JP2012085085A5 - - Google Patents

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Publication number
JP2012085085A5
JP2012085085A5 JP2010229321A JP2010229321A JP2012085085A5 JP 2012085085 A5 JP2012085085 A5 JP 2012085085A5 JP 2010229321 A JP2010229321 A JP 2010229321A JP 2010229321 A JP2010229321 A JP 2010229321A JP 2012085085 A5 JP2012085085 A5 JP 2012085085A5
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JP
Japan
Prior art keywords
electrode
semiconductor layer
substrate
patterning
region
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JP2010229321A
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English (en)
Japanese (ja)
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JP5601463B2 (ja
JP2012085085A (ja
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Publication of JP2012085085A5 publication Critical patent/JP2012085085A5/ja
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JP2010229321A 2010-10-12 2010-10-12 Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法 Expired - Fee Related JP5601463B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010229321A JP5601463B2 (ja) 2010-10-12 2010-10-12 Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010229321A JP5601463B2 (ja) 2010-10-12 2010-10-12 Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法

Publications (3)

Publication Number Publication Date
JP2012085085A JP2012085085A (ja) 2012-04-26
JP2012085085A5 true JP2012085085A5 (enrdf_load_stackoverflow) 2013-11-07
JP5601463B2 JP5601463B2 (ja) 2014-10-08

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010229321A Expired - Fee Related JP5601463B2 (ja) 2010-10-12 2010-10-12 Ｍｅｍｓ振動子、発振器、およびｍｅｍｓ振動子の製造方法

Country Status (1)

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JP (1) JP5601463B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014116707A (ja) * 2012-12-07 2014-06-26 Seiko Epson Corp 振動子の製造方法
JP2014170997A (ja) 2013-03-01 2014-09-18 Seiko Epson Corp Ｍｅｍｓ振動子、ｍｅｍｓ振動子の製造方法、電子機器、及び移動体
JP2015080012A (ja) 2013-10-15 2015-04-23 セイコーエプソン株式会社 振動子、発振器、電子機器及び移動体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03263833A (ja) * 1990-03-14 1991-11-25 Mitsubishi Electric Corp テーパエツチング方法
EP1777816A1 (en) * 2005-10-18 2007-04-25 Seiko Epson Corporation MEMS resonator and method of enhancing an output signal current from a MEMS resonator
JP2010166201A (ja) * 2009-01-14 2010-07-29 Seiko Epson Corp Ｍｅｍｓデバイス及びその製造方法
JP5446365B2 (ja) * 2009-03-25 2014-03-19 セイコーエプソン株式会社 機能素子の寸法の測定方法、機能素子付き基板の製造方法、機能素子付き基板および電子装置

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