CN113370005A - Semiconductor crystal bar tumbling mill - Google Patents
Semiconductor crystal bar tumbling mill Download PDFInfo
- Publication number
- CN113370005A CN113370005A CN202110825306.0A CN202110825306A CN113370005A CN 113370005 A CN113370005 A CN 113370005A CN 202110825306 A CN202110825306 A CN 202110825306A CN 113370005 A CN113370005 A CN 113370005A
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- Prior art keywords
- feeding
- sliding table
- sliding
- machine tool
- guide rail
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
- B24B5/04—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding cylindrical surfaces externally
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
- B24B41/061—Work supports, e.g. adjustable steadies axially supporting turning workpieces, e.g. magnetically, pneumatically
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/02—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent
- B24B49/04—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent involving measurement of the workpiece at the place of grinding during grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/35—Accessories
- B24B5/355—Feeding means
Abstract
The invention provides a semiconductor crystal bar tumbling machine tool which comprises a machine tool base, a cross beam positioned above the machine tool base, a Z-axis feeding sliding table arranged on the cross beam, a Z-axis driving device for driving the Z-axis feeding sliding table to move, a clamp group arranged at the bottom of the Z-axis feeding sliding table, a feeding guide rail arranged on the machine tool base, a feeding conveying sliding table arranged on the feeding guide rail, a detection sliding table and a driving mechanism, a feeding centering device arranged on the feeding conveying sliding table, a blank detection device and an X-ray crystal orientation detector arranged on the detection sliding table, a crystal bar grinding device arranged on the machine tool base and a processing detection device arranged on the crystal bar grinding device. The invention realizes full-automatic processing, mechanical feeding and mechanical detection to determine the grinding times, reduces manual operation, and increases working efficiency and working precision.
Description
Technical Field
The invention relates to the technical field of silicon rod processing, in particular to a semiconductor crystal bar barreling machine tool.
Background
The semiconductor crystal bar tumbling mill widely applied to the market at present is processed by adopting modes of manual feeding, clamping, alignment, detection and the like. The manual feeding and discharging and manual detection machining mode determines the grinding times, and the machining efficiency is lower on the premise of ensuring the machining quality by manually detecting the size after single grinding. And according to the level of operators, the difference of detection methods and the processing consistency of the crystal bar are poor.
And the existing barreling machine tool has overlarge occupied area due to more mechanical parts.
Disclosure of Invention
According to the technical problem, the semiconductor crystal bar barreling machine tool is provided.
The technical means adopted by the invention are as follows:
a semiconductor crystal bar barreling machine tool comprises:
a machine tool base;
the cross beam is arranged above the machine tool base, and the extending direction of the cross beam is parallel to the length direction of the machine tool base;
the Z-axis feeding sliding table is arranged on the cross beam and is connected with the cross beam in a sliding manner;
the Z-axis feeding driving device is arranged on the cross beam and used for driving the Z-axis feeding sliding table to horizontally move along the extension direction of the cross beam; the Z-axis feeding driving device can adopt a lead screw, the output end of the lead screw is connected with the Z-axis feeding sliding table, and the input end of the lead screw is connected with a motor;
the clamp group is arranged at the bottom of the Z-axis feeding sliding table, is used for axially clamping two end surfaces of the crystal bar and drives the crystal bar to rotate around the axis of the crystal bar;
the feeding guide rail group is arranged on the machine tool base, is arranged at the head end of the machine tool base, and extends along the width direction of the machine tool base;
the feeding conveying sliding table is arranged on the feeding guide rail group and is connected with the feeding guide rail group in a sliding manner;
the feeding conveying sliding table driving mechanism is used for driving the feeding conveying sliding table to horizontally move along the extension direction of the feeding guide rail group; the feeding conveying sliding table driving mechanism can adopt a lead screw, the output end of the lead screw is connected with the feeding conveying sliding table, and the input end of the lead screw is connected with a motor;
the detection sliding table is arranged on the feeding guide rail group and is in sliding connection with the feeding guide rail group;
the detection sliding table driving mechanism is used for driving the detection sliding table to horizontally move along the extension direction of the feeding guide rail group; the detection sliding table driving mechanism can adopt a lead screw, the output end of the lead screw is connected with the detection sliding table, and the input end of the lead screw is connected with the motor;
the feeding centering device is arranged on the feeding conveying sliding table and used for radially clamping the outer wall of the crystal bar and enabling the axis of the crystal bar to be parallel to the length direction of the machine tool base;
the blank detection device is arranged on the detection sliding table and used for detecting the blank size and the machining allowance of the crystal bar;
the X-ray crystal orientation detector is arranged on the detection sliding table and used for detecting crystal lines of the crystal bars;
the crystal bar grinding device is arranged on the side part of the machine tool base and is used for grinding the crystal bar; and
and the processing detection device is arranged on the crystal bar grinding device and is used for detecting the processed size of the crystal bar. The processing detection device can adopt the combination of the probe and the cylinder, and the cylinder pushes the probe to stretch out and draw back, so that the probe detects.
Preferably, the jig set includes:
the Z-axis screw is arranged on the Z-axis feeding sliding table, and the input end of the Z-axis screw is connected with the first motor;
one chuck is connected with the output end of the Z-axis screw rod, and the other chuck is fixedly connected with the Z-axis feeding sliding table; and
and the motor and the harmonic reducer are connected with the chuck fixed on the Z-axis feeding sliding table and used for driving the chuck to rotate around the axis of the chuck.
The chuck can adopt a chuck provided by application numbers of 2020217826293 or 201820892877X;
preferably, the crystal bar grinding device comprises a V-shaped groove grinding device and at least one outer circle and reference surface grinding device, the V-shaped groove grinding device is used for processing a V-shaped groove on the silicon rod, the outer circle and reference surface grinding device is used for grinding the outer surface of the silicon rod and processing a reference plane on the outer surface of the silicon rod, and the V-shaped groove grinding device and the outer circle and reference surface grinding device are arranged oppositely. When a plurality of outer circle and reference surface grinding devices are adopted, the plurality of outer circle and reference surface grinding devices are arranged side by side, one of the outer circle and reference surface grinding devices can be independently used for rough grinding, one of the outer circle and reference surface grinding devices can be independently used for fine grinding, and the other one of the outer circle and reference surface grinding devices can be independently used for grinding the reference surface. An outer circle and reference surface grinding device may also be used.
Preferably, the V-groove grinding device and the outer circle and reference surface grinding device each include:
the extending direction of the grinding guide rail is the width direction of the machine tool base;
the spindle feeding sliding table is arranged on the grinding guide rail and is in sliding fit with the grinding guide rail;
the output end of the main shaft screw is connected with the main shaft feeding sliding table, and the input end of the main shaft screw is connected with a motor and used for driving the main shaft feeding sliding table to horizontally move along the direction of the grinding guide rail; and
and the grinding main shaft is arranged on the main shaft feeding sliding table, and the input end of the grinding main shaft is connected with a main shaft driving mechanism. The spindle driving mechanism can adopt a motor with a belt pulley, and then the motor is connected with the input end of the grinding spindle through a belt to realize the rotation of the grinding spindle.
Preferably, a grinding spindle of the outer circle and reference surface grinding device is mounted on the spindle feeding sliding table through a vertical feeding mechanism, and the vertical feeding mechanism includes:
the frame is vertically fixed on the main shaft feeding sliding table;
the vertical guide rail is arranged on the inner wall of the rack;
a lifting slide table in sliding fit with the vertical guide rail, and the grinding spindle is mounted on the lifting slide table and
and the lifting cylinder is arranged on the main shaft feeding sliding table, and the input end of the lifting cylinder is connected with the lifting sliding table.
Preferably, the feeding centering device comprises:
the two sliding plate guide rails are arranged in parallel and fixed on the feeding conveying sliding table, and the extending direction of the two sliding plate guide rails is parallel to the length direction of the machine tool base;
the silicon rod bearing device is positioned between the two sliding plate guide rails and is used for bearing a silicon rod;
the extending directions of the two clamping jaw systems are parallel to the width direction of the machine tool base and are used for clamping the silicon rod carried by the silicon rod carrying device; and
the clamping jaw system driving mechanism is used for driving the two clamping jaw systems to move towards or away from each other along the extending direction of the sliding plate guide rail;
the jaw system comprises:
the extending direction of the sliding plate is parallel to the width direction of the machine tool base, and the bottom of the sliding plate is connected with the two sliding plate guide rails in a sliding mode through sliding plate sliding blocks;
the clamping jaw guide rail is positioned on the sliding plate, and the extending direction of the clamping jaw guide rail is parallel to the width direction of the machine tool base;
the bottoms of the two clamping jaws are connected with the clamping jaw guide rail in a sliding manner through clamping jaw sliding blocks, and the opposite surfaces of the two clamping jaws are provided with V-shaped clamping openings; and
and the clamping jaw driving mechanism is positioned on the sliding plate and used for driving the two clamping jaws to move towards or away from each other along the extension direction of the clamping jaw guide rail.
Preferably, the silicon rod carrying device comprises:
the tray is positioned above the sliding plate, the extending direction of the tray is parallel to the length direction of the machine tool base, vertical plates extending vertically and downwards are arranged at two ends of the tray, and the length of the tray is greater than or equal to that of the sliding plate guide rail;
the crystal support is fixed at the top of the tray and used for bearing the silicon rod;
the first transverse plate is fixed on the vertical plate;
the second transverse plate is positioned below the first transverse plate and is fixedly connected with the feeding conveying sliding table;
a plurality of sliding guide rods vertically passing through the first and second cross plates;
the sliding guide rod is sleeved with a part between the first transverse plate and the second transverse plate; and
and the two limiting blocks are respectively fixed on the lower surface of the first transverse plate and the upper surface of the second transverse plate and used for limiting.
Preferably, the jaw system drive mechanism comprises:
two output ends of the first left-right-handed double-nut screw are fixedly connected with the bottoms of the two sliding plates respectively, and the input end of the first left-right-handed double-nut screw is a hand wheel or a first motor;
the first left-right-handed double-nut screw is connected with the sliding plate through a floating buffer mechanism;
the floating buffer mechanism comprises:
the middle part of the lead screw of the first left-right-handed double-nut lead screw is connected with the sliding plate through the lead screw fixing seat;
the fixed seat is positioned beside the screw rod fixed seat and is fixedly connected with the feeding conveying sliding table;
the extending direction of the guide bolt is parallel to the length direction of the machine tool base, and one end of the guide bolt, which is far away from the screwing end, penetrates through the fixed seat and is fixedly connected with the lead screw fixed seat; and
and the second spring is sleeved on the guide bolt, one end of the second spring is connected with the fixed seat, and the other end of the second spring is connected with the lead screw fixed seat.
Preferably, the clamping jaw driving mechanism is a second left-right-handed double-nut screw, two output ends of the clamping jaw driving mechanism are fixedly connected with the two clamping jaws respectively, and an input end of the clamping jaw driving mechanism is a motor.
Preferably, the jaw system further comprises: a clamping jaw opening position feedback mechanism;
preferably, the jaw opening position feedback mechanism comprises:
the screw bearing seat is fixed at one end of the sliding plate and is close to the clamping jaw driving motor, and one end part of a screw of the second left-right-handed double-nut screw is connected with the sliding plate through the screw bearing seat;
and the clamping jaw opening position trigger switch is arranged on the lead screw bearing seat, and when the two clamping jaws move away to the maximum stroke, the clamping jaw close to the clamping jaw opening position trigger switch touches the clamping jaw opening position trigger switch to be opened.
Preferably, the clip mouth in a V-shape has a vertical face at an inner end of an opening thereof.
Preferably, a silicon rod detection mechanism is mounted on the vertical surface;
the silicon rod detection mechanism includes:
the mounting groove is machined in the vertical plane, and an opening extends towards the outer end of the opening of the clamping opening;
the outer diameter of the piston is matched with the inner diameter of the mounting groove, part of the piston is positioned in the mounting groove, and part of the piston penetrates through a notch of the mounting groove;
the extending direction of the piston rod is parallel to the width direction of the machine tool base, and one end of the piston rod penetrates through the groove bottom of the mounting groove and is fixedly connected with the piston;
the third spring is positioned in the mounting groove, is sleeved on the piston rod, has one end connected with the piston and the other end connected with the groove bottom of the mounting groove and is used for resetting the piston rod; and
the trigger switch is arranged on one side, which is not provided with the clamping opening, of the clamping jaw and is close to the other end of the piston rod; after the silicon rod is clamped by the clamping jaw, the piston rod moves, and the other end of the piston rod triggers the trigger switch.
Preferably, the mounting groove on each vertical surface is in different positions, or the length of the notch of each piston penetrating through the mounting groove is different.
Or a contact type displacement sensor is arranged on the vertical surface to replace the silicon rod detection mechanism.
Preferably, the blank detection device comprises a detection cylinder fixed on the detection sliding table, an output end of the detection cylinder is connected with an installation plate through a detection support, the installation plate is in sliding connection with a detection guide rail fixed on the detection sliding table, and the extension direction of the detection guide rail is parallel to the width direction of the machine tool base;
the probe is installed on the installing plate, the output end of the probe is connected with a guide wheel shaft, the guide wheel shaft is pre-pressed on the probe, the guide wheel shaft is far away from one end of the probe, a guide wheel is installed at one end of the guide wheel shaft, the extending direction of the guide wheel shaft is overlapped with the extending direction of the probe, and a guide wheel shaft rotation prohibiting mechanism is arranged at the position of the guide wheel shaft and used for blocking the guide wheel shaft to rotate around the axis of the guide wheel shaft.
Preferably, a plane is processed on the side wall of the idler shaft; the guide wheel shaft rotation prohibiting mechanism comprises a mounting seat fixed on the mounting plate, a groove is processed at one end of the mounting seat facing the guide wheel, the guide wheel shaft axially penetrates through the groove bottom of the groove, threaded holes are respectively formed in the four walls of the groove, a fastening bolt is arranged in one or two threaded holes oppositely arranged, and the fastening bolt is matched with the plane to block the guide wheel shaft from rotating around the axis of the guide wheel shaft; the groove is internally provided with a return spring sleeved on the guide wheel shaft, one end of the return spring is connected with one end of the guide wheel shaft, which is provided with the guide wheel, the other end of the return spring is connected with the bottom of the groove, and the outer diameter of one end of the guide wheel shaft, which is provided with the guide wheel, is matched with the inner diameter of the groove.
The working process of the invention is as follows: the silicon rod is placed in the feeding centering device, the feeding centering device clamps the silicon rod, then the feeding conveying sliding table moves to the machine tool base from the side part of the machine tool base, and the clamp group on the Z-axis feeding sliding table clamps two end surfaces of the silicon rod in the length direction of the machine tool base; and the detection sliding table moves to the position of the silicon rod, and the blank detection device detects the size of the silicon rod and judges the machining allowance. Then the Z-axis feeding sliding table and the clamp group drive the silicon rod to move to the crystal rod grinding device for grinding (grinding is carried out according to feedback OF the blank detection device, the clamp group drives the crystal rod to rotate around the axis OF the crystal rod in the grinding process), the processing detection device carries out rechecking after the grinding process is finished (size detection is carried out after coarse grinding is finished, then accurate grinding is carried out, and the rechecking is still carried out after the accurate grinding is finished), then the Z-axis feeding sliding table moves to the original position, the detection sliding table slides out, the X-ray crystal orientation detector carries out crystal orientation detection on the ground silicon rod, the silicon rod moves to the crystal rod grinding device again after the crystal wire is detected to carry out OF plane (reference plane) or V-shaped Notch groove (V-shaped groove) processing, and then the silicon rod returns to the original position to carry out blanking.
Compared with the prior art, the invention has the following advantages:
1. the invention realizes full-automatic processing, mechanical feeding and mechanical detection to determine the grinding times, reduces manual operation, and increases working efficiency and working precision.
2. The structure and the space are reasonably utilized, and the occupied space size of the machine tool can be effectively reduced.
3. The invention can realize that cylindrical wafer blank bars with different diameters and specifications are fixedly clamped by keeping the same center. And the span of the clamping points can be adjusted according to the silicon rods with different lengths, so that the central axis of the wafer blank is ensured to be horizontal. And has the functions of detecting the specification of the clamping diameter of the bar stock and detecting whether the bar stock is clamped or not. And has the unloading function when the bar is subjected to the axial thrust. And has the bar clamping action boosting function. And has the function of feeding back the opening position of the clamping jaw.
4. The roller is additionally arranged on the probe in the blank detection device, so that the continuous detection of the silicon rod is realized, and the detection efficiency and the detection precision are increased.
For the reasons, the invention can be widely popularized in the fields of silicon rod processing and the like.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a semiconductor crystal bar barreling machine according to an embodiment of the invention.
Fig. 2 is a schematic structural view of a semiconductor ingot tumbling mill with another small angle of view according to an embodiment of the present invention.
FIG. 3 is a schematic diagram of a semiconductor ingot tumbling mill configuration according to one embodiment of the present invention (top view).
Fig. 4 is a schematic structural diagram of a clamp group according to an embodiment of the present invention.
FIG. 5 is a front view of an outer circle and reference surface grinding apparatus according to an embodiment of the present invention.
Fig. 6 is a schematic structural view of a feeding centering device in the embodiment of the present invention.
Fig. 7 is a schematic structural view of the feeding centering device according to another view in the embodiment of the present invention.
Fig. 8 is a schematic structural diagram of a floating buffer mechanism according to an embodiment of the present invention.
FIG. 9 is a schematic structural diagram of a silicon rod detection mechanism according to an embodiment of the present invention.
Fig. 10 is a schematic structural view of a blank detection device in the embodiment of the present invention.
Fig. 11 is a sectional view taken along line a-a in fig. 10.
In the figure: 1. a machine tool base; 2. a cross beam; 3. a Z-axis feed slide table; 4. a Z-axis feed drive; 5. a clamp group; 501. a Z-axis lead screw; 502. a chuck; 503. a motor and a harmonic reducer;
6. a feeding guide rail group; 7. a feeding conveying sliding table; 8. a feeding conveying sliding table driving mechanism; 9. detecting the sliding table; 10. detecting a sliding table driving mechanism; 11. a feeding centering device; 1101. a slide guide rail; 1102. a slide plate; 1103. a jaw guide; 1104. a clamping jaw; 1105. a second left-right-handed double-nut screw; 1106. a jaw drive motor; 1107. a first left-right-handed double-nut screw; 1108. a hand wheel; 1109. a tray; 1110. crystal support; 1111. a first transverse plate; 1112. a second transverse plate; 1113. a slide guide bar; 1114. a first spring; 1115. a limiting block; 1116. a lead screw fixing seat; 1117. a fixed seat; 1118. a guide bolt; 1119. a second spring; 1120. a lead screw bearing seat; 1121. the opening position of the clamping jaw triggers a switch; 1122. a vertical plane; 1123. mounting grooves; 1124. a piston; 1125. a piston rod; 1126. a third spring; 1127. a trigger switch;
12. a blank detection device; 1201. detecting a cylinder; 1202. detecting the bracket; 1203. mounting a plate; 1204. detecting a guide rail; 1205. a probe; 1206. a guide wheel shaft; 1207. a guide wheel; 1208. a mounting seat; 1209. tightening the bolt; 1210. a return spring; 1211. a guide wheel shaft is provided with a screw;
13. an X-ray crystal orientation detector; 14. a crystal bar grinding device; 1401. a V-shaped groove grinding device; 1402. an excircle and reference surface grinding device; 1403. grinding the guide rail; 1404. a spindle feed slide table; 1405. grinding the main shaft; 1406. a spindle drive mechanism; 1407. a frame; 1408. a vertical guide rail; 1409. lifting the sliding table; 1410. a lifting cylinder; 15. a processing detection device.
Detailed Description
It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of exemplary embodiments according to the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
The relative arrangement of the components and steps, the numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. Any specific values in all examples shown and discussed herein are to be construed as exemplary only and not as limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.
In the description of the present invention, it is to be understood that the orientation or positional relationship indicated by the directional terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal" and "top, bottom", etc., are generally based on the orientation or positional relationship shown in the drawings, and are used for convenience of description and simplicity of description only, and in the absence of any contrary indication, these directional terms are not intended to indicate and imply that the device or element so referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore should not be considered as limiting the scope of the present invention: the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.
Spatially relative terms, such as "above … …," "above … …," "above … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and the terms have no special meanings unless otherwise stated, and therefore, the scope of the present invention should not be construed as being limited.
As shown in fig. 1 to 10, a semiconductor crystal bar barreling machine comprises:
a machine tool base 1;
a cross beam 2 which is arranged above the machine tool base 1 and has an extending direction parallel to the longitudinal direction of the machine tool base 1;
the Z-axis feeding sliding table 3 is arranged on the cross beam 2 and is connected with the cross beam 2 in a sliding manner;
the Z-axis feeding driving device 4 is arranged on the cross beam 2 and used for driving the Z-axis feeding sliding table 3 to horizontally move along the extending direction of the cross beam 2; the Z-axis feed driving device 4 can adopt a lead screw, the output end of the lead screw is connected with the Z-axis feed sliding table 3, and the input end of the lead screw is connected with a motor;
the clamp group 5 is arranged at the bottom of the Z-axis feeding sliding table 3, is used for axially clamping two end surfaces of the crystal bar and drives the crystal bar to rotate around the axis of the crystal bar;
the feeding guide rail group 6 is installed on the machine tool base 1, is arranged at the head end of the machine tool base 1, and extends along the width direction of the machine tool base 1; two guide rails are usually used for structural stability;
the feeding conveying sliding table 7 is arranged on the feeding guide rail group 6 and is connected with the feeding guide rail group 6 in a sliding manner;
the feeding conveying sliding table driving mechanism 8 is used for driving the feeding conveying sliding table 7 to horizontally move along the extension direction of the feeding guide rail group 6; the feeding conveying sliding table driving mechanism 8 can adopt a lead screw, the output end of the lead screw is connected with the feeding conveying sliding table 7, and the input end of the lead screw is connected with a motor;
the detection sliding table 9 is arranged on the feeding guide rail group 6 and is in sliding connection with the feeding guide rail group 6;
the detection sliding table driving mechanism 10 is used for driving the detection sliding table 9 to horizontally move along the extension direction of the feeding guide rail group 6; the detection sliding table driving mechanism 10 can adopt a lead screw, the output end of the lead screw is connected with the detection sliding table 9, and the input end of the lead screw is connected with a motor;
the feeding centering device 11 is arranged on the feeding conveying sliding table 7 and used for radially clamping the outer wall of the crystal bar and enabling the axis of the crystal bar to be parallel to the length direction of the machine tool base 1;
the blank detection device 12 is arranged on the detection sliding table 9 and used for detecting the blank size and the machining allowance of the crystal bar;
the X-ray crystal orientation detector 13 is arranged on the detection sliding table 9 and is used for detecting crystal lines of the crystal bars; a crystal bar grinding device 14 which is arranged on the side part of the machine tool base 1 and is used for grinding crystal bars; and
and the processing detection device 15 is arranged on the crystal bar grinding device 14 and is used for detecting the processed size of the crystal bar. The processing detection device 15 can adopt a combination of a probe and a cylinder, and the cylinder pushes the probe to stretch and retract so that the probe can detect.
The jig set 5 includes: a Z-axis lead screw 501 mounted on the Z-axis feeding sliding table 3, and an input end thereof is connected with a first motor; the axis of the Z-axis screw 501 is parallel to the length direction of the machine tool base, and in order to ensure the stable movement of the chuck, a guide rail is arranged on the Z-axis feeding sliding table 3, and the chuck 502 is arranged on the guide rail and is in sliding fit with the guide rail. One of the two chucks 502 is connected with the output end of the Z-axis screw 501, the other chuck is fixedly connected with the bottom of the Z-axis feeding sliding table 3, and the chucks 502 can adopt chucks provided by application numbers of (2020217826293) or (201820892877X); the chuck 502 fixed at the bottom of the Z-axis feeding sliding table 3 is connected with a motor and a harmonic reducer 503, and the motor and the harmonic reducer 503 are used for driving the chuck 502 to rotate around the axis thereof.
The crystal bar grinding device 14 comprises a V-shaped groove grinding device 1401 and at least one outer circle and reference surface grinding device 1402, wherein the V-shaped groove grinding device 1401 is used for processing a V-shaped groove on the silicon rod, the outer circle and reference surface grinding device 1402 is used for grinding the outer surface of the silicon rod and processing a reference plane on the outer surface of the silicon rod, and the V-shaped groove grinding device 1401 and the outer circle and reference surface grinding device 1402 are oppositely arranged. When a plurality of outer circle and reference surface grinding devices 1402 are used, a plurality of the outer circle and reference surface grinding devices 1402 are arranged side by side, and one of them may be used alone for rough grinding, one of them may be used alone for finish grinding, and one of them may be used alone for grinding the reference surface. An outer circle and reference surface grinding device 1402 may also be used.
Preferably, the V-groove grinding device 1401 and the outer circle and reference surface grinding device 1402 each include: a grinding rail 1403 extending in the width direction of the machine base 1; a spindle feed slide table 1404 mounted on the grinding guide 1403 and slidably engaged with the grinding guide 1403; a spindle screw, an output end of which is connected to the spindle feed sliding table, and an input end of which is connected to a motor, for driving the spindle feed sliding table 1404 to horizontally move along the grinding guide 1403; and a grinding spindle 1405 mounted on the spindle feed slide 1404 and having an input end connected to a spindle drive mechanism 1406. The spindle drive mechanism 1406 may employ a motor having a pulley and then connected to the input end of the grinding spindle by a belt to effect rotation of the grinding spindle.
Preferably, the grinding spindle 1405 of the outer circle and reference surface grinding apparatus 1402 is mounted on the spindle feed slide table 1404 by a vertical feed mechanism including: a frame 1407 vertically fixed on the spindle feed sliding table 1404; a vertical guide 1408 mounted on an inner wall of the housing 1407; an elevating slide table 1409 which is slidably fitted to the vertical guide rail 1408, and on which the grinding spindle 1405 is mounted; and a lift cylinder 1410 installed on the spindle feed slide 1404 and having an input end connected to the lift slide 1409. The machining detection device 15 is installed on the lifting slide table 1409.
Preferably, said feeding centring device 11 comprises: the two sliding plate guide rails 1101 are arranged in parallel, fixed on the feeding conveying sliding table 7 and parallel to the extending direction of the machine tool base 1;
the silicon rod bearing device is positioned between the two sliding plate guide rails 1101 and is used for bearing a silicon rod;
the extending directions of the two clamping jaw systems are parallel to the width direction of the machine tool base 1 and are used for clamping the silicon rod carried by the silicon rod carrying device; and
a gripper system driving mechanism for driving the two gripper systems to move toward or away from each other along the extending direction of the sled guide 1101;
the jaw system comprises: a slide plate 1102 extending in a direction parallel to the width direction of the machine tool base 1, the bottom of which is slidably connected to the two slide plate rails 1101 through slide plate sliders; a jaw guide 1103 located on the slide plate 1102 and having an extending direction parallel to the width direction of the machine tool base 1; the bottoms of the two clamping jaws 1104 are connected with the clamping jaw guide rail 1103 in a sliding manner through clamping jaw sliding blocks, and the opposite surfaces of the two clamping jaws 1104 are provided with V-shaped clamping openings; and a jaw driving mechanism, located on the sliding plate 1102, for driving the two jaws 1104 to move towards or away from each other along the extending direction of the jaw guide.
Preferably, the jaw driving mechanism is a second left-right screw double-nut screw 1105, two output ends of which are respectively and fixedly connected with the two jaws 1104, and an input end of which is a jaw driving motor 1106.
Preferably, the jaw system drive mechanism comprises: two output ends of the first left-right-handed double-nut screw 1107 are respectively and fixedly connected with the bottoms of the two sliding plates 1102, and the input end of the first left-right-handed double-nut screw is a hand wheel 1108 or a first motor;
preferably, the silicon rod carrying device comprises: the tray 1109 is positioned above the sliding plate 1102, the extending direction of the tray 1109 is parallel to the length direction of the machine tool base 1, two ends of the tray 1109 are provided with vertical plates extending downwards, and the length of the tray 1109 is greater than or equal to that of the sliding plate guide rail 1101; the crystal support 1110 is fixed at the top of the tray 1109 and is used for bearing the silicon rod; a first horizontal plate 1111 fixed to the vertical plate; the second transverse plate 1112 is positioned below the first transverse plate 1111 and is fixedly connected with the feeding conveying sliding table 7; a plurality of sliding guide rods 1113 vertically passing through the first and second cross plates 1111 and 1112; a plurality of first springs 1114 fitted around a portion of the sliding guide rod 1113 between the first cross plate 1111 and the second cross plate 1112; and two limit blocks 1115 fixed to the lower surface of the first horizontal plate 1111 and the upper surface of the second horizontal plate 1112, respectively, for limiting.
The first left-right-handed double-nut screw 1107 is connected with the sliding plate 1102 through a floating buffer mechanism;
the floating buffer mechanism comprises: the screw fixing seat 1116 is fixed in the middle of the sliding plate 1102, and the middle of a screw of the first left-right double-screw nut screw 1107 is connected with the sliding plate 1102 through the screw fixing seat 1116; a fixed seat 1117 which is positioned beside the screw rod fixed seat 1116 and is fixedly connected with the feeding conveying sliding table 7; the extending direction of the guide bolt 1118 is parallel to the length direction of the machine tool base 1, and one end of the guide bolt, which is far away from the screwing end, penetrates through the fixed seat 1117 and is fixedly connected with the lead screw fixed seat 1116; and a second spring 1119 sleeved on the guide bolt 1118, wherein one end of the second spring is connected with the fixed seat 1117, and the other end of the second spring is connected with the lead screw fixed seat 1116.
Preferably, the jaw system further comprises: a clamping jaw opening position feedback mechanism; the clamping jaw opening position feedback mechanism comprises: a screw bearing 1120 fixed to one end of the slide plate 1102 and close to the jaw driving motor 1106, wherein one end of a screw of the second left-right double-nut screw 1105 is connected to the slide plate 1102 through the screw bearing 1120; and a jaw opening position trigger switch 1121 which is installed on the screw shaft bearing block 1120, and when the two jaws 1104 move away to the maximum stroke, the jaw 1104 close to the jaw opening position trigger switch 1121 touches the jaw opening position trigger switch 1121 to open.
Preferably, the clip in a V-shape has a vertical face 1122 at the inner end of its opening. A silicon rod detection mechanism is arranged on the vertical surface 1122; the silicon rod detection mechanism includes: a mounting groove 1123 machined in the vertical surface 1122 with an opening extending toward an open outer end of the nip; the outer diameter of the piston 1124 is matched with the inner diameter of the mounting groove 1123, part of the piston is positioned in the mounting groove 1123, and part of the piston penetrates through the notch of the mounting groove 1123; a piston rod 1125 parallel to the width direction of the machine tool base 1, one end of which passes through the groove bottom of the mounting groove 1123 and is fixedly connected with the piston 1124; a third spring 1126, which is located in the mounting groove 1124, and is sleeved on the piston rod 1125, wherein one end of the third spring is connected to the piston 1124, and the other end of the third spring is connected to the groove bottom of the mounting groove 1123, so that the piston rod 1125 can return; and a trigger switch 1127 installed on the side of the jaw 1104 not having the nip, near the other end of the piston rod 1125; after the silicon rod is clamped by the clamping jaw 1104, the piston rod 1125 moves, and the other end of the piston rod 1125 triggers the trigger switch 1127.
Preferably, the location of the mounting groove 1123 on each of the vertical surfaces 1122 is different, or the length of the slot of each of the pistons 1124 extending through the mounting groove 1123 is different. Or a contact type displacement sensor may be mounted on the vertical surface 1122 instead of the silicon rod detecting mechanism.
Preferably, the blank detection device 12 includes a detection cylinder 1201 fixed on the detection sliding table 9, an output end of the detection cylinder 1201 is connected with a mounting plate 1203 through a detection support 1202, the mounting plate 1203 is slidably connected with a detection guide rail 1204 fixed on the detection sliding table 9, and an extending direction of the detection guide rail 1204 is parallel to a width direction of the machine tool base 1;
a probe 1205 is installed on the installation 1203 plate, an output end of the probe 1205 is connected with a guide wheel shaft 1206, the guide wheel shaft 1206 pre-presses the probe 1205, a guide wheel 1207 is installed at one end, far away from the probe 1205, of the guide wheel shaft 1206, the extending direction of the guide wheel shaft 1206 is overlapped with the extending direction of the probe 1205, the extending direction of the probe 1205 is parallel to the width direction of the machine tool base 1, and a guide wheel shaft rotation inhibiting mechanism is arranged at the position, where the guide wheel shaft 1206 is located, of the installation plate 1203 and used for inhibiting the guide wheel shaft 1206 from rotating around the axis of the guide wheel shaft 1206.
Preferably, a plane is machined on the side wall of the idler shaft 1206; the rotation prohibiting mechanism for the guide wheel shaft 1206 comprises a mounting seat 1208 fixed on the mounting plate 1203, a groove is processed at one end, facing the guide wheel 1207, of the mounting seat 1208, the guide wheel shaft 1206 axially penetrates through the groove bottom of the groove, threaded holes are respectively formed in the four walls of the groove, a fastening bolt 1209 is arranged in one or two threaded holes oppositely arranged in the groove, the fastening bolt 1209 is matched with the plane to prevent the guide wheel shaft 1206 from rotating around the axis of the guide wheel shaft 1206, and the fastening bolt 1209 rotates around after tightly pushing against the plane to ensure the smooth extension and retraction of the guide wheel shaft 1206; a return spring 1210 sleeved on the guide wheel shaft 1206 is arranged in the groove, one end of the return spring 1210 is connected with one end of the guide wheel shaft 1206 with a guide wheel 1207, the other end of the return spring 1210 is connected with the groove bottom of the groove, and the outer diameter of one end of the guide wheel shaft 1206 with the guide wheel 1207 is matched with the inner diameter of the groove. A guide wheel shaft mounting screw 1211 is fixed to one end of the guide wheel shaft 1206 penetrating through the mounting seat 1208, and the guide wheel shaft mounting screw 1211 is in contact connection with the output end of the probe 1205 and pre-presses the probe 1205.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A semiconductor crystal bar barreling machine tool is characterized by comprising:
a machine tool base;
the cross beam is arranged above the machine tool base, and the extending direction of the cross beam is parallel to the length direction of the machine tool base;
the Z-axis feeding sliding table is arranged on the cross beam and is connected with the cross beam in a sliding manner;
the Z-axis feeding driving device is arranged on the cross beam and used for driving the Z-axis feeding sliding table to horizontally move along the extension direction of the cross beam;
the clamp group is arranged at the bottom of the Z-axis feeding sliding table, is used for axially clamping two end surfaces of the crystal bar and drives the crystal bar to rotate around the axis of the crystal bar;
the feeding guide rail group is arranged on the machine tool base, is arranged at the head end of the machine tool base, and extends along the width direction of the machine tool base;
the feeding conveying sliding table is arranged on the feeding guide rail group and is connected with the feeding guide rail group in a sliding manner;
the feeding conveying sliding table driving mechanism is used for driving the feeding conveying sliding table to horizontally move along the extension direction of the feeding guide rail group;
the detection sliding table is arranged on the feeding guide rail group and is in sliding connection with the feeding guide rail group;
the detection sliding table driving mechanism is used for driving the detection sliding table to horizontally move along the extension direction of the feeding guide rail group;
the feeding centering device is arranged on the feeding conveying sliding table and used for radially clamping the outer wall of the crystal bar and enabling the axis of the crystal bar to be parallel to the length direction of the machine tool base;
the blank detection device is arranged on the detection sliding table and used for detecting the blank size and the machining allowance of the crystal bar;
the X-ray crystal orientation detector is arranged on the detection sliding table and used for detecting crystal lines of the crystal bars;
the crystal bar grinding device is arranged on the side part of the machine tool base and is used for grinding the crystal bar; and
and the processing detection device is arranged on the crystal bar grinding device and is used for detecting the processed size of the crystal bar.
2. The semiconductor ingot tumbling mill of claim 1, wherein the jig set comprises:
the Z-axis screw is arranged on the Z-axis feeding sliding table, and the input end of the Z-axis screw is connected with the first motor;
one chuck is connected with the output end of the Z-axis screw rod, and the other chuck is fixedly connected with the Z-axis feeding sliding table; and
and the motor and the harmonic reducer are connected with the chuck fixed on the Z-axis feeding sliding table and used for driving the chuck to rotate around the axis of the chuck.
3. The semiconductor crystal bar barreling machine according to claim 1 or 2, wherein the crystal bar grinding device comprises a V-shaped groove grinding device for processing a V-shaped groove on the silicon rod and at least one outer circle and reference surface grinding device for grinding an outer surface of the silicon rod and processing a reference plane on the outer surface of the silicon rod.
4. The semiconductor crystal bar barreling machine according to claim 3, wherein the V-groove grinding device and the outer circle and reference surface grinding device each comprise:
the extending direction of the grinding guide rail is the width direction of the machine tool base;
the spindle feeding sliding table is arranged on the grinding guide rail and is in sliding fit with the grinding guide rail;
the output end of the main shaft screw is connected with the main shaft feeding sliding table, and the input end of the main shaft screw is connected with a motor and used for driving the main shaft feeding sliding table to horizontally move along the direction of the grinding guide rail; and
and the grinding main shaft is arranged on the main shaft feeding sliding table, and the input end of the grinding main shaft is connected with a main shaft driving mechanism.
5. The semiconductor crystal bar barreling machine tool according to claim 4, wherein the grinding spindle of the outer circle and reference surface grinding device is mounted on the spindle feed sliding table through a vertical feed mechanism, the vertical feed mechanism comprising:
the frame is vertically fixed on the main shaft feeding sliding table;
the vertical guide rail is arranged on the inner wall of the rack;
a lifting slide table in sliding fit with the vertical guide rail, and the grinding spindle is mounted on the lifting slide table and
and the lifting cylinder is arranged on the main shaft feeding sliding table, and the input end of the lifting cylinder is connected with the lifting sliding table.
6. The semiconductor crystal bar barreling machine according to claim 1, wherein the feeding centering device comprises:
the two sliding plate guide rails are arranged in parallel and fixed on the feeding conveying sliding table, and the extending direction of the two sliding plate guide rails is parallel to the length direction of the machine tool base;
the silicon rod bearing device is positioned between the two sliding plate guide rails and is used for bearing a silicon rod;
the extending directions of the two clamping jaw systems are parallel to the width direction of the machine tool base and are used for clamping the silicon rod carried by the silicon rod carrying device; and
the clamping jaw system driving mechanism is used for driving the two clamping jaw systems to move towards or away from each other along the extending direction of the sliding plate guide rail;
the jaw system comprises:
the extending direction of the sliding plate is parallel to the width direction of the machine tool base, and the bottom of the sliding plate is connected with the two sliding plate guide rails in a sliding mode through sliding plate sliding blocks;
the clamping jaw guide rail is positioned on the sliding plate, and the extending direction of the clamping jaw guide rail is parallel to the width direction of the machine tool base;
the bottoms of the two clamping jaws are connected with the clamping jaw guide rail in a sliding manner through clamping jaw sliding blocks, and the opposite surfaces of the two clamping jaws are provided with V-shaped clamping openings; and
and the clamping jaw driving mechanism is positioned on the sliding plate and used for driving the two clamping jaws to move towards or away from each other along the extension direction of the clamping jaw guide rail.
7. The semiconductor crystal bar barreling machine according to claim 6, wherein the silicon rod carrying device comprises:
the tray is positioned above the sliding plate, the extending direction of the tray is parallel to the length direction of the machine tool base, vertical plates extending vertically and downwards are arranged at two ends of the tray, and the length of the tray is greater than or equal to that of the sliding plate guide rail;
the crystal support is fixed at the top of the tray and used for bearing the silicon rod;
the first transverse plate is fixed on the vertical plate;
the second transverse plate is positioned below the first transverse plate and is fixedly connected with the feeding conveying sliding table;
a plurality of sliding guide rods vertically passing through the first and second cross plates;
the sliding guide rod is sleeved with a part between the first transverse plate and the second transverse plate; and
and the two limiting blocks are respectively fixed on the lower surface of the first transverse plate and the upper surface of the second transverse plate and used for limiting.
8. The semiconductor ingot tumbling machine of claim 6, wherein the jaw system drive mechanism comprises:
two output ends of the first left-right-handed double-nut screw are fixedly connected with the bottoms of the two sliding plates respectively, and the input end of the first left-right-handed double-nut screw is a hand wheel or a first motor;
the first left-right-handed double-nut screw is connected with the sliding plate through a floating buffer mechanism;
the floating buffer mechanism comprises:
the middle part of the lead screw of the first left-right-handed double-nut lead screw is connected with the sliding plate through the lead screw fixing seat;
the fixed seat is positioned beside the screw rod fixed seat and is fixedly connected with the feeding conveying sliding table;
the extending direction of the guide bolt is parallel to the length direction of the machine tool base, and one end of the guide bolt, which is far away from the screwing end, penetrates through the fixed seat and is fixedly connected with the lead screw fixed seat; and
and the second spring is sleeved on the guide bolt, one end of the second spring is connected with the fixed seat, and the other end of the second spring is connected with the lead screw fixed seat.
9. The semiconductor crystal bar barreling machine tool according to claim 1, wherein the blank detection device comprises a detection cylinder fixed on the detection sliding table, an output end of the detection cylinder is connected with a mounting plate through a detection bracket, the mounting plate is in sliding connection with a detection guide rail fixed on the detection sliding table, and the extension direction of the detection guide rail is parallel to the width direction of the machine tool base;
the probe is installed on the installing plate, the output end of the probe is connected with a guide wheel shaft, the guide wheel shaft is pre-pressed on the probe, the guide wheel shaft is far away from one end of the probe, a guide wheel is installed at one end of the guide wheel shaft, the extending direction of the guide wheel shaft is overlapped with the extending direction of the probe, and a guide wheel shaft rotation prohibiting mechanism is arranged at the position of the guide wheel shaft and used for blocking the guide wheel shaft to rotate around the axis of the guide wheel shaft.
10. The semiconductor crystal bar barreling machine according to claim 9, wherein the side wall of the idler shaft is provided with a plane; the guide wheel shaft rotation prohibiting mechanism comprises a mounting seat fixed on the mounting plate, a groove is processed at one end of the mounting seat facing the guide wheel, the guide wheel shaft axially penetrates through the groove bottom of the groove, threaded holes are respectively formed in the four walls of the groove, a fastening bolt is arranged in one or two threaded holes oppositely arranged, and the fastening bolt is matched with the plane to block the guide wheel shaft from rotating around the axis of the guide wheel shaft; the groove is internally provided with a return spring sleeved on the guide wheel shaft, one end of the return spring is connected with one end of the guide wheel shaft, which is provided with the guide wheel, the other end of the return spring is connected with the bottom of the groove, and the outer diameter of one end of the guide wheel shaft, which is provided with the guide wheel, is matched with the inner diameter of the groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110825306.0A CN113370005A (en) | 2021-07-21 | 2021-07-21 | Semiconductor crystal bar tumbling mill |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110825306.0A CN113370005A (en) | 2021-07-21 | 2021-07-21 | Semiconductor crystal bar tumbling mill |
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| CN113370005A true CN113370005A (en) | 2021-09-10 |
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| CN202110825306.0A Pending CN113370005A (en) | 2021-07-21 | 2021-07-21 | Semiconductor crystal bar tumbling mill |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114277440A (en) * | 2021-11-23 | 2022-04-05 | 浙江晶盛机电股份有限公司 | Clamp, crystal bar grabbing device and single crystal furnace |
| CN114734318A (en) * | 2022-03-15 | 2022-07-12 | 银川隆基硅材料有限公司 | Silicon wafer grinding method and silicon wafer grinding device |
| CN115673895A (en) * | 2022-11-11 | 2023-02-03 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Semiconductor material chip synthesis equipment |
| CN117400091A (en) * | 2023-12-14 | 2024-01-16 | 山东粤海金半导体科技有限公司 | Barreling device for silicon carbide ingot |
| CN117415683A (en) * | 2023-10-31 | 2024-01-19 | 宁夏中欣晶圆半导体科技有限公司 | Barreling method of semiconductor crystal bar barreling machine |
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2021
- 2021-07-21 CN CN202110825306.0A patent/CN113370005A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114277440A (en) * | 2021-11-23 | 2022-04-05 | 浙江晶盛机电股份有限公司 | Clamp, crystal bar grabbing device and single crystal furnace |
| CN114734318A (en) * | 2022-03-15 | 2022-07-12 | 银川隆基硅材料有限公司 | Silicon wafer grinding method and silicon wafer grinding device |
| CN115673895A (en) * | 2022-11-11 | 2023-02-03 | 苏师大半导体材料与设备研究院(邳州)有限公司 | Semiconductor material chip synthesis equipment |
| CN117415683A (en) * | 2023-10-31 | 2024-01-19 | 宁夏中欣晶圆半导体科技有限公司 | Barreling method of semiconductor crystal bar barreling machine |
| CN117400091A (en) * | 2023-12-14 | 2024-01-16 | 山东粤海金半导体科技有限公司 | Barreling device for silicon carbide ingot |
| CN117400091B (en) * | 2023-12-14 | 2024-02-09 | 山东粤海金半导体科技有限公司 | Barreling device for silicon carbide ingot |
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