JP2012114323A - Tape sticking device and tape sticking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tape sticking device and a tape sticking method in which attachment accuracy of a segment of an ACF tape to a substrate can be enhanced by supplying a tape member stably regardless of the residual quantity of the tape member.SOLUTION: Rotation angle φ of a reel 23 is detected when the reel 23 feeds a tape member Tp corresponding to the length Ls of a segment 4S of an ACF tape 4. From the rotation angle φ of the reel 23 thus detected and the length Ls of the segment 4S of the ACF tape 4, winding radius R of the tape member Tp wound around the reel 23 is calculated. The reel 23 is rotated with a smaller rotation speed W for the larger winding radius R of the tape member Tp thus calculated.

Description

  The present invention relates to a tape adhering apparatus and a tape adhering method for adhering an ACF tape made of an anisotropic conductive film to an adhesion target site on a substrate.

  In a module manufacturing process such as a liquid crystal panel, a tape made of an anisotropic conductive film called an ACF (Anisotropic Conductive Film) (hereinafter referred to as an ACF tape) is attached to a plurality of electrodes arranged side by side on the upper surface of the substrate. A tape sticking device is used. Here, the ACF tape is supplied in a state of a tape member integrated with a protective tape called a separator attached to one side thereof.

  The tape sticking device has a substrate holding part for holding a substrate, a base part provided above the substrate holding part, a pressing tool provided so as to be movable up and down with respect to the base part, and a tape member wound around the base part. A reel tape, a tape member fed out by the rotation of the reel, guides the area immediately below the pressing tool to extend in the horizontal direction and transports the tape member, and an ACF tape from the tape member fed out from the reel. A tape cutting unit that cuts and forms a section of the ACF tape on the tape member is provided (for example, Patent Document 1).

JP 2001-294361 A

  However, in the above-described conventional tape sticking apparatus, the length of the ACF tape section is always constant, and the rotation speed of the reel is kept constant, while the winding radius of the tape member wound around the reel is the tape member's winding radius. The feeding speed of the tape member increases as the remaining amount of the tape member increases and the winding radius increases. For this reason, depending on the remaining amount of the tape member, the feeding speed of the tape member may become excessive, which may cause inconveniences such as the tape member coming off the transport guide roller, and the tape member cannot be stably supplied. There is a problem in that the accuracy of attaching the section of the ACF tape to the substrate may be lowered.

  Therefore, the present invention provides a tape sticking apparatus and a tape sticking method that can stably supply a tape member regardless of the remaining amount of the tape member and increase the accuracy of attaching the section of the ACF tape to the substrate. With the goal.

  The tape sticking apparatus according to claim 1 includes a substrate holding portion for holding a substrate, a base portion provided above the substrate holding portion, a pressing tool provided to be movable up and down with respect to the base portion, and a base A reel with a separator attached to one side of an ACF tape made of an anisotropic conductive film, and a tape member that is fed out by the rotation of the reel in the area directly below the pressing tool. A tape transport unit that guides the tape member to extend and transports the tape member, a tape cutting unit that cuts the ACF tape from the tape member fed from the reel to form a section of the ACF tape on the tape member, and a separator Press the tool with the section of the formed ACF tape positioned at a position just above the target site on the substrate held by the substrate holder. A tape sticking device comprising a pressing tool lifting and lowering means for pressing and sticking a section of an ACF tape against a part to be stuck on a substrate, wherein the reel is a tape member corresponding to the length of the section of the ACF tape Rotation angle detecting means for detecting the rotation angle of the reel rotated when the reel is fed, and the winding radius of the tape member wound around the reel from the rotation angle of the reel detected by the rotation angle detection means and the length of the ACF tape section And a reel rotation control means for rotating the reel at a lower rotation speed as the tape member winding radius calculated by the winding radius calculation means is larger.

  The tape sticking device according to claim 2 is the tape sticking device according to claim 1, wherein the tape member fed from the reel is moved on the base portion so that the tape member is not loosened, and tension is applied to the tape member. A tension applying member that is positioned at a specified position when the amount of feeding of the tape member from the reel in a state where conveyance of the tape member by the tape conveying unit is stopped becomes equal to the length of the section of the ACF tape; Tension applying member detecting means for detecting a state in which the tension applying member is located at the prescribed position, and the rotation angle detecting means includes a rotation position of the reel before feeding the ACF tape, and a section of the ACF tape at the base portion. The ACF tape is fed out from the reel in a fixed state with respect to the reel, and the state of the reel when the state where the tension applying member is located at the specified position is detected by the tension applying member detecting means. Rolling on the basis of the angular difference between the position, for detecting the rotation angle of the rotated reel when feeding the length of the tape member sections of the ACF tape.

  The tape adhering method according to claim 3 includes a substrate holding portion for holding a substrate, a base portion provided above the substrate holding portion, a pressing tool provided to be movable up and down with respect to the base portion, a base A reel with a separator attached to one side of an ACF tape made of an anisotropic conductive film, and a tape member that is fed out by the rotation of the reel in the area directly below the pressing tool. Tape separator that guides and transports the tape member, and tape cutting part that cuts the ACF tape from the tape member fed from the reel and forms a section of the ACF tape on the tape member, formed on the separator Lower the pressing tool with the section of the ACF tape placed in the position directly above the target site on the substrate held by the substrate holder. , A tape sticking method in a tape sticking device for sticking a piece of ACF tape against a part to be stuck on a substrate, and the reel rotates when the tape member corresponding to the length of the piece of ACF tape is fed. The step of detecting the rotation angle of the reel, the step of calculating the winding radius of the tape member wound around the reel from the detected rotation angle of the reel and the length of the section of the ACF tape, and the calculated winding radius of the tape member And a step of rotating the reel at a lower rotation speed as the value increases.

  The tape sticking method according to claim 4 is the tape sticking method according to claim 3, wherein the tape sticking device moves on the base portion so that the tape member fed from the reel does not loosen. Apply tension to the tape member, and when the tape member feed amount from the reel becomes equal to the length of the ACF tape section when the tape transport unit is stopped by the tape transport unit, it is positioned at the specified position. And a tension applying member detecting means for detecting a state in which the tension applying member is located at the specified position, and the rotational position of the reel before feeding the ACF tape, and the section of the ACF tape at the base portion When the ACF tape is fed out from the reel while being fixed to the reel, and the tension applying member detecting means detects that the tension applying member is located at the specified position, the reel is rotated. Based on the angular difference between the position, for detecting the rotation angle of the rotated reel when feeding the length of the tape member sections of the ACF tape.

  In the present invention, the winding radius of the tape member wound around the reel is calculated from the length of the section of the ACF tape and the rotation angle of the reel rotated when the tape member corresponding to the length of the section of the ACF tape is fed. Since the reel is rotated at a lower rotation speed as the member winding radius is larger, the feeding speed of the tape member fed out from the reel is the winding radius of the tape member wound around the reel, that is, the remaining amount of the tape member. Regardless of this, the tape member can be stably supplied and the accuracy of attaching the ACF tape slice to the substrate can be increased.

The front view of the tape sticking apparatus in one embodiment of this invention The side view of the tape sticking apparatus in one embodiment of this invention The block diagram which shows the control system of the tape sticking apparatus in one embodiment of this invention The partial front view of the tape sticking apparatus in one embodiment of this invention (A) (b) The partial front view of the tape sticking apparatus in one embodiment of this invention The flowchart which shows the execution procedure of the operation | work which the tape sticking apparatus in one embodiment of this invention sticks the slice of ACF tape to the sticking object site | part on a board | substrate. (A) (b) (c) Operation | movement explanatory drawing of the tape sticking operation | work which the tape sticking apparatus in one embodiment of this invention performs (A) (b) (c) Operation | movement explanatory drawing of the tape sticking operation | work which the tape sticking apparatus in one embodiment of this invention performs (A) (b) Operation | movement explanatory drawing of the tape sticking operation | work which the tape sticking apparatus in one embodiment of this invention performs

  Embodiments of the present invention will be described below with reference to the drawings. A tape adhering apparatus 1 shown in FIGS. 1 and 2 is a tape (ACF) made of an anisotropic conductive film called ACF (Anisotropic Conductive Film) with respect to a plurality of electrodes 3 provided on the edge of the upper surface of a substrate 2. It is an apparatus for attaching the slice 4S of the tape 4). In the present embodiment, the ACF tape 4 is supplied as a tape member Tp having a separator Sp, which is a protective tape, attached on one side (see an enlarged view in FIG. 1).

  1 and 2, the tape sticking apparatus 1 holds a substrate 2 in a horizontal posture so that the base 10 and the electrode 3 face upward, and a substrate holding part moving mechanism 11 provided on the base 10. The table-shaped substrate holding part 12 moved by the above, the gate-type frame 13 having the horizontal frame 13a provided on the base 10 and extending in the horizontal direction, and the substrate attached to the horizontal frame 13a of the gate-type frame 13 A plate-like base portion 14 that is located above the holding portion 12 and is provided so as to be movable along the horizontal frame 13a (that is, in the horizontal direction), and provided on the base 10 so as to extend in the moving direction of the base portion 14. The backup stage 15 is provided. Hereinafter, for convenience of explanation, the horizontal direction in which the horizontal frame 13a extends (the base part 14 moves) is defined as the left-right direction of the tape adhering apparatus 1, this is defined as the X-axis direction, and the horizontal direction orthogonal to the X-axis direction is adhered to the tape. This is the Y-axis direction as the longitudinal direction of the device 1. Also, the vertical direction is the Z-axis direction. Further, in the left-right direction (X-axis direction), the left side in FIG. 1 is the left side, the right side in FIG. 1 is the right side, and in the front-back direction (Y-axis direction), the left side in FIG. The right side of page 2 is the rear.

  1 and 2, the substrate holding unit moving mechanism 11 includes an X-axis table 11a that can move in the left-right direction (X-axis direction) with respect to the base 10, and a front-rear direction (Y-axis direction with respect to the X-axis table 11a). ) Movable Y-axis table 11b and θ-table 11c provided on Y-axis table 11b and rotatable about the Z-axis, and substrate holding part 12 is attached to the upper surface of θ-table 11c. Therefore, the substrate holder 12 moves the X-axis table 11a in the left-right direction (X-axis direction), moves the Y-axis table 11b in the front-rear direction (Y-axis direction), and the vertical axis (Z-axis) of the θ table 11c. It can be moved in the horizontal plane by rotating around.

  1 and 2, on the front surface of the base portion 14, a pressing tool 22 provided so as to be movable up and down with respect to the base portion 14 via a tool elevating cylinder 21, a reel 23 around which a tape member Tp is wound, a reel 23 A tape transport unit 24 that transports the tape member Tp that is fed by the rotation of the tape, and a tape cutting that cuts the ACF tape 4 from the tape member Tp that is fed from the reel 23 to form a section 4S of the ACF tape 4 on the tape member Tp. An imaging camera 27 that moves together with the base 25 and a peeling roller 26 that peels the separator Sp from the section 25 of the section 25 and the slice 4S of the ACF tape 4 adhered on the substrate 2 is provided.

  1 and 2, the tool elevating cylinder 21 is provided at the center of the front surface of the base portion 14 with the piston rod 21a facing downward. The pressing tool 22 is attached to the lower end of the piston rod 21a. When the piston rod 21a of the tool elevating cylinder 21 protrudes downward, the pressing tool 22 is positioned between the standby position shown in FIG. 1 and the pressing position below it. Go up and down. In the pressing tool 22, a heater 22a (FIG. 1) for heating the pressing tool 22 is provided.

  The reel 23 is driven by a reel driving motor 31 (FIG. 2) provided on the rear surface of the base portion 14 to feed and supply the tape member Tp. The tape transport unit 24 includes a tape collecting unit 32 that collects the tape member Tp fed from the reel 23 by vacuum suction, and a region Rg (see FIG. 5) immediately below the pressing tool 22 when the tape member Tp between the reel 23 and the tape collecting unit 32 is pressed. 1) A plurality of rollers (first guide roller 33a, elevating roller 33b, second guide roller 33c, third guide roller 33d, fourth guide roller 33e, and a pair of fifth guide rollers 33f for guiding the rollers so as to extend in the horizontal direction. ).

  In FIG. 1, the first guide roller 33a is provided at the upper left part of the base portion 14, and the elevating roller 33b moves in a roller moving groove 14a formed to extend vertically below the first guide roller 33a. It is provided freely. The second guide roller 33c is provided at an obliquely lower right position of the first guide roller 33a, and the third guide roller 33d is provided slightly to the right of the second guide roller 33c and at the lower left portion of the base portion 14. It has been. The fourth guide roller 33e is provided on the right side of the base portion 14 on the right side of the third guide roller 33d, and the pair of fifth guide rollers 33f is above the fourth guide roller 33e and on the base portion. 14 are provided side by side in the left-right direction at the center of the right side. Here, the third guide roller 33d and the fourth guide roller 33e are positioned below the lower surface of the pressing tool 22 when the pressing tool 22 is in the standby position (see FIG. 1), and the pressing tool 22 is in the pressing position. Sometimes, it is provided at a location located above the lower surface of the pressing tool 22.

  In FIG. 1, the tape member Tp supplied from the reel 23 includes a first guide roller 33a, an elevating roller 33b, a second guide roller 33c, a third guide roller 33d, a fourth guide roller 33e, and a pair of fifth guide rollers 33f. (In the pair of fifth guide rollers 33f, the tape member Tp is sandwiched from both sides in the left-right direction) and collected by the tape collecting unit 32.

  The tape member Tp is given an appropriate tension by urging the portion between the first guide roller 33a and the second guide roller 33c downward by the weight of the elevating roller 33b provided in the roller moving groove 14a. It is done.

  The tape member Tp travels vertically downward in the left area of the pressing tool 22 between the second guide roller 33c and the third guide roller 33d, and the base portion 14 between the third guide roller 33d and the fourth guide roller 33e. The lower region proceeds from left to right (arrow A shown in FIG. 1). Further, the tape member Tp moves vertically upward in the right region of the pressing tool 22 between the fourth guide roller 33e and the pair of fifth guide rollers 33f and between the pair of fifth guide rollers 33f and the tape collection unit 32. To do.

  As described above, in the present embodiment, the tape transport unit 24 guides the tape member Tp fed out by the rotation of the reel 23 so that the region Rg immediately below the pressing tool 22 extends in the horizontal direction to transport the tape member Tp. Has the function to perform.

  In FIG. 1, the tape cutting unit 25 is located on the upstream side of the tape member Tp in the transport direction of the tape member Tp by the tape transport unit 24 from the region Rg directly below the pressing tool 22 (here, the second guide roller 33c). Between the second guide roller 33c and the third guide roller 33d, and is provided so as to be movable in the left-right direction in the left region of the tape member Tp extending in the vertical direction. Cutter 25a, cutter driving cylinder 25b for driving the cutter 25a so that the cutter 25a moves between the left storage position and the right protruding position (arrow B shown in FIG. 1) and the second guide roller A position facing the cutter 25a in the horizontal direction (namely, in the right region of the tape member Tp extending in the vertical direction between 33c and the third guide roller 33d (ie, Made from the back plate portion 25c provided at a position) sandwiching the tape member Tp between the cutter 25a.

  In the tape cutting part 25, a clearance that is slightly narrower than the thickness of the separator Sp is secured between the cutter 25a and the back plate part 25c positioned at the right protruding position. For this reason, when the cutter drive cylinder 25b moves the cutter 25a from the storage position to the protruding position with the tape member Tp extending in the vertical direction between the second guide roller 33c and the third guide roller 33d, the tape The cutter 25a is pressed perpendicularly to the ACF tape 4 on the left side of the member Tp, and only the ACF tape 4 is cut without cutting the separator Sp. At this time, the back plate portion 25c functions as a contact plate that supports the separator Sp on the right side of the tape member Tp and takes the reaction force of the pressing load of the cutter 25a against the tape member Tp.

  In FIG. 1, the peeling roller 26 is a part on the downstream side in the transport direction of the tape member Tp from the region Rg directly below the pressing tool 22 of the tape member Tp transported by the tape transport unit 24 (directly below the pressing tool 22. (A part of the right side of the region Rg) is composed of a pair of roller members that are vertically clamped. The peeling roller 26 is provided on the base portion 14, and when the base portion 14 moves in the horizontal direction, the peeling roller 26 also moves integrally with the base portion 14 in the horizontal direction.

  The imaging camera 27 is provided on the lower right side of the base portion 14 with the imaging field of view facing downward. The imaging camera 27 moves in accordance with the movement of the base portion 14 in the horizontal direction, so that the slice 4S of the attached ACF tape 4 is provided. The both ends of the image are taken. Thereby, the success or failure of pasting can be confirmed.

  The movement of the base unit 14 in the X-axis direction (left-right direction) relative to the horizontal frame 13a of the portal frame 13 is performed by the work execution control unit 40a (FIG. 3) of the control device 40 (FIG. 3) provided in the tape adhering device 1. This is done by controlling the operation of a base unit moving mechanism 41 (FIG. 3) including an actuator (not shown).

  The movement operation of the substrate 2 held by the substrate holding unit 12 is performed by the work execution control unit 40a of the control device 40 controlling the operation of the substrate holding unit driving mechanism 42 (FIG. 3) including an actuator (not shown). .

  The operation of transporting the tape member Tp by the tape transport unit 24 is performed when the work execution control unit 40a of the control device 40 controls the operation of the pair of fifth guide rollers 33f, the reel drive motor 31, and the tape collecting unit 32 ( FIG. 3).

  The raising / lowering operation of the pressing tool 22 is performed when the work execution control part 40a of the control apparatus 40 controls the operation of the tool raising / lowering cylinder 21 (FIG. 3). Further, the heater 22 a provided inside the pressing tool 22 is turned on and off by the work execution control unit 40 a of the control device 40.

  The imaging operation control by the imaging camera 27 is performed by the work execution control unit 40a of the control device 40 (FIG. 3). The image data captured by the imaging camera 27 is stored in the image data storage unit 40b of the control device 40, and the image recognition unit 40c (FIG. 3) receiving the instruction from the work execution control unit 40a stores it in the image data storage unit 40b. Image recognition is performed on the basis of the image data thus obtained.

  The movement operation of the cutter 25a in the left-right direction in the tape cutting unit 25, that is, the cutting operation of the ACF tape 4 by the cutter 25a is performed by the work execution control unit 40a of the control device 40 controlling the operation of the cutter drive cylinder 25b. (Figure 3).

  The length Ls (FIG. 1) of the slice 4S of the ACF tape 4 to be stuck to the electrode 3 on the substrate 2 is the target site Sa to be stuck to which the slice 4S of the ACF tape 4 is to be stuck to the electrode 3 on the substrate 2. (FIG. 1. Each sticking target portion Sa includes a plurality of electrodes 3) corresponding to the length in the X-axis direction, and the tape cutting unit 25 has the tape member Tp from the reel 23 to the ACF tape 4. The ACF tape 4 is cut every time the slice 4S is fed by the length Ls.

  FIG. 4 shows a section 4S of the ACF tape 4 located on the most head side of the tape member Tp among the sections 4S of the plurality of ACF tapes 4 formed on the tape member Tp (hereinafter referred to as the head section 4S). The rear end P is located just below the left end of the pressing tool 22 in the standby position. As shown in this figure, the cutting position M of the ACF tape 4 by the tape cutting unit 25 is such that the distance along the tape member Tp from the position immediately below the left end of the pressing tool 22 of the tape member Tp is the distance of the section 4S of the ACF tape 4. The tape cutting unit 25 is provided at a position that is an integral multiple of the length Ls (three times here), and the rear end P of the leading section 4S is located immediately below the left end of the pressing tool 22. By repeating the operation of cutting the ACF tape 4, a row of pieces 4S of the plurality of ACF tapes 4 having a length Ls is formed on the tape member Tp (on the separator Sp).

  FIG. 5A shows a state in which the top section 4S is attached to the substrate 2 by lowering the pressing tool 22 from the state shown in FIG. 4 to the pressing position (arrow C1 shown in FIG. 5A). The state pressed against the part Sa is shown. When the reel 23 is rotated and the tape member Tp is fed out from the reel 23 while maintaining the state of FIG. 5A, that is, the state where the transport of the tape member Tp by the tape transport unit 24 is stopped (FIG. 5B). ), The arrow D), and the raising / lowering roller 33b descends in the roller moving groove 14a in accordance with the feeding amount of the tape member Tp (by a distance half the feeding amount) (arrow E1 shown in FIG. 5B). . Then, the feeding amount of the tape member Tp becomes equal to the length Ls of the section 4S of the ACF tape 4, and the lifting roller 33b is half the length Ls of the section 4S of the ACF tape 4 from the start of rotation of the reel 23. When lowered by a distance Dm (= Ls / 2), the elevating roller 33b is located at a preset specified position (hereinafter referred to as a specified position J). The state in which the elevating roller 33 b is located at the specified position J is detected by a roller detection sensor 43 (FIG. 1) provided in the base portion 14, and the detection information is transmitted to the control device 40.

  That is, in the present embodiment, the elevating roller 33b moves on the base portion 14 so that the tape member Tp fed from the reel 23 is not loosened, and applies tension to the tape member Tp. When the feeding amount of the tape member Tp from the reel 23 in the state where the transport of the tape is stopped becomes equal to the length Ls of the section 4S of the ACF tape 4, it functions as a tension applying member located at the specified position J. Further, the roller detection sensor 43 functions as a tension applying member detection unit that detects a state in which the elevating roller 33b is located at the specified position J.

  The drive restricting portion 40d (FIG. 3) of the control device 40 is in a state where the lifting roller 33b has reached the specified position J by the roller detection sensor 43 in order to prevent the amount of feeding of the tape member Tp from the reel 23 from being excessive. Is detected, a restriction signal is output to the work execution control unit 40a to stop the rotation of the reel 23 by the reel drive motor 31. For this reason, when the tape member Tp is fed out from the reel 23 in a state where the feeding of the tape member Tp by the tape feeding unit 24 is stopped, the feeding amount of the tape member Tp is the length Ls of the section 4S of the ACF tape 4. , The rotation of the reel 23 is automatically stopped.

  Even when the restriction signal is output from the drive restricting unit 40d and the rotation of the reel 23 by the reel drive motor 31 is restricted, the lift roller 33b is subsequently moved to a position above the specified position J. Since the rotation restriction of the reel 23 is released, the work execution control unit 40a of the control device 40 can rotate the reel 23 to resume the feeding of the tape member Tp.

  Here, when the winding radius of the tape member Tp around the reel 23 is R (FIGS. 5A and 5B), the tape member Tp corresponding to the length Ls of the section 4S of the ACF tape 4 is fed out. Since the rotation angle φ of the reel 23 (FIG. 5B) satisfies the relational expression φ = Ls / R, the tape member Tp corresponding to the length Ls of the segment 4S of the ACF tape 4 is fed out from the reel 23. If the rotation angle φ of the reel 23 at this time is obtained, the winding radius R of the tape member Tp at that time (FIGS. 5A and 5B) can be known.

  The tape sticking apparatus 1 uses a rotation shaft of a reel drive motor 31 as a means for detecting a rotation angle φ of the reel 23 rotated when the reel 23 feeds out a tape member Tp corresponding to the length Ls of the section 4S of the ACF tape 4. Based on a rotational position detection sensor 44 (FIG. 3) that detects the rotational position of the reel 23 from a rotational angle (not shown) and an angular difference between the rotational positions of the two reels 23 detected by the rotational position detection sensor 44. A rotation angle calculation unit 40e (FIG. 3) of the control device 40 is provided as rotation angle detection means for calculating the rotation angle φ of the reel 23 between the rotation positions of the two reels 23.

  In the present embodiment, the rotational position of the reel 23 (FIG. 5A) when the rear end P of the leading section 4S is positioned directly below the left end of the pressing tool 22 and the pressing tool 22 is lowered, Thereafter, the tape member Tp is unwound from the reel 23, and the rotation position (FIG. 5B) of the reel 23 when the roller detection sensor 43 detects that the elevating roller 33b is located at the specified position J is the rotation position. Based on the angle difference between the two rotational positions read from the detection sensor 44, the rotation angle φ of the reel 23 rotated when the reel 23 feeds the tape member Tp corresponding to the length Ls of the section 4S of the ACF tape 4 is calculated. .

  The winding radius calculation unit 40f (FIG. 3) of the control device 40 applies the reel 23 based on the rotation angle φ of the reel 23 detected by the rotation angle detection means and the length Ls of the segment 4S of the ACF tape 4. The winding radius R of the wound tape member Tp is calculated from the formula R = Ls / φ.

  The work execution control unit 40a of the control device 40 performs control to rotate the reel 23 at a lower rotation speed W (FIG. 5B) as the winding radius R of the tape member Tp calculated by the winding radius calculation unit 40f is larger. Do.

  Next, using the flowchart of FIG. 6 and the operation explanatory diagrams of FIGS. 7 to 9, an operation of attaching the section 4S of the ACF tape 4 to the attachment target site Sa on the substrate 2 by the tape attaching device 1 (tape application) The execution procedure of the landing work) will be described.

  In order to attach the section 4S of the ACF tape 4 to the attachment target site Sa on the substrate 2 by the tape attaching device 1, the work execution control unit 40a of the control device 40 is first set to another device installed on the upstream side. The substrate 2 received from (for example, an electrode cleaning apparatus) is carried in by a substrate carry-in mechanism (not shown), and the substrate holding unit 12 is held (substrate loading and holding step in step ST1 shown in FIG. 6).

  When the substrate holding unit 12 holds the substrate 2, the work execution control unit 40 a of the control device 40 operates the substrate holding unit moving mechanism 11 to move the substrate holding unit 12, so that the substrate 2 provided with the electrode 3 is moved. The lower surface of the edge is brought into contact with the upper surface of the backup stage 15 (see the substrate 2 indicated by a one-dot chain line in FIG. 2). Then, the substrate 2 is positioned so that the plurality of electrodes 3 are arranged in a direction parallel to the moving direction (X-axis direction) of the base portion 14 and are located immediately below the pressing tool 22 (in step ST2 shown in FIG. 6). Substrate positioning step).

  When positioning the substrate 2, the work execution control unit 40 a of the control device 40 moves the base unit 14 in the left-right direction (X-axis direction) and is provided at both left and right ends of the substrate 2 by the imaging camera 27. The positioning mark is imaged, and the obtained image data is image-recognized by the image recognition unit 40c, thereby confirming whether or not the positional deviation of the substrate 2 with respect to the backup stage 15 has occurred.

  After positioning the substrate 2, the work execution control unit 40a of the control device 40 controls the operation of the base unit moving mechanism 41 to move the base unit 14 in the left-right direction (arrow F1 shown in FIG. 7A). ), The base portion 14 is positioned so that the left end of the pressing tool 22 is positioned immediately above the left end of the attachment target portion Sa on the substrate 2 to which the section 4S of the ACF tape 4 is to be attached (see FIG. Step ST3 base portion positioning step shown in FIG.

  The work execution control unit 40a of the control device 40, after positioning the base unit 14, controls the operation of the tape transport unit 24 to transport the tape member Tp, and presses the rear end P of the top section 4S to press the tool 22. Is positioned so as to be located immediately below the left end (FIG. 7A. ACF tape slice positioning step of step ST4 shown in FIG. 6).

  When the section 4S of the ACF tape 4 is positioned, the work execution control unit 40a of the control device 40 controls the operation of the cutter drive cylinder 25b to move the cutter 25a between the storage position and the protruding position, and the ACF tape. 4 is cut to form a section 4S of the ACF tape 4 on the tape member Tp (FIGS. 7B and 7C. Arrows B1 and B2 shown in these drawings. Steps shown in FIG. ST5 ACF tape cutting step).

  After cutting the ACF tape 4, the work execution control unit 40a of the control device 40 controls the operation of the tool lifting cylinder 21 to lower the pressing tool 22 to the pressing position (FIGS. 8A and 5A). ), An arrow C1), and the pressing tool 22 previously heated by the heater 22a presses the slice 4S of the ACF tape 4 together with the separator Sp against the edge of the substrate 2 (FIG. 8A). ACF tape section pressing step in step ST6).

  As described above, in the present embodiment, the tool elevating cylinder 21 is positioned immediately above the attachment target site Sa on the substrate 2 where the section 4S of the ACF tape 4 formed on the separator Sp is held by the substrate holding unit 12. The pressing tool 22 is lowered in a state where the pressing tool 22 is positioned, and the section 4S of the ACF tape 4 is pressed against the bonding target site Sa on the substrate 2 to function as a pressing tool lifting / lowering means.

  The work execution control unit 40a of the control device 40 starts the pressing of the section 4S of the ACF tape 4 onto the sticking target site Sa on the substrate 2 by the pressing tool 22, based on the detection information from the rotational position detection sensor 44. Then, the current rotation position of the reel 23 (that is, before the rotation) is read (reel rotation position reading process before the reel rotation in step ST7 shown in FIG. 6).

  When the work execution control unit 40a of the control device 40 reads the rotation position before the rotation of the reel 23, the work execution control unit 40a controls the rotation of the reel drive motor 31 to rotate the reel 23 at the rotation speed W, and removes the tape member Tp from the reel 23. It is fed out (arrow D shown in FIG. 8 (b) and FIG. 5 (b) in the reel rotation driving process in step ST8 shown in FIG. 6). As a result, the lifting roller 33b moves downward in the roller moving groove 14a (arrow E1 shown in FIGS. 8B and 5B). Here, the work execution control unit 40a of the control device 40 first rotates the reel 23 at a predetermined rotation speed W with a predetermined rotation speed W, and thereafter rotates the reel 23 at a rotation speed W set in step ST17 described later. Rotate.

  The work execution control unit 40a of the control device 40 monitors the output of the roller detection sensor 43 when the reel 23 starts to rotate at the rotational speed W, and determines whether or not the elevating roller 33b is positioned at the specified position J (FIG. Step ST9 for determining the arrival of the specified position shown in FIG. Then, the lifting roller 33b reaches the specified position J (FIGS. 8B and 5B), and the rotation of the reel 23 is restricted by the drive restricting portion 40d of the control device 40, so that the tape member Tp from the reel 23 is When the feeding is stopped (reel rotation stop process in step ST10 shown in FIG. 6), the work execution control unit 40a of the control device 40 determines the reel 23 based on the detection information from the rotation position detection sensor 44. The current rotation position (that is, after rotation) is read (rotation position reading process after reel rotation in step ST11 shown in FIG. 6).

  When the work execution control unit 40a of the control device 40 reads the rotation position after the rotation of the reel 23, the elapsed time from the start of pressing the section 4S of the ACF tape 4 onto the substrate 2 by the pressing tool 22 (step ST6) is predetermined. It is determined whether or not the time has been reached (elapsed time determination step in step ST12 shown in FIG. 6). When the elapsed time from the start of pressing the section 4S of the ACF tape 4 to the substrate 2 by the pressing tool 22 has not reached the predetermined time, the work execution control unit 40a of the control device 40 determines in step ST12. If the elapsed time from the start of pressing the section 4S of the ACF tape 4 to the substrate 2 by the pressing tool 22 has reached a predetermined time, the operation of the tool lifting cylinder 21 is controlled to press the pressing tool 22 Is raised to the standby position (arrow C2 shown in FIG. 8C), and the pressing of the ACF tape 4 to the substrate 2 by the pressing tool 22 is finished (FIG. 8C). Step A13 of ACF tape pressing end process).

  In the state in which the pressing tool 22 is raised to the standby position, the section 4S of the ACF tape 4 is stuck to the part to be stuck Sa on the substrate 2, so that the third guide roller 33d and the fourth guide roller As shown in FIG. 8C, the tape member Tp between 33e is kept pulled downward.

  When the work execution control unit 40a of the control device 40 raises the pressing tool 22 to the standby position, the section 4S of the ACF tape 4 is still on the substrate 2 on which the section 4S of the ACF tape 4 is currently stuck. It is determined whether or not there is a target site Sa to be pasted (step ST14 for determining whether a target site is present in step ST14 shown in FIG. 6). If there is still an attachment target part Sa on which the section 4S of the ACF tape 4 is attached on the substrate 2, the work execution control unit 40a of the control device 40 rotates the reel 23 read in step ST7. Based on the angle difference between the previous rotation position and the rotation position after the rotation of the reel 23 read in step ST11, the reel 23 is rotated when the tape member Tp corresponding to the length of the section 4S of the ACF tape 4 is fed. After detecting (calculating) the rotation angle φ of the reel 23 (rotation angle detection step of step ST15 shown in FIG. 6), from the detected rotation angle φ of the reel 23 and the length Ls of the slice 4S of the ACF tape 4 Then, the winding radius R of the tape member Tp wound around the reel 23 is calculated based on the equation R = Ls / φ (the winding radius calculating step of step ST16 shown in FIG. 6).

  When the work execution control unit 40a of the control device 40 calculates the winding radius R of the tape member Tp wound around the reel 23, the rotation speed W of the reel 23 decreases as the calculated winding radius R of the tape member Tp increases. The rotation speed W of the reel 23 is set on the basis of the predetermined standard determined as described above (reel rotation speed setting step in step ST17 shown in FIG. 6).

  After setting the rotation speed W of the reel 23, the work execution control unit 40a of the control device 40 controls the operation of the base unit moving mechanism 41, and moves the base unit 14 to the left (FIG. 9A and FIG. 9). 9 (b), the left end of the pressing tool 22 is located immediately above the left end of the target site Sa on the substrate 2 to which the section 4S of the ACF tape 4 is to be applied next (from now on). In this way, the base portion 14 is positioned (FIG. 9B), and during that time, the operation of the tape transport portion 24 is controlled to transport the tape member Tp and pull (arrow G shown in FIG. 9A). ), The top section 4S is drawn into the region Rg immediately below the pressing tool 22 (FIGS. 9B and 4).

  As a result, the separator Sp attached to the upper surface of the section 4S of the ACF tape 4 attached on the substrate 2 is transported by the tape transport unit 24 while being pulled upward by the peeling roller 26 (left). Therefore, the separator Sp is peeled from the section 4S of the ACF tape 4 attached to the attachment target site Sa on the substrate 2 (FIG. 9A → FIG. 9B). The base part positioning process which served as peeling of the separator of step ST18 shown). During this time, the elevating roller 33b rises from the specified position J (FIG. 9 (a) → FIG. 9 (b). Arrow E2 shown in FIG. 9 (a)), the rotation restriction of the reel 23 is released.

  When the work execution control unit 40a of the control device 40 performs positioning of the base unit 14 that also serves as the separation of the separator Sp, the work execution control unit 40a returns to step ST4 and positions the section 4S of the ACF tape 4 (FIG. 9B). In positioning of the section 4S of the ACF tape 4 in step ST4 after this step ST18 has elapsed, the tape transport unit 24 continues to transport the tape member Tp in step ST18, and the tape transport unit 24 transports the tape member Tp. When the amount reaches the length Ls of the section 4S of the ACF tape 4, the conveying operation of the tape member Tp is stopped. When the tape transport unit 24 transports the tape member Tp, the lifting roller 33b moves up in the roller moving groove 14a. When the tape member Tp is transported by the length Ls of the section 4S of the ACF tape 4, the lift roller 33b moves up and down. The roller 33b is located at the ascending position J1, which is a position above the defined position J by a distance Dm (= Ls / 2) (FIGS. 9B and 4).

  In step ST4 performed after step ST18 has elapsed, the reel 23 is rotated at the rotational speed W set in step ST18 (that is, the rotational speed W set to a smaller value as the winding radius R of the tape member Tp increases). Therefore, the feeding speed of the tape member Tp fed from the reel 23 is constant regardless of the winding radius of the tape member Tp wound around the reel 23 (that is, the remaining amount of the tape member Tp), and the tape member Tp can be supplied stably. Made.

  On the other hand, in step ST14, the work execution control unit 40a of the control device 40 moves the base unit 14 to the left when there is no attachment target site Sa on which the section 4S of the ACF tape 4 is attached on the substrate 2. The separator Sp is peeled off from the slice 4S of the ACF tape 4 attached to the attachment target portion Sa on the substrate 2 by causing the tape conveyance unit 24 to convey the tape member Tp while moving to (FIG. 6). Step ST19 separator peeling step shown in FIG. In step ST19, the work execution control unit 40a of the control device 40 moves the base unit 14 by a moving amount that allows the separator Sp to be peeled off.

  When the work execution control unit 40a of the control device 40 peels off the separator Sp in step ST19, the substrate 2 held by the substrate holding unit 12 (the section 4S of the ACF tape 4 is attached) by the substrate unloading mechanism (not shown). The finished substrate 2) is carried out to another device (for example, a temporary pressure bonding device) installed on the downstream side (substrate carrying-out step of step ST20 shown in FIG. 6).

  As described above, the tape adhering device 1 according to the present embodiment detects the rotation angle φ of the reel 23 that is rotated when the reel 23 feeds the tape member Tp corresponding to the length Ls of the section 4S of the ACF tape 4. The rotation angle detection means (the rotation position detection sensor 44 and the rotation angle calculation unit 40e of the control device 40), the rotation angle φ of the reel 23 detected by the rotation angle detection means, and the length Ls of the slice 4S of the ACF tape 4 The winding radius calculation means (the winding radius calculation section 40f of the control device 40) for calculating the winding radius R of the tape member Tp wound around the reel 23 and the winding radius R of the tape member Tp calculated by the winding radius calculation means are large. Reel rotation control means (the work execution control unit 40 of the control device 40) that rotates the reel 23 at a rotational speed W that is gradually reduced. a) is provided.

  Moreover, the tape sticking method in this Embodiment is the tape sticking method by the said tape sticking apparatus 1, (1) When the reel 23 pays out the tape member Tp for the length of the piece 4S of the ACF tape 4 (2) The reel 23 is wound around the reel 23 from the detected rotation angle φ of the reel 23 and the length Ls of the slice 4S of the ACF tape 4. A step of calculating the winding radius R of the tape member Tp thus obtained (the winding radius calculation step of step ST16), and (3) a step of rotating the reel 23 at a smaller rotational speed W as the calculated winding radius R of the tape member Tp is larger. (Reel rotation speed setting step in step ST17 and reel rotation drive step in step ST8).

  In the tape adhering device 1 (tape adhering method) in the present embodiment, the tape member Tp is rotated when the length Ls of the section 4S of the ACF tape 4 and the length Ls of the section 4S of the ACF tape 4 are fed out. The winding radius R of the tape member Tp wound around the reel 23 is calculated from the rotation angle φ of the reel 23, and the reel 23 is rotated at a lower rotational speed W as the winding radius R of the tape member Tp is larger. Therefore, the feeding speed of the tape member Tp fed from the reel 23 (the feeding speed of the tape member Tp corresponds to the raising / lowering speed in the roller moving groove 14a of the raising / lowering roller 33b) is the tape member wound around the reel 23. The winding radius R of Tp, that is, the tape member Tp can be constant regardless of the remaining amount of the tape member Tp. It is possible to enhance the mounting accuracy of the substrate 2 sections 4S of the ACF tape 4 is supplied to the Joteki.

  Moreover, in the tape sticking apparatus 1 (tape sticking method) in this Embodiment, it moves on the base part 14 so that the tape member Tp drawn | fed out from the reel 23 may not loosen, and tension | tensile_strength is given to the tape member Tp, When the feeding amount of the tape member Tp from the reel 23 in a state where the feeding of the tape member Tp by the tape feeding unit 24 is stopped becomes equal to the length Ls of the section 4S of the ACF tape 4, a prescribed position (a prescribed position) J) includes a lifting roller 33b serving as a tension applying member, and a roller detection sensor 43 serving as a tension applying member detection sensor for detecting a state where the lifting roller 33b is positioned at a specified position J. The reel 23 in a state in which the rotation position of the reel 23 before feeding the ACF tape 4 and the section 4S of the ACF tape 4 are fixed to the base portion 14. The ACF tape 4 is fed out, and the length of the section 4S of the ACF tape 4 is determined based on the angular difference from the rotational position of the reel 23 when the roller detection sensor 43 detects that the lifting roller 33b is located at the specified position J. Since the rotation angle φ of the reel 23 rotated when the tape member Tp corresponding to the length Ls is fed out is detected, the rotation angle φ of the reel 23 can be detected with a simple configuration.

  Although the embodiment of the present invention has been described so far, the present invention is not limited to the above. For example, in the above-described embodiment, the cutting position M of the ACF tape 4 by the tape cutting unit 25 is such that the distance along the tape member Tp from the position immediately below the left end of the pressing tool 22 of the tape member Tp is a section of the ACF tape 4. Although it was provided at a position that is an integral multiple of the length Ls of 4S, this means that the rear end P of the leading section 4S is located immediately below the left end of the pressing tool 22 at the standby position (ie, This is because the ACF tape 4 can be cut in a state immediately before the section 4S of the ACF tape 4 is pressed by the pressing tool 22, and unless the ACF tape 4 is cut at such timing. The cutting position M of the ACF tape 4 by the tape cutting unit 25 is not necessarily located at the position shown in the present embodiment.

  Further, in the above-described embodiment, the tape member Tp is fed out from the reel 23 while the section 4S of the ACF tape 4 is pressed against the substrate 2 by the pressing tool 22, thereby pressing the tape member Tp. The effect that the feeding operation of the tape member Tp can be performed using the pressing time of the section 4S of the ACF tape 4 by the tool 22 is obtained, but the feeding operation of the tape member Tp is performed by the tape transport unit 24. This can be performed if the conveyance is stopped (if the tape member Tp is fed out from the reel 23 in a state where the conveyance of the tape member Tp is stopped), the elevating roller 33b is lowered in the roller moving groove 14a), and the ACF is not necessarily required. It may not be while pressing the section 4S of the tape 4 against the substrate 2 by the pressing tool 22.

  Provided are a tape adhering device and a tape adhering method capable of stably supplying a tape member regardless of the remaining amount of the tape member and improving the accuracy of attaching an ACF tape section to a substrate.

DESCRIPTION OF SYMBOLS 1 Tape sticking apparatus 2 Substrate 4 ACF tape 4S Section 12 Substrate holding part 14 Base part 21 Tool raising / lowering cylinder (pressing tool raising / lowering means)
22 Pressing Tool 23 Reel 24 Tape Conveying Section 25 Tape Cutting Section 33b Lifting Roller (Tension Applying Member)
40a Work execution control unit (reel rotation control means)
40e Rotation angle calculation unit (rotation angle detection means)
40f Winding radius calculation unit (winding radius calculation means)
43 Roller detection sensor (tension applying member detection means)
44 Rotation position detection sensor (Rotation angle detection means)
Sp Separator Tp Tape member Ls Length of ACF tape section Rg Area just below the pressing tool φ Reel rotation angle R Tape member winding radius W Rotational speed Sa Site to be attached

Claims (4)

A substrate holding portion for holding a substrate, a base portion provided above the substrate holding portion, a pressing tool provided to be movable up and down with respect to the base portion, and an anisotropic conductive film provided on the base portion A reel on which a tape member having a separator attached on one side of an ACF tape is wound, and a tape member fed out by the rotation of the reel guides the region immediately below the pressing tool so as to extend in the horizontal direction, thereby transporting the tape member. A tape transport unit, a tape cutting unit that cuts the ACF tape from the tape member fed from the reel to form a section of the ACF tape on the tape member, and a section of the ACF tape formed on the separator as the substrate holding unit The pressing tool is lowered in a state where it is positioned at a position immediately above the target site of attachment on the held substrate, and a section of the ACF tape is placed on the substrate. A and pressing tool lifting means is stuck against the wearing target site pasting of the tape sticking device provided with,
A rotation angle detecting means for detecting a rotation angle of the reel rotated when the reel feeds out a tape member corresponding to the length of the ACF tape section;
A winding radius calculating means for calculating a winding radius of the tape member wound around the reel from the rotation angle of the reel detected by the rotation angle detecting means and the length of the section of the ACF tape;
A tape adhering apparatus comprising: a reel rotation control unit that rotates a reel at a lower rotation speed as the winding radius of the tape member calculated by the winding radius calculation unit increases. The tape member fed from the reel is moved on the base so that the tape member does not loosen, tension is applied to the tape member, and the tape member is fed out from the reel in a state where the tape feeding by the tape feeding unit is stopped. A tensioning member located at a defined position when equal to the length of the ACF tape section;
A tension applying member detecting means for detecting a state in which the tension applying member is located at the specified position;
The rotation angle detection means feeds the ACF tape from the reel in a state where the reel rotation position before feeding the ACF tape and the section of the ACF tape is fixed to the base, and the tension application member detects the tension application member. Based on the angular difference from the rotation position of the reel when the state positioned at the specified position is detected, the rotation angle of the reel rotated when the tape member corresponding to the length of the section of the ACF tape is fed out is detected. The tape sticking apparatus according to claim 1. A substrate holding portion for holding a substrate, a base portion provided above the substrate holding portion, a pressing tool provided to be movable up and down with respect to the base portion, and an anisotropic conductive film provided on the base portion A reel on which a tape member having a separator attached to one side of an ACF tape is wound, and a tape transport unit that transports the tape member by guiding the region immediately below the pressing tool by the tape member fed out by the rotation of the reel in the horizontal direction. And a tape cutting section for cutting the ACF tape from the tape member fed from the reel to form a section of the ACF tape on the tape member, and holding the section of the ACF tape formed on the separator to the substrate holding section The pressing tool is lowered in a state where it is positioned at a position immediately above the site to be pasted on the substrate, and a section of the ACF tape is pasted on the substrate. A tape applying method in tape sticking device of sticking against the target site,
Detecting the rotation angle of the reel that is rotated when the reel feeds the tape member for the length of the ACF tape section;
Calculating a winding radius of the tape member wound around the reel from the detected rotation angle of the reel and the length of the section of the ACF tape;
And a step of rotating the reel at a lower rotation speed as the calculated winding radius of the tape member is larger. The tape sticking device moves on the base portion so that the tape member fed from the reel does not loosen, tension is applied to the tape member, and the tape from the reel in a state in which the tape conveyance by the tape conveyance portion is stopped. A tension applying member located at a specified position when the amount of feeding of the tape member becomes equal to the length of the section of the ACF tape;
A tension applying member detecting means for detecting a state in which the tension applying member is located at the specified position;
The reel rotation position before feeding out the ACF tape, and the ACF tape is fed out from the reel in a state where the ACF tape section is fixed to the base portion, and the tension applying member is positioned at the specified position by the tension applying member detecting means. The rotation angle of the reel rotated when the tape member corresponding to the length of the section of the ACF tape is fed out is detected based on the angle difference from the rotation position of the reel when the detected state is detected. Item 4. The tape sticking method according to Item 3.

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