JP2012145493A5 - - Google Patents
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- Publication number
- JP2012145493A5 JP2012145493A5 JP2011004998A JP2011004998A JP2012145493A5 JP 2012145493 A5 JP2012145493 A5 JP 2012145493A5 JP 2011004998 A JP2011004998 A JP 2011004998A JP 2011004998 A JP2011004998 A JP 2011004998A JP 2012145493 A5 JP2012145493 A5 JP 2012145493A5
- Authority
- JP
- Japan
- Prior art keywords
- axis
- movable mass
- movable
- arm
- physical quantity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 6
- 238000006073 displacement reaction Methods 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011004998A JP5790915B2 (ja) | 2011-01-13 | 2011-01-13 | 物理量センサー及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011004998A JP5790915B2 (ja) | 2011-01-13 | 2011-01-13 | 物理量センサー及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012145493A JP2012145493A (ja) | 2012-08-02 |
| JP2012145493A5 true JP2012145493A5 (cg-RX-API-DMAC7.html) | 2014-02-27 |
| JP5790915B2 JP5790915B2 (ja) | 2015-10-07 |
Family
ID=46789182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011004998A Active JP5790915B2 (ja) | 2011-01-13 | 2011-01-13 | 物理量センサー及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5790915B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6176001B2 (ja) * | 2012-11-29 | 2017-08-09 | 株式会社デンソー | ジャイロセンサ |
| WO2017130312A1 (ja) * | 2016-01-27 | 2017-08-03 | 株式会社日立製作所 | ジャイロスコープ |
| US11698256B2 (en) | 2020-05-25 | 2023-07-11 | Murata Manufacturing Co., Ltd. | Gyroscope with peripheral detection |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9621873D0 (en) * | 1996-10-21 | 1996-12-11 | British Tech Group | A solid state,multi-axis gyroscope |
| US6892575B2 (en) * | 2003-10-20 | 2005-05-17 | Invensense Inc. | X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging |
| US8261614B2 (en) * | 2006-03-10 | 2012-09-11 | Continental Teves Ag & Co. Ohg | Rotational speed sensor having a coupling bar |
| WO2007104289A1 (de) * | 2006-03-10 | 2007-09-20 | Conti Temic Microelectronic Gmbh | Mikromechanischer drehratensensor |
| WO2009107573A1 (ja) * | 2008-02-25 | 2009-09-03 | アルプス電気株式会社 | 角速度センサ |
| DE102008002748A1 (de) * | 2008-06-27 | 2009-12-31 | Sensordynamics Ag | Mikro-Gyroskop |
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2011
- 2011-01-13 JP JP2011004998A patent/JP5790915B2/ja active Active