JP2012015696A5 - - Google Patents

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Publication number
JP2012015696A5
JP2012015696A5 JP2010148749A JP2010148749A JP2012015696A5 JP 2012015696 A5 JP2012015696 A5 JP 2012015696A5 JP 2010148749 A JP2010148749 A JP 2010148749A JP 2010148749 A JP2010148749 A JP 2010148749A JP 2012015696 A5 JP2012015696 A5 JP 2012015696A5
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JP
Japan
Prior art keywords
electrode
vibration piece
piezoelectric layer
disposed
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010148749A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012015696A (ja
JP5533349B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2010148749A priority Critical patent/JP5533349B2/ja
Priority claimed from JP2010148749A external-priority patent/JP5533349B2/ja
Publication of JP2012015696A publication Critical patent/JP2012015696A/ja
Publication of JP2012015696A5 publication Critical patent/JP2012015696A5/ja
Application granted granted Critical
Publication of JP5533349B2 publication Critical patent/JP5533349B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010148749A 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器 Expired - Fee Related JP5533349B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010148749A JP5533349B2 (ja) 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010148749A JP5533349B2 (ja) 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器

Publications (3)

Publication Number Publication Date
JP2012015696A JP2012015696A (ja) 2012-01-19
JP2012015696A5 true JP2012015696A5 (cg-RX-API-DMAC10.html) 2013-05-02
JP5533349B2 JP5533349B2 (ja) 2014-06-25

Family

ID=45601626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010148749A Expired - Fee Related JP5533349B2 (ja) 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器

Country Status (1)

Country Link
JP (1) JP5533349B2 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6044222B2 (ja) * 2012-09-20 2016-12-14 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、および移動体
JP2017216753A (ja) * 2017-09-15 2017-12-07 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4296757B2 (ja) * 2002-07-19 2009-07-15 パナソニック株式会社 圧電機能部品の製造方法
JP2005249645A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサおよびその製造方法
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
JP4533934B2 (ja) * 2008-01-15 2010-09-01 エプソントヨコム株式会社 振動片及び振動子の製造方法
JP5316748B2 (ja) * 2008-03-28 2013-10-16 セイコーエプソン株式会社 振動片の製造方法
JP5168002B2 (ja) * 2008-07-22 2013-03-21 セイコーエプソン株式会社 振動子及び発振器

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