JP2012094462A5 - - Google Patents

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Publication number
JP2012094462A5
JP2012094462A5 JP2010242952A JP2010242952A JP2012094462A5 JP 2012094462 A5 JP2012094462 A5 JP 2012094462A5 JP 2010242952 A JP2010242952 A JP 2010242952A JP 2010242952 A JP2010242952 A JP 2010242952A JP 2012094462 A5 JP2012094462 A5 JP 2012094462A5
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JP
Japan
Prior art keywords
charged particle
particle beam
insulating member
beam apparatus
cylindrical insulating
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Application number
JP2010242952A
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English (en)
Japanese (ja)
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JP2012094462A (ja
JP5452446B2 (ja
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Priority to JP2010242952A priority Critical patent/JP5452446B2/ja
Priority claimed from JP2010242952A external-priority patent/JP5452446B2/ja
Publication of JP2012094462A publication Critical patent/JP2012094462A/ja
Publication of JP2012094462A5 publication Critical patent/JP2012094462A5/ja
Application granted granted Critical
Publication of JP5452446B2 publication Critical patent/JP5452446B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010242952A 2010-10-29 2010-10-29 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置 Expired - Fee Related JP5452446B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010242952A JP5452446B2 (ja) 2010-10-29 2010-10-29 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010242952A JP5452446B2 (ja) 2010-10-29 2010-10-29 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2012094462A JP2012094462A (ja) 2012-05-17
JP2012094462A5 true JP2012094462A5 (enExample) 2013-03-14
JP5452446B2 JP5452446B2 (ja) 2014-03-26

Family

ID=46387567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010242952A Expired - Fee Related JP5452446B2 (ja) 2010-10-29 2010-10-29 磁界重畳型電子銃および当該磁界重畳型電子銃を備えた荷電粒子線装置

Country Status (1)

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JP (1) JP5452446B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101813467B1 (ko) * 2016-11-29 2017-12-29 주식회사 다원시스 진공내 설치 및 운용이 가능한 솔레노이드 자기장 렌즈의 구성 방법과 그 장치
CN110360919B (zh) * 2019-08-06 2021-04-02 中国电子科技集团公司第四十九研究所 一种超高温位移传感器
US10923307B1 (en) * 2020-04-13 2021-02-16 Hamamatsu Photonics K.K. Electron beam generator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5360556A (en) * 1976-11-12 1978-05-31 Hitachi Ltd Electric apparatus

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