JP2011199661A5 - - Google Patents

Download PDF

Info

Publication number
JP2011199661A5
JP2011199661A5 JP2010065016A JP2010065016A JP2011199661A5 JP 2011199661 A5 JP2011199661 A5 JP 2011199661A5 JP 2010065016 A JP2010065016 A JP 2010065016A JP 2010065016 A JP2010065016 A JP 2010065016A JP 2011199661 A5 JP2011199661 A5 JP 2011199661A5
Authority
JP
Japan
Prior art keywords
vibrating
base
viewed
pair
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010065016A
Other languages
English (en)
Japanese (ja)
Other versions
JP5531699B2 (ja
JP2011199661A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010065016A priority Critical patent/JP5531699B2/ja
Priority claimed from JP2010065016A external-priority patent/JP5531699B2/ja
Publication of JP2011199661A publication Critical patent/JP2011199661A/ja
Publication of JP2011199661A5 publication Critical patent/JP2011199661A5/ja
Application granted granted Critical
Publication of JP5531699B2 publication Critical patent/JP5531699B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010065016A 2010-03-19 2010-03-19 振動デバイス Expired - Fee Related JP5531699B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010065016A JP5531699B2 (ja) 2010-03-19 2010-03-19 振動デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010065016A JP5531699B2 (ja) 2010-03-19 2010-03-19 振動デバイス

Publications (3)

Publication Number Publication Date
JP2011199661A JP2011199661A (ja) 2011-10-06
JP2011199661A5 true JP2011199661A5 (cg-RX-API-DMAC7.html) 2013-05-02
JP5531699B2 JP5531699B2 (ja) 2014-06-25

Family

ID=44877288

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010065016A Expired - Fee Related JP5531699B2 (ja) 2010-03-19 2010-03-19 振動デバイス

Country Status (1)

Country Link
JP (1) JP5531699B2 (cg-RX-API-DMAC7.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102629861A (zh) 2011-02-02 2012-08-08 精工爱普生株式会社 振动片、振子、振荡器以及电子设备
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP2014165573A (ja) * 2013-02-22 2014-09-08 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体
CN109580030B (zh) * 2019-01-10 2020-08-11 哈尔滨华凡传感技术有限公司 一种具有多枚箭形振臂的高精度谐振式石英温度传感器
WO2020202961A1 (ja) * 2019-03-29 2020-10-08 株式会社村田製作所 音叉型圧電振動子及びその製造方法
CN114704589B (zh) * 2022-04-21 2023-03-24 山东大学 一种局域共振型声子晶体减振装置及设备
WO2025094647A1 (ja) * 2023-10-31 2025-05-08 京セラ株式会社 圧電デバイス

Similar Documents

Publication Publication Date Title
JP2011199661A5 (cg-RX-API-DMAC7.html)
JP2012185153A5 (cg-RX-API-DMAC7.html)
JP2011196823A5 (ja) ジャイロ素子、ジャイロセンサー、および電子機器
JP2014511055A5 (cg-RX-API-DMAC7.html)
JP2017017916A5 (cg-RX-API-DMAC7.html)
JP2006270177A5 (cg-RX-API-DMAC7.html)
JP2011160250A5 (cg-RX-API-DMAC7.html)
EP2490002A3 (en) Piezoelectric vibration type force sensor and robot apparatus
JP2014062753A5 (cg-RX-API-DMAC7.html)
JP2018173313A5 (cg-RX-API-DMAC7.html)
JP2010050960A5 (cg-RX-API-DMAC7.html)
JP2011223489A5 (cg-RX-API-DMAC7.html)
JP2010187197A5 (cg-RX-API-DMAC7.html)
JP2011217348A5 (cg-RX-API-DMAC7.html)
JP2016092879A5 (cg-RX-API-DMAC7.html)
JP2009158999A5 (cg-RX-API-DMAC7.html)
JP2012160996A5 (cg-RX-API-DMAC7.html)
JP2012199861A5 (cg-RX-API-DMAC7.html)
JP2014032137A5 (cg-RX-API-DMAC7.html)
JP2014033389A5 (cg-RX-API-DMAC7.html)
JP2016032244A5 (cg-RX-API-DMAC7.html)
JP2013017207A5 (cg-RX-API-DMAC7.html)
JP2012080166A5 (cg-RX-API-DMAC7.html)
JP2017022814A5 (cg-RX-API-DMAC7.html)
JP2015197423A (ja) Ｍｅｍｓデバイス