JP2012172208A5 - - Google Patents
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- JP2012172208A5 JP2012172208A5 JP2011036450A JP2011036450A JP2012172208A5 JP 2012172208 A5 JP2012172208 A5 JP 2012172208A5 JP 2011036450 A JP2011036450 A JP 2011036450A JP 2011036450 A JP2011036450 A JP 2011036450A JP 2012172208 A5 JP2012172208 A5 JP 2012172208A5
- Authority
- JP
- Japan
- Prior art keywords
- microwave
- plastic bottle
- gas
- supply pipe
- confinement chamber
- Prior art date
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Claims (4)
筒状の誘電体からなる供給管本体の内部に導電体からなる細棒部材を配置してなる前記ガス供給管に、前記マイクロ波閉じ込め室の周囲に配置され、前記マイクロ波閉じ込め室に対向する面に設けられたスリットアンテナから前記マイクロ波閉じ込め室の内部にリング状共振器によりマイクロ波を導入することにより、前記細棒部材を放電させて前記プラスチックボトルの内部にプラズマを発生させ、
前記プラズマの発生を前記マイクロ波の導入により維持して、前記ガス供給管により供給された原料ガスを含むガスをプラズマ化することを特徴とするプラスチックボトル内面の処理方法。 A plastic bottle to be treated is disposed inside the microwave confinement chamber, a microwave is introduced into the microwave confinement chamber, and a raw material gas supplied by a gas supply pipe disposed inside the plastic bottle is supplied. It is a method of converting the contained gas into plasma and processing the inner surface of the plastic bottle,
A gas supply pipe formed by arranging a thin rod member made of a conductor inside a supply pipe body made of a cylindrical dielectric is arranged around the microwave confinement chamber and faces the microwave confinement chamber. By introducing a microwave from a slit antenna provided on the surface into the microwave confinement chamber by a ring resonator, the thin rod member is discharged to generate plasma inside the plastic bottle,
A method of treating an inner surface of a plastic bottle, characterized in that the generation of the plasma is maintained by introducing the microwave and the gas containing the raw material gas supplied from the gas supply pipe is turned into plasma.
前記マイクロ波導入手段は、前記マイクロ波閉じ込め室の周囲に配置され、前記マイクロ波閉じ込め室に対向する面に設けられたスリットアンテナから前記マイクロ波閉じ込め室の内部にマイクロ波を導入するリング状共振器を含み、 The microwave introducing means is arranged around the microwave confining chamber, and is a ring-shaped resonance for introducing the microwave into the microwave confining chamber from a slit antenna provided on a surface facing the microwave confining chamber. Including
前記ガス供給管は、筒状の誘電体からなる供給管本体の内部に導電体からなる細棒部材を配置してなることを特徴とするプラスチックボトル内面の処理装置。 The said gas supply pipe | tube is a processing apparatus of the inner surface of a plastic bottle characterized by arrange | positioning the thin rod member which consists of conductors inside the supply pipe | tube main body which consists of a cylindrical dielectric material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011036450A JP5555930B2 (en) | 2011-02-22 | 2011-02-22 | Method for processing inner surface of plastic bottle and apparatus for processing inner surface of plastic bottle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011036450A JP5555930B2 (en) | 2011-02-22 | 2011-02-22 | Method for processing inner surface of plastic bottle and apparatus for processing inner surface of plastic bottle |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012172208A JP2012172208A (en) | 2012-09-10 |
| JP2012172208A5 true JP2012172208A5 (en) | 2014-02-27 |
| JP5555930B2 JP5555930B2 (en) | 2014-07-23 |
Family
ID=46975403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011036450A Expired - Fee Related JP5555930B2 (en) | 2011-02-22 | 2011-02-22 | Method for processing inner surface of plastic bottle and apparatus for processing inner surface of plastic bottle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5555930B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106062246B (en) * | 2014-03-03 | 2020-05-08 | 皮考逊公司 | Protection of the interior of hollow bodies with ALD coatings |
| JP6302082B2 (en) | 2014-03-03 | 2018-03-28 | ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ | Protection inside gas container by ALD coating |
| JP6662520B2 (en) * | 2015-10-02 | 2020-03-11 | 国立大学法人山形大学 | Inner surface coating method and apparatus |
| JP6848578B2 (en) * | 2017-03-23 | 2021-03-24 | 三菱ケミカル株式会社 | How to make a plastic bottle |
| BR112022019126A2 (en) * | 2020-03-25 | 2022-11-08 | Suntory Holdings Ltd | CVD APPARATUS WITH REMOTE ATMOSPHERIC PRESSURE PLASMA, AND, METHODS FOR FORMING A COATING ON A SUBSTRATE SURFACE AND FOR PRODUCING A PLASTIC BOTTLE WITH A COATED INTERNAL SURFACE |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4122452C2 (en) * | 1991-07-06 | 1993-10-28 | Schott Glaswerke | Method and device for igniting CVD plasmas |
| AU747272B2 (en) * | 1997-09-30 | 2002-05-09 | Tetra Laval Holdings & Finance Sa | Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process |
| JP4595276B2 (en) * | 2000-12-25 | 2010-12-08 | 東洋製罐株式会社 | Microwave plasma processing method and apparatus |
| JP4432351B2 (en) * | 2003-04-16 | 2010-03-17 | 東洋製罐株式会社 | Microwave plasma processing method |
| JP2006124739A (en) * | 2004-10-27 | 2006-05-18 | Toppan Printing Co Ltd | Film deposition apparatus by plasma cvd method |
| JP2006144099A (en) * | 2004-11-24 | 2006-06-08 | Toppan Printing Co Ltd | Apparatus for forming thin film on three-dimensional hollow container |
| JP2008106331A (en) * | 2006-10-27 | 2008-05-08 | Toppan Printing Co Ltd | Container treatment device by plasma cvd |
-
2011
- 2011-02-22 JP JP2011036450A patent/JP5555930B2/en not_active Expired - Fee Related
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