JP2012172208A5 - - Google Patents

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Publication number
JP2012172208A5
JP2012172208A5 JP2011036450A JP2011036450A JP2012172208A5 JP 2012172208 A5 JP2012172208 A5 JP 2012172208A5 JP 2011036450 A JP2011036450 A JP 2011036450A JP 2011036450 A JP2011036450 A JP 2011036450A JP 2012172208 A5 JP2012172208 A5 JP 2012172208A5
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Japan
Prior art keywords
microwave
plastic bottle
gas
supply pipe
confinement chamber
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JP2011036450A
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English (en)
Japanese (ja)
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JP2012172208A (ja
JP5555930B2 (ja
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Priority claimed from JP2011036450A external-priority patent/JP5555930B2/ja
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Publication of JP2012172208A5 publication Critical patent/JP2012172208A5/ja
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JP2011036450A 2011-02-22 2011-02-22 プラスチックボトル内面の処理方法及びプラスチックボトル内面の処理装置 Expired - Fee Related JP5555930B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011036450A JP5555930B2 (ja) 2011-02-22 2011-02-22 プラスチックボトル内面の処理方法及びプラスチックボトル内面の処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011036450A JP5555930B2 (ja) 2011-02-22 2011-02-22 プラスチックボトル内面の処理方法及びプラスチックボトル内面の処理装置

Publications (3)

Publication Number Publication Date
JP2012172208A JP2012172208A (ja) 2012-09-10
JP2012172208A5 true JP2012172208A5 (https=) 2014-02-27
JP5555930B2 JP5555930B2 (ja) 2014-07-23

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JP2011036450A Expired - Fee Related JP5555930B2 (ja) 2011-02-22 2011-02-22 プラスチックボトル内面の処理方法及びプラスチックボトル内面の処理装置

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JP (1) JP5555930B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10329662B2 (en) 2014-03-03 2019-06-25 Picosun Oy Protecting an interior of a hollow body with an ALD coating
SG11201605837TA (en) 2014-03-03 2016-08-30 Picosun Oy Protecting an interior of a gas container with an ald coating
JP6662520B2 (ja) * 2015-10-02 2020-03-11 国立大学法人山形大学 内面コーティング方法及び装置
JP6848578B2 (ja) * 2017-03-23 2021-03-24 三菱ケミカル株式会社 プラスチックボトルの製造方法
CA3176927A1 (en) * 2020-03-25 2021-09-30 Suntory Holdings Limited Atmospheric pressure remote plasma cvd device, film formation method, and plastic bottle manufacturing method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4122452C2 (de) * 1991-07-06 1993-10-28 Schott Glaswerke Verfahren und Vorrichtung zum Zünden von CVD-Plasmen
EP1019944A1 (en) * 1997-09-30 2000-07-19 Tetra Laval Holdings & Finance S.A. Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
JP4595276B2 (ja) * 2000-12-25 2010-12-08 東洋製罐株式会社 マイクロ波プラズマ処理方法及び装置
JP4432351B2 (ja) * 2003-04-16 2010-03-17 東洋製罐株式会社 マイクロ波プラズマ処理方法
JP2006124739A (ja) * 2004-10-27 2006-05-18 Toppan Printing Co Ltd プラズマｃｖｄ法成膜装置
JP2006144099A (ja) * 2004-11-24 2006-06-08 Toppan Printing Co Ltd ３次元中空容器の薄膜成膜装置
JP2008106331A (ja) * 2006-10-27 2008-05-08 Toppan Printing Co Ltd プラズマｃｖｄによる容器処理装置

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