JP2012068247A5 - - Google Patents
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- Publication number
- JP2012068247A5 JP2012068247A5 JP2011206800A JP2011206800A JP2012068247A5 JP 2012068247 A5 JP2012068247 A5 JP 2012068247A5 JP 2011206800 A JP2011206800 A JP 2011206800A JP 2011206800 A JP2011206800 A JP 2011206800A JP 2012068247 A5 JP2012068247 A5 JP 2012068247A5
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- measurement
- plasma
- discharge light
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000691 measurement method Methods 0.000 claims 7
- 239000000203 mixture Substances 0.000 claims 7
- 239000007789 gas Substances 0.000 claims 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 4
- 238000005259 measurement Methods 0.000 claims 4
- 239000011368 organic material Substances 0.000 claims 4
- 239000001301 oxygen Substances 0.000 claims 4
- 229910052760 oxygen Inorganic materials 0.000 claims 4
- 239000007787 solid Substances 0.000 claims 4
- 238000004611 spectroscopical analysis Methods 0.000 claims 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- 239000000446 fuel Substances 0.000 claims 2
- 229920000642 polymer Polymers 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 229910052786 argon Inorganic materials 0.000 claims 1
- 229960001716 benzalkonium Drugs 0.000 claims 1
- CYDRXTMLKJDRQH-UHFFFAOYSA-N benzododecinium Chemical compound CCCCCCCCCCCC[N+](C)(C)CC1=CC=CC=C1 CYDRXTMLKJDRQH-UHFFFAOYSA-N 0.000 claims 1
- 238000004993 emission spectroscopy Methods 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
- -1 polyethylene terephthalate Polymers 0.000 claims 1
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 1
- 239000005020 polyethylene terephthalate Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1057722A FR2965355B1 (fr) | 2010-09-24 | 2010-09-24 | Procede de mesure par spectrometrie de decharge luminescente d'un echantillon solide organique ou polymere |
| FR1057722 | 2010-09-24 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013187504A Division JP5427313B2 (ja) | 2010-09-24 | 2013-09-10 | 固体試料の放電発光分光分析による測定方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012068247A JP2012068247A (ja) | 2012-04-05 |
| JP2012068247A5 true JP2012068247A5 (enExample) | 2013-08-01 |
| JP5367036B2 JP5367036B2 (ja) | 2013-12-11 |
Family
ID=43567667
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011206800A Active JP5367036B2 (ja) | 2010-09-24 | 2011-09-22 | 有機またはポリマー固体試料の放電発光分光分析による測定方法 |
| JP2013187504A Active JP5427313B2 (ja) | 2010-09-24 | 2013-09-10 | 固体試料の放電発光分光分析による測定方法 |
| JP2013248023A Active JP5643892B2 (ja) | 2010-09-24 | 2013-11-29 | 固体試料の放電発光分光分析による測定装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013187504A Active JP5427313B2 (ja) | 2010-09-24 | 2013-09-10 | 固体試料の放電発光分光分析による測定方法 |
| JP2013248023A Active JP5643892B2 (ja) | 2010-09-24 | 2013-11-29 | 固体試料の放電発光分光分析による測定装置 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP2434275B1 (enExample) |
| JP (3) | JP5367036B2 (enExample) |
| FR (1) | FR2965355B1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0657876B2 (ja) | 1984-10-15 | 1994-08-03 | 日本カ−ボン株式会社 | 電気炉用黒鉛電極の製造方法 |
| JP6042772B2 (ja) * | 2013-05-20 | 2016-12-14 | 日本電信電話株式会社 | 金属部材に対する水素侵入特性評価方法 |
| FR3019298B1 (fr) * | 2014-03-31 | 2016-04-15 | Horiba Jobin Yvon Sas | Procede et appareil de mesure d'un echantillon solide organique par spectrometrie de decharge luminescente |
| FR3028952B1 (fr) * | 2014-11-26 | 2018-02-09 | Horiba Jobin Yvon Sas | Procede d'analyse d'un echantillon solide par spectrometrie de masse a temps de vol |
| TWI636253B (zh) * | 2017-01-05 | 2018-09-21 | 富蘭登科技股份有限公司 | 一種應用光譜儀來量測氣體解離狀態的量測裝置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2038518C (en) * | 1990-03-19 | 1998-06-23 | Tetsuya Mega | Glow discharge atomic emission spectroscopy and apparatus thereof |
| JP3170170B2 (ja) * | 1995-02-02 | 2001-05-28 | 理学電機工業株式会社 | グロー放電発光分光分析方法およびそれに用いる装置 |
| US6040248A (en) * | 1998-06-24 | 2000-03-21 | Taiwan Semiconductor Manufacturing Company | Chemistry for etching organic low-k materials |
| US6174800B1 (en) * | 1998-09-08 | 2001-01-16 | Taiwan Semiconductor Manufacturing Company | Via formation in a poly(arylene ether) inter metal dielectric layer |
| JP2001004547A (ja) * | 1999-06-21 | 2001-01-12 | Horiba Ltd | グロー放電分析装置 |
| US6900139B1 (en) * | 2002-04-30 | 2005-05-31 | Advanced Micro Devices, Inc. | Method for photoresist trim endpoint detection |
| JP3996817B2 (ja) * | 2002-08-27 | 2007-10-24 | 株式会社堀場製作所 | グロー放電分析装置およびグロー放電分析装置の分析結果表示方法 |
| US7129159B2 (en) * | 2004-08-17 | 2006-10-31 | International Business Machines Corporation | Integrated dual damascene RIE process with organic patterning layer |
| FR2926161B1 (fr) * | 2008-01-04 | 2012-02-10 | Horiba Jobin Yvon Sas | Source magnetron pour spectrometre a decharge luminescente. |
| FR2942071B1 (fr) * | 2009-02-11 | 2011-04-08 | Horiba Jobin Yvon Sas | Lampe a decharge pour gds a champ magnetique axial |
-
2010
- 2010-09-24 FR FR1057722A patent/FR2965355B1/fr active Active
-
2011
- 2011-09-14 EP EP11306147.7A patent/EP2434275B1/fr active Active
- 2011-09-22 JP JP2011206800A patent/JP5367036B2/ja active Active
-
2013
- 2013-09-10 JP JP2013187504A patent/JP5427313B2/ja active Active
- 2013-11-29 JP JP2013248023A patent/JP5643892B2/ja active Active
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