JP2012022812A - Vacuum valve - Google Patents

Vacuum valve Download PDF

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Publication number
JP2012022812A
JP2012022812A JP2010158126A JP2010158126A JP2012022812A JP 2012022812 A JP2012022812 A JP 2012022812A JP 2010158126 A JP2010158126 A JP 2010158126A JP 2010158126 A JP2010158126 A JP 2010158126A JP 2012022812 A JP2012022812 A JP 2012022812A
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metal
vacuum valve
vacuum
arc shield
contact
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JP5537303B2 (en
Inventor
Naoki Asari
直紀 浅利
Haruka Sasaki
遥 佐々木
Kosuke Sasage
浩資 捧
Shiro Otake
史郎 大竹
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Toshiba Corp
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Toshiba Corp
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Priority to JP2010158126A priority Critical patent/JP5537303B2/en
Priority to KR1020110067133A priority patent/KR101254629B1/en
Priority to EP11173237A priority patent/EP2407991A1/en
Priority to CN201110219982.XA priority patent/CN102332364B/en
Publication of JP2012022812A publication Critical patent/JP2012022812A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H01H33/662—Housings or protective screens
    • H01H33/66207—Specific housing details, e.g. sealing, soldering or brazing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H01H33/662—Housings or protective screens
    • H01H33/66261—Specific screen details, e.g. mounting, materials, multiple screens or specific electrical field considerations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H9/00—Details of switching devices, not covered by groups H01H1/00 - H01H7/00
    • H01H9/30—Means for extinguishing or preventing arc between current-carrying parts
    • H01H9/34—Stationary parts for restricting or subdividing the arc, e.g. barrier plate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H01H33/662—Housings or protective screens
    • H01H33/66261—Specific screen details, e.g. mounting, materials, multiple screens or specific electrical field considerations
    • H01H2033/66269—Details relating to the materials used for screens in vacuum switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H01H33/662—Housings or protective screens
    • H01H33/66261—Specific screen details, e.g. mounting, materials, multiple screens or specific electrical field considerations
    • H01H2033/66284—Details relating to the electrical field properties of screens in vacuum switches

Landscapes

  • High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a vacuum valve arranged so that the dielectric strength characteristic is enhanced between a conducting shaft and an arc shield even when the conducting shaft and arc shield are large in areas of portions opposed to each other and the strength of breakdown electric field is reduced.SOLUTION: The vacuum valve has: a vacuum insulating container 1; a pair of contacts 6 and 7 which are housed in the vacuum insulating container 1 and can be freely brought into and out of contact with each other; a pair of conducting shafts 4 and 8 tightly fixed to the pair of contacts 6 and 7; an arc shield 11 provided to surround the pair of contacts 6 and 7; and metal coatings 5, 9 and 12 provided on outer surfaces of the pair of conducting shafts 4 and 8 and an inner surface of the arc shield 11, and made of metal material higher in fusing point than metal constituting themselves.

Description

本発明の実施形態は、耐電圧特性を向上し得る接離自在の一対の接点を有する真空バルブに関する。   Embodiments of the present invention relate to a vacuum valve having a pair of contact points that can improve withstand voltage characteristics.

従来、この種の真空バルブは、真空中の耐電圧特性を向上させるため、金属蒸気の拡散を防止する筒状のアークシールド端部にセラミック拡散層を生成させたものが知られている（例えば、特許文献１参照。）。   Conventionally, this type of vacuum valve is known in which a ceramic diffusion layer is generated at the end of a cylindrical arc shield that prevents diffusion of metal vapor in order to improve the withstand voltage characteristics in vacuum (for example, , See Patent Document 1).

一方、アークシールド端部などにおいては、曲率を小さくし、耐電圧特性を向上させるものが知られている。所謂、真空中の面積効果を利用したものであり、絶縁破壊に寄与する面積を小さくし、破壊電界を上昇させるものである（例えば、特許文献２参照。）。   On the other hand, an arc shield end or the like is known that has a reduced curvature and improved withstand voltage characteristics. A so-called area effect in a vacuum is used to reduce the area contributing to dielectric breakdown and increase the breakdown electric field (see, for example, Patent Document 2).

特開２００７−１１５５９９号公報JP 2007-115599 A 特開平１０−２１８０２号公報Japanese Patent Laid-Open No. 10-21802

上記の従来の真空バルブにおいては、電界強度の高い部分がアークシールド端部に位置し易く、各種の耐電圧向上策が取られている。一方、接点を固着している通電軸においては、アークシールドとの絶縁距離が比較的に確保され、電界強度が抑制されている。しかしながら、棒状の通電軸と筒状のアークシールド間は、絶縁破壊に寄与する面積がアークシールド端部と比べて格段に広く、真空中の面積効果を考慮すると、破壊電界が低くなる。   In the conventional vacuum valve described above, a portion with a high electric field strength is easily located at the end of the arc shield, and various measures for improving the withstand voltage are taken. On the other hand, in the current-carrying shaft to which the contact is fixed, the insulation distance from the arc shield is relatively ensured, and the electric field strength is suppressed. However, the area that contributes to dielectric breakdown is much wider between the rod-shaped current-carrying shaft and the cylindrical arc shield, and the breakdown electric field becomes lower in consideration of the area effect in vacuum.

特に、大容量化や小型化の要求に対しては、通電軸を太径としたり、絶縁距離を短くしたりするので、対向する面積が増加して破壊電界が低下する。このため、通電軸とアークシールド間において、耐電圧特性が低下する問題がある。   In particular, in response to demands for large capacity and miniaturization, the current-carrying shaft is increased in diameter or the insulation distance is shortened, so that the opposing area increases and the breakdown electric field decreases. For this reason, there exists a problem that a withstand voltage characteristic falls between an electricity supply shaft and an arc shield.

本発明は上記問題を解決するためになされたもので、通電軸とアークシールド間の耐電圧特性を向上させ、大容量化や小型化を図ることのできる真空バルブを提供することを目的とする。   The present invention has been made to solve the above problems, and has an object to provide a vacuum valve capable of improving a withstand voltage characteristic between a current-carrying shaft and an arc shield and achieving a large capacity and a small size. .

上記目的を達成するために、実施形態の真空バルブは、真空絶縁容器と、前記真空絶縁容器内に収納される接離自在の一対の接点と、前記接点に固着された通電軸と、前記接点を包囲するように設けられたアークシールドとを有する真空バルブであって、前記通電軸の外面および前記アークシールドの内面には、当該構成金属よりも融点の高い金属材料からなる金属被膜を設けたことを特徴とする。   In order to achieve the above object, a vacuum valve according to an embodiment includes a vacuum insulating container, a pair of contactable and separable contacts accommodated in the vacuum insulating container, a current-carrying shaft fixed to the contact, and the contact And a metal film made of a metal material having a melting point higher than that of the constituent metal is provided on the outer surface of the current-carrying shaft and the inner surface of the arc shield. It is characterized by that.

本発明の実施例１に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 1 of this invention. 本発明の実施例２に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 2 of this invention. 本発明の実施例３に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 3 of this invention.

本発明による実施形態は、融点の高い金属被膜を用いることにより、真空中での破壊電界を上昇させることにある。以下、図面を参照して本発明の実施例を説明する。   An embodiment according to the present invention is to increase a breakdown electric field in a vacuum by using a metal film having a high melting point. Embodiments of the present invention will be described below with reference to the drawings.

先ず、本発明の実施例１に係る真空バルブを図１を参照して説明する。図１は、本発明の実施例１に係る真空バルブの構成を示す断面図である。   First, a vacuum valve according to Embodiment 1 of the present invention will be described with reference to FIG. FIG. 1 is a cross-sectional view illustrating a configuration of a vacuum valve according to Embodiment 1 of the present invention.

図１に示すように、アルミナ磁器からなる筒状の真空絶縁容器１の両端開口部には、固定側封着金具２と可動側封着金具３が封着されている。固定側封着金具２には、電気銅からなる固定側通電軸４が貫通固定されている。固定側通電軸４の外面には、例えばクロムのような電気銅よりも融点の高い固定側金属被膜５が蒸着やメッキにより設けられている。膜厚は、数１００ｎｍである。固定側通電軸４端には、銅合金を有する固定側接点６が固着されている。   As shown in FIG. 1, a fixed-side sealing metal fitting 2 and a movable-side sealing metal fitting 3 are sealed at both end openings of a cylindrical vacuum insulating container 1 made of alumina porcelain. A fixed-side energizing shaft 4 made of electrolytic copper is passed through and fixed to the fixed-side sealing fitting 2. A fixed-side metal coating 5 having a melting point higher than that of electrolytic copper such as chromium is provided on the outer surface of the fixed-side conducting shaft 4 by vapor deposition or plating. The film thickness is several hundred nm. A fixed side contact 6 having a copper alloy is fixed to the end of the fixed side energizing shaft 4.

固定側接点６に対向して接離自在の銅合金を有する可動側接点７が、可動側封着金具３を移動自在に貫通する電気銅からなる可動側通電軸８端に固着されている。可動側通電軸８の外面には、固定側と同様に、電気銅よりも融点の高い可動側金属被膜９が設けられている。   A movable contact 7 having a copper alloy that can be contacted and separated is opposed to the fixed contact 6 and is fixed to an end of a movable energizing shaft 8 made of electrolytic copper that movably penetrates the movable sealing fitting 3. Similar to the fixed side, a movable side metal coating 9 having a melting point higher than that of electrolytic copper is provided on the outer surface of the movable side conducting shaft 8.

可動側通電軸８の中間部には、伸縮自在のベローズ１０の一方端が封着され、他方端が可動側封着金具３に封着されている。これにより、真空絶縁容器１内の真空を保って、可動側通電軸８を軸方向に移動させることができる。なお、ベローズ１０内に囲まれた可動側通電軸８には、前記可動側金属被膜９を設けなくてもよい。   One end of a telescopic bellows 10 is sealed at the intermediate portion of the movable side energizing shaft 8, and the other end is sealed to the movable side sealing fitting 3. Thereby, the movable side energizing shaft 8 can be moved in the axial direction while maintaining the vacuum in the vacuum insulating container 1. Note that the movable-side metal coating 9 may not be provided on the movable-side conductive shaft 8 surrounded by the bellows 10.

また、固定側接点６と可動側接点７を包囲するように、ステンレスからなる筒状のアークシールド１１が真空絶縁容器１内面に固定されている。アークシールド１１の内面には、通電軸４、８と同様に、例えばクロムのようなステンレスよりも融点の高いシールド側金属被膜１２が設けられている。   A cylindrical arc shield 11 made of stainless steel is fixed to the inner surface of the vacuum insulating container 1 so as to surround the fixed contact 6 and the movable contact 7. On the inner surface of the arc shield 11, similarly to the current-carrying shafts 4 and 8, a shield-side metal coating 12 having a higher melting point than stainless steel such as chromium is provided.

これにより、通電軸４、８では、電気銅（約１０２０℃）よりも融点の高い例えばクロム（約１９００℃）の金属被膜５、９が設けられ、また、アークシールド１１では、ステンレス（約１４２０℃）よりも融点の高い金属被膜１２が設けられており、耐電圧特性を向上させることができる。即ち、通電軸４、８とアークシールド１１間は、真空バルブ内で対向する面積が最も大きく、面積効果から破壊電界が低下する傾向にあるが、自身を構成している当該構成金属よりも融点の高い金属材料からなる金属被膜５、９、１２を設けているので、見かけ上の破壊電界を上昇させることができる。当該構成金属とは、通電軸４、８では電気銅、アークシールド１１ではステンレスとなる。   Thus, the current-carrying shafts 4 and 8 are provided with metal coatings 5 and 9 of, for example, chromium (about 1900 ° C.) having a melting point higher than that of the electric copper (about 1020 ° C.). The metal film 12 having a melting point higher than that of the second temperature is provided, and the withstand voltage characteristics can be improved. That is, the area between the current-carrying shafts 4 and 8 and the arc shield 11 is the largest in the vacuum bulb, and the breakdown electric field tends to decrease due to the area effect, but the melting point is higher than that of the constituent metal constituting itself. Since the metal coatings 5, 9, and 12 made of a high metal material are provided, the apparent breakdown electric field can be increased. The constituent metal is electrolytic copper for the current-carrying shafts 4 and 8 and stainless steel for the arc shield 11.

これは、金属被膜５、９、１２によって、機械加工時に形成された微小な凸凹が滑らかになり、電界放射による電子放出が抑制されたものと考えられる。また、自身からの電子放出も抑制されたものと考えられる。なお、金属被膜５、９、１２に、更に融点の高いチタン（約３１７０℃）やモリブデン（約２６２０℃）などを用いることができる。クロム、チタン、モリブデンは、少なくとも１種類を含有するものとする。   This is presumably because the metal coatings 5, 9, and 12 smooth the minute irregularities formed at the time of machining, and suppress the electron emission due to field emission. It is also considered that the electron emission from itself was suppressed. Note that titanium (about 3170 ° C.) or molybdenum (about 2620 ° C.) having a higher melting point can be used for the metal coatings 5, 9, and 12. Chromium, titanium, and molybdenum contain at least one kind.

上記実施例１の真空バルブによれば、対向する面積が大きい通電軸４、８の外面とアークシールド１１内面に、当該構成金属よりも融点の高い金属材料を用いて金属被膜５、９、１２を設けているので、耐電圧特性を向上させることができ、全体形状の小型化を図ることができる。   According to the vacuum valve of the first embodiment, the metal coatings 5, 9, 12 are formed on the outer surfaces of the current-carrying shafts 4, 8 and the inner surface of the arc shield 11 having a large facing area using a metal material having a melting point higher than that of the constituent metals. Therefore, withstand voltage characteristics can be improved, and the overall shape can be reduced in size.

次に、本発明の実施例２に係る真空バルブを図２を参照して説明する。図２は、本発明の実施例２に係る真空バルブの構成を示す断面図である。なお、この実施例２が実施例１と異なる点は、金属被膜を設ける範囲である。図２において、実施例１と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。   Next, a vacuum valve according to Embodiment 2 of the present invention will be described with reference to FIG. FIG. 2 is a cross-sectional view showing a configuration of a vacuum valve according to Embodiment 2 of the present invention. In addition, the point in which this Example 2 differs from Example 1 is the range which provides a metal film. In FIG. 2, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図２に示すように、固定側接点６、可動側接点７の外周部にも、金属被膜５、９と同様の、固定側電極金属被膜１３、可動側電極金属被膜１４を設けている。固定側接点６、可動側接点７は、例えば縦磁界を発生するコイル電極と接触子などで構成されるが、コイル電極の外面は比較的電界が高くなる。このコイル電極の外面に、金属被膜１３、１４を設けるものである。また、アークシールド１１の端部にも、シールド側金属被膜１２と同様の、端部金属被膜１５を設けている。   As shown in FIG. 2, a fixed-side electrode metal film 13 and a movable-side electrode metal film 14 similar to the metal films 5 and 9 are provided on the outer peripheral portions of the fixed-side contact 6 and the movable-side contact 7. The fixed side contact 6 and the movable side contact 7 are composed of, for example, a coil electrode that generates a longitudinal magnetic field and a contact, but the outer surface of the coil electrode has a relatively high electric field. Metal coatings 13 and 14 are provided on the outer surface of the coil electrode. Further, an end metal film 15 similar to the shield-side metal film 12 is also provided at the end of the arc shield 11.

即ち、電界が高くなる部分にも、金属被膜１３、１４、１５を設けている。これらの金属被膜１３、１４、１５は、電界強度の低い面に設けた金属被膜５、９、１２よりも膜厚が厚い方がよく、より表面を滑らかにすることができる。イオンプレーティングを用いることにより、数〜数１０μｍの膜厚にすることができる。なお、コイル電極は、通電性を考慮し電気銅で構成される。   That is, the metal films 13, 14, and 15 are provided also in the portion where the electric field is increased. These metal coatings 13, 14, and 15 are preferably thicker than the metal coatings 5, 9, and 12 provided on the surface with low electric field strength, and the surface can be made smoother. By using ion plating, the film thickness can be several to several tens of μm. Note that the coil electrode is made of electrolytic copper in consideration of electrical conductivity.

上記実施例２の真空バルブによれば、実施例１による効果のほかに、電界強度が高くなる部分においても、融点の高い金属材料からなる金属被膜１３、１４、１５を設けているので、耐電圧特性を向上させることができる。   According to the vacuum valve of the second embodiment, in addition to the effects of the first embodiment, the metal films 13, 14, and 15 made of a metal material having a high melting point are provided in the portion where the electric field strength is high. The voltage characteristics can be improved.

次に、本発明の実施例３に係る真空バルブを図３を参照して説明する。図３は、本発明の実施例３に係る真空バルブの構成を示す断面図である。なお、この実施例３が実施例２と異なる点は、真空絶縁容器の外周に絶縁層を設けたことである。図３において、実施例２と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。   Next, a vacuum valve according to Embodiment 3 of the present invention will be described with reference to FIG. FIG. 3 is a cross-sectional view illustrating a configuration of a vacuum valve according to Embodiment 3 of the present invention. The third embodiment is different from the second embodiment in that an insulating layer is provided on the outer periphery of the vacuum insulating container. In FIG. 3, the same components as those in the second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図３に示すように、真空絶縁容器１に外周には、エポキシ樹脂をモールドして形成した絶縁層１６を設けている。   As shown in FIG. 3, an insulating layer 16 formed by molding an epoxy resin is provided on the outer periphery of the vacuum insulating container 1.

上記実施例３の真空バルブによれば、実施例２による効果のほかに、絶縁層１６により、真空絶縁容器１の外部沿面の絶縁補強をすることができ、更に真空バルブの小型化を図ることができる。   According to the vacuum valve of the third embodiment, in addition to the effects of the second embodiment, the insulation layer 16 can insulate and reinforce the external creepage of the vacuum insulating container 1, and further reduce the size of the vacuum valve. Can do.

以上述べたような実施形態は、通電軸では電気銅、アークシールドではステンレスよりも融点の高い金属材料からなる金属被膜を設けることにより、耐電圧特性を向上させることができる。   In the embodiment as described above, the withstand voltage characteristics can be improved by providing a metal film made of a metal material having a melting point higher than that of stainless steel for the current-carrying shaft and for the arc shield.

以上において幾つかの実施形態を述べたが、これらの実施形態は、単に例として示したもので、本発明の範囲を限定することを意図したものではない。実際、ここにおいて述べた新規な装置は、種々の他の形態に具体化されてもよいし、さらに、本発明の主旨またはスピリットから逸脱することなく、ここにおいて述べた装置の形態における種々の省略、置き換えおよび変更を行ってもよい。付随する請求項およびそれらの均等物は、本発明の範囲および主旨またはスピリットに入るようにそのような形態若しくは変形を含むことを意図している。   Several embodiments have been described above, but these embodiments are merely given as examples and are not intended to limit the scope of the present invention. Indeed, the novel devices described herein may be embodied in a variety of other forms, and various omissions may be made in the form of devices described herein without departing from the spirit or spirit of the invention. Replacements and changes may be made. The appended claims and their equivalents are intended to include such forms or modifications as would fall within the scope and spirit or spirit of the present invention.

１ 真空絶縁容器
２、３ 封着金具
４、８ 通電軸
５、９、１２、１３、１４、１５ 金属被膜
６、７ 接点
１０ ベローズ
１１ アークシールド
１６ 絶縁層 DESCRIPTION OF SYMBOLS 1 Vacuum insulation container 2, 3 Sealing metal fittings 4, 8 Current supply shaft 5, 9, 12, 13, 14, 15 Metal coating 6, 7 Contact 10 Bellows 11 Arc shield 16 Insulation layer

Claims (6)

真空絶縁容器と、
前記真空絶縁容器内に収納される接離自在の一対の接点と、
前記接点に固着された通電軸と、
前記接点を包囲するように設けられたアークシールドとを有する真空バルブであって、
前記通電軸の外面および前記アークシールドの内面には、当該構成金属よりも融点の高い金属材料からなる金属被膜を設けたことを特徴とする真空バルブ。 A vacuum insulation container;
A pair of contactable and separable contacts housed in the vacuum insulating container;
A current-carrying shaft fixed to the contact;
A vacuum valve having an arc shield provided to surround the contact,
A vacuum valve, wherein a metal coating made of a metal material having a melting point higher than that of the constituent metal is provided on an outer surface of the current-carrying shaft and an inner surface of the arc shield. 前記接点は、接離する接触子と、
前記接触子に固着された磁界を発生するコイル電極とで構成され、
前記コイル電極の外面に、当該構成金属よりも融点の高い金属材料からなる金属被膜を設けたことを特徴とする請求項１に記載の真空バルブ。 The contact is a contactor that contacts and separates;
A coil electrode that generates a magnetic field fixed to the contact;
The vacuum valve according to claim 1, wherein a metal film made of a metal material having a melting point higher than that of the constituent metal is provided on an outer surface of the coil electrode. 前記アークシールドの端部に、当該構成金属よりも融点の高い金属材料からなる金属被膜を設けたことを特徴とする請求項１または請求項２に記載の真空バルブ。   The vacuum valve according to claim 1 or 2, wherein a metal film made of a metal material having a melting point higher than that of the constituent metal is provided at an end of the arc shield. 前記金属被膜は、クロム、チタン、モリブデンの少なくとも１種類を含有していることを特徴とする請求項１乃至請求項３のいずれか１項に記載の真空バルブ。   The vacuum valve according to any one of claims 1 to 3, wherein the metal coating contains at least one of chromium, titanium, and molybdenum. 前記金属被膜をイオンプレーティングで設けたことを特徴とする請求項１乃至請求項４のいずれか１項に記載の真空バルブ。   The vacuum valve according to any one of claims 1 to 4, wherein the metal coating is provided by ion plating. 前記真空絶縁容器の周りに絶縁層を設けたことを特徴とする請求項１乃至請求項５のいずれか１項に記載の真空バルブ。   The vacuum valve according to claim 1, wherein an insulating layer is provided around the vacuum insulating container.
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