecting means for detecting the position of the wire.

In the measurement jig, detection means may be configured to detect a wire optically.
In the measurement jig, detection means may Ru movable der along the axial direction of the wire.

In order to achieve the above object, according to a second aspect of the present invention, a wire saw provided with a workpiece support and a workpiece jig is provided. The position of the workpiece support portion can be adjusted around an axis extending in the vertical direction . The workpiece jig is attached to and detached from the workpiece support . The wire saw includes the above-described measuring jig . Work jig also through a plurality of clamping brackets with positioning function, Ru is detachably attached to the work supporting portion.

In the wire saw, clamp fitting, may be configured to restrict the vertical and lateral position of the workpiece jig and measuring jig.
In the wire saw, clamp fitting, the air pressure and the spring force, the work jig or measuring jig clamped to Rukoto preferred.
In order to achieve the above object, according to a third aspect of the present invention, there is provided a method of mounting a workpiece on a workpiece support portion of a wire saw. The workpiece mounting method is based on a step of mounting a measurement jig having a camera on a workpiece support, a step of detecting the position of the wire while moving the camera in the axial direction of the wire, and a detection position of the wire, Rotating the work support part around the axis extending in the vertical direction to adjust the position of the work support part, and removing the measurement jig from the work support part, then supporting the work jig to which the work is fixed And a step of attaching to the part.
In the workpiece mounting method, it is preferable that the workpiece is fixed to the workpiece jig in a state where the crystal orientation of the workpiece is adjusted.

As shown in FIG. 8, when the wire 25 is stretched between the main rollers 24, for example, when the main saw 24 of the wire saw is replaced, the work support 27 of the wire saw is interposed via the clamp fitting 30. A measuring jig 42 is detachably mounted. On the upper surface of the measurement jig 42, a plurality of clamped members 33 that can be engaged with and disengaged from the clamp fittings 30 of the work support portion 27 are provided in the same manner as the work jig 31. A guide rail 43 is laid on the side surface of the measurement jig 42 so as to extend substantially along the left-right direction in FIG. 8, that is, the end surface width direction of the workpiece W supported by the workpiece support portion 27. On the guide rail 43, a camera 44 as detection means is supported via a bracket 45 so as to be displaceable in the extending direction of the wire 25. The position of the wire 25 is optically detected by the camera 44.

Claims (6)

In a measurement jig that is detachably attached to a work support portion of a wire saw whose position can be adjusted around an axis extending in the vertical direction,
It is detachable via a plurality of clamp fittings having a positioning function with respect to the work support part,
A measuring jig provided with detecting means for detecting a position of a wire between main rollers of a wire saw. The measurement jig according to claim 1, wherein the detection unit optically detects a wire. The measurement jig according to claim 1, wherein the detection unit is displaceable in an extending direction of the wire. In a wire saw comprising a work support portion whose position can be adjusted around an axis extending in the vertical direction, and a work jig detachably attached to the work support portion,
It is provided with the measuring jig according to any one of claims 1 to 3, and the work jig is also detachable via a plurality of clamp fittings having a positioning function with respect to the work support part. A featured wire saw. 5. The wire saw according to claim 4, wherein the clamp fitting regulates the vertical and horizontal positions of the workpiece jig and the measurement jig. The wire saw according to claim 5, wherein the clamp fitting is clamp-driven by air pressure and spring force.

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