FR2926161B1 - Source magnetron pour spectrometre a decharge luminescente. - Google Patents
Source magnetron pour spectrometre a decharge luminescente.Info
- Publication number
- FR2926161B1 FR2926161B1 FR0850055A FR0850055A FR2926161B1 FR 2926161 B1 FR2926161 B1 FR 2926161B1 FR 0850055 A FR0850055 A FR 0850055A FR 0850055 A FR0850055 A FR 0850055A FR 2926161 B1 FR2926161 B1 FR 2926161B1
- Authority
- FR
- France
- Prior art keywords
- spectrometer
- luminescent discharge
- source magnetron
- magnetron
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
Landscapes
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0850055A FR2926161B1 (fr) | 2008-01-04 | 2008-01-04 | Source magnetron pour spectrometre a decharge luminescente. |
PCT/FR2009/050008 WO2009130424A1 (fr) | 2008-01-04 | 2009-01-05 | Source magnetron pour spectrometre a decharge luminescente |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0850055A FR2926161B1 (fr) | 2008-01-04 | 2008-01-04 | Source magnetron pour spectrometre a decharge luminescente. |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2926161A1 FR2926161A1 (fr) | 2009-07-10 |
FR2926161B1 true FR2926161B1 (fr) | 2012-02-10 |
Family
ID=39650467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0850055A Active FR2926161B1 (fr) | 2008-01-04 | 2008-01-04 | Source magnetron pour spectrometre a decharge luminescente. |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2926161B1 (fr) |
WO (1) | WO2009130424A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2965355B1 (fr) * | 2010-09-24 | 2013-05-10 | Horiba Jobin Yvon Sas | Procede de mesure par spectrometrie de decharge luminescente d'un echantillon solide organique ou polymere |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3371439D1 (en) * | 1982-01-26 | 1987-06-11 | Materials Research Corp | Magnetron reactive bias sputtering method and apparatus |
US4581118A (en) * | 1983-01-26 | 1986-04-08 | Materials Research Corporation | Shaped field magnetron electrode |
CA1239115A (fr) * | 1987-10-29 | 1988-07-12 | Canadian Patents And Development Limited - Societe Canadienne Des Brevets Et D'exploitation Limitee | Appareil et methode de pulverisation cathodique |
EP0574100B1 (fr) * | 1992-04-16 | 1999-05-12 | Mitsubishi Jukogyo Kabushiki Kaisha | Procédé et appareillage de dépÔt chimique en phase vapeur assisté par plasma |
-
2008
- 2008-01-04 FR FR0850055A patent/FR2926161B1/fr active Active
-
2009
- 2009-01-05 WO PCT/FR2009/050008 patent/WO2009130424A1/fr active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2009130424A1 (fr) | 2009-10-29 |
FR2926161A1 (fr) | 2009-07-10 |
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Legal Events
Date | Code | Title | Description |
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PLFP | Fee payment |
Year of fee payment: 9 |
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PLFP | Fee payment |
Year of fee payment: 10 |
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PLFP | Fee payment |
Year of fee payment: 11 |
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PLFP | Fee payment |
Year of fee payment: 13 |
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PLFP | Fee payment |
Year of fee payment: 14 |
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PLFP | Fee payment |
Year of fee payment: 15 |
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PLFP | Fee payment |
Year of fee payment: 16 |