CN102958646A - Jig for measurement, wire saw, and workpiece mounting method - Google Patents
Jig for measurement, wire saw, and workpiece mounting method Download PDFInfo
- Publication number
- CN102958646A CN102958646A CN201280001528XA CN201280001528A CN102958646A CN 102958646 A CN102958646 A CN 102958646A CN 201280001528X A CN201280001528X A CN 201280001528XA CN 201280001528 A CN201280001528 A CN 201280001528A CN 102958646 A CN102958646 A CN 102958646A
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- China
- Prior art keywords
- work support
- workpiece
- steel wire
- measured material
- attached
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/06—Grinders for cutting-off
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Abstract
A wire saw is provided with: a pair of main rollers; a wire (25) installed between both the main rollers; a workpiece support section (27); and a jig for a workpiece, attached to and detached from the workpiece support section (27). The position of the workpiece support section (27) can be adjusted about a vertically extending axis. The jig for a workpiece is attached to and detached from the workpiece support section (27) by the operation of clamps (30) having a positioning function. A jig (42) for measurement can be attached to the workpiece support section (27) in place of the jig for a workpiece. A camera (44) for detecting the position of the wire (25) is provided to the jig (42) for measurement. The position of the workpiece support section (27) is adjusted on the basis of the position of the wire (25) detected by the camera (44), and as a result, the positions of the clamps (30) relative to the wire (25) are set to predetermined positions.
Description
Technical field
The present invention relates to a kind of scroll saw with steel wire cutting semiconductor material or picture pottery and so on friable material, especially relate to the workpiece attaching method of the measured material of a kind of measuring steel wire position, the scroll saw with measured material and use measured material.
Background technology
Scroll saw comprises main roller and the steel wire of running between two main rollers.Steel wire is to be wrapped on the main roller with predetermined spacing helical form.Steel wire is run along its axis.In addition, supply has the slurry of abrasive grains to steel wire.When the abrasive grains of diamond and so on is maintained on the steel wire, needn't supplies slurry.Based on crystal orientation of workpiece and so on, regulate the position of workpiece, so that a predetermined relation is satisfied in the position of workpiece and steel wire.Under this state, force workpiece to be against on the steel wire, be cut into pieces.
When cut workpiece, workpiece is being attached on the workpiece support main body under the state of gripper shoe to paste.Under this state, detect the crystal orientation of workpiece from end surface of workpiece and so on.Then, workpiece orientation adjusting device is regulated the run position relationship of direction of the crystal orientation of workpiece and steel wire.
In such scroll saw, the workpiece support structure shown in Figure 10 and 11 with workpiece support on the lower surface of workpiece support base.In described workpiece support structure, workpiece support main body 52 is fixed on the lower surface of workpiece support base 51.Workpiece support main body 52 comprises the first support slot 52a and the second relative support slot 52b, and the first support slot 52a has a leg-of-mutton cross section, and the second support slot 52b has a quadrangular section.Back-up block 54 is arranged on the gripper shoe 53 that is adhesive with workpiece W, and it comprises the mate 54a with the first support slot 52a engagement.The lock construction element 55 that meshes with mate 54a is to be arranged on movably among the second support slot 52b of workpiece support main body 52.Workpiece support main body 52 has a side surface, and this side surface has lock construction element 55 is being pushed away two fastening bolts 56 that prop up mate 54a.
Be inserted at mate 54a under the state of the first support slot 52a, fastening bolt 56 is tightened, and is pushing away lock construction element 55 and is withstanding mate 54a.This is fixed on back-up block 54 on the workpiece support main body 52, workpiece W is attached to the below part of workpiece support main body 52.
In the situation with this workpiece support structure, need operating personnel to bow to the machining area of work saw, frontier inspection is looked into the position relationship limit of steel wire and workpiece and is regulated.In other words, need operating personnel's visual inspection mate 54a to regulate with respect to the contact condition of workpiece support main body 52.In addition, in this case, shown in the arrow among Figure 10, workpiece W can be attached to a position, it has inclination with respect to workpiece support main body 52 in this position.Shown in the arrow of Figure 11, can be with in the vertical mobile or inclination of workpiece W.In this way, regulate difficulty and consuming time, easily mistake appears in the attachment positions at workpiece W.In addition, no matter when when being attached to workpiece W on the workpiece support main body 52, the crystal orientation of workpiece W is detected under such state, and namely workpiece W is attached on the workpiece support main body 52 the position relationship between the direction of running with the crystal orientation that readjusts workpiece W and steel wire.This can cause poor operability, reduces working (machining) efficiency.
The prior art document
Patent documentation
Patent documentation 1: the open No.9-141549 of Japanese patent of invention.
Summary of the invention
The problem to be solved in the present invention
An object of the present invention is to provide a kind of measured material and scroll saw, when being attached to workpiece on the work support, needn't regulate workpiece with respect to the position of steel wire, thereby improve machinability and machine efficiency.
The technological means of dealing with problems
In order to address the above problem, the measured material that first aspect present invention provides on a kind of work support that is attached to scroll saw and taken off from this work support.Scroll saw comprises two main rollers and the steel wire of running between two main rollers.The axis that the position of described work support can be extended on vertical direction is regulated.Described measured material comprises: the checkout gear that detects described steel wire position.Described measured material is to utilize the clamp fixator of a plurality of realization positioning functions to be attached on the described work support and from this work support to take off.
In this structure, when steel wire extended between main roller during changing main roller, measured material was to be attached on the work support with clamp fixator.This with measured material with respect to work support with hi-Fix.In this state, checkout gear detects the position of steel wire, and work support is regulated according to testing result around the position of vertical axis.The result is, the position of clamp fixator on work support is configured to satisfy a predetermined relation with the position of steel wire.When being attached to workpiece on the work support, workpiece is fixed on the work piece holder with the state that regulates in advance the location of workpiece.Then, with clamp fixator work piece holder is attached on the work support.This has reproduced the exact position of work piece holder with respect to work support.Therefore, workpiece is positioned in the position relationship of steel wire and the adjusted good state of the direction of running of steel wire with respect to work support.The result is when no matter when being attached to workpiece on the work support, not need to regulate workpiece with respect to the position of steel wire.This has improved machinability, has increased working (machining) efficiency.
In the superincumbent measured material, preferably, checkout gear is used the position of optical detection steel wire.
In the superincumbent measured material, preferably, wherein checkout gear can move along the axis of steel wire.
In order to address the above problem, second aspect of the present invention provides a kind of scroll saw with work support and work piece holder.The position of described work support can be regulated around the axis that in the vertical direction extends.Described work piece holder is attached on the described work support and from this work support and takes off.Described scroll saw comprises above-mentioned measured material.Clamp fixator by a plurality of realization positioning functions is attached to described work piece holder on the described work support and from this work support to be taken off.
In above-mentioned scroll saw, preferably, clamp fixator restriction work piece holder and the position of measured material on vertical direction and horizontal direction.
In above-mentioned scroll saw, preferably, clamp fixator vises work piece holder or measured material with air pressure or spring force.
In order to address the above problem, it is a kind of with the method for workpiece attaching on the work support of scroll saw that third aspect present invention provides.The method comprising the steps of: the measured material that will comprise camera is attached on the described work support; When the axially mobile described camera of steel wire, detect the position of steel wire; According to the position of the steel wire that detects, rotate described work support by the axis that extends around in the vertical direction, regulate the position of described work support; And with described measured material after described work support is taken off, the work piece holder that is fixed with described workpiece is attached on the described work support.
In said method, preferably, described workpiece is fixed on the described workpiece clamp with the state that the crystal orientation of described workpiece is conditioned.
Description of drawings
Fig. 1 shows the according to an embodiment of the invention front view of scroll saw.
Fig. 2 is the local enlarged front view of showing scroll saw and work support.
Fig. 3 is the local enlarged front view of showing scroll saw and work support.
Fig. 4 is the perspective view of showing the work piece holder that is fixed with workpiece.
Fig. 5 is the amplifier section cutaway view of showing the clamp fixator of scroll saw.
Fig. 6 shows that work piece holder is attached to the partial sectional view of the state on the work support.
Fig. 7 is the partial sectional view of diagram clamp operation.
Fig. 8 shows that measured material is attached to the partial front elevation view of the state on the work support.
Fig. 9 shows that measured material is attached to the partial front elevation view of the state on the work support.
Figure 10 is the partial front elevation view of showing the workpiece support structure of prior art.
Figure 11 is the partial side view that shows the workpiece support structure of prior art.
The specific embodiment
With reference now to Fig. 1 to Fig. 9, according to an embodiment of the invention scroll saw and measured material are described.
As shown in Figure 1, scroll saw comprises shell 21, puts machinery bed 22 and pillar 23.Pillar 23 is arranged on the machinery bed 22.Two main rollers 24 are supported on the machinery bed 22 rotationally.Main roller 24 comprises the cannelure that extends along the outer surface of main roller 24.Steel wire 25 is wrapped on the main roller 24 with the preset space length helical form.Steel wire 25 is run between two main rollers 24.Pillar 23 comprises sidepiece, saddle 26 that can rise and descend of this side supports.Saddle 26 is arranged on steel wire 25 tops.Work support 27 is being supported by the rotating shaft 28 on saddle 26 lower surfaces and bearing 29.The position of work support 27 can be regulated around a vertical curve as the axis of in the vertical direction extension.
As shown in Figure 1 to Figure 3, the lower surface at work support 27 arranges four clamp fixators 30 realizing positioning function.Work piece holder 31 or measured material 42 usefulness clamp fixators 30 are attached to the lower surface of work support 27.With reference to figure 4, work piece holder 31 is metallic plates.
" SWT type " supporting plate clamp fixator that Kosmel company makes is realized positioning function as clamp fixator 30.As shown in Figure 5, the upper surface of work piece holder 31 comprises a plurality of recesses 32 corresponding with clamp fixator 30.With clamp fixator 30 engagement and break away from it be installed on each recess 32 by jaw members 33.As shown in Figure 3 and Figure 4, workpiece W is the lower surface that is attached to work piece holder 31 with the intervention material 34 that synthetic resin forms.Under this state, regulate the crystal orientation of workpiece W at circumferencial direction, horizontal direction and vertical direction.
Be under the state of taking off from work support at work piece holder 31, air-flow rushes at the external peripheral surface of taper 37 and the end of piston rod 38 from gas channel 40.The foreign matter of avoiding like this cutting bits and so on is gathered on the taper 37, and the end of process piston rod 38 is near steel ball 36.
From the state shown in Fig. 5, workpiece clamp 31 is attached on the work support 27, as shown in Figure 6.In this case, the end portion of clamp shell 35 and taper 37 are inserted in by in the jaw members 33.The end of piston rod 38 contacts with the lower surface of recess 32.In this state, form a gap at the seating face 35a of clamp shell 35 with between by the top reference surface 33a of jaw members 33, and form a gap at the external peripheral surface of taper 37 with between by the taper reference surface 33b of jaw members 33.These gaps are to be formed by the air-flow from gas channel 40.Air-flow will cut the foreign matter of bits and cutting oil and so on and remove from described gap.
Then, be stopped from the air-flow of gas channel 40, then be supplied to piston rod 38 and piston 38a from the pinning air that pins gas passage 41.The result is as shown in Figure 7, to pin the air pressure of air and the thrust of spring 39 piston rod 38 is promoted.Therefore, steel ball 36 is mobile in recess 38b along the peripheral surface of piston rod 38, utilizes protuberance 33c to promote by jaw members 33.The result is, is forced to withstand the seating face 35a of clamp shell 35 by the top reference surface 33a of jaw members 33, workpiece clamp 31 by clamp on work support 27.In this state, limited the position of workpiece clamp 31 in vertical direction and horizontal direction by the contact between the seating face 35a of the top reference surface 33a of jaw members 33 and clamp shell 35 and by the contact between the external peripheral surface of the taper reference surface 33b of jaw members 33 and taper 37.
As shown in Figure 8, in the process of replacing main roller 24, when steel wire 25 extended between main roller 24, measured material 42 was attached on the work support 27 by clamp fixator 30.In the mode same with work piece holder 31, with clamp fixator 30 engagements and being arranged on the upper surface of measured material 42 by jaw members 33 of breaking away from it.Guide rail 43 is arranged on the side surface of measured material 42.In the state that is supported by work support 27, guide rail 43 extends (be from left to right direction) along the width of the end surface of workpiece W basically in Fig. 8.Camera 44 as checkout gear is supported by the carriage 45 on the guide rail 43.Camera 44 can move along the axis of steel wire 25.Camera 44 detects the position of steel wire 25 optically.
With reference now to Fig. 1 to Fig. 4 and Fig. 8 and Fig. 9, the operation of scroll saw and measured material is described.
As shown in Figure 8, during replacing main roller 24, when steel wire 25 extended between main roller 24, measured material 42 was attached on the work support 27 by clamp fixator 30.Like this with measured material 42 with respect to the hi-Fix of work support 27 with micron level.Under this state, operating personnel move axially camera 44 along steel wire 25.Along with camera 44 moves, it detects the position of steel wire 25 optically.With reference to figure 9, based on the position of the steel wire 25 that is detected, the position of work support 27 is regulated in rotating shaft 28 around vertical axis.The result is that predetermined relation is arranged to satisfy in the position of clamp fixator 30 and the position of steel wire 25.
When with scroll saw processing work W, to shown in Figure 4, workpiece W is the lower surface that is attached on work piece holder 31 by intervention material 34 such as Fig. 2.Under this state, at the crystal orientation of circumferencial direction, horizontal direction and vertical direction adjusted workpiece W.By with clamp fixator 30 work piece holder 31 being attached on the work support 27, repetition the exact position of work piece holder 31 with respect to work support 27.Under the state of the crystal orientation of regulating workpiece W, workpiece W is accurately located with respect to work support 27.Therefore, no matter when when being attached to workpiece W on the work support 27, needn't readjust workpiece W with respect to the position of steel wire and the crystal orientation direction of workpiece W.
Then, when the processing of workpiece W began, with reference to figure 1, main roller 24 rotated, and steel wire 25 is axially run it.Simultaneously, slurry feeding mechanism (not shown) is supplied the slurry that does not comprise abrasive grains to steel wire 25.In this state, when saddle 26 descended, workpiece W was forced to the top to steel wire 25.In this way, workpiece W keeps being cut into pieces in the preposition relation in the direction of running with steel wire 25.
Correspondingly, the present invention has advantages of and the following describes.
(1) when steel wire 25 extended between main roller 24 in the process of changing main roller 24, measured material 42 was attached on the work support 27 by clamp fixator 30.So accurately measured material 42 is located with respect to work support 27.Under this state, operating personnel are along moving axially camera 44, and camera 44 detects the position of steel wire 25.According to testing result, regulate the position of work support 27 around vertical axis.The result is, the position of clamp fixator 30 on work support 27 is arranged to satisfy a predetermined relation with the position of steel wire 25.When workpiece W was attached on the work support 27, workpiece W was fixed on the work piece holder 31 with the state that regulates in advance workpiece W crystal orientation.Then with clamp fixator 30 work piece holder 31 is attached on the work support 27 with workpiece W.This has reproduced the exact position of work piece holder 31 with respect to work support 27.Therefore workpiece W is positioned at the state of the direction position relationship of running that regulates workpiece W and steel wire 25 with respect to work support 27.The result is, operating personnel only need to be during measuring mobile camera 44, the machining area the inside that needn't bow to the workpiece saw is regulated.This has improved operability, has increased machine efficiency.
(2) camera 44 optically detects the position of steel wire 25, and can move along the axis of steel wire 25.In this structure, camera 44 can accurately detect the position of steel wire 25.
(3) clamp fixator 30 restriction work piece holder 31 and the positions of measured material 42 on vertical direction and horizontal direction.In this structure, only by with clamp fixator 30 work piece holder 31 or measured material 42 being attached on the work support 27, work piece holder 31 or the position of measured material 42 on vertical direction and horizontal direction have just been limited.In this way, can repetition be attached to work piece holder 31 on the work support 27 or the exact position of measured material 42.In this case, can clamp quickly and accurately work piece holder 31 or measured material 42 with air pressure or spring strength.Therefore, can easily work piece holder 31 or measured material 42 be attached on the work support 27, thus preparation time reduction.
The present embodiment can be revised like that according to hereinafter describing.
The checkout gear of measured material 42 can be speculum.In this case, similar with the mode of camera 44, can check from the outside of scroll saw the position of steel wire 25.
Can change as required clamp fixator 30 and by the structure of jaw members 33.For example, can attract clamp fixator 30 and by jaw members 33 with magnetic force.
Workpiece W is not limited to the monocrystal material with crystal orientation, can be polycrystalline material.In addition, workpiece W can have a polygonal cross-section, rather than cylindrical cross-section.
Claims (8)
1. the measured material of taking off on the work support that is attached to scroll saw and from this work support, wherein said scroll saw comprises two main rollers and the steel wire of running between two main rollers, the axis that the position of wherein said work support can be extended on vertical direction is regulated, and described measured material comprises:
Detect the checkout gear of described steel wire position,
Wherein said measured material is to utilize the clamp fixator of a plurality of realization positioning functions to be attached on the described work support and from this work support to take off.
2. according to claim 1 measured material, wherein said checkout gear is with the position of the described steel wire of optical detection.
3. according to claim 1 and 2 measured material, wherein said checkout gear can move along the axis of described steel wire.
4. scroll saw with work support and work piece holder, the position of wherein said work support can be regulated around the axis that in the vertical direction extends, and described work piece holder is attached on the described work support and from this work support and takes off, and described scroll saw comprises:
According to claim 1 to the described measured material of 3 any one claims,
Wherein the clamp fixator by a plurality of realization positioning functions is attached to described work piece holder on the described work support and from this work support and takes off.
5. according to claim 4 scroll saw, wherein said clamp fixator limits described work piece holder and the position of described measured material on vertical direction and horizontal direction.
6. according to claim 5 scroll saw, wherein said clamp fixator is clamped described work piece holder or described measured material with air pressure or spring force.
7. one kind with the method for workpiece attaching on the work support of scroll saw, and the method comprising the steps of:
The measured material that will comprise camera is attached on the described work support;
When the axially mobile described camera of steel wire, detect the position of steel wire;
According to the position of the steel wire that detects, rotate described work support by the axis that extends around in the vertical direction, regulate the position of described work support; And
With described measured material after described work support is taken off, the work piece holder that is fixed with described workpiece is attached on the described work support.
8. according to claim 7 method, wherein said workpiece is fixed on the described workpiece clamp with the state that the crystal orientation of described workpiece is conditioned.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011049054A JP5016122B1 (en) | 2011-03-07 | 2011-03-07 | Measuring jig, wire saw, and workpiece mounting method |
| JP2011-049054 | 2011-03-07 | ||
| PCT/JP2012/054822 WO2012121049A1 (en) | 2011-03-07 | 2012-02-27 | Jig for measurement, wire saw, and workpiece mounting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102958646A true CN102958646A (en) | 2013-03-06 |
| CN102958646B CN102958646B (en) | 2015-04-15 |
Family
ID=46798017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280001528.XA Active CN102958646B (en) | 2011-03-07 | 2012-02-27 | Jig for measurement, wire saw, and workpiece mounting method |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP5016122B1 (en) |
| KR (1) | KR101257327B1 (en) |
| CN (1) | CN102958646B (en) |
| MY (1) | MY166688A (en) |
| TW (1) | TWI469838B (en) |
| WO (1) | WO2012121049A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112536926A (en) * | 2019-09-20 | 2021-03-23 | 小松Ntc株式会社 | Wire saw and method for feeding workpiece into and out of wire saw |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5964204B2 (en) * | 2012-10-31 | 2016-08-03 | コマツＮｔｃ株式会社 | Automatic wire winding method and apparatus for wire saw |
| JP6090624B2 (en) * | 2013-03-29 | 2017-03-08 | パナソニックＩｐマネジメント株式会社 | Manufacturing method of semiconductor wafer |
| CN112720611A (en) * | 2021-01-15 | 2021-04-30 | 昆山竹言薄膜特殊材料有限公司 | Cutting positioning device for plastic film production |
| CN114043634B (en) * | 2021-11-12 | 2024-02-20 | 中山市海晶电子有限公司 | Wafer cutting clamping equipment |
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| JPH0666520A (en) * | 1992-08-14 | 1994-03-08 | A T R Koudenpa Tsushin Kenkyusho:Kk | Optical waveguide sensor equipment |
| JP3187295B2 (en) * | 1995-08-31 | 2001-07-11 | 株式会社日平トヤマ | Wire saw equipment |
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2011
- 2011-03-07 JP JP2011049054A patent/JP5016122B1/en active Active
-
2012
- 2012-02-27 WO PCT/JP2012/054822 patent/WO2012121049A1/en active Application Filing
- 2012-02-27 MY MYPI2012005003A patent/MY166688A/en unknown
- 2012-02-27 CN CN201280001528.XA patent/CN102958646B/en active Active
- 2012-02-27 KR KR1020127030336A patent/KR101257327B1/en active IP Right Grant
- 2012-03-05 TW TW101107295A patent/TWI469838B/en not_active IP Right Cessation
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| JPH09141549A (en) * | 1995-11-22 | 1997-06-03 | Nippei Toyama Corp | Workpiece azimuth adjusting device in wire saw |
| CN2378152Y (en) * | 1999-05-20 | 2000-05-17 | 杨文恭 | Flexible grinding wheel cutting-off machine |
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| CN112536926A (en) * | 2019-09-20 | 2021-03-23 | 小松Ntc株式会社 | Wire saw and method for feeding workpiece into and out of wire saw |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5016122B1 (en) | 2012-09-05 |
| JP2012183615A (en) | 2012-09-27 |
| WO2012121049A1 (en) | 2012-09-13 |
| TWI469838B (en) | 2015-01-21 |
| CN102958646B (en) | 2015-04-15 |
| TW201249573A (en) | 2012-12-16 |
| KR20120136425A (en) | 2012-12-18 |
| MY166688A (en) | 2018-07-18 |
| KR101257327B1 (en) | 2013-04-23 |
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