JP2012147347A - 振動片、振動子、発振器及び電子機器 - Google Patents
振動片、振動子、発振器及び電子機器 Download PDFInfo
- Publication number
- JP2012147347A JP2012147347A JP2011005562A JP2011005562A JP2012147347A JP 2012147347 A JP2012147347 A JP 2012147347A JP 2011005562 A JP2011005562 A JP 2011005562A JP 2011005562 A JP2011005562 A JP 2011005562A JP 2012147347 A JP2012147347 A JP 2012147347A
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- Prior art keywords
- electrode
- vibrating
- resonator element
- arm
- axis direction
- Prior art date
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
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- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
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- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
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- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
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Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011005562A JP2012147347A (ja) | 2011-01-14 | 2011-01-14 | 振動片、振動子、発振器及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011005562A JP2012147347A (ja) | 2011-01-14 | 2011-01-14 | 振動片、振動子、発振器及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012147347A true JP2012147347A (ja) | 2012-08-02 |
| JP2012147347A5 JP2012147347A5 (enExample) | 2014-03-06 |
Family
ID=46790434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011005562A Pending JP2012147347A (ja) | 2011-01-14 | 2011-01-14 | 振動片、振動子、発振器及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2012147347A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015035734A (ja) * | 2013-08-09 | 2015-02-19 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器、および移動体 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003227719A (ja) * | 2001-11-27 | 2003-08-15 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車 |
| JP2008011348A (ja) * | 2006-06-30 | 2008-01-17 | Seiko Epson Corp | 圧電振動片 |
| JP2010028536A (ja) * | 2008-07-22 | 2010-02-04 | Seiko Epson Corp | 音叉型振動子及び発振器 |
-
2011
- 2011-01-14 JP JP2011005562A patent/JP2012147347A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003227719A (ja) * | 2001-11-27 | 2003-08-15 | Matsushita Electric Ind Co Ltd | 薄膜微小機械式共振子、薄膜微小機械式共振子ジャイロ、この薄膜微小機械式共振子ジャイロを用いたナビゲーションシステム及び自動車 |
| JP2008011348A (ja) * | 2006-06-30 | 2008-01-17 | Seiko Epson Corp | 圧電振動片 |
| JP2010028536A (ja) * | 2008-07-22 | 2010-02-04 | Seiko Epson Corp | 音叉型振動子及び発振器 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015035734A (ja) * | 2013-08-09 | 2015-02-19 | セイコーエプソン株式会社 | 振動素子、振動デバイス、電子機器、および移動体 |
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