JP2012023120A5 - - Google Patents
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- JP2012023120A5 JP2012023120A5 JP2010158502A JP2010158502A JP2012023120A5 JP 2012023120 A5 JP2012023120 A5 JP 2012023120A5 JP 2010158502 A JP2010158502 A JP 2010158502A JP 2010158502 A JP2010158502 A JP 2010158502A JP 2012023120 A5 JP2012023120 A5 JP 2012023120A5
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- probe
- holding
- chuck
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010158502A JP5564347B2 (ja) | 2010-07-13 | 2010-07-13 | プローブ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010158502A JP5564347B2 (ja) | 2010-07-13 | 2010-07-13 | プローブ装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2012023120A JP2012023120A (ja) | 2012-02-02 |
JP2012023120A5 true JP2012023120A5 (zh) | 2013-07-25 |
JP5564347B2 JP5564347B2 (ja) | 2014-07-30 |
Family
ID=45777164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010158502A Active JP5564347B2 (ja) | 2010-07-13 | 2010-07-13 | プローブ装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5564347B2 (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6418118B2 (ja) | 2015-09-24 | 2018-11-07 | 三菱電機株式会社 | 半導体装置の評価装置及び評価方法 |
JP6406221B2 (ja) | 2015-11-17 | 2018-10-17 | 三菱電機株式会社 | 半導体装置の評価装置及び評価方法 |
JP7426157B1 (ja) | 2023-06-06 | 2024-02-01 | ハイソル株式会社 | 加熱ステージおよび温度特性計測システム |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000138268A (ja) * | 1998-11-04 | 2000-05-16 | Hitachi Chem Co Ltd | 半導体回路の検査方法及び検査装置 |
JP2004266206A (ja) * | 2003-03-04 | 2004-09-24 | Nec Yamagata Ltd | プローバ装置、プローブカードのプリヒート方法およびそのプログラム |
JP2006278414A (ja) * | 2005-03-28 | 2006-10-12 | Seiko Epson Corp | 半導体検査装置、半導体装置の検査方法、及び半導体装置の製造方法 |
JP2008300655A (ja) * | 2007-05-31 | 2008-12-11 | Fujitsu Microelectronics Ltd | ウエハの試験装置及び試験方法 |
JP2009070874A (ja) * | 2007-09-11 | 2009-04-02 | Tokyo Electron Ltd | 検査装置 |
JP5074878B2 (ja) * | 2007-10-15 | 2012-11-14 | 東京エレクトロン株式会社 | 検査装置 |
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2010
- 2010-07-13 JP JP2010158502A patent/JP5564347B2/ja active Active
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