JP2012142626A - Light-emitting element and light-emitting element manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light-emitting element having a light-emitting layer of improved crystallinity and easy for mass production and a manufacturing method of the light-emitting element.SOLUTION: A light-emitting element manufacturing method comprises: a step of crystal growing a laminate including an etching easy layer adjacent to a first substrate composed of a III-V compound semiconductor and a light-emitting layer composed of a nitride-based semiconductor on the first substrate; a step of forming a transparent electrode and a first metal layer on the laminate in this order; a step of bonding a surface of a second metal layer provided on a second substrate with a surface of the first metal layer by heating the first and second metal layers in a stuck state; and a step of separating the first substrate and the second substrate on which the light-emitting layer is provided by removing the etching easy layer by use of solution etching or removing the etching easy layer by use of mechanical polishing.

Description

  The present invention relates to a light emitting element and a method for manufacturing the light emitting element.

  Improvements in the characteristics of nitride-based light emitting devices have enabled lighting fixtures using semiconductor light emitting devices. In order to further expand the lighting application, it is required to improve the light output and light emission efficiency of the light emitting element. In addition, high mass productivity is required for lighting applications.

  In many cases, sapphire, which is an insulating material, is used as a substrate for crystal growth of a nitride-based light emitting device. However, when an insulating substrate is used, it is difficult to use the vertical direction of the substrate as a current path, and a current path is formed through a high series resistance along a plane parallel to the substrate. For this reason, luminous efficiency falls. On the other hand, when a nitride-based semiconductor substrate having conductivity is used, the resistance can be reduced, but it is difficult to increase the size of the substrate and the mass productivity is insufficient.

There is a technical disclosure example relating to a group III-V compound semiconductor device having high luminous efficiency and a method for manufacturing the same (Patent Document 1). In this technology disclosure example, a method for manufacturing a light-emitting element in which a base substrate on which a III-V group compound semiconductor multilayer body is formed and a semiconductor substrate on which a multilayer body including a metal layer is formed is bonded and then the base substrate is removed. Is provided.
However, even if this example of technical disclosure is used, it is not sufficient as a light emitting element and a manufacturing method having characteristics and mass productivity that satisfy the requirements for lighting applications.

JP 2006-135026 A

  Provided are a light-emitting element having a light-emitting layer with improved crystallinity and easily mass-produced, and a method for manufacturing the light-emitting element.

  According to one aspect of the present invention, a stacked layer including an easy-to-etch layer adjacent to the first substrate and a light emitting layer made of a nitride-based semiconductor on a first substrate made of a III-V group compound semiconductor. A step of crystal-growing a body, a step of forming a transparent electrode and a first metal layer in this order on the laminate, a surface of a second metal layer provided on a second substrate, and the Heating and bonding in a state where the surface of the first metal layer is bonded, and removing the easy-etching layer using a solution etching method, or using the mechanical polishing method, the first substrate And a step of separating the second substrate provided with the light-emitting layer and the first substrate by removing the easy-to-etch layer.

  According to another aspect of the present invention, a laminate including a light emitting layer and made of a group III-V compound semiconductor, a conductive transparent electrode provided on the laminate, and an upper surface of the transparent electrode. A first metal layer including any one of Au, AuGe and a stacked layer provided in the order of AuGe on the transparent electrode, a semiconductor substrate, and Au provided on the semiconductor substrate. A second metal layer, wherein the first metal layer and the second metal layer are joined together, and the emitted light from the light emitting layer passes through the transparent electrode, A light emitting element that is reflected by the metal layer and taken out to the outside is provided.

  Provided are a light-emitting element that has a light-emitting layer with improved crystallinity and can be easily mass-produced, and a method for manufacturing the light-emitting element.

The flowchart of the manufacturing method of the light emitting element concerning this invention Process sectional drawing of the light emitting element manufacturing method concerning 1st Embodiment Schematic cross-sectional view of a light emitting device using the first embodiment Process sectional drawing showing the light emitting element manufacturing method concerning 2nd Embodiment Schematic cross-sectional view of a light emitting device using the second embodiment Process sectional drawing of the light emitting element manufacturing method concerning 3rd Embodiment

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a flowchart of a method for manufacturing a light emitting device according to the present invention. On the first substrate made of GaP, GaAs, GaAlAs, etc., a stacked body including an easy-to-etch layer and a light emitting layer made of a nitride semiconductor is crystal-grown (S100). The laminate has a structure in which a light emitting layer is sandwiched between layers having a refractive index different from that of the light emitting layer, and the spread of light in the direction perpendicular to the substrate is controlled, and such a laminated structure is crystal-grown.

  The surface of the laminate and the second substrate are bonded to face each other, and the first substrate and the second substrate are bonded (S102). Examples of the joining process include heat treatment and a method using an adhesive sheet. The second substrate may be a material such as Si, ZnO (zinc oxide), sapphire, or a metal layer provided thereon.

  Subsequently, the easy etching layer is removed using a chemical etching method or a mechanical polishing method to separate the first substrate and the second substrate (S104). One electrode is formed on the laminate, and the other electrode is formed on the back surface of the second substrate (S106).

  Subsequently, dicing and chip separation are performed (S108), the chip is mounted on a package, electrically connected by wire bonding, sealing is performed using resin or the like, and the process is terminated (S110).

Thus, in the light emitting element manufacturing method according to the present embodiment, a nitride-based semiconductor is crystal-grown on a substrate such as GaP, GaAs, or GaAlAs having a thermal expansion coefficient close to that of GaN. The coefficient of thermal expansion is 5.9 × 10 ⁻⁶ / K for GaP and 6.0 × 10 ⁻⁶ / K for GaAs, which is close to 5.6 × 10 ⁻⁶ / K for GaN, which is a good nitride system. Semiconductor crystal growth is possible. That is, the generation of cracks in the crystal growth layer after crystal growth can be suppressed, and the warpage of the wafer can be reduced. On the other hand, the thermal expansion coefficients are 2.5 × 10 ⁻⁶ / K for Si, 4.2 × 10 ⁻⁶ / K for 6H—SiC, and 4.8 × 10 ⁻⁶ / K for ZnO. It is difficult to maintain good crystallinity with these substrates.

  Both GaN and GaP are III-V group compound semiconductors and have crystal polarities depending on the plane orientation. For this reason, in crystal growth of a GaN-based semiconductor, it is important to control the crystal polarity such as the N plane or the Ga plane in the growth direction. When a semiconductor having no crystal polarity such as sapphire is used for the substrate, it becomes difficult to control the crystal polarity of the crystal growth film, and the crystal defect density increases. On the other hand, it is more preferable to use GaP because it is easy to control the crystal polarity, reduce the defect density, and form a light-emitting layer having better crystallinity by appropriately selecting the plane orientation.

  Furthermore, in order to separate the laminated body crystal-grown on the sapphire substrate from the sapphire substrate, a complicated process such as melting a buffer layer such as GaN by irradiating it with a laser beam is required. On the other hand, when a III-V compound semiconductor such as a GaP substrate, a GaAs substrate, or a GaAlAs substrate is used, a crystal growth layer that can be easily removed by a chemical etching method such as solution etching is sandwiched, and the separation process can be simplified. Further, since this easily removable crystal growth layer is softer than the nitride-based semiconductor, it is easy to separate the first substrate from the second substrate provided with the light emitting layer by a mechanical polishing method.

  On the other hand, a substrate made of a nitride-based semiconductor has a very high melting point and an extremely high equilibrium vapor pressure of nitrogen, so that it is difficult to grow a bulk crystal from the melt, and it is difficult to increase the diameter.

  On the other hand, according to the light emitting element manufacturing method of the present embodiment, a light emitting layer with good crystallinity is formed on a large-diameter substrate made of GaP or AlGaAs, and bonded to another conductive substrate to grow crystals. The substrate used for the separation is separated. That is, it is rich in mass productivity.

FIG. 2 is a process cross-sectional view of the light emitting element manufacturing method according to the first embodiment. In the schematic cross-sectional view of FIG. 2A, an easy-to-etch layer 22 (thickness: 0. 0) made of Al _x Ga _1-x P (0 <x <1) is formed on a GaP substrate (first substrate) 20. 5 to several μm), GaP buffer layer 24, GaN low temperature growth buffer layer 26, n-type GaN buffer layer 28, n-type InGaAlN cladding layer 30 (thickness: 0.5 to 1.0 μm), InGaAlN-based MQW (Multi Quantum) Light emitting layer 32 (thickness: 0.05 to 0.2 μm), p-type InGaAlN cladding layer 34 (thickness: 0.5 to 1.0 μm), p-type GaN layer 36 (thickness: 0) 0.1 to 0.4 μm), and a contact layer 38 made of p ⁺ -type GaN forms a laminate 39 in which crystals are grown in this order.

  As the crystal growth method, MOCVD (Metal-Organic Chemical Vapor Deposition) method, MBE (Molecular Beam Epitaxy) method, vapor phase growth method, liquid phase growth method and the like can be used.

  If the AlGaP easy etching layer 22 and the GaP buffer layer 24 are formed on the GaP substrate 20 by using a liquid phase growth method or the like, a GaP-based gas control system is not required in the MOCVD apparatus for crystal growth of a nitride-based semiconductor. It becomes. In the MOCVD method, the GaP growth temperature is lower than 1000 ° C., and the nitride-based semiconductor growth growth temperature is higher than 1000 ° C. For this reason, when the AlGaP easy etching layer 22 and the GaP buffer layer 24 are formed by the liquid phase growth method, the MOCVD crystal growth temperature can be matched with the nitride-based semiconductor, and the productivity can be improved. Of course, the laminate 39 may be formed by MOCVD or MBE.

  Further, as shown in FIG. 2B, a transparent electrode 40 made of n-type ZnO or ITO (Indium Tin Oxide) and an AuGe metal layer (first metal layer) 42 are further formed on the contact layer 38. To do. Alternatively, an Au metal layer may be provided adjacent to the transparent electrode 40, and an AuGe metal layer may be stacked on the Au metal layer.

  On the other hand, as shown in FIG. 2C, an Au metal layer (second metal layer) 52 is provided on the second substrate 50 made of n-type Si having approximately the same size as the first substrate 20, and the second substrate The laminated body 53 of this is comprised. The Au metal layer 52 and the AuGe metal layer 42 are opposed to each other and bonded together. The heat treatment conditions for bonding are, for example, 500 ° C. and about 1 hour. If more pressure is applied, bonding can be performed more reliably. The melting point of AuGe eutectic solder is around 360 ° C., and good bonding can be obtained by maintaining the heat treatment conditions for an appropriate time. Further, it is more preferable to perform bonding in a vacuum atmosphere because it is possible to achieve bonding with suppressed voids. Note that the AuGe metal layer may be the surface of the second metal layer 52.

  Subsequently, as shown in FIG. 2D, the GaP substrate 20 is separated using a solution etching method or a mechanical polishing method. For example, when hydrochloric acid, nitric acid, and a mixed solution thereof are used, the etching easy layer 22 (thickness: for example, 0.5 to several μm) containing Al such as AlGaP is larger than the GaP substrate 20, the GaP buffer layer 24, and the nitride semiconductor. Since the etching rate is high, removal is easy.

On the other hand, nitride-based semiconductors are hard. That is, the Young's modulus of GaN is approximately 2.9 × 1011 N / m ² , which is higher than that of III-V group compound semiconductors such as GaAs and GaAlAs that do not contain nitrogen. Therefore, it is easy to remove the first substrate 20 and the easy-to-etch layer 22 and separate the second substrate 50 to which the stacked body including the light-emitting layer 32 is bonded using a mechanical polishing method.

  Subsequently, the GaP buffer layer 24 and the GaN low-temperature growth buffer layer 26 are removed by using a mechanical polishing method or a solution etching method. Since the GaP buffer layer 24 and the GaN low-temperature growth buffer layer 26 do not contain Al, the GaP buffer layer 24 and the GaN low-temperature growth buffer layer 26 can suppress oxidation and can be a good crystalline nitride laminate. By not containing Al, the solution etching rate is lower than that of AlGaP. However, since it is usually thinner than the easy-to-etch layer 22, it can be easily removed by solution etching or mechanical polishing.

When the first substrate 20 is made of GaAs, the easy etching layer 22 made of, for example, Al _y Ga _1-y As (0 <y <1) is used, and the easy etching layer 22 can be removed using, for example, an etching solution containing an acid.

  In FIG. 2D, on one side, the easy-to-etch layer 22, the GaP buffer layer 24, the stacked body 44 from which the GaN low-temperature growth buffer layer 24 is removed, the transparent electrode 40, and the AuGe metal layer 42 are disposed on one side. There is a first stacked body 45 in which are stacked in this order. On the other side, there is a second laminated body 53, and the AuGe metal layer 42 of the first laminated body 45 and the Au metal layer 52 of the second laminated body 53 are joined.

  FIG. 3 is a schematic cross-sectional view of a light emitting device manufactured by the method for manufacturing a light emitting device according to the present embodiment. If the 1st laminated body 45 and the 2nd laminated body 53 are joined, the 1st electrode 60 is formed in the light extraction surface, the 2nd electrode 62 is formed in the back surface of the 2nd board | substrate 50, and it will divide | segment into a chip | tip. The light emitting element of FIG. 3 is obtained. Of the radiated light (elliptical broken line) from the light emitting layer 32, the light passing through the transparent electrode 40 is reflected by the AuGe metal layer 42 and extracted to the outside.

  Since ultraviolet to green light emitted from the nitride-based semiconductor is absorbed by Si, at least a first metal layer 42 made of an AuGe metal layer or the like is provided to suppress absorption in the second substrate 50 made of Si. Therefore, high luminous efficiency is preferable.

  In the manufacturing method of the present embodiment, it is not necessary to provide the transparent electrode 40 made of ZnO or ITO. However, the compound semiconductor forming the stacked body 39 and an alloy such as Au or AuGe absorb the radiated light from the light emitting layer 32 and reduce the reflectance. Therefore, the transparent electrode 40 suppresses alloying and keeps the reflectance high. Therefore, the luminous efficiency can be further increased.

  When n-type ZnO is used as the transparent electrode 40, a low-resistance ohmic contact is formed at the pn junction with the contact layer 38, so that the operating current flows in the vertical direction through the n-type Si substrate 50 having conductivity. A light-emitting element with reduced loss can be obtained.

  FIG. 4 is a process cross-sectional view illustrating a light emitting element manufacturing method according to the second embodiment. FIG. 5 is a schematic cross-sectional view of a light emitting device using this manufacturing method. In FIG. 4A, the stacked body 39 formed on the GaP substrate 20 has the same structure as that of FIG. 2A representing the first embodiment. The contact layer 38 constituting the surface of the stacked body 39 and the surface of the second substrate 51 made of an n-type ZnO layer having substantially the same size as the GaP substrate 20 are directly bonded face-to-face and heated to join. The heat treatment condition is, for example, 600 to 800 ° C. for about 1 hour. Moreover, it can join more reliably when a pressure is applied. In this case, it is not necessary to provide a bonding metal layer on the surface of the stacked body 39 and the surface of the second substrate 51.

In this heat treatment step, Ga constituting the contact layer 38 is diffused into the n-type ZnO layer, and Zn constituting the n-type ZnO layer is diffused into the contact layer 38. For this reason, if the donor concentration of the n-type ZnO layer is 5 × 10 ¹⁸ cm ⁻³ or more, the depletion layer width of the pn junction is narrowed and the tunnel current is increased, and it is more preferable to set it to 5 × 10 ¹⁹ cm ^−3. . Similarly, the acceptor concentration of the contact layer 38 is preferably 5 × 10 ¹⁸ cm ⁻³ or more, and more preferably 5 × 10 ¹⁹ cm ⁻³ . In this way, this interface operates as an ohmic contact.

  FIG. 4B shows a process of separating the GaP substrate 20. In this step, the easy-to-etch layer 22, the GaP buffer layer 24, and the GaN low-temperature growth buffer layer 26 are removed in this order in the same manner as in FIG. 2D representing the first embodiment. The stacked body 44 whose surface becomes the n-type GaN buffer layer 28 remains on the n-type ZnO substrate 51.

  A first electrode 60 is formed on the n-type GaN buffer layer 28, and a second electrode 62 is formed on the back surface of the second substrate 51 made of n-type ZnO, thereby completing the light emitting device shown in FIG. Since the band gap wavelength of ZnO is about 368 nm, the radiated light from the light emitting layer 32 is not absorbed and transmitted. In the second substrate 51, the downward light of the emitted light (elliptical broken line) from the light emitting layer 32 made of a nitride-based semiconductor is transmitted and reflected by the second electrode 62 while being reduced in loss. Permeates toward. For this reason, a light emitting element having high luminous efficiency can be obtained. Since the band gap wavelength of GaP is about 550 nm, the radiated light in the ultraviolet to green wavelength range from the light emitting layer 32 is absorbed.

  FIG. 6 is a process cross-sectional view of the light emitting element manufacturing method according to the third embodiment. The stacked body 39 on the GaP substrate 20 shown in FIG. 6A is the same as that shown in FIG. For example, an adhesive sheet 82 made of resin or the like is attached to the surface of the second substrate 54 made of sapphire having a size larger than that of the GaP substrate 20. The surface of the contact layer 38 constituting the surface of the multilayer body 39 and the surface of the adhesive sheet 82 are bonded face to face.

  FIG. 6B shows a process of separating the GaP substrate 20. Similarly to FIG. 2D, the easy etching layer 22, the GaP buffer layer 24, and the GaN low temperature growth buffer layer 26 are removed in this order. On the second substrate 54, the stacked body 44 whose one surface 44a is the n-type GaN buffer layer 28 remains.

  FIG. 6C shows a process of bonding a third substrate 55 made of sapphire having a size larger than that of the stacked body 44 to the side where the GaP substrate 20 is separated. That is, the surface of the adhesive sheet 83 of the third substrate 55 and the one surface 44a of the stacked body 44 are bonded to face to face.

  After that, as shown in FIG. 6D, the other surface 44b of the laminate 44 is separated from the second substrate 54 to which the adhesive sheet 82 is bonded.

  In FIG. 6E, the other surface 44b of the stacked body 44 and the fourth substrate 56 made of n-type ZnO having substantially the same size as the stacked body 44 are face-to-face bonded and heat-treated. Further, as shown in FIG. 6F, the one surface 44a of the laminate 44 bonded to the fourth substrate 56 and the third substrate 55 to which the adhesive sheet is bonded are separated.

  Note that, when a nitride-based semiconductor is crystal-grown at 1000 ° C. or higher, highly corrosive ammonia gas is used. A ZnO substrate is not as robust as sapphire and may deteriorate depending on growth conditions. In this embodiment, ZnO is not used as the crystal growth substrate, but the GaP substrate 20 is used, and it is easy to suppress deterioration of the substrate.

  Also, by using a sapphire substrate as the second substrate 53, the GaP substrate 20 separation process can be performed more reliably. That is, when solution-etching the easy-to-etch layer 22 such as AlGaP, n-type ZnO may be etched depending on the acid solution. On the other hand, when sapphire is used, substrate etching by a solution can be suppressed. Further, when the GaP buffer layer 24, the GaN low-temperature growth buffer layer 26, etc. are mechanically polished, the sapphire is robust. Since the sapphire substrates 53 and 54 and the laminate 44 are joined by the adhesive sheets 82 and 83, the removal is easy.

  In FIG. 6D, when the second substrate 54 is separated, the third substrate 55 is unnecessary if the thickness of the laminate 44 is sufficient, but the laminate 44 is usually thin and has a mechanical strength. Since it is insufficient, the third substrate 55 is used as a reinforcing substrate. In order to finally obtain FIG. 6F, for example, the second substrate 54 and the third substrate 55 made of sapphire are used, and the number of processes is increased, but the light emitting element can be formed more reliably. Since the second and third substrates 54 and 55 can be reused, the material efficiency can be improved.

  The adhesive sheets 82 and 83 and the sapphire substrates 54 and 55 can be easily joined by an adhesive or heating, and the joining process is simple. The light-emitting element that can be formed by the light-emitting element manufacturing method according to the third embodiment is substantially the same as the schematic cross-sectional view shown in FIG.

Next, characteristics of the light emitting device using the light emitting device manufacturing method according to the present embodiment will be described.
In the laminated body grown on the sapphire substrate, current flows along the substrate in a light emitting layer as thin as several μm, for example. The sheet resistance value of the thin light emitting layer becomes high, and heat generation becomes large at an operating current of 100 mA or more, resulting in a decrease in light emission efficiency. Further, the larger the current, the more likely the current becomes non-uniform in the light emitting layer, which further promotes a decrease in light emission efficiency as well as the low thermal conductivity of sapphire.

  On the other hand, since the light emitting element obtained by the light emitting element manufacturing method according to the first to third embodiments allows current to flow in the vertical direction of the substrate, the series resistance can be reduced and the power loss can be reduced. Therefore, an operating current of 100 mA or more, a high light output, and a high luminous efficiency are possible. Further, since the first electrode 60 and the second electrode 62 are arranged one above the other and current can flow in the vertical direction, the chip can be easily downsized and the price can be reduced.

  When the laminate 44, the transparent electrode 40, the metal layer 42, and the second substrate 50 are laminated in this order as shown in FIG. 3, the alloying of the laminate 44 and the AuGe metal layer (first metal layer) 40 is suppressed, The reflectance in the first metal layer 40 can be increased, and the light emission efficiency can be improved. In FIG. 3, the second substrate 50 is not limited to Si but may be a compound semiconductor.

  Further, when the stacked body 44 is bonded to the second substrate 51 made of n-type ZnO as shown in FIG. 5, alloying of the second electrode 62 and the stacked body 44 can be suppressed, and the reflectance by the second electrode 62 can be increased. It can be kept high and the luminous efficiency can be improved.

  When a large number of light-emitting elements with improved light emission efficiency are arranged, it is easy to realize a lighting device having high light intensity. For example, a white light source instead of a phosphor, a light bulb color light source rich in color rendering, a high-intensity lamp, a large full-color display device, and the like are possible.

In the present specification, the “nitride-based semiconductor” means B _x In _y Ga _z Al _1-xyz N (0 ≦ x ≦ 1, 0 ≦ y ≦ 1, 0 ≦ z ≦ 1, x + y + z ≦ 1) represents a semiconductor represented by a composition formula, and includes a semiconductor added with impurities to control the conductivity type.

  The embodiments of the present invention have been described above with reference to the drawings. However, the present invention is not limited to these embodiments. 1st board | substrate which comprises this invention, 2nd board | substrate, 3rd board | substrate, 4th board | substrate, the laminated body which consists of semiconductors, 1st laminated body, 2nd laminated body, adhesive sheet, metal layer, transparent Even those whose design has been changed by those skilled in the art regarding the material, size, shape, arrangement, process conditions, etc. of the electrodes are included in the scope of the present invention without departing from the gist of the present invention.

20 GaP substrate (first substrate), 22 easy etching layer, 32 light emitting layer, 39 laminate, 40 transparent electrode, 42 first metal layer, 45 first laminate, 50, 51, 54 second substrate , 52 second metal layer, 53 second laminate, 55 third substrate, 56 fourth substrate

Claims (14)

Crystal growth of a laminate including an easy etching layer adjacent to the first substrate and a light emitting layer made of a nitride-based semiconductor on a first substrate made of a III-V compound semiconductor;
Forming a transparent electrode and a first metal layer in this order on the laminate;
Heating and bonding in a state where the surface of the second metal layer provided on the second substrate and the surface of the first metal layer are bonded together;
The second layer provided with the light emitting layer is removed by removing the first layer and the first layer using a mechanical polishing method by removing the first layer using a solution etching method. Separating the substrate and the first substrate;
A method for manufacturing a light emitting device comprising:   The method for manufacturing a light-emitting element according to claim 1, wherein the transparent electrode has at least one of ZnO and ITO. The first metal layer has at least one of AuGe and Au,
The method for manufacturing a light emitting element according to claim 1, wherein the second metal layer includes at least one of Au and AuGe.   The light emitting element manufacturing method according to claim 3, wherein the first metal layer has Au on the transparent electrode side. The second substrate is made of Si,
The method for manufacturing a light-emitting element according to claim 1, wherein the first substrate is made of GaP and the easy-etching layer is made of AlGaP. The second substrate is made of Si,
5. The method of manufacturing a light emitting element according to claim 1, wherein the first substrate is made of GaAs and the easy etching layer is made of AlGaAs. 6. The second substrate is made of ZnO,
5. The method of manufacturing a light emitting element according to claim 1, wherein the first substrate is made of GaP and the easy-etching layer is made of AlGaP. 6. The second substrate is made of ZnO,
5. The method of manufacturing a light emitting element according to claim 1, wherein the first substrate is made of GaAs and the easy etching layer is made of AlGaAs. 6.   The method for manufacturing a light-emitting element according to claim 7, wherein the second substrate is made of n-type ZnO. Bonding one surface of the laminate on the side from which the easy-etching layer has been removed and a third substrate;
Separating the other surface of the laminate bonded to the third substrate from the second substrate and bonding to a conductive fourth substrate;
Separating the one surface of the laminate bonded to the fourth substrate from the third substrate;
The method of manufacturing a light emitting device according to claim 1, further comprising:   The method of manufacturing a light emitting element according to claim 10, wherein each of the second and third substrates is made of sapphire.   In the step of bonding the surface of the first metal layer and the surface of the second metal, and the step of bonding the one surface of the laminate and the third substrate, an adhesive sheet is provided. The manufacturing method of the light emitting element of Claim 10 or 11 used respectively. A laminate comprising a light-emitting layer and comprising a III-V compound semiconductor;
A conductive transparent electrode provided on the laminate;
A first metal layer including any one of AuGe provided on the transparent electrode and a laminate provided in the order of Au and AuGe on the transparent electrode;
A semiconductor substrate;
A second metal layer provided on the semiconductor substrate and having Au;
With
The first metal layer and the second metal layer are joined,
The light emitting element in which the radiated light from the said light emitting layer passes the said transparent electrode, is reflected by the said 1st metal layer, and is taken out outside.   The light emitting device according to claim 13, wherein the transparent electrode has at least one of ZnO and ITO.

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