JP2007188661A - Vacuum valve - Google Patents

Vacuum valve Download PDF

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JP2007188661A
JP2007188661A JP2006003436A JP2006003436A JP2007188661A JP 2007188661 A JP2007188661 A JP 2007188661A JP 2006003436 A JP2006003436 A JP 2006003436A JP 2006003436 A JP2006003436 A JP 2006003436A JP 2007188661 A JP2007188661 A JP 2007188661A
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fixed
vacuum
movable
contact
permanent magnet
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Jun Matsuzaki
順 松崎
Masaru Miyagawa
勝 宮川
Osamu Sakaguchi
修 阪口
Nobutaka Kubota
信孝 久保田
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Toshiba Corp
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Toshiba Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum valve having a permanent magnet capable of controlling intensity of a vertical magnetic field generated between contacts, and capable of improving a shutoff characteristic. <P>SOLUTION: This vacuum valve is characterized by comprising: a cylindrical vacuum insulation vessel 2; a fixed-side sealing fitting 3 sealed to an opening surface at one end of the vacuum insulation vessel 2; a fixed-side current-carrying shaft 5 piercing through and fixed to the fixed-side sealing fitting 3; a fixed-side contact 6 fixed to an end of the fixed-side energizing shaft 5; a moving-side contact 7 arranged oppositely to the fixed-side contact 6; a moving-side energizing shaft 9 with the moving-side contact 7 fixed to an end thereof; a moving-side sealing fitting 4 having the moving-side current-carrying shaft 9 airtightly movably piercing therethrough and sealed to an opening surface at the other end of the vacuum insulation vessel 2; an insulation layer 13 formed in the outer periphery of the vacuum insulation vessel 2 by molding; and the permanent magnet 15 mounted and fixed to the outer periphery of the insulation layer 13 to cover the vacuum insulation vessel 2. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、接離自在の一対の接点を有する真空バルブに係り、特に遮断特性を向上し得る真空バルブに関する。   The present invention relates to a vacuum valve having a pair of contact points that can be freely separated from each other, and more particularly to a vacuum valve that can improve a cutoff characteristic.

従来、接離自在の一対の接点を有する真空バルブは、遮断特性を向上させるため、接点にコイル電極を備え、接点間に縦磁界(軸方向磁界)が発生されるように構成されたものが知られている。これにより、接点間に発生するアークが接点表面全体に広がり、接点の損傷を抑えている(例えば、特許文献1参照。)。   Conventionally, a vacuum valve having a pair of contact points that can be contacted and separated has a configuration in which a coil electrode is provided at the contact point and a longitudinal magnetic field (axial magnetic field) is generated between the contact points in order to improve the breaking characteristics. Are known. Thereby, the arc generated between the contacts spreads over the entire contact surface, and damage to the contacts is suppressed (for example, refer to Patent Document 1).

また、接点が固着される通電軸に永久磁石を取り付け、接点間に縦磁界が発生するように構成されたものが知られている。これにおいても、アークが拡散され接点の損傷が抑えられている(例えば、特許文献2参照。)。
特開平8−111148号公報 (第4ページ、図1) 特開平7−335091号公報 (第3ページ、図1)
In addition, a configuration is known in which a permanent magnet is attached to an energizing shaft to which a contact is fixed, and a longitudinal magnetic field is generated between the contacts. In this case as well, the arc is diffused and contact damage is suppressed (for example, see Patent Document 2).
Japanese Patent Laid-Open No. 8-111148 (Page 4, FIG. 1) Japanese Patent Laid-Open No. 7-335091 (page 3, FIG. 1)

上記の従来の真空バルブにおいては、次のような問題がある。
接点にコイル電極を備えた真空バルブでは、主電流の経路をコイル状に形成するため、構成が複雑化するとともに、通電電流に対する断面積の低下を招くからこと熱的な制約を受ける。
The above-described conventional vacuum valve has the following problems.
In a vacuum valve provided with a coil electrode at a contact, the path of the main current is formed in a coil shape, which complicates the configuration and lowers the cross-sectional area with respect to the energized current, which is subject to thermal restrictions.

一方、永久磁石を備えた真空バルブでは、永久磁石が通電軸内に取り付けられているので、必然的に永久磁石の断面積が制約される。永久磁石の磁力は断面積に大きく左右され、充分なる縦磁界を発生させることが困難であった。なお、接点の構成は、接点自体で縦磁界を発生させる必要がないので、簡素化することができる。   On the other hand, in a vacuum valve provided with a permanent magnet, the permanent magnet is mounted in the current-carrying shaft, so that the cross-sectional area of the permanent magnet is necessarily restricted. The magnetic force of the permanent magnet is greatly affected by the cross-sectional area, and it has been difficult to generate a sufficient longitudinal magnetic field. The configuration of the contact can be simplified because it is not necessary to generate a longitudinal magnetic field by the contact itself.

このため、接点を簡素化できる永久磁石を備えたもので、この永久磁石による縦磁界の強さを制御することのできる真空バルブが望まれていた。   For this reason, there has been a demand for a vacuum valve equipped with a permanent magnet capable of simplifying the contact and capable of controlling the strength of the longitudinal magnetic field generated by the permanent magnet.

本発明は上記問題を解決するためになされたもので、接点間に発生させる縦磁界の強さを制御することのできる永久磁石を備え、遮断特性を向上し得る真空バルブを提供することを目的とする。   The present invention has been made to solve the above-described problem, and has an object to provide a vacuum valve that includes a permanent magnet that can control the strength of a longitudinal magnetic field generated between contacts, and that can improve a cutoff characteristic. And

上記目的を達成するために、本発明の真空バルブは、筒状の真空絶縁容器と、前記真空絶縁容器の一方端の開口面に封着された固定側封着金具と、前記固定側封着金具に貫通固定された固定側通電軸と、前記固定側通電軸端に固着された固定側接点と、前記固定側接点と対向して配置された接離自在の可動側接点と、前記可動側接点が端部に固着された可動側通電軸と、前記可動側通電軸が気密のもと移動自在に貫通するとともに、前記真空絶縁容器の他方端の開口面に封着された可動側封着金具と、前記真空絶縁容器の外周にモールドにより形成された絶縁層と、前記絶縁層の外周に前記真空絶縁容器を覆うように取り付け固定された永久磁石とを具備したことを特徴とする。   In order to achieve the above object, the vacuum valve of the present invention comprises a cylindrical vacuum insulating container, a fixed-side sealing metal fitting sealed on an opening surface at one end of the vacuum insulating container, and the fixed-side sealing. A fixed-side energizing shaft that is fixed through the metal fitting, a fixed-side contact that is fixed to the fixed-side energizing shaft end, a movable contact that can be separated from and disposed opposite to the fixed-side contact, and the movable side A movable energizing shaft with a contact point fixed to the end, and the movable energizing shaft movably penetrates in an airtight manner and is sealed on the opening surface of the other end of the vacuum insulating container. A metal fitting, an insulating layer formed by molding on the outer periphery of the vacuum insulating container, and a permanent magnet attached and fixed to the outer periphery of the insulating layer so as to cover the vacuum insulating container.

本発明によれば、接離自在の一対の接点を収納する真空絶縁容器の外周に絶縁層を形成し、その絶縁層の外周に永久磁石を取り付け固定しているので、永久磁石の断面積を所定の大きさにでき、接点間に発生する縦磁界の強さを制御でき、遮断特性を向上させることができる。   According to the present invention, the insulating layer is formed on the outer periphery of the vacuum insulating container that houses a pair of contactable and separable contacts, and the permanent magnet is attached and fixed to the outer periphery of the insulating layer. It can be set to a predetermined size, the strength of the longitudinal magnetic field generated between the contacts can be controlled, and the interruption characteristic can be improved.

以下、図面を参照して本発明の実施例を説明する。   Embodiments of the present invention will be described below with reference to the drawings.

先ず、本発明の実施例1に係る真空バルブを図1を参照して説明する。図1は、本発明の実施例1に係る真空バルブの構成を示す断面図である。   First, a vacuum valve according to Embodiment 1 of the present invention will be described with reference to FIG. FIG. 1 is a cross-sectional view illustrating a configuration of a vacuum valve according to Embodiment 1 of the present invention.

図1に示すように、真空バルブは、軸方向に対してその内周側の接点部1aと、外周側の永久磁石部1bとから構成されている。   As shown in FIG. 1, the vacuum valve includes an inner peripheral side contact portion 1 a and an outer peripheral side permanent magnet portion 1 b with respect to the axial direction.

接点部1aには、例えばアルミナ磁器からなる筒状の真空絶縁容器2が設けられ、その両端開口面に固定側封着金具3と可動側封着金具4とが気密に封着されている。固定側封着金具3には、固定側通電軸5が気密に貫通固定され、真空絶縁容器2内の固定側通電軸5端に固定側接点6が固着されている。真空絶縁容器2外の固定側通電軸5端には、凹状の接触部5aが設けられ、一方の電路となる図示しない固定側外部導体が接続されるようになっている。   The contact portion 1a is provided with a cylindrical vacuum insulating container 2 made of, for example, alumina porcelain, and a fixed-side sealing metal fitting 3 and a movable-side sealing metal fitting 4 are hermetically sealed at both end opening surfaces. A fixed-side energizing shaft 5 is airtightly fixed to the fixed-side sealing fitting 3, and a fixed-side contact 6 is fixed to the end of the fixed-side energizing shaft 5 in the vacuum insulating container 2. A concave contact portion 5a is provided at the end of the stationary energizing shaft 5 outside the vacuum insulating container 2, and a stationary outer conductor (not shown) serving as one electric circuit is connected thereto.

固定側接点6に対向して、接離自在の可動側接点7が可動側電極8に固着されている。可動側電極8には、可動側通電軸9の一方端が固着されている。真空絶縁容器2外の可動側通電軸9の他方端には、円柱状の可動側接触導体10が軸方向に連結され、他方の電路となる図示しない可動側外部導体と摺動接触するようになっている。   Opposite to the fixed side contact 6, a movable side contact 7 that can be contacted and separated is fixed to the movable side electrode 8. One end of a movable side energizing shaft 9 is fixed to the movable side electrode 8. A cylindrical movable contact conductor 10 is connected in the axial direction to the other end of the movable energizing shaft 9 outside the vacuum insulating container 2 so as to be in sliding contact with a movable outer conductor (not shown) serving as the other electric path. It has become.

可動側通電軸9の真空絶縁容器2内中間部には、伸縮自在のベローズ11の一方端が気密に取り付けられ、他方端が、可動側封着金具4の中央開口部に気密に取り付けられている。これにより、内部圧力10−2Pa以下の真空度を維持しながら可動側通電軸9を軸方向に移動させることが可能になっている。この移動は、可動側接触導体10に連結される図示しない操作機構によって行われる。 One end of a telescopic bellows 11 is airtightly attached to the middle portion of the movable side energizing shaft 9 in the vacuum insulating container 2, and the other end is airtightly attached to the central opening of the movable side sealing fitting 4. Yes. Thereby, it is possible to move the movable-side energizing shaft 9 in the axial direction while maintaining a vacuum level of an internal pressure of 10 −2 Pa or less. This movement is performed by an operation mechanism (not shown) connected to the movable contact conductor 10.

真空絶縁容器2内面の中間部には、凸部2aが設けられ、両接点6、7を包囲するように設けられた筒状のアークシールド12が固定されている。このアークシールド12により、両接点6、7の電流開閉時に発生する金属蒸気が真空絶縁容器2の内面に付着して、沿面の絶縁抵抗の低下を防止している。   A convex portion 2 a is provided at an intermediate portion of the inner surface of the vacuum insulating container 2, and a cylindrical arc shield 12 provided so as to surround both the contacts 6 and 7 is fixed. By this arc shield 12, metal vapor generated at the time of opening and closing the currents of both contacts 6 and 7 adheres to the inner surface of the vacuum insulating container 2 to prevent a decrease in creeping insulation resistance.

永久磁石部1bには、真空絶縁容器2などの外周をエポキシ樹脂のような絶縁材料でモールドして形成した絶縁層13が設けられている。絶縁層13の外周には、カーボン塗料、銀塗料のような導電性塗料を塗布して形成した接地層14が設けられている。なお、導電性塗料に鉄、ニッケル、コバルトなどの磁性粉粒子を混練し、接地層14を形成してもよい。そして、接地層14の外周には、筒状の永久磁石15が真空絶縁容器2の全体を包囲するように設けられている。即ち、筒状の永久磁石15の長さを真空絶縁容器2よりも大きくしている。   The permanent magnet portion 1b is provided with an insulating layer 13 formed by molding the outer periphery of the vacuum insulating container 2 or the like with an insulating material such as an epoxy resin. A ground layer 14 formed by applying a conductive paint such as carbon paint or silver paint is provided on the outer periphery of the insulating layer 13. The ground layer 14 may be formed by kneading magnetic powder particles such as iron, nickel, and cobalt in the conductive paint. A cylindrical permanent magnet 15 is provided on the outer periphery of the ground layer 14 so as to surround the entire vacuum insulating container 2. That is, the length of the cylindrical permanent magnet 15 is made longer than that of the vacuum insulating container 2.

この永久磁石15は、絶縁層13を形成後、予め形成させておいたものを絶縁層13の固定側外周から挿入し、一方端を可動側端部に設けた突出部13aに当接させ、例えばエポキシ樹脂接着剤で取り付け固定されるようになっている。接着剤に前述の磁性粉粒子を同様に混練してもよい。なお、絶縁層13の可動側から永久磁石15を挿入するように固定側に突出部13aを設ける構成にしてもよい。また、永久磁石15は、例えば図示上部がN極、図示下部がS極に着磁されている。   After the insulating layer 13 is formed, the permanent magnet 15 is inserted in advance from the outer periphery on the fixed side of the insulating layer 13, and one end is brought into contact with the protruding portion 13a provided at the movable side end, For example, it is attached and fixed with an epoxy resin adhesive. The aforementioned magnetic powder particles may be kneaded in the same manner. In addition, you may make it the structure which provides the protrusion part 13a in the fixed side so that the permanent magnet 15 may be inserted from the movable side of the insulating layer 13. FIG. In addition, the permanent magnet 15 is magnetized, for example, with an N pole at the top in the figure and an S pole at the bottom in the figure.

絶縁層13の固定側には、端面中央部に筒状の開口部13bが設けられ、前記固定側外部導体が絶縁性能を維持しながら接続されるようになっている。また、絶縁層13の可動側には、電界緩和のためのシールド電極16が埋め込まれている。端面には、テーパ部13cが形成され、前記可動側外部導体が絶縁性能を維持しながら接続されるようになっている。このような接続は、可撓性材料を介する界面接続を行うことで、絶縁性能を維持することができる。   On the fixed side of the insulating layer 13, a cylindrical opening 13b is provided at the center of the end surface, and the fixed-side outer conductor is connected while maintaining insulation performance. A shield electrode 16 for relaxing the electric field is embedded on the movable side of the insulating layer 13. A tapered portion 13c is formed on the end surface, and the movable side outer conductor is connected while maintaining the insulation performance. Such a connection can maintain insulation performance by performing an interface connection through a flexible material.

これにより、両接点6、7が開離してアークが発生すると、永久磁石15により直流の縦磁界(軸方向磁界)が接点6、7間に発生し、アークは拡散アークになる。その結果、両接点6、7表面全体にアークが広がり、局部加熱を抑えることができ、接点6、7の損傷を減らし、遮断特性を向上させることができる。この永久磁石15は、絶縁層13の外周に取り付けるため、断面積を所定の大きさにすることができ、遮断特性に適するような縦磁界を発生させることができる。   Thereby, when both the contacts 6 and 7 are separated and an arc is generated, a DC longitudinal magnetic field (axial magnetic field) is generated between the contacts 6 and 7 by the permanent magnet 15 and the arc becomes a diffusion arc. As a result, an arc spreads over the entire surfaces of both the contacts 6 and 7, local heating can be suppressed, damage to the contacts 6 and 7 can be reduced, and the breaking characteristics can be improved. Since the permanent magnet 15 is attached to the outer periphery of the insulating layer 13, the cross-sectional area can be set to a predetermined size, and a longitudinal magnetic field suitable for the interruption characteristic can be generated.

また、真空絶縁容器2全体を包囲するように永久磁石15を設けているので、接点部1aに形成される縦磁界を、より一層、軸方向と平行させることができる。また、磁性粉粒子を混練した接地層14や前記接着剤により、これらを磁性体にすることができ、永久磁石15による磁気回路の磁気抵抗を抑制することができる。更に、永久磁石15は接地電位に固定されているので、絶縁層13などの電界分布を乱すことがない。   Moreover, since the permanent magnet 15 is provided so as to surround the entire vacuum insulating container 2, the longitudinal magnetic field formed in the contact portion 1a can be made further parallel to the axial direction. In addition, the ground layer 14 in which magnetic powder particles are kneaded and the adhesive can make them magnetic, and the magnetic resistance of the magnetic circuit by the permanent magnet 15 can be suppressed. Furthermore, since the permanent magnet 15 is fixed at the ground potential, the electric field distribution of the insulating layer 13 and the like is not disturbed.

上記実施例1の真空バルブによれば、接離自在の接点6、7を収納した真空絶縁容器2の外周に絶縁層13を形成し、その絶縁層13の外周に永久磁石15を取り付け固定しているので、永久磁石15の断面積を所定の大きさにでき、接点6、7間に発生する縦磁界の強さを制御することができる。その結果、アークを接点6、7表面全体に拡散させることができ、遮断特性を向上させることができる。   According to the vacuum valve of the first embodiment, the insulating layer 13 is formed on the outer periphery of the vacuum insulating container 2 in which the contactable contacts 6 and 7 are accommodated, and the permanent magnet 15 is attached and fixed to the outer periphery of the insulating layer 13. Therefore, the sectional area of the permanent magnet 15 can be set to a predetermined size, and the strength of the longitudinal magnetic field generated between the contacts 6 and 7 can be controlled. As a result, the arc can be diffused over the entire surfaces of the contacts 6 and 7, and the interruption characteristics can be improved.

次に、本発明の実施例2に係る真空バルブを図2を参照して説明する。図2は、本発明の実施例2に係る真空バルブの構成を示す断面図である。なお、この実施例2が実施例1と異なる点は、通電軸内に磁性体を設けたことである。図2において、実施例1と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。   Next, a vacuum valve according to Embodiment 2 of the present invention will be described with reference to FIG. FIG. 2 is a cross-sectional view showing a configuration of a vacuum valve according to Embodiment 2 of the present invention. The second embodiment is different from the first embodiment in that a magnetic body is provided in the energizing shaft. In FIG. 2, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図2に示すように、固定側通電軸5、および可動側電極8と可動側通電軸9との内部には、鉄、ニッケル、コバルトなどの磁性体17a、17bをそれぞれ取り付け固定している。これらの磁性体17a、17bは、固定側通電軸5、可動側電極8、可動側通電軸9のそれぞれに穴加工をし、その穴に磁性体17a、17bを挿入固定している。なお、可動側電極8と可動側通電軸9とが一体となっているものでは、接点7を除く部分に磁性体17bを取り付けるものとする。これは、固定側でも同様である。   As shown in FIG. 2, magnetic bodies 17 a and 17 b such as iron, nickel, and cobalt are attached and fixed inside the fixed-side energizing shaft 5 and the movable-side electrode 8 and the movable-side energizing shaft 9. In these magnetic bodies 17a and 17b, holes are formed in each of the fixed-side energizing shaft 5, the movable-side electrode 8, and the movable-side energizing shaft 9, and the magnetic bodies 17a and 17b are inserted and fixed in the holes. In the case where the movable side electrode 8 and the movable side energizing shaft 9 are integrated, the magnetic body 17 b is attached to a portion excluding the contact 7. The same applies to the fixed side.

上記実施例2の真空バルブによれば、接点6、7間に縦磁界が形成され易く、遮断特性を実施例1よりも向上させることができる。   According to the vacuum valve of the second embodiment, a longitudinal magnetic field is easily formed between the contacts 6 and 7, and the interruption characteristic can be improved as compared with the first embodiment.

本発明の実施例1に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 1 of this invention. 本発明の実施例2に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 2 of this invention.

符号の説明Explanation of symbols

1a 接点部
1b 永久磁石部
2 真空絶縁容器
2a 凸部
3 固定側封着金具
4 可動側封着金具
5 固定側通電軸
5a 接触部
6 固定側接点
7 可動側接点
8 可動側電極
9 可動側通電軸
10 可動側接触導体
11 ベローズ
12 アークシールド
13 絶縁層
13a 突出部
13b 開口部
13c テーパ部
14 接地層
15 永久磁石
16 シールド電極
17a、17b 磁性体
DESCRIPTION OF SYMBOLS 1a Contact part 1b Permanent magnet part 2 Vacuum insulation container 2a Convex part 3 Fixed side sealing metal fitting 4 Movable side sealing metal fitting 5 Fixed side energizing shaft 5a Contact part 6 Fixed side contact 7 Movable side contact 8 Movable side electrode 9 Movable side energization Shaft 10 Movable contact conductor 11 Bellows 12 Arc shield 13 Insulating layer 13a Protruding portion 13b Opening portion 13c Taper portion 14 Ground layer 15 Permanent magnet 16 Shield electrodes 17a and 17b Magnetic body

Claims (3)

筒状の真空絶縁容器と、
前記真空絶縁容器の一方端の開口面に封着された固定側封着金具と、
前記固定側封着金具に貫通固定された固定側通電軸と、
前記固定側通電軸端に固着された固定側接点と、
前記固定側接点と対向して配置された接離自在の可動側接点と、
前記可動側接点が端部に固着された可動側通電軸と、
前記可動側通電軸が気密のもと移動自在に貫通するとともに、前記真空絶縁容器の他方端の開口面に封着された可動側封着金具と、
前記真空絶縁容器の外周にモールドにより形成された絶縁層と、
前記絶縁層の外周に前記真空絶縁容器を覆うように取り付け固定された永久磁石とを具備したことを特徴とする真空バルブ。
A tubular vacuum insulated container;
A fixed-side sealing metal fitting sealed to the opening surface of one end of the vacuum insulating container;
A fixed-side energizing shaft that is fixedly penetrated to the fixed-side sealing fitting;
A fixed-side contact fixed to the fixed-side energizing shaft end;
A movable contact that can be freely separated from and disposed to face the fixed contact;
A movable-side energizing shaft having the movable-side contact fixed to the end;
The movable side energizing shaft penetrates movably in an airtight manner, and a movable side sealing metal fitting sealed to the opening surface of the other end of the vacuum insulating container;
An insulating layer formed by molding on the outer periphery of the vacuum insulating container;
A vacuum valve comprising a permanent magnet attached and fixed to the outer periphery of the insulating layer so as to cover the vacuum insulating container.
前記固定側通電軸内および前記可動側通電軸内のそれぞれに磁性体を取り付けたことを特徴とする請求項1に記載の真空バルブ。   2. The vacuum valve according to claim 1, wherein a magnetic body is attached to each of the fixed side energizing shaft and the movable side energizing shaft. 前記永久磁石を、磁性粉粒子を混練した接着剤で取り付け固定したことを特徴とする請求項1または請求項2に記載の真空バルブ。   The vacuum valve according to claim 1 or 2, wherein the permanent magnet is attached and fixed with an adhesive kneaded with magnetic powder particles.
JP2006003436A 2006-01-11 2006-01-11 Vacuum valve Pending JP2007188661A (en)

Priority Applications (1)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010015919A (en) * 2008-07-07 2010-01-21 Toshiba Corp Vacuum valve
CN102683099A (en) * 2012-05-31 2012-09-19 武汉大学 High-voltage vacuum switch
JP2019110011A (en) * 2017-12-18 2019-07-04 株式会社東芝 Vacuum valve
WO2020059435A1 (en) * 2018-09-21 2020-03-26 三菱電機株式会社 Vacuum valve

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010015919A (en) * 2008-07-07 2010-01-21 Toshiba Corp Vacuum valve
CN102683099A (en) * 2012-05-31 2012-09-19 武汉大学 High-voltage vacuum switch
JP2019110011A (en) * 2017-12-18 2019-07-04 株式会社東芝 Vacuum valve
JP7042606B2 (en) 2017-12-18 2022-03-28 株式会社東芝 Vacuum valve
WO2020059435A1 (en) * 2018-09-21 2020-03-26 三菱電機株式会社 Vacuum valve

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