JP2012147347A5 - - Google Patents
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- Publication number
- JP2012147347A5 JP2012147347A5 JP2011005562A JP2011005562A JP2012147347A5 JP 2012147347 A5 JP2012147347 A5 JP 2012147347A5 JP 2011005562 A JP2011005562 A JP 2011005562A JP 2011005562 A JP2011005562 A JP 2011005562A JP 2012147347 A5 JP2012147347 A5 JP 2012147347A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- resonator element
- arm
- width
- vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 230000005284 excitation Effects 0.000 claims description 9
- 230000010355 oscillation Effects 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 4
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011005562A JP2012147347A (ja) | 2011-01-14 | 2011-01-14 | 振動片、振動子、発振器及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011005562A JP2012147347A (ja) | 2011-01-14 | 2011-01-14 | 振動片、振動子、発振器及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012147347A JP2012147347A (ja) | 2012-08-02 |
| JP2012147347A5 true JP2012147347A5 (enExample) | 2014-03-06 |
Family
ID=46790434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011005562A Pending JP2012147347A (ja) | 2011-01-14 | 2011-01-14 | 振動片、振動子、発振器及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012147347A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6435596B2 (ja) * | 2013-08-09 | 2018-12-12 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器、および移動体 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3972790B2 (ja) * | 2001-11-27 | 2007-09-05 | 松下電器産業株式会社 | 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ |
| JP4715652B2 (ja) * | 2006-06-30 | 2011-07-06 | セイコーエプソン株式会社 | 圧電振動片 |
| JP5168002B2 (ja) * | 2008-07-22 | 2013-03-21 | セイコーエプソン株式会社 | 振動子及び発振器 |
-
2011
- 2011-01-14 JP JP2011005562A patent/JP2012147347A/ja active Pending
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