JP3256114B2 - Work orientation adjustment device for wire saw - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a brittle material such as a semiconductor material, a magnetic material, and a ceramic with a wire, and more particularly to an apparatus for adjusting a work orientation in the wire saw.

[0002]

2. Description of the Related Art Generally, in a wire saw of this type, a wire is spirally wound at a predetermined pitch between a plurality of processing rollers, and while the wire is traveling in the direction of its extension, abrasive grains are formed on the wire. Slurry including is supplied. Then, in this state, the work is pressed against the wire, and the work is cut into a slice with a predetermined positional relationship with respect to the crystal orientation.

[0003] In a conventional wire saw of this type, the following work orientation adjusting device is provided for setting and adjusting the positional relationship between the crystal orientation of the work and the traveling direction of the wire. That is, a support member for supporting the work is attached to the frame so as to be movable and adjustable, and the frame is provided with an adjusting member for moving and adjusting the support member. And, between the adjusting member and the supporting member,
A feed mechanism including one feed screw is provided, and when the adjustment member is adjusted, the support member is moved via the feed screw to align the crystal orientation of the work.

[0004]

As described above, in this conventional work orientation adjusting device, the work supporting member is moved and adjusted via one feed screw when the adjusting member is adjusted. I have. For this reason, J
Even if an IS-meter fine screw is used, there is a problem that the fine adjustment of the support member cannot be performed, and it is not possible to easily cope with a work that requires fine position adjustment, such as quartz.

In order to finely adjust the support member,
Although it is necessary to further reduce the feed screw, it is difficult to make the feed screw finer than the JIS fine screw with the current processing technology. For this reason, a commercially available expensive reduction gear must be used in combination, and there is a problem that the structure is complicated and the manufacturing cost rises.

The present invention has been made by paying attention to such problems existing in the conventional technology. Its main purpose is to adjust the orientation of the work by finely adjusting the support member that supports the work, and to easily adjust the work orientation of a wire saw that can be easily adapted to a work requiring fine position adjustment, such as quartz. It is to provide an adjusting device.

Another object of the present invention is to eliminate the need to use a commercially available expensive reducer or the like in combination.
An object of the present invention is to provide a work orientation adjusting device for a wire saw having a simple structure.

[0008]

In order to achieve the above object, according to the first aspect of the present invention, a supporting member for supporting a work is attached to a frame so as to be movable and adjustable. An adjustment member for adjusting the positional relationship between the direction of the work and the traveling direction of the wire is provided, and between the adjustment member and the support member,
A differential speed reduction mechanism for transmitting the adjustment operation amount of the adjustment member to the support member at a reduced speed, and a differential pitch feed screw mechanism.
And the differential gear mechanism, and the differential gear mechanism
And a reduction ratio switching mechanism for switching to an operating state .

[0009]

[0010]

[0011] In the invention described in claim 2, in the work orientation adjustment device of claim 1, wherein the feed screw mechanism comprises a pair of screws to match the spiral direction and is formed on the same axis, of one The screw is supported on the frame side, and the other screw is supported on the support member side.

According to the third aspect of the present invention, there is provided the first or second aspect.
In the work orientation regulating apparatus according to 2, around the connecting shaft connected to the shaft of the feed screw mechanism, and the control member, provided with a said differential gear mechanism, the reduction is on the connecting shaft the ratio changeover mechanism is provided, the reduction ratio switching mechanism, before the front Symbol adjusting member and the connecting shaft Ru is integrally connected
The differential gear mechanism, wherein the inoperative state of the differential gear mechanism and the adjusting member and the connection shaft are connected via the differential gear mechanism
The operation state is switched to the operation state .

[0013]

According to a fourth aspect of the present invention, in the work azimuth adjusting device according to the third aspect , the shaft of the feed screw mechanism and the connection shaft are connected to each other so as to be able to expand and contract at a connection portion thereof.

Therefore, in the work orientation adjusting device for a wire saw according to the first aspect, when adjusting the orientation of the work, when the adjusting member is adjusted, the adjustment operation amount is reduced by the differential reduction mechanism to be supported. Transmitted to the member. Thereby, the fine adjustment of the support member can be performed, and the crystal orientation of the work supported by the support member can be easily matched with the traveling direction of the wire. Therefore, the present invention can be applied to a work requiring fine position adjustment, such as a crystal. In addition, there is no need to use a combination of a commercially available expensive reducer or the like, so that the structure is simple and the manufacturing cost can be reduced. Further
In order to adjust the orientation of the workpiece by ultra-fine adjustment,
The differential gear mechanism is switched to the operating state by the reduction ratio switching mechanism
I can. When the adjustment member is adjusted in this state, the adjustment
Feed screw mechanism and differential gear mechanism with differential operation of differential pitch
The gear is decelerated at a large reduction ratio and transmitted to the support member.
Thus, the support member is finely adjusted. On the other hand, the work orientation
When adjusting by fine movement adjustment, use the reduction ratio switching mechanism.
The differential gear mechanism is switched to the inoperative state. This state
When the adjustment member is adjusted, the amount of adjustment
Deceleration at a small reduction ratio only by the pitch feed screw mechanism
Is transmitted to the support member, and the support member is finely adjusted.
You. Therefore, the reduction ratio is switched according to the type of work.
It can be used for a wide range of adjustment strokes
Can be adapted.

According to a second aspect of the present invention, the differential speed reduction mechanism includes a differential pitch feed screw mechanism.
The feed screw mechanism includes a pair of screws formed on the same axis and having different helical directions. One screw is supported by the frame and the other screw is supported by the support member.
In this azimuth adjusting device, when the adjusting member is adjusted, the support member is finely adjusted at a reduction ratio corresponding to the differential pitch of the feed screw mechanism. For this reason, a JIS fine screw can be used as the feed screw, and the structure of the differential reduction mechanism can be simplified, so that machining can be performed easily.

[0017]

[0018]

The work azimuth adjusting device according to claim 3 , wherein an adjusting member and a differential gear mechanism are provided around a connecting shaft connected to a shaft of the feed screw mechanism. Is provided with a reduction ratio switching mechanism. In this work azimuth adjusting device, a reduction ratio switching mechanism is used.
It, and connected to the adjusting member shaft is integrally connected, wherein
The state is switched to the inoperative state of the differential gear mechanism, and fine movement adjustment can be performed only with the differential pitch feed screw mechanism. Also,
By the reduction ratio switching mechanism , the adjusting member and the connection shaft are connected via the differential gear mechanism, and the operation state of the differential gear mechanism is changed.
And the fine pitch adjustment by the feed screw mechanism and the differential gear mechanism of the differential pitch becomes possible. As described above, it is possible to switch the reduction ratio of the differential reduction mechanism with a simple configuration.

[0020]

According to a fourth aspect of the present invention, the shaft of the feed screw mechanism and the connection shaft are connected to be able to expand and contract. For this reason, the portion between the pair of screws of the shaft of the feed screw mechanism and the portion of the connection shaft on the adjustment member side can expand and contract, and the adjustment member is moved with the movement of the support member. Nothing. Then, the adjusting member is always kept at a fixed position, so that the adjusting member can be easily operated.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, one embodiment of the present invention will be described.
This will be described in detail with reference to the drawings. As shown in FIGS. 2 and 3, the cutting mechanism 11 in the wire saw is mounted on a machine base (not shown). The cutting mechanism 11 includes two processing rollers 12 extending in parallel at a predetermined interval,
An annular groove 12a is formed at a predetermined pitch on the outer periphery thereof. In the drawings, the number of the annular grooves 12a is smaller than the actual number for easy understanding.

One cutting wire 13 made of steel wire
Are continuously wound around each annular groove 12a of the processing roller 12. Then, the processing roller 12 is rotated by a motor (not shown), and the wire 13 travels at a predetermined traveling speed in the extension direction thereof. Slurry supply pipe 1
Numeral 4 is disposed between the processing rollers 12, and a slurry containing abrasive grains is injected and supplied from the slurry supply pipe 14 toward the running wire 13.

The work supporting mechanism 15 is provided with the cutting mechanism 11.
, Is mounted on a vertically movable saddle 25. The frame 16 of the cutting mechanism 15 includes a saddle 2
5 and a pair of long holes 16a and through holes 16b are formed in the bottom wall. A work support table 17 as a support member is supported by a support shaft 18 on the lower surface of the frame 16 so as to be rotatable in a horizontal plane. The four holding pins 19 project from the upper surface of the work support 17 at predetermined intervals so as to pass through the long holes 16 a of the frame 16. A disc spring 20 is attached to the lower surface of the disk for pressure contact.

A pair of work supports 21 are arranged on the lower surface of the work support table 17, and a work 22 is provided between the supports 21 by a support plate 2 made of a glass plate and a carbon plate.
3 and is detachably supported. When the frame 16 attached to the saddle 25 is lowered in a state where the work 22 is supported, the work 22 is pressed against the cutting wire 13 between the processing rollers 12, and the work 13 causes the work 22 to have a crystal orientation. Is cut with a predetermined positional relationship with respect to.

The work orientation adjusting device 24 is disposed on the frame 16. Then, the work support 21 is rotated and adjusted by the work orientation adjusting device 24 so that the crystal orientation of the work 22 supported on the lower surface thereof and the positional relationship between the extending direction of the cutting wire 13 can be set. Has become.

Here, the work orientation adjusting device 24 will be described in detail. As shown in FIG. 1, the mounting plate 27 is fixed to the front surface of the frame 16. This mounting plate 27
Has a cylindrical shape, and rotatably supports an operation shaft 28 as a connection shaft connected to a shaft of a feed screw mechanism 31 described later. Cylindrical adjusting knob 29 as an adjusting member
Is rotatably supported on an operation shaft 28, and rotates the adjustment knob 29 when adjusting the azimuth of the work 22.

The differential reduction mechanism 30 is provided with the adjusting knob 29
The adjusting knob 29 is disposed between the
Is reduced and transmitted to the work support 17.
The differential reduction mechanism 30 includes a differential pitch feed screw mechanism 31, a differential gear mechanism 32, and a differential gear mechanism 3
And a speed reduction ratio switching mechanism 33 for switching the state 2 between an operating state and an inactive state.

The support plate 34 in the feed screw mechanism 31
Is fixed to the lower surface of the frame 16 and protrudes into the through hole 16b. The support shaft 35 is rotatably supported on a support plate 34 via a pair of bearings 36 and a mounting cylinder 37, and a screw hole 35a is formed at an upper end thereof.
The connection shaft 38 is located in the through hole 16b of the frame 16.
It is rotatably supported on the work support 17 via a pair of bearings 39 and a holding plate 40, and a screw hole 38a is formed at the upper end thereof.

A screw rod 41 constituting a part of the shaft of the feed screw mechanism is rotatably provided between the support shaft 35 and the connecting shaft 38. The screw rod 41 has a pair of screws, that is, a first feed screw 42 screwed into the screw hole 35 a of the support shaft 35 and a second feed screw 43 screwed into the screw hole 38 a of the connection shaft 38. are doing. In this embodiment, for example, the first feed screw 42 is formed on either the left or right screw at a feed pitch of 1.5 mm, and the second feed screw 43 is the same as the first feed screw 42 at a feed pitch of 1.25 mm. The direction of the screw is formed.

As shown in FIGS. 1 and 4, a transmission shaft 44 constituting a part of the shaft of the feed screw mechanism is fitted into the key groove 28a of the operation shaft 28 so as to be integrally rotatable and relatively movable in the axial direction. A coupling 45 which is inserted and whose inner end is bendable
Is connected to the screw rod 41 via the. Therefore, the transmission shaft 44 and the operation shaft 28 on the adjustment knob 29 side can be extended and contracted. When the operating shaft 28 is rotated in accordance with the rotating operation of the adjustment knob 29, the coupling 4
5, the screw rod 41 is rotated, and both feed screws 42, 4 are rotated.
The connection shaft 38 is moved and displaced at a reduction ratio corresponding to the difference of the feed pitches of 3, and the work support 17 is rotated and adjusted.

As shown in FIGS. 1, 5 and 6, the first gear 46 of the differential gear mechanism 32 is
Inside 9, a plurality of screws 47 are fixed to the front surface of the mounting plate 27, and an operation shaft 28 is inserted at the center thereof so as to be relatively rotatable. The rotating disk 48 is inserted into the front surface of the first gear 46 so as to be rotatable relative to the operation shaft 28, and has a plurality of engagement grooves 48 a formed on an inner peripheral surface of a center hole thereof and a fitting groove formed on an outer periphery thereof. 48b are formed.

The second gear 49 is rotatably inserted into the operation shaft 28 on the front surface of the rotary disk 48, and has a plurality of engagement grooves 49a formed on the inner peripheral surface of the center hole. In this embodiment, for example, the number of teeth of the first gear 46 is set to 41, and the number of teeth of the second gear 49 is set to 40, which is one less than the number of teeth of the first gear 46. ing.

The cover plate 50 is attached to the front end opening of the adjustment knob 29 by a plurality of screws 51, and the first gear 4
6. The rotating disk 48 and the second gear 49 are housed and held in the adjustment knob 29. The third gear 52 is rotatably supported between the rear wall of the adjustment knob 29 and the cover plate 50 so as to mesh with the first gear 46 and the second gear 49, and a rotating disk 48 is provided at an intermediate portion thereof. A fitting shaft portion 52a is formed so as to be rotatably fitted into the fitting groove 48b.

The speed reduction ratio switching mechanism 33 includes the operating shaft 2
At the end of 8, it is provided on its axis. The switching knob 53 of the reduction ratio switching mechanism 33 is screwed into the screw hole 28b at the front end of the operation shaft 28 so as to be relatively rotatable.
At the rear end, a switching shaft portion 53a having a pair of tapered surfaces is protruded. The pair of first engagement balls 54 as the connecting members are movably housed in the housing holes 28c on the operation shaft 28 at positions corresponding to the rotating disks 48. The pair of second engagement balls 55 as the connecting members are movably accommodated in the accommodation holes 28 c on the operation shaft 28 at positions corresponding to the second gears 49.

When the switching knob 53 is rotated clockwise, the first engaging ball 54 is moved outward by the switching shaft 53a, and the engaging groove 48a of the rotating disk 48 is moved.
, And the rotating disk 48 is operatively connected to the operation shaft 28 via the first engagement ball 54. On the other hand, when the switching knob 53 is rotated counterclockwise, the second engaging ball 55 is moved outward by the switching shaft 53a and is engaged with the engaging groove 49a of the second gear 49. , Its second
The second gear 49 is operatively connected to the operation shaft 28 via the engagement ball 55.

Next, the operation of the work orientation adjusting device in the wire saw configured as described above will be described.
In this work orientation adjusting device, when the orientation of the work 22 is adjusted by fine movement adjustment, the switching knob 53 is used.
Is rotated clockwise, the first engagement ball 54 is moved outward from the switching shaft 53a to engage with the engagement groove 48a of the rotating disk 48, and the second engagement ball 55 Falls into the operation shaft 28. Thus, the rotating disk 48 is operatively connected to the operation shaft 28 via the first engagement ball 54.

When the adjustment knob 29 is rotated in this state, the rotating disk 48 is rotated via the fitting shaft portion 52a of the third gear 52, and the operation shaft 28 is integrally connected to the adjustment knob 29. Rotated. Then, the rotation of the operation shaft 28 is transmitted to the screw rod 41 via the coupling 45,
The connecting shaft 38 is moved by a displacement amount corresponding to a pitch difference between the first feed screw 42 and the second feed screw 43.

That is, the feed pitch of the first feed screw 42 is 1.5 mm and the feed pitch of the second feed screw 43 is 1.25 mm. 5-1.25 = 0.25m
It is moved by a displacement amount of m. Therefore, the work support 17 is rotated around the support shaft 18 by fine adjustment so that the crystal orientation of the work 22 can be made to coincide with the traveling direction of the cutting wire 13.

On the other hand, when the azimuth of the work 22 is to be adjusted by ultra-fine movement adjustment, when the switching knob 53 is rotated counterclockwise, the second engaging ball 55 is moved from the switching shaft 53a.
Is moved outward to engage with the engagement groove 49a of the second gear 49, and the first engagement ball 54 falls into the operation shaft 28. As a result, the second engagement ball 55
A gear 49 is operatively connected to the operating shaft 28.

In this state, when the adjustment knob 29 is rotated, the third gear 52 is rotated around both the gears 46 and 49 while meshing with the first gear 46 and the second gear 49.
For this reason, the rotation of the adjustment knob 29 is controlled by the second gear 4 at a reduction ratio corresponding to the difference in the number of teeth between the first gear 46 and the second gear 49.
9 to the operating shaft 28. That is, operation axis 2
8 and the adjustment knob 29 are operated to operate the differential gear mechanism 32.
Operatively connected via Here, since the number of teeth of the first gear 46 is set to 41 and the number of teeth of the second gear 49 is set to 40, the operating shaft 28 is 1/40 of the rotation of the adjustment knob 29. It is rotated at a reduction ratio.

Then, the rotation of the operation shaft 28 is transmitted to the screw rod 41 via the coupling 45 and the connection shaft 38
Is moved by a displacement amount corresponding to a pitch difference between the first feed screw 42 and the second feed screw 43. That is, the feed pitch between the first feed screw 42 and the second feed screw 43 is 0.25 mm.
Therefore, the connection shaft 38 is moved by a displacement amount of 0.25 ÷ 40 = 0.00625 mm per rotation of the adjustment knob 29. Therefore, the work support 17 is rotated about the support shaft 18 by ultra-fine movement adjustment, and the crystal orientation of the work 22 can be made to coincide with the traveling direction of the cutting wire 13.

The effects that can be expected from the above embodiment will be described below. (1) In the work orientation adjusting device, when adjusting the orientation of the work 22, the adjustment operation amount of the adjustment knob 29 can be reduced at a large reduction ratio to finely adjust the work support base 17. Therefore, the present invention can also be applied to a work 22 that requires fine position adjustment, such as quartz. Further, as described above, fine adjustment can be performed by a combination of ordinary gears and screws, so that there is no need to use a combination of a commercially available expensive reducer or the like, and the structure of the device is simple and the manufacturing cost is reduced. Can be reduced.

(2) In this work azimuth adjusting device, the differential speed reduction mechanism 30 has the feed screw mechanism 31 of the differential pitch, and when the adjustment knob 29 is adjusted, the one on the screw rod 41 of the feed screw mechanism 31 is adjusted. The workpiece support 17 is finely adjusted at a reduction ratio corresponding to the differential pitch between the pair of screws 42 and 43. For this reason, a JIS fine screw can be used for the first feed screw 42 and the second feed screw 43 of the feed screw mechanism 31, and the structure of the differential reduction mechanism 30 is simple, so that machining can be easily performed.

(3) In this work azimuth adjusting device, the differential reduction mechanism 30 includes the differential gear mechanism 32, and the adjusting knob 2
9, the work support 17 is finely adjusted at a reduction ratio corresponding to the differential amount of the differential gear mechanism 32. Therefore, it is possible to be able to fine motion adjusting the workpiece support 17 with a high reduction ratio, to accurately align the orientation of the workpiece 22 that require fine adjustment of the position of the quartz crystal or the like.

(4) In this work azimuth adjusting device, the differential gear mechanism 32 is switched between the active state and the inactive state by the reduction ratio switching mechanism 33, and the azimuth adjustment of the work 22 is performed by the fine adjustment and the fine adjustment. Can be done. For this reason, the reduction ratio can be selected and used according to the type of the work 22, and can be adapted to a wide range of adjustment strokes.

(5) In this work orientation adjusting device, an adjusting knob 29 and a differential gear mechanism 30 are provided around an operating shaft 28, and a reduction ratio switching mechanism 33 is provided on the operating shaft 28. Is provided. Here, when the reduction ratio switching mechanism 33 is moved to a position on the front end side of the operation shaft 28, the adjustment knob 29 and the operation shaft 28 are integrally connected by the first engagement ball 54. Then, the fine movement can be adjusted only by the feed screw mechanism 31 having the differential pitch. On the other hand, when the reduction ratio switching mechanism 33 is moved to the position on the rear end side of the operation shaft 28, the adjustment knob 29 and the operation shaft 28 are actuated by the second engagement ball 55 via the differential gear mechanism 32 in the operating state. Be linked. Then, the super fine movement adjustment by the feed screw mechanism 31 and the differential gear mechanism 32 of the differential pitch becomes possible. As described above, the differential reduction mechanism 30 has a simple configuration.
Can be switched.

(6) In this work orientation adjusting device, the reduction ratio switching mechanism 33 is provided at the end of the operation shaft 28 on the axis thereof. Therefore, the reduction ratio switching mechanism 33
Is moved in a direction parallel to the axis, so that the differential gear mechanism 3
3 can easily be switched between the active state and the inactive state. Therefore, the switching operation of the reduction ratio of the differential reduction mechanism 30 can be facilitated.

(7) In this work azimuth adjusting device, the transmission shaft 44 and the operation shaft 28 are connected to be extendable and contractible.
Therefore, a portion of the feed rod mechanism 31 having the pair of screws 42 and 43 of the screw rod 41 and the adjusting knob 2 of the operation shaft 28
Since the space between the work support table 17 and the part on the side of the ninth side can be expanded and contracted, the adjustment knob 29 is not moved with the movement of the work support base 17. Then, the adjustment knob 29 is always kept at a fixed position, so that the operation of the adjustment knob 29 is facilitated.

(8) Adjustment knob 29 as an adjustment member
Are formed in a cylindrical shape, and the first
The gear 46, the second gear 49 and the third gear 42, the rotating disk 48, and the like are housed and arranged in the adjustment knob 29. For this reason, the number of parts of the differential reduction mechanism 30 can be reduced and the differential reduction mechanism 30 can be configured compact.

The present invention can be embodied with the following modifications. (1) In the work support mechanism 15 in which the work support 17 as a support member is supported so as to move in a linear direction with respect to the frame 16, the transmission shaft 44 is connected to the end of the screw rod 41 without using the coupling 45. To be formed integrally with the part.

(2) The feed screw mechanism 31, the differential gear mechanism 32, and the reduction ratio switching mechanism 33 in the differential reduction mechanism 30
As appropriate. Next, the technical ideas extracted from the above embodiment will be described.

(1) The wire saw according to any one of claims 1 to 4 , wherein the adjusting member is formed in a cylindrical shape, and a plurality of gears and a rotating disk constituting a differential gear mechanism are housed and arranged in the adjusting member. Work orientation adjustment device. .

According to this configuration, the number of parts of the differential reduction mechanism can be reduced and the differential reduction mechanism can be made compact.

[0055]

The present invention is configured as described above, and has the following effects. According to the first aspect of the invention, at the time of aligning the orientation of the work, the support member for supporting the work can be finely adjusted, and the present invention can be applied to, for example, a work requiring fine position adjustment such as quartz. .

Further, according to the first aspect of the present invention, it is not necessary to use a commercially available expensive reducer or the like in combination, so that the structure is simple and the manufacturing cost can be reduced. Furthermore, the reduction ratio can be switched according to the type of work.
Can be used for a wide range of adjustment strokes
Can also be adapted.

According to the second aspect of the present invention, the support member can be finely adjusted by using a JIS fine screw, and the structure of the differential reduction mechanism can be simplified, so that machining can be performed. It can be done easily.

[0058]

According to the third aspect of the invention, switching of the reduction ratio of the differential reduction mechanism, that is, switching between the state in which the fine adjustment of the support member is possible and the state in which the fine movement is adjustable is possible with a simple configuration. It will be.

[0060] According to the invention described in 請 Motomeko 4, without adjustment member is moved with the movement of the support member, the adjustment member is always held at a fixed position, the operation of the adjustment member is It will be easy.

[Brief description of the drawings]

FIG. 1 is an enlarged vertical sectional view of a work orientation adjusting device in a wire saw according to an embodiment, substantially at the center in FIG. 2;

FIG. 2 is a plan view showing the entire work orientation adjusting device in the wire saw.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 2;

FIG. 4 is a partially enlarged sectional view taken along line 4-4 in FIG. 1;

FIG. 5 is a partially enlarged sectional view taken along line 5-5 in FIG. 1;

FIG. 6 is an exploded perspective view showing a differential gear mechanism and a reduction ratio switching mechanism.

[Explanation of symbols]

11: cutting mechanism, 12: processing roller, 13: wire,
14 ... Slurry supply pipe, 15 ... Work support mechanism, 16
... frame, 17 ... work support as support member, 2
2 ... Work, 24 ... Work orientation adjustment device, 28 ... Operation axis as connection axis, 29 ... Adjustment knob as adjustment member,
Reference numeral 30: differential reduction mechanism, 31: differential pitch feed screw mechanism, 32: differential gear mechanism, 33: reduction ratio switching mechanism, 41
... A screw rod constituting a part of the shaft of the feed screw mechanism, 42... A first feed screw as a screw supported on the frame side, 43
... a second feed screw as a screw supported on the support member side;
44: a transmission shaft constituting a part of the shaft of the feed screw mechanism, 54
... a first engaging ball as a connecting member, 55 ... a second engaging ball as a connecting member.

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-4-36547 (JP, A) JP-A-51-73686 (JP, A) JP-A-58-61352 (JP, A) 323371 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) B24B 27/06 B28D 5/04 B23Q 5/40 F16H 1/28

Claims (4)

(57) [Claims] 1. A wire spirally wound between a plurality of processing rollers is run in the direction of its extension, and a workpiece is pressed and cut while supplying a slurry containing abrasive grains to the wire. In a wire saw, a support member for supporting the work is attached to a frame so as to be movable and adjustable, and the frame is provided with an adjustment member for adjusting the positional relationship between the direction of the work and the traveling direction of the wire, and the adjustment member and the support member are provided. A differential reduction mechanism for transmitting the adjustment operation amount of the adjustment member to the support member at a reduced speed.
The differential reduction mechanism is a differential pitch feed screw mechanism.
And the differential gear mechanism, and the differential gear mechanism
Work orientation adjusting device in Wa ear <br/> saw including a reduction ratio switching mechanism for switching to the working state. 2. The feed screw mechanism is formed on the same axis.
Including a pair of screws with matching helical directions, one of which is
Check that the other screw is supported by the support member on the frame side.
A work orientation adjusting device for the wire saw according to claim 1.
Place. 3. A connection connected to a shaft of the feed screw mechanism.
Around an axis, the adjusting member and the differential gear mechanism
And a reduction ratio switching mechanism on the connection shaft.
Wherein the speed reduction ratio switching mechanism is provided with the adjusting member and the connection shaft.
Inactive state of the differential gear mechanism in which
And the adjusting member and the connection shaft are connected via a differential gear mechanism.
To switch to the operating state of the differential gear mechanism to be connected.
Work orientation in the wire saw according to claim 1 or 2
Adjustment device. 4. A shaft of the feed screw mechanism and the connection shaft.
Is connected so as to be extendable and contractible at the connection portion.
A work azimuth adjusting device in the wire saw described in the above.