JP2011014285A - Vacuum valve - Google Patents

Vacuum valve Download PDF

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JP2011014285A
JP2011014285A JP2009155389A JP2009155389A JP2011014285A JP 2011014285 A JP2011014285 A JP 2011014285A JP 2009155389 A JP2009155389 A JP 2009155389A JP 2009155389 A JP2009155389 A JP 2009155389A JP 2011014285 A JP2011014285 A JP 2011014285A
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fixed
movable
contact
shield
insulating
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Satoru Shioiri
哲 塩入
Naoki Asari
直紀 浅利
Kosuke Sasage
浩資 捧
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Toshiba Corp
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Toshiba Corp
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Abstract

PROBLEM TO BE SOLVED: To moderate an electric field on a contact surface of a vacuum valve, to restrain irregular discharge, and to enhance a withstand voltage characteristic.SOLUTION: This vacuum valve includes a vacuum insulating container 1, a fixed side sealing fitting 2 and a movable side sealing fitting 3 sealed respectively to both end opening parts of the vacuum insulating container 1, a fixed side electrification shaft 4 penetrated through and fixed to the fixed side sealing fitting 2, a fixed side contact 5 fixed to a fixed side electrification shaft 4 end, a fixed side insulating shield 6 for surrounding a side face of the fixed side contact 5 with a prescribed clearance, a movable side contact 7 contacting and separated with/from the fixed side contact 5, a movable side electrification shaft 8 for fixing the movable side contact 7, and for penetrating movably the movable side sealing fitting 3 therethrough, a movable side insulating shield 11 for surrounding a side face of the movable side contact 7 with a prescribed clearance, when the movable side contact 7 is located in an electrode opening position, and an freely extendable bellows 9 of which the one end is sealed to an intermediate part of the movable side electrification shaft 8 and of which the other end is sealed to the movable side sealing fitting 3.

Description

本発明は、接離自在の一対の接点を有する真空バルブに係り、特に接点間での不整放電を抑制し、耐電圧特性を向上し得る真空バルブに関する。   The present invention relates to a vacuum valve having a pair of contactable and separable contacts, and more particularly to a vacuum valve that can suppress irregular discharge between the contacts and improve the withstand voltage characteristics.

従来、真空バルブを断路器用として用いると、無負荷開閉などにより接点表面に微小な突起が形成され、局部的に電界が集中し、接点間の放電開始が不整現象を生じる、所謂、不整放電を起こすことがあった。これを解決するために、接点の外周に金属部材を設けて電界緩和を図り、接点表面に微小な突起が形成されても、不整放電が起き難いようにしたものが知られている。(例えば、特許文献1参照。)。   Conventionally, when a vacuum valve is used for a disconnector, a minute protrusion is formed on the contact surface due to no-load switching etc., the electric field is concentrated locally, and the discharge start between the contacts causes an irregular phenomenon. I sometimes woke up. In order to solve this problem, it is known that a metal member is provided on the outer periphery of the contact to reduce the electric field so that irregular discharge hardly occurs even if a minute protrusion is formed on the contact surface. (For example, refer to Patent Document 1).

特開2003−92051号公報 (第3ページ、図1)JP 2003-92051 A (Page 3, FIG. 1)

上記の従来の真空バルブにおいては、次のような問題がある。接点の外周に金属部材を設けることにより、接点表面の電界緩和が図られるものの、金属部材自体の電界強度が上昇する。金属部材には、接点開閉時に機械的衝撃が加わらず、微小な突起が形成されないとしても、真空中の破壊電圧のばらつきは約10%あり、気中やSF6ガス中などに比べて大きい。ばらつきが大きいと、破壊確率を下げるため、ギャップ長を大きくしなければならず、真空バルブが大型化する。   The above-described conventional vacuum valve has the following problems. By providing the metal member on the outer periphery of the contact, the electric field on the contact surface can be reduced, but the electric field strength of the metal member itself increases. Even when the metal member is not mechanically impacted when the contact is opened and closed and a minute protrusion is not formed, the variation in breakdown voltage in vacuum is about 10%, which is larger than that in air or SF6 gas. If the variation is large, the gap length must be increased in order to reduce the probability of destruction, and the vacuum valve becomes larger.

このため、金属部材に替わる部材で電界緩和を図り、接点表面に微小な突起が形成されても不整放電を起こし難いものが望まれていた。ここで、金属部材に替わる部材とは、臨界電界に達するとそれ自体から電子放出し難く、直接的に放電開始に寄与しない絶縁部材のようなものが好ましいものとなる。   For this reason, there has been a demand for a member that replaces the metal member to reduce the electric field and hardly cause irregular discharge even if a minute protrusion is formed on the contact surface. Here, the member that replaces the metal member is preferably an insulating member that does not easily emit electrons from itself when it reaches a critical electric field and does not directly contribute to the start of discharge.

本発明は上記問題を解決するためになされたもので、絶縁部材で接点表面の電界緩和を図り、接点間での不整放電を抑制し、耐電圧特性を向上し得る真空バルブを提供することを目的とする。   The present invention has been made to solve the above-described problems, and provides a vacuum valve that can reduce the electric field on the contact surface with an insulating member, suppress irregular discharge between the contacts, and improve the withstand voltage characteristics. Objective.

上記目的を達成するために、本発明の真空バルブは、両端開口部を有する真空絶縁容器と、前記真空絶縁容器の両端開口部にそれぞれ封着された固定側封着金具および可動側封着金具と、前記固定側封着金具に貫通固定された固定側通電軸と、前記固定側通電軸端に固着された固定側接点と、前記固定側接点の側面を所定の隙間を保って包囲する固定側絶縁シールドと、前記固定側接点と接離する可動側接点と、前記可動側接点を固着するとともに、前記可動側封着金具を移動自在に貫通する可動側通電軸と、前記可動側接点が開極位置のとき、その側面を所定の隙間を保って包囲する可動側絶縁シールドと、前記可動側通電軸の中間部に一方端が封着され、他方端が前記可動側封着金具に封着された伸縮自在のベローズとを備えたことを特徴とする。   In order to achieve the above object, a vacuum valve according to the present invention includes a vacuum insulating container having openings at both ends, and a fixed-side sealing metal fitting and a movable-side sealing metal fitting respectively sealed at both end openings of the vacuum insulating container. A fixed-side energizing shaft that is fixedly penetrated to the fixed-side sealing metal fitting, a fixed-side contact that is fixed to the end of the fixed-side energizing shaft, and a fixed that surrounds the side surface of the fixed-side contact with a predetermined gap. A side insulation shield, a movable side contact contacting and separating from the fixed side contact, a movable side energizing shaft that fixes the movable side contact and movably penetrates the movable side sealing bracket, and the movable side contact When in the open position, one end is sealed to the middle portion of the movable side conductive shield and the movable side energizing shaft surrounding the side surface with a predetermined gap, and the other end is sealed to the movable side sealing bracket. Specially equipped with a retractable bellows To.

本発明によれば、接点を絶縁シールドで所定の隙間を保って包囲しているので、接点表面の電界緩和を図ることができ、接点間での不整放電が抑制されて耐電圧特性を向上させることができる。   According to the present invention, since the contact is surrounded by the insulation shield with a predetermined gap, the electric field on the contact surface can be reduced, and irregular discharge between the contacts is suppressed to improve the withstand voltage characteristic. be able to.

本発明の実施例1に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 1 of this invention. 本発明の実施例2に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 2 of this invention. 本発明の実施例3に係る真空バルブの構成を示す断面図。Sectional drawing which shows the structure of the vacuum valve which concerns on Example 3 of this invention. 本発明の実施例3に係る真空バルブに用いる絶縁シールドを示す上面図。The top view which shows the insulation shield used for the vacuum valve which concerns on Example 3 of this invention.

以下、図面を参照して本発明の実施例を説明する。   Embodiments of the present invention will be described below with reference to the drawings.

先ず、本発明の実施例1に係る真空バルブを図面を参照して説明する。図1は、本発明の実施例1に係る真空バルブの構成を示す断面図である。   First, a vacuum valve according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view illustrating a configuration of a vacuum valve according to Embodiment 1 of the present invention.

図1に示すように、アルミナ磁器のようなセラミックスからなる筒状の真空絶縁容器1の両端開口部には、それぞれ固定側封着金具2と可動側封着金具3が封着されている。固定側封着金具2の中央部には、固定側通電軸4が貫通固定され、真空絶縁容器1内端部の軸方向と直交する面に固定側接点5が固着されている。   As shown in FIG. 1, a fixed-side sealing metal fitting 2 and a movable-side sealing metal fitting 3 are respectively sealed at both end openings of a cylindrical vacuum insulating container 1 made of ceramics such as alumina porcelain. A fixed-side energizing shaft 4 is penetrated and fixed at the center of the fixed-side sealing fitting 2, and a fixed-side contact 5 is fixed to a surface orthogonal to the axial direction of the inner end portion of the vacuum insulating container 1.

固定側通電軸4端部の外周には、固定側接点5の側面外周を包囲するような、セラミックスやマイカなどの無機絶縁材料よりなる環状の固定側絶縁シールド6が図示しないメタライズ層を介してろう付けなどにより固定されている。固定側絶縁シールド6の内径は、固定側接点5の外径よりも大きく、2mm程度の隙間が保たれるようになっている。また、先端は、断面半円状の曲面となっており、固定側接点5面よりも可動側に5mm程度突出している。   An annular fixed side insulating shield 6 made of an inorganic insulating material such as ceramics or mica that surrounds the outer periphery of the side surface of the fixed side contact 5 is provided on the outer periphery of the fixed side energizing shaft 4 through a metallization layer (not shown). It is fixed by brazing. The inner diameter of the fixed-side insulation shield 6 is larger than the outer diameter of the fixed-side contact 5 so that a gap of about 2 mm is maintained. The tip is a curved surface with a semicircular cross section, and protrudes about 5 mm from the fixed contact point 5 surface to the movable side.

固定側接点5に対向して接離自在の可動側接点7が、可動側封着金具3の中央開口部を移動自在に貫通する可動側通電軸8端部の軸方向と直交する面に固着されている。可動側通電軸8の中間部には、伸縮自在のベローズ9の一方端が封着され、他方端が可動側封着金具3の中央開口部に封着されている。これにより、真空絶縁容器1内の真空を保って可動側通電軸8を軸方向に移動させることができる。   A movable contact 7 that can be moved toward and away from the fixed contact 5 is fixed to a surface perpendicular to the axial direction of the end of the movable energizing shaft 8 that movably penetrates the central opening of the movable seal 3. Has been. One end of a telescopic bellows 9 is sealed at an intermediate portion of the movable side energizing shaft 8, and the other end is sealed at a central opening of the movable side sealing fitting 3. Thereby, the movable side energizing shaft 8 can be moved in the axial direction while maintaining the vacuum in the vacuum insulating container 1.

可動側封着金具3のベローズ9外周には、筒状の支持金具10の一方端が固定されている。他方端には、固定側と同様に、無機絶縁材料よりなる環状の可動側絶縁シールド11が図示しないメタライズ層を介してろう付けなどにより固定されている。可動側絶縁シールド11の内径は、可動側接点7と可動側通電軸8の外径よりも大きく、2mm程度の隙間を保って、可動側接点7の側面外周を囲むように配置されている。また、先端は、曲面となっており、可動側接点7が開極位置に達したとき、可動側接点7面よりも固定側に5mm程度突出するようになっている。   One end of a cylindrical support fitting 10 is fixed to the outer periphery of the bellows 9 of the movable side sealing fitting 3. Similarly to the fixed side, an annular movable insulating shield 11 made of an inorganic insulating material is fixed to the other end by brazing or the like through a metallization layer (not shown). The inner diameter of the movable-side insulating shield 11 is larger than the outer diameter of the movable-side contact 7 and the movable-side conductive shaft 8 and is arranged so as to surround the outer periphery of the side surface of the movable-side contact 7 with a gap of about 2 mm. Further, the tip is a curved surface, and when the movable contact 7 reaches the open position, it protrudes about 5 mm from the surface of the movable contact 7 to the fixed side.

なお、固定側接点5と可動側接点7間、および固定側絶縁シールド6と可動側絶縁シールド11間を包囲するような筒状のアークシールド12が真空絶縁容器1内面の中間部に固定されている。   A cylindrical arc shield 12 surrounding the fixed side contact 5 and the movable side contact 7 and between the fixed side insulating shield 6 and the movable side insulating shield 11 is fixed to the intermediate portion of the inner surface of the vacuum insulating container 1. Yes.

これにより、固定側接点5と可動側接点7では、固定側絶縁シールド6と可動側絶縁シールド11を設けているため、電界緩和を図ることができる。特に、接点5、7表面では、無負荷開閉などで微小な突起が形成された場合、電界が上昇するものの、絶縁破壊が互いの接点5、7が対向する平面よりも周縁部から起こることが多い。絶縁破壊は、微小な突起の電界形成が不均一であり、不整放電を起こし易いが、周縁部には接点5、7面よりも突出した誘電体が近接しているので、電界上昇を抑制することができる。絶縁シールド6、11の比誘電率が6〜11の場合、電界強度を約10〜20%抑制することができ、放電のばらつきを小さくすることができる。   Thereby, the fixed side contact 5 and the movable side contact 7 are provided with the fixed side insulating shield 6 and the movable side insulating shield 11, so that the electric field can be reduced. In particular, when a minute protrusion is formed on the surface of the contact 5 or 7 by no-load switching or the like, the electric field increases, but the dielectric breakdown may occur from the peripheral portion rather than the plane where the contacts 5 and 7 face each other. Many. Dielectric breakdown causes uneven electric field formation of minute protrusions and is liable to cause irregular discharge. However, since a dielectric projecting from the contact surfaces 5 and 7 is close to the peripheral portion, the electric field rise is suppressed. be able to. When the dielectric constants of the insulating shields 6 and 11 are 6 to 11, the electric field strength can be suppressed by about 10 to 20%, and the variation in discharge can be reduced.

なお、接点5、7と絶縁シールド6、11との隙間を所定値に保っているので、三重点結合による電界上昇を防ぐことができる。また、可動側接点7が開極位置のとき、絶縁シールド6、11間が最短ギャップとなるが、誘電体同士の対向であり、耐電圧特性を低下させるものではない。更に、絶縁シールド6、11は、無機絶縁材料よりなるので、真空中に不純ガスを放出することがなく、耐熱性を有し、アークに対して冷却作用が働き優れた特性を発揮する。   In addition, since the clearance gap between the contacts 5 and 7 and the insulation shields 6 and 11 is maintained at a predetermined value, it is possible to prevent an electric field increase due to triple point coupling. Further, when the movable contact 7 is at the open position, the shortest gap is formed between the insulating shields 6 and 11, but the dielectrics are opposed to each other, and the withstand voltage characteristic is not deteriorated. Furthermore, since the insulating shields 6 and 11 are made of an inorganic insulating material, they do not emit an impure gas in a vacuum, have heat resistance, have a cooling effect on the arc, and exhibit excellent characteristics.

上記実施例1の真空バルブによれば、固定側接点5、可動側接点7を包囲するような固定側絶縁シールド6、可動側絶縁シールド11を設けているので、固定側接点5と可動側接点7の表面、特に周縁部の電界緩和を図ることができ、不整放電を抑制し、耐電圧特性を向上させることができる。   According to the vacuum valve of the first embodiment, since the fixed side insulating shield 6 and the movable side insulating shield 11 surrounding the fixed side contact 5 and the movable side contact 7 are provided, the fixed side contact 5 and the movable side contact are provided. 7, particularly the electric field of the peripheral edge can be reduced, irregular discharge can be suppressed, and the withstand voltage characteristics can be improved.

次に、本発明の実施例2に係る真空バルブを図2を参照して説明する。図2は、本発明の実施例2に係る真空バルブの構成を示す断面図である。なお、この実施例2が実施例1と異なる点は、可動側絶縁シールドの固定方法である。図2において、実施例1と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。   Next, a vacuum valve according to Embodiment 2 of the present invention will be described with reference to FIG. FIG. 2 is a cross-sectional view showing a configuration of a vacuum valve according to Embodiment 2 of the present invention. The second embodiment is different from the first embodiment in the method for fixing the movable insulating shield. In FIG. 2, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図2に示すように、可動側絶縁シールド11を可動側通電軸8端部の外周に固定している。可動側絶縁シールド11の内径は、固定側絶縁シールド6の外径よりも大きく、固定側接点5と可動側接点7が接触したとき、互いが接触しないようになっている。なお、逆に、固定側絶縁シールド6の内径を可動側絶縁シールド11の外径よりも大きくしてもよい。   As shown in FIG. 2, the movable insulating shield 11 is fixed to the outer periphery of the end of the movable energizing shaft 8. The inner diameter of the movable insulating shield 11 is larger than the outer diameter of the fixed insulating shield 6 so that when the fixed contact 5 and the movable contact 7 come into contact with each other, they do not come into contact with each other. Conversely, the inner diameter of the fixed insulating shield 6 may be larger than the outer diameter of the movable insulating shield 11.

上記実施例2の真空バルブによれば、実施例1と同様の効果を得ることができる。なお、可動側絶縁シールド11が移動したとき、可動側通電軸8との固定部分に機械的強度が加わるので、開閉速度が遮断器よりも遅い断路器のような開閉器に適用するのが好ましい。   According to the vacuum valve of the second embodiment, the same effect as that of the first embodiment can be obtained. When the movable insulating shield 11 moves, mechanical strength is applied to the portion fixed to the movable conductive shaft 8, so that it is preferably applied to a switch such as a disconnector whose switching speed is slower than the circuit breaker. .

次に、本発明の実施例3に係る真空バルブを図3、図4を参照して説明する。図3は、本発明の実施例3に係る真空バルブの構成を示す断面図、図4は、本発明の実施例3に係る真空バルブに用いる絶縁シールドを示す上面図である。なお、この実施例3が実施例1と異なる点は、固定側と可動側の絶縁シールドの固定方法である。図3、図4において、実施例1と同様の構成部分においては、同一符号を付し、その詳細な説明を省略する。   Next, a vacuum valve according to Embodiment 3 of the present invention will be described with reference to FIGS. FIG. 3 is a sectional view showing the configuration of the vacuum valve according to the third embodiment of the present invention, and FIG. 4 is a top view showing an insulation shield used in the vacuum valve according to the third embodiment of the present invention. The third embodiment is different from the first embodiment in the fixing method of the insulation shield on the fixed side and the movable side. 3 and 4, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

図3に示すように、固定側絶縁シールド13と可動側絶縁シールド14は、接点5、7の側面外周を包囲する環状の筒部13a、14aと、筒部13a、14aの外周に設けられた円板状の支持部13b、14bに分かれて構成されている。支持部13b、14bの外周は、図示しないメタライズ層を介してろう付けなどによりアークシールド12の内面に所定の間隔を保ってそれぞれ固定されている。   As shown in FIG. 3, the fixed-side insulating shield 13 and the movable-side insulating shield 14 are provided on the outer circumferences of the annular cylinder portions 13 a and 14 a surrounding the outer circumference of the side surfaces of the contacts 5 and 7 and the cylinder portions 13 a and 14 a. It is divided into disk-shaped support portions 13b and 14b. The outer peripheries of the support portions 13b and 14b are fixed to the inner surface of the arc shield 12 at a predetermined interval by brazing or the like via a metallization layer (not shown).

また、支持部13b、(14b)は、図4に示すように、開口部13b1、(14b1)が形成され、接点5、7間で発生した金属蒸気が真空絶縁容器1内に拡散されるようになっている。なお、筒部13a、(14a)の内径は、実施例1の可動側絶縁シールド11と同様に、接点5、(7)の外径よりも大きく、所定の隙間が保たれている。   Further, as shown in FIG. 4, the support portions 13 b and (14 b) are formed with openings 13 b 1 and (14 b 1) so that the metal vapor generated between the contacts 5 and 7 is diffused into the vacuum insulating container 1. It has become. The inner diameters of the cylindrical portions 13a and (14a) are larger than the outer diameters of the contacts 5 and (7), and a predetermined gap is maintained, as in the movable insulating shield 11 of the first embodiment.

上記実施例3の真空バルブによれば、実施例1と同様の効果のほかに、絶縁シールド13、14が同様の形状であるので、量産でき製造が容易となる。   According to the vacuum valve of the third embodiment, in addition to the same effects as those of the first embodiment, since the insulation shields 13 and 14 have the same shape, they can be mass-produced and manufactured easily.

1 真空絶縁容器
2 固定側封着金具
3 可動側封着金具
4 固定側通電軸
5 固定側接点
6、13 固定側絶縁シールド
7 可動側接点
8 可動側通電軸
9 ベローズ
10 支持金具
11、14 可動側絶縁シールド
12 アークシールド
13a、14a 筒部
13b、14b 支持部
DESCRIPTION OF SYMBOLS 1 Vacuum insulating container 2 Fixed side sealing metal fitting 3 Movable side sealing metal fitting 4 Fixed side energizing shaft 5 Fixed side contact 6 and 13 Fixed side insulation shield 7 Movable side contact 8 Movable side energizing shaft 9 Bellows 10 Support metal fittings 11 and 14 Movable Side insulation shield 12 Arc shield 13a, 14a Tube part 13b, 14b Support part

Claims (5)

両端開口部を有する真空絶縁容器と、
前記真空絶縁容器の両端開口部にそれぞれ封着された固定側封着金具および可動側封着金具と、
前記固定側封着金具に貫通固定された固定側通電軸と、
前記固定側通電軸端に固着された固定側接点と、
前記固定側接点の側面を所定の隙間を保って包囲する固定側絶縁シールドと、
前記固定側接点と接離する可動側接点と、
前記可動側接点を固着するとともに、前記可動側封着金具を移動自在に貫通する可動側通電軸と、
前記可動側接点が開極位置のとき、その側面を所定の隙間を保って包囲する可動側絶縁シールドと、
前記可動側通電軸の中間部に一方端が封着され、他方端が前記可動側封着金具に封着された伸縮自在のベローズと
を備えたことを特徴とする真空バルブ。
A vacuum insulating container having openings at both ends;
A fixed-side sealing metal fitting and a movable-side sealing metal fitting respectively sealed at both ends of the vacuum insulating container;
A fixed-side energizing shaft that is fixedly penetrated to the fixed-side sealing fitting;
A fixed-side contact fixed to the fixed-side energizing shaft end;
A fixed-side insulating shield that surrounds the side surface of the fixed-side contact with a predetermined gap; and
A movable contact that contacts and separates from the fixed contact;
A movable side energizing shaft that sticks the movable side contact and movably penetrates the movable side sealing bracket,
When the movable contact is in the open position, a movable insulating shield that surrounds the side surface with a predetermined gap;
A vacuum valve comprising: a telescopic bellows having one end sealed at an intermediate portion of the movable side energizing shaft and the other end sealed by the movable side sealing metal fitting.
前記固定側絶縁シールドを前記固定側通電軸端の外周に固定し、
前記可動側絶縁シールドを前記可動側封着金具に固定された支持金具に固定したことを特徴とする請求項1に記載の真空バルブ。
Fixing the stationary insulating shield to the outer periphery of the stationary energizing shaft end;
The vacuum valve according to claim 1, wherein the movable insulating shield is fixed to a support fitting fixed to the movable sealing fitting.
一方の絶縁シールドを一方の通電軸端の外周に固定し、
他方の絶縁シールドを他方の通電軸端の外周に固定し、
前記一方の絶縁シールドの外径よりも前記他方の絶縁シールドの内径を大きくしたことを特徴とする請求項1に記載の真空バルブ。
One insulation shield is fixed to the outer periphery of one energizing shaft end,
Fix the other insulation shield to the outer circumference of the other energizing shaft end,
The vacuum valve according to claim 1, wherein an inner diameter of the other insulating shield is larger than an outer diameter of the one insulating shield.
前記固定側絶縁シールドおよび前記可動側絶縁シールドを前記固定側接点と前記可動側接点間を包囲するアークシールドの内面に固定したことを特徴とする請求項1に記載の真空バルブ。   The vacuum valve according to claim 1, wherein the fixed-side insulating shield and the movable-side insulating shield are fixed to an inner surface of an arc shield surrounding the fixed-side contact and the movable-side contact. 前記固定側絶縁シールドおよび前記可動側絶縁シールドを無機絶縁材料で形成したことを特徴とする請求項1乃至請求項4のいずれか1項に記載の真空バルブ。   The vacuum valve according to any one of claims 1 to 4, wherein the fixed-side insulating shield and the movable-side insulating shield are formed of an inorganic insulating material.
JP2009155389A 2009-06-30 2009-06-30 Vacuum valve Pending JP2011014285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009155389A JP2011014285A (en) 2009-06-30 2009-06-30 Vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009155389A JP2011014285A (en) 2009-06-30 2009-06-30 Vacuum valve

Publications (1)

Publication Number Publication Date
JP2011014285A true JP2011014285A (en) 2011-01-20

Family

ID=43592986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009155389A Pending JP2011014285A (en) 2009-06-30 2009-06-30 Vacuum valve

Country Status (1)

Country Link
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