JP2012015559A5 - - Google Patents

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Publication number
JP2012015559A5
JP2012015559A5 JP2011230093A JP2011230093A JP2012015559A5 JP 2012015559 A5 JP2012015559 A5 JP 2012015559A5 JP 2011230093 A JP2011230093 A JP 2011230093A JP 2011230093 A JP2011230093 A JP 2011230093A JP 2012015559 A5 JP2012015559 A5 JP 2012015559A5
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JP
Japan
Prior art keywords
oxide
nitride
oxynitride
fluoride
hafnium
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Application number
JP2011230093A
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English (en)
Japanese (ja)
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JP2012015559A (ja
JP5387649B2 (ja
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Priority to JP2011230093A priority Critical patent/JP5387649B2/ja
Priority claimed from JP2011230093A external-priority patent/JP5387649B2/ja
Publication of JP2012015559A publication Critical patent/JP2012015559A/ja
Publication of JP2012015559A5 publication Critical patent/JP2012015559A5/ja
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Publication of JP5387649B2 publication Critical patent/JP5387649B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011230093A 2011-10-19 2011-10-19 Ｉｉｉ族窒化物半導体レーザ素子、及びｉｉｉ族窒化物半導体レーザ素子を作製する方法 Expired - Fee Related JP5387649B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011230093A JP5387649B2 (ja) 2011-10-19 2011-10-19 Ｉｉｉ族窒化物半導体レーザ素子、及びｉｉｉ族窒化物半導体レーザ素子を作製する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011230093A JP5387649B2 (ja) 2011-10-19 2011-10-19 Ｉｉｉ族窒化物半導体レーザ素子、及びｉｉｉ族窒化物半導体レーザ素子を作製する方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2009228747A Division JP5387302B2 (ja) 2009-09-30 2009-09-30 Ｉｉｉ族窒化物半導体レーザ素子、及びｉｉｉ族窒化物半導体レーザ素子を作製する方法

Publications (3)

Publication Number Publication Date
JP2012015559A JP2012015559A (ja) 2012-01-19
JP2012015559A5 true JP2012015559A5 (https=) 2012-11-15
JP5387649B2 JP5387649B2 (ja) 2014-01-15

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ID=45601534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011230093A Expired - Fee Related JP5387649B2 (ja) 2011-10-19 2011-10-19 Ｉｉｉ族窒化物半導体レーザ素子、及びｉｉｉ族窒化物半導体レーザ素子を作製する方法

Country Status (1)

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JP (1) JP5387649B2 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5014967B2 (ja) * 2007-12-06 2012-08-29 シャープ株式会社 発光素子及び発光素子の製造方法

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