JP2012015546A - Semiconductor apparatus, and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the degree of freedom in wiring on a surface of a semiconductor apparatus.SOLUTION: A post 40 formed on an insulating film 30 is arranged in the circumference of a semiconductor chip 11, and the semiconductor chip 11 is adhered to the insulating film 30 by an adhesive resin layer 20. A thermosetting resin sheet 70a is sandwiched between the insulating film 30 and an insulating film 80, and by heating and pressurizing these, a sealing layer 70 for sealing the semiconductor chip 11 and the post 40 is formed from the thermosetting resin sheet 70a. Base materials 101 and 102 are removed. Via holes 21, 31, 71, 81, and 32 are formed. A wiring 33 is patterned on a surface of the insulating film 30 to bury a part of the wiring 33 in the via holes 21, 31 and 32. A wiring 83 is patterned on a surface of the insulating film 80 to bury a part of the wiring 83 in the via holes 71 and 81.

Description

  The present invention relates to a semiconductor device and a method for manufacturing the semiconductor device.

  In a conventional semiconductor device, a via hole is formed in a substrate, and a conductor is filled in the via hole, whereby an electrical connection between an electrode of a semiconductor chip mounted on one surface of the substrate and an external electrode formed on the other surface of the substrate. There is a thing which takes a general connection (refer patent document 1).

JP 2008-42063 A

  By the way, since the semiconductor chip is mounted on the substrate, the entire semiconductor device becomes thick depending on the thickness of the substrate. Therefore, attempts have been made to mount the semiconductor chip on the insulating film. Since the insulating film is deformed by itself, the semiconductor chip is mounted on the insulating film in a state where the insulating film is supported by the supporting base material. Then, after molding the sealing layer on the insulating film, the base material is removed by etching or the like. After that, a via hole that penetrates to the electrode of the semiconductor chip is formed in the insulating film, and then a conductor is provided in the via hole, or a through hole is passed through the insulating film and the sealing layer, and then the conductor is plated on the wall surface of the through hole. Interlayer connection is performed by providing. Then, the wiring is patterned on the surface of the insulating film or the sealing layer.

  However, when the conductor is plated on the wall surface of the through hole, the lands on both sides become large, and there is a problem that the degree of freedom of wiring on the surface of the insulating film or the sealing layer is restricted.

  An object of the present invention is to improve the degree of freedom of wiring on the surface of a semiconductor device.

  In order to solve the above problems, the invention according to claim 1 is a semiconductor in which a conductor post formed on a first insulating film formed on a first substrate and an electrode formed on a lower surface are provided. A first step of bonding the lower surface of the semiconductor chip to the first insulating film with an adhesive resin layer so as to be disposed around the chip, and formed on the second substrate after the first step A thermosetting resin sheet is sandwiched between a second insulating film and the first insulating film, and the first base material, the first insulating film, the thermosetting resin sheet, the second A second step of forming a sealing layer for sealing the semiconductor chip and the post from the thermosetting resin sheet by heating and pressing the insulating film and the second substrate; After the step, a third step of removing the first base material and the second base material, and the third work Later, a fourth step of forming a first via hole at a position overlapping the electrode in the first insulating film and the adhesive resin layer, and after the third step, the second insulating film and the sealing layer A fifth step of forming a second via hole at a position overlapping with the post, and a sixth step of forming a third via hole at a position overlapping with the post in the first insulating film after the third step. Then, after the fourth step and the sixth step, the first wiring is patterned on the surface of the first insulating film, and a part of the first wiring is transferred to the first via hole and the third step. A seventh step of filling the first wiring with the electrode and the post by filling in a via hole; and after the fifth step, patterning a second wiring on the surface of the second insulating film to form the second wiring A part of the wiring to the second via hole An eighth step of conducting Umate the second wiring to the post is a method of manufacturing a semiconductor device, which comprises a.

  The invention according to claim 2 includes a step of forming the post from the metal layer by partially etching the metal layer formed on the first insulating film before the first step. A method of manufacturing a semiconductor device according to claim 1.

  According to a third aspect of the present invention, there is provided a conductor post connected to the embedded wiring formed on the first insulating film formed on the first base material and formed on the first insulating film. Is disposed around the semiconductor chip having the electrode formed on the lower surface, and the electrode is overlaid on the through hole formed in the embedded wiring, and the lower surface of the semiconductor chip is covered with an adhesive resin layer. A first step of bonding to the first insulating film; and a thermosetting resin between the second insulating film formed on the second substrate and the first insulating film after the first step. By sandwiching a sheet, heating and pressurizing the first base material, the first insulating film, the thermosetting resin sheet, the second insulating film, and the second base material, A sealing layer for sealing the semiconductor chip and the post is formed on the thermosetting resin sheet. A second step formed from, a third step of removing the first base material and the second base material after the second step, and a first insulating film and the adhesion after the third step. A fourth step of forming a first via hole in a position overlapping the electrode and the through hole in the resin layer; and a position overlapping the post in the second insulating film and the sealing layer after the third step. After the fifth step of forming the second via hole and the fourth step, the first via hole and the through hole are filled with a conductor filler, and the filler is conducted to the electrode and the embedded wiring. After the sixth step and the fifth step, a wiring is patterned on the surface of the second insulating film, and a part of the wiring is buried in the second via hole to make the wiring conductive to the post. A process characterized by comprising a process Device is a method of manufacturing.

  The invention according to claim 4 is formed on the lower surface of the semiconductor chip in the first through hole formed in the first embedded wiring formed on the first insulating film formed on the first substrate. A first step of adhering a lower surface of the semiconductor chip to the first insulating film by an adhesive resin layer so as to overlap the formed electrodes, and a second insulating film formed on the second base material A conductor post connected to the formed second embedded wiring and formed on the second insulating film is disposed around the semiconductor chip, and is formed on the first embedded wiring. The post is overlaid on the second through hole, and the thermosetting resin sheet is sandwiched between the second insulating film and the first insulating film, and the first base material and the first Heating of the insulating film, the thermosetting resin sheet, the second insulating film, and the second base material A second step of forming a sealing layer for sealing the semiconductor chip and the post from the thermosetting resin sheet by applying pressure, and after the second step, the first substrate and the second Forming a first via hole at a position overlapping with the electrode and the first through hole in the first insulating film and the adhesive resin layer after the third step of removing the substrate and the third step After the fourth step, after the third step, a fifth step of forming a second via hole at a position overlapping the second embedded wiring in the second insulating film, and after the third step, the first step A sixth step of forming a third via hole at a position overlapping with the post and the second through hole in the insulating film and the sealing layer, and after the fourth step and the sixth step, The first via hole and the first filler The through hole is filled to make the first filler conductive to the first embedded wiring and the electrode, and the second filler of the conductor is filled into the third via hole and the second through hole. Then, after the seventh step of conducting the second filler to the post and the first embedded wiring, and after the fifth step, the wiring is patterned on the surface of the second insulating film, thereby And an eighth step of filling the portion into the second via hole and conducting the wiring to the buried wiring.

  According to a fifth aspect of the present invention, there is provided a first insulating film, a semiconductor chip having a lower surface facing the first insulating film, an electrode formed on the lower surface of the semiconductor chip, a lower surface of the semiconductor chip, and the first An adhesive resin layer sandwiched between one insulating film and bonding the lower surface of the semiconductor chip to the first insulating film, and a conductor formed on the first insulating film around the semiconductor chip. A post, a sealing layer formed on the first insulating film and sealing the post and the semiconductor chip, and a sealing layer formed on the sealing layer and between the first insulating film and the sealing layer. A second insulating film sandwiching a stop layer; a first wiring formed on the surface of the first insulating film on the opposite side of the sealing layer; and the first wiring on the opposite side of the sealing layer. A second wiring formed on the surface of the second insulating film, the first insulating film and the contact A first via hole is formed at a position overlapping with the electrode in the resin layer, and a second via hole is formed at a position overlapping with the post in the second insulating film and the sealing layer. A third via hole is formed in the film at a position overlapping the post, a part of the first wiring is buried in the first via hole and the third via hole, and the first wiring is formed in the post. The semiconductor device is characterized in that it is electrically connected to the electrode, part of the second wiring is buried in the second via hole, and the second wiring is electrically connected to the post.

  According to a sixth aspect of the present invention, there is provided a first insulating film, a buried wiring having a through hole formed on the first insulating film, a semiconductor chip having a lower surface facing the first insulating film, The electrode formed on the lower surface of the semiconductor chip and disposed so as to overlap the through hole, and the lower surface of the semiconductor chip is sandwiched between the lower surface of the semiconductor chip and the first insulating film, and the lower surface of the semiconductor chip is Formed on the first insulating film around the semiconductor chip, connected to the embedded wiring, and formed on the first insulating film. A sealing layer sealing the post and the semiconductor chip; a second insulating film formed on the sealing layer and sandwiching the sealing layer between the first insulating film; and Formed on the surface of the second insulating film on the opposite side of the sealing layer. A first via hole is formed at a position overlapping the electrode and the through hole in the first insulating film and the adhesive resin layer, and the second insulating film and the conductive filler. A second via hole is formed at a position overlapping the post in the sealing layer, the filler is buried in the first via hole and the through hole, and the filler is electrically connected to the electrode and the embedded wiring. The semiconductor device is characterized in that a part of the wiring is buried in the second via hole and the wiring is conducted to the post.

  The invention according to claim 7 is a first insulating film, a first embedded wiring formed on the first insulating film and having a first through hole and a second through hole; A semiconductor chip facing the first insulating film, an electrode formed on the lower surface of the semiconductor chip and arranged to overlap the first through hole, a lower surface of the semiconductor chip, and the first insulating film The semiconductor chip is placed between the first insulating film and an adhesive resin layer that is sandwiched between the adhesive chip and the lower surface of the semiconductor chip bonded to the first insulating film, and faces the first insulating film The second insulating film, the second embedded wiring formed on the side of the second insulating film facing the first insulating film, and the second insulating film around the semiconductor chip. Formed on the side facing the first insulating film and arranged to overlap the second through hole A sealing layer which is sandwiched between the first insulating film and the second insulating film and which seals the post and the semiconductor chip, and is connected to the second embedded wiring. A wiring formed on the surface of the second insulating film on the opposite side of the sealing layer, a first filler for the conductor, and a second filler for the conductor, and the first A first via hole is formed at a position overlapping the electrode and the first through hole in the insulating film and the adhesive resin layer, and a first via hole is formed at a position overlapping the second embedded wiring in the second insulating film. A second via hole is formed, a third via hole is formed at a position overlapping the post and the second through hole in the first insulating film and the sealing layer, and the first filler is formed in the first filling material. 1 via hole and the first through hole are filled and the first And the second filling material is filled in the third via hole and the second through hole, and is electrically connected to the post and the first embedded wiring. A part of the semiconductor device is buried in the second via hole, and the wiring is electrically connected to the buried wiring.

  According to the present invention, the degree of freedom of wiring on the surface of a semiconductor device can be improved.

1 is a cross-sectional view of a semiconductor device 1A according to a first embodiment of the present invention. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is explanatory drawing of the manufacturing method of 1 A of semiconductor devices. It is sectional drawing of the semiconductor device 1B which concerns on the 2nd Embodiment of this invention. 4 is a plan view of a buried wiring 36. FIG. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is explanatory drawing of the manufacturing method of the semiconductor device 1B. It is sectional drawing of 1 C of semiconductor devices which concern on the 1st modification of this invention. It is sectional drawing of semiconductor device 1D which concerns on the 2nd modification of this invention. It is sectional drawing of the semiconductor device 1E which concerns on the 3rd Embodiment of this invention. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device 1E. It is explanatory drawing of the manufacturing method of the semiconductor device which concerns on the 3rd modification of this invention. It is explanatory drawing of the manufacturing method of the semiconductor device which concerns on the 3rd modification of this invention. It is explanatory drawing of the manufacturing method of the semiconductor device which concerns on the 3rd modification of this invention. It is explanatory drawing of the manufacturing method of the semiconductor device which concerns on the 3rd modification of this invention. It is explanatory drawing of the manufacturing method of the semiconductor device which concerns on the 4th modification of this invention. It is explanatory drawing of the manufacturing method of the semiconductor device which concerns on the 4th modification of this invention. It is explanatory drawing of the manufacturing method of the semiconductor device which concerns on the 4th modification of this invention. (A)-(c) is sectional drawing which shows the semiconductor structure of another form.

  Hereinafter, preferred embodiments for carrying out the present invention will be described with reference to the drawings. However, although various technically preferable limitations for implementing the present invention are given to the embodiments described below, the scope of the invention is not limited to the following embodiments and illustrated examples.

<First Embodiment>
FIG. 1 is a cross-sectional view of a semiconductor device 1A according to the first embodiment of the present invention. This semiconductor device 1A is obtained by packaging the semiconductor structure 10. The semiconductor structure 10 includes a semiconductor chip 11 and a plurality of electrodes 12. The semiconductor chip 11 is obtained by providing an integrated circuit on a semiconductor substrate of a silicon substrate. The plurality of electrodes 12 are provided on the lower surface of the semiconductor chip 11. The electrode 12 is made of Cu. The electrode 12 may be part of the wiring.

  As shown in FIG. 1, the lower surface of the semiconductor structure 10 is bonded to the upper surface of the lower insulating film 30 with an adhesive resin layer 20. The adhesive resin layer 20 is made of a thermosetting resin such as an epoxy resin and has an insulating property. The adhesive resin layer 20 is not fiber reinforced.

The lower insulating film 30 is a fiber reinforced resin film. Specifically, the lower insulating film 30 is made of a glass cloth base epoxy resin, a glass cloth base polyimide resin, or another glass cloth base insulating resin composite material.
Via holes 31 and 21 are formed in the lower insulating film 30 and the adhesive resin layer 20 at positions corresponding to the electrodes 12, respectively. A plurality of posts 40 made of a conductor are formed on the upper surface of the lower insulating film 30 so as to be adjacent to the semiconductor structure 10. Via holes 32 are formed in the lower insulating film 30 at positions corresponding to the plurality of posts 40.

On the lower surface of the lower insulating film 30, a lower wiring 33 is provided integrally with the conductor filled in the via holes 21, 31 and 32. The lower layer wiring 33 makes the electrode 12 and the post 40 conductive.
The lower layer wiring 33 is covered with a lower overcoat layer 60. An opening 61 is formed in a portion of the lower overcoat layer 60 that overlaps the contact pad 34 of the lower wiring 33. A solder bump or the like is formed on the contact pad 34.

  On the upper surface of the lower insulating film 30, a sealing layer 70 for sealing the semiconductor structure 10 and the post 40 is provided. The sealing layer 70 is made of an epoxy resin, a polyimide resin, or other insulating resin. The sealing layer 70 is preferably made of a thermosetting resin (for example, epoxy resin) containing a filler. The sealing layer 70 is not fiber reinforced like the glass cloth base insulating resin, but may be made of fiber reinforced resin.

  An upper insulating film 80 is provided on the upper surface of the sealing layer 70. The upper insulating film 80 is a fiber reinforced resin film. Specifically, the upper insulating film 80 is made of a glass cloth base epoxy resin, a glass cloth base polyimide resin, or another glass cloth base insulating resin composite material.

In the upper insulating film 80 and the sealing layer 70, via holes 81 and 71 are formed at positions corresponding to the plurality of posts 40, respectively.
On the upper surface of the upper insulating film 80, an upper layer wiring 83 is provided integrally with the conductor filling the via holes 81 and 71. The upper layer wiring 83 is electrically connected to the post 40.
The upper wiring 83 is covered with an upper overcoat layer 90. An opening 91 is formed in a portion of the upper overcoat layer 90 that overlaps the contact pad 84 of the upper wiring 83.

  In addition, plating (for example, single-layer plating made of gold plating, double-layer plating made of nickel plating / gold plating, etc.) may be formed on the surfaces of the contact pads 34 and 84 in the openings 61 and 91.

  The lower layer wiring 33, the upper layer wiring 83, and the post 40 are made of copper, nickel, or a laminate of copper and nickel. The lower layer wiring 33, the upper layer wiring 83, and the post 40 may be made of other metals.

Next, a method for manufacturing the semiconductor device 1A will be described. First, as shown in FIG. 2, a lower insulating film 30 and a metal layer 41 are sequentially laminated on a lower substrate 101 made of metal, and integrated by hot press molding as shown in FIG.
The lower base material 101 is a carrier for facilitating the handling of the lower insulating film 30, and is specifically a copper foil. The metal layer 41 is made of the same material as the post 40.
The sizes of the lower insulating film 30 and the metal layer 41 prepared in this way are such that a plurality of semiconductor devices 1A shown in FIG. 1 can be taken out by dicing. Further, the size of the lower substrate 101 is larger than the sizes of the lower insulating film 30 and the metal layer 41.

Next, the post 40 is formed by etching the metal layer 41 as shown in FIG. Next, as shown in FIG. 5, the adhesive resin layer 20 is applied to the upper surface of the lower insulating film 30 and between the posts 40, and the semiconductor structure 10 is face-down bonded thereon. Specifically, after applying a non-conductive paste (NCP; Non-Conductive Paste) by a printing method or a dispenser method, or after supplying a non-conductive film (NCF; Non-Conductive Film) in advance, a semiconductor structure The lower surface of 10 is lowered toward the non-conductive paste or the non-conductive film, and thermocompression bonded. The non-conductive paste or non-conductive film is cured to form the adhesive resin layer 20.

  Next, as shown in FIG. 6, a material in which an upper insulating film 80 is formed on one surface of the upper base material 102 made of metal is prepared, and a thermosetting resin sheet 70 a is prepared. The material of the upper substrate 102 is the same as the material of the lower substrate 101, and the material of the upper insulating film 80 is the same as the material of the lower insulating film 30. The thermosetting resin sheet 70a is obtained by adding a filler to an epoxy resin, a polyimide resin, or other thermosetting resin, and making the thermosetting resin into a semi-cured state into a sheet shape.

  Next, as shown in FIG. 6, a thermosetting resin sheet 70 a is placed on the post 40, and the upper insulating film 80 side is on the upper side on the thermosetting resin sheet 70 a and the semiconductor structure 10. The substrate 102 is placed, and these are sandwiched between a pair of hot plates 103 and 104. Then, the lower base 101, the lower insulating film 30, the thermosetting resin sheet 70a, the upper insulating film 80, and the upper base 102 are hot pressed by the hot plates 103 and 104. The thermosetting resin sheet 70a is compressed between the upper insulating film 80 and the lower insulating film 30 by heating and pressing, and the sealing layer 70 that seals the semiconductor structure 10 and the adhesive resin layer 20 is formed by curing. Is done.

  Next, as shown in FIG. 8, the lower base material 101 and the upper base material 102 are removed by etching (for example, chemical etching or wet etching). Even if the base materials 101 and 102 are removed, sufficient strength can be secured by the laminated structure of the sealing layer 70, the upper insulating film 80 and the lower insulating film 30. Moreover, since the base materials 101 and 102 required during the manufacturing process are removed, the thickness of the completed semiconductor device 1A can be reduced.

Next, as shown in FIG. 9, the lower insulating film 30 and the adhesive resin are irradiated by irradiating laser from the lower insulating film 30 side to the position corresponding to the electrode 12 and the post 40 until the electrode 12 and the post 40 are exposed. Via holes 21, 31 and 32 are formed in the layer 20. Further, a laser is irradiated from the upper insulating film 80 side to a position corresponding to the post 40 to form via holes 81 and 71 in the upper insulating film 80 and the sealing layer 70.
As the laser, a carbon dioxide laser (CO ₂ laser) is preferably used. This is because the lower insulating film 30 is made of a fiber reinforced resin. In addition, after forming the via holes 31, 32, 81, the via holes 21, 71 may be formed by an ultraviolet laser (UV laser) or a low output CO laser.
Next, desmear processing is performed in the via holes 21, 31, 32, 71 and 81.

  Next, as shown in FIG. 10, metal plating films 35 and 85 are formed on the entire surface of the upper insulating film 80 and the lower insulating film 30 by sequentially performing an electroless plating process and an electroplating process. At this time, the via holes 21, 31 and 32 are filled with part of the metal plating film 35, and the via holes 71 and 81 are filled with part of the metal plating film 85.

  Next, as shown in FIG. 11, the metal plating films 35 and 85 are patterned by a photolithography method and an etching method to process the metal plating film 35 into the lower layer wiring 33 and the metal plating film 85 into the upper layer wiring 83. . Instead of patterning the lower layer wiring 33 and the upper layer wiring 83 by the subtractive method as described above, the lower layer wiring 33 and the upper layer wiring 83 may be patterned by the semi-additive method or the full additive method.

  Next, as shown in FIG. 12, the lower overcoat layer 60 is patterned by printing a resin material on the surface of the lower insulating film 30 and on the lower wiring 33 and curing the resin material. Similarly, the upper overcoat layer 90 is patterned on the surface of the upper insulating film 80 and on the upper wiring 83. Openings 61 and 91 are formed by patterning the lower overcoat layer 60 and the upper overcoat layer 90, and the pads 34 and 84 are exposed in the openings 61 and 91.

  The lower overcoat layer 60 is formed by applying a photosensitive resin to the entire surface of the lower insulating film 30, the lower wiring 33, the upper insulating film 80, and the upper wiring 83 by dip coating or spin coating, and exposing and developing. The upper overcoat layer 90 may be patterned.

Next, terminal processing is performed in which gold plating or nickel plating / gold plating is grown by electroless plating on the surfaces of the pads 34 and 84 in the openings 61 and 91.
Next, as shown in FIG. 13, a plurality of semiconductor devices 1A are cut out by a dicing process. Note that solder bumps may be formed in the openings 61 and 91.

  In the semiconductor device 1A manufactured in this way, the via holes 21, 31, 32, 71, 81 can be formed at arbitrary positions within the range of the electrode 12 and the post 40. Therefore, the via holes 21, 31, 32, 71, The degree of freedom of the 81 formation position is increased. Further, since the land becomes minute, the degree of freedom of the lower layer wiring 33 and the upper layer wiring 83 is increased. In addition, when an IVH substrate is used instead of the post 40, the intermediate layer cannot be made thinner than the thickness of the IVH substrate. However, when the post 40 is used, the intermediate layer is reduced by lowering the post 40. Can be thinned.

<Second Embodiment>
FIG. 14 is a cross-sectional view of a semiconductor device 1B according to the second embodiment of the present invention. In addition, about the structure similar to 1st Embodiment, the same code | symbol is attached | subjected and description is omitted.
In the present embodiment, the filler 37 made of a conductor filled in the via holes 21 and 31 and the filler 38 made of a conductor filled in the via hole 32 are separated. A buried wiring 36 is provided on the upper surface of the lower insulating film 30. The embedded wiring 36 includes a wiring layer 36 a and an etching barrier layer 36 b, and one end is provided at a position corresponding to the electrode 12 and the other end is provided at a position corresponding to the post 40.

FIG. 15 is a plan view of the embedded wiring 36. As shown in FIG. 15, the embedded wiring 36 is formed with a through hole 36 c in a portion where the via hole 21 is formed. The filler 37 and the filler 38 are electrically connected by the embedded wiring 36.
A contact pad 34 formed integrally with the filler 38 is provided on the lower surface of the lower insulating film 30, and a solder bump 34 a is formed on the contact pad 34.

  Next, a method for manufacturing the semiconductor device 1B will be described. First, on the metal layer 41, a metal layer to be an etching barrier layer 36b and a wiring layer 36a is sequentially laminated and patterned to form a buried wiring 36 as shown in FIG. The metal layer 41 is made of the same metal as the wiring layer 36a.

  Next, as shown in FIG. 17, the lower insulating film 30 is laminated on the lower substrate 101, and the metal layer 41 is laminated so that the surface on which the embedded wiring 36 is formed faces the lower insulating film 30 side. . Thereafter, when integrated as shown in FIG. 18 by hot press molding, the embedded wiring 36 is embedded in the lower insulating film 30.

Next, the post 40 is formed by etching the metal layer 41 as shown in FIG. At this time, the wiring layer 36a remains because of the etching barrier layer 36b.
Next, as shown in FIG. 20, the adhesive resin layer 20 is applied to a portion where the through hole 36c of the embedded wiring 36 is formed, and the electrode 12 is disposed on the upper portion of the through hole 36c thereon. The body 10 is face-down bonded.

  Next, a material in which an upper insulating film 80 is formed on one surface of the upper substrate 102 made of metal is prepared, and a thermosetting resin sheet 70a is prepared. Then, as shown in FIG. 21, a thermosetting resin sheet 70 a is placed on the post 40, and the upper base insulating film 80 side is placed on the thermosetting resin sheet 70 a and the semiconductor structure 10 so that the upper base film is down. The material 102 is placed, and these are sandwiched between a pair of heating plates 103 and 104. Then, the lower base 101, the lower insulating film 30, the thermosetting resin sheet 70a, the upper insulating film 80, and the upper base 102 are hot pressed by the hot plates 103 and 104. The thermosetting resin sheet 70a is compressed and cured between the upper insulating film 80 and the lower insulating film 30 by heat and pressure, thereby sealing the semiconductor structure 10 and the adhesive resin layer 20 as shown in FIG. A sealing layer 70 to be stopped is formed.

  Next, as shown in FIG. 23, the lower base material 101 and the upper base material 102 are removed by etching (for example, chemical etching or wet etching). Even if the base materials 101 and 102 are removed, sufficient strength can be secured by the laminated structure of the sealing layer 70, the upper insulating film 80 and the lower insulating film 30. Moreover, since the base materials 101 and 102 required during the manufacturing process are removed, the thickness of the completed semiconductor device 1B can be reduced.

Next, the lower insulating film 30 and the adhesive resin layer 20 are irradiated with laser from the lower insulating film 30 side to both ends of the embedded wiring 36 until the electrode 12 and the embedded wiring 36 are exposed, as shown in FIG. Via holes 21, 31 and 32 are formed. At this time, as shown in FIG. 25, the via hole 21 is formed only in a portion where the laser light L has passed through the through hole 36c using the embedded wiring 36 as a mask.
Similarly, a laser is irradiated to the position corresponding to the post 40 from the upper insulating film 80 side to form via holes 81 and 71 in the upper insulating film 80 and the sealing layer 70.
Next, desmear processing is performed in the via holes 21, 31, 32, 71 and 81.

  Next, as shown in FIG. 26, metal plating films 35 and 85 are formed on the entire surface of the upper insulating film 80 and the lower insulating film 30 by sequentially performing an electroless plating process and an electroplating process. At this time, the via holes 21, 31 and 32 are filled with part of the metal plating film 35, and the via holes 71 and 81 are filled with part of the metal plating film 85.

  Next, the metal plating films 35 and 85 are patterned by a photolithography method and an etching method, so that the metal plating film 35 is used as the fillers 37 and 38 and the metal plating film 85 is used as the upper wiring 83 as shown in FIG. Process. Instead of patterning the fillers 37 and 38 and the upper layer wiring 83 by the subtractive method as described above, the fillers 37 and 38 and the upper layer wiring 83 are patterned by the semi-additive method or the full additive method. May be.

  Thereafter, the lower overcoat layer 60 is patterned by printing a resin material on the surface of the lower insulating film 30 and on the fillers 37 and 38 and curing the resin material. Similarly, the upper overcoat layer 90 is patterned on the surface of the upper insulating film 80 and on the upper wiring 83. Openings 61 and 91 are formed by patterning the lower overcoat layer 60 and the upper overcoat layer 90, and the pads 34 and 84 are exposed in the openings 61 and 91.

  The lower overcoat layer 60 is formed by applying a photosensitive resin to the entire surface of the lower insulating film 30, the lower wiring 33, the upper insulating film 80, and the upper wiring 83 by dip coating or spin coating, and exposing and developing. The upper overcoat layer 90 may be patterned.

Next, terminal processing is performed in which gold plating or nickel plating / gold plating is grown by electroless plating on the surfaces of the pads 34 and 84 in the openings 61 and 91.
Next, as shown in FIG. 28, a plurality of semiconductor devices 1B are cut out by a dicing process. Note that solder bumps may be formed in the openings 61 and 91.
Also in this embodiment, since the land is very small, the degree of freedom of the lower layer wiring 33 and the upper layer wiring 83 is increased. Further, since the through hole 36c of the embedded wiring 36 serves as a mask when forming the via hole 21, the via hole 21 can be formed with high accuracy.

<Modification 1>
As shown in FIG. 29, a buried wiring 86 is also provided on the lower surface of the upper insulating film 80, and the post 40 and the buried wiring 86 are made conductive by a filler 87 made of a conductor filled in the via holes 71 and 81. The semiconductor device 1 </ b> C may have a structure in which the upper layer wiring 83 is provided integrally with the conductor filled in the via hole 82 provided in the upper layer insulating film 80.
The embedded wiring 86 includes a wiring layer 86a and an etching barrier layer 86b. The method for forming the embedded wiring 86 in the upper insulating film 80 is the same as the method for forming the embedded wiring 36 on the lower surface of the lower insulating film 30. The via hole 71 is formed using the through hole 86c of the embedded wiring 86 as a mask.

<Modification 2>
Alternatively, as shown in FIG. 30, the post 40 is provided on the lower surface of the upper insulating film 80, the through hole 36d is provided at the same position as the via hole 32 of the embedded wiring 36, and the through hole 36d of the embedded wiring 36 is sealed using the mask. A via hole 72 may be formed in the layer 70 and the via hole 72 may be filled with a filler 38. By using the through hole 36d as a mask, the via hole 72 can be formed with high accuracy.

<Third Embodiment>
FIG. 31 is a cross-sectional view of a semiconductor device 1E according to the third embodiment of the present invention. In addition, about the structure similar to 2nd Embodiment, the same code | symbol is attached | subjected and description is omitted.
In the present embodiment, the post 40 is provided on the lower surface of the upper insulating film 80. Further, one end of the embedded wiring 36 extends to the lower part of the post 40, and a through hole 36 d is provided in the lower part of the post 40 and in the upper part of the via hole 32.

  A via hole 72 is provided in the sealing layer 70 above the through hole 36 d and below the post 40. The via holes 72 and 32 and the through hole 36d are filled with a filler 38.

  A buried wiring 86 is provided on the lower surface of the upper insulating film 80. The embedded wiring 86 is composed of a wiring layer 86 a and an etching barrier layer 86 b, and one end is provided at a position corresponding to the post 40 and the other end is provided above the semiconductor structure 10. The method for forming the embedded wiring 86 on the lower surface of the upper insulating film 80 is the same as the method for forming the embedded wiring 36 on the lower surface of the lower insulating film 30.

  The upper insulating film 80 is provided with a via hole 82 penetrating from the upper surface to the end of the embedded wiring 86 on the semiconductor structure 10 side. The upper insulating film 80 is integrated with the conductor filled in the via hole 82 on the upper surface. Upper layer wiring 83 is provided in the upper layer.

  Next, a method for manufacturing the semiconductor device 1B will be described. First, as in the second embodiment, as shown in FIG. 32, a through hole 36c of the embedded wiring 36 is formed in the laminated body of the lower base material 101 and the lower insulating film 30 on which the embedded wiring 36 is formed. The adhesive resin layer 20 is applied to the formed portion, and the semiconductor structure 10 is face-down bonded so that the electrode 12 is disposed on the through hole 36c.

  Next, a laminate of the upper base material 102 and the upper insulating film 80 on which the embedded wiring 86 and the posts 40 are formed is prepared, and a thermosetting resin sheet 70a is prepared. And as shown in FIG. 33, the thermosetting resin sheet 70a is mounted between the semiconductor structures 10, and the upper insulating film 80 side is arranged so that the post 40 is disposed on the thermosetting resin sheet 70a. The upper base material 102 is placed face down, and these are sandwiched between a pair of hot plates 103 and 104. Then, the lower base 101, the lower insulating film 30, the thermosetting resin sheet 70a, the upper insulating film 80, and the upper base 102 are hot pressed by the hot plates 103 and 104. As shown in FIG. 34, the thermosetting resin sheet 70a is compressed and cured between the upper insulating film 80 and the lower insulating film 30 by heat and pressure, so that the semiconductor structure 10 and the adhesive resin layer 20 are sealed. A sealing layer 70 to be stopped is formed.

  Next, as shown in FIG. 35, the lower base material 101 and the upper base material 102 are removed by etching (for example, chemical etching or wet etching). Even if the base materials 101 and 102 are removed, sufficient strength can be secured by the laminated structure of the sealing layer 70, the upper insulating film 80 and the lower insulating film 30. Moreover, since the base materials 101 and 102 required during the manufacturing process are removed, the thickness of the completed semiconductor device 1E can be reduced.

Next, by irradiating the both ends of the embedded wiring 36 from the lower insulating film 30 side until the electrode 12, the post 40 and the embedded wiring 36 are exposed, as shown in FIG. Via holes 21, 31, 32 and 72 are formed in the resin layer 20 and the sealing layer 70. At this time, the through hole 36 c is used as a mask when forming the via hole 21, and the through hole 36 d is used as a mask when forming the via hole 72.
Similarly, a laser is irradiated from the upper layer insulating film 80 side to a position corresponding to the end portion of the buried wiring 86 to form a via hole 82 in the upper layer insulating film 80.
Next, the desmear process is performed in the via holes 21, 31, 32 and 82.

  Next, metal plating films 35 and 85 are formed on the entire surface of the upper insulating film 80 and the lower insulating film 30 by sequentially performing an electroless plating process and an electroplating process. At this time, the via holes 21, 31, 32 and 72 are filled with a part of the metal plating film 35, and the via hole 82 is filled with a part of the metal plating film 85.

  Next, as shown in FIG. 37, the metal plating films 35 and 85 are patterned by a photolithography method and an etching method, so that the metal plating film 35 is used as the fillers 37 and 38 and the metal plating film 85 is used as the upper wiring 83. Process. Instead of patterning the fillers 37 and 38 and the upper layer wiring 83 by the subtractive method as described above, the fillers 37 and 38 and the upper layer wiring 83 are patterned by the semi-additive method or the full additive method. May be.

  Thereafter, as shown in FIG. 38, the lower overcoat layer 60 is patterned by printing a resin material on the surface of the lower insulating film 30 and on the fillers 37 and 38 and curing the resin material. Similarly, the upper overcoat layer 90 is patterned on the surface of the upper insulating film 80 and on the upper wiring 83. Openings 61 and 91 are formed by patterning the lower overcoat layer 60 and the upper overcoat layer 90, and the pads 34 and 84 are exposed in the openings 61 and 91.

  The lower overcoat layer 60 is formed by applying a photosensitive resin to the entire surface of the lower insulating film 30, the lower wiring 33, the upper insulating film 80, and the upper wiring 83 by dip coating or spin coating, and exposing and developing. The upper overcoat layer 90 may be patterned.

Next, terminal processing is performed in which gold plating or nickel plating / gold plating is grown by electroless plating on the surfaces of the pads 34 and 84 in the openings 61 and 91.
Next, as shown in FIG. 39, a plurality of semiconductor devices 1E are cut out by a dicing process. Note that solder bumps may be formed in the openings 61 and 91.
Also in this embodiment, since the land is very small, the degree of freedom of the lower layer wiring 33 and the upper layer wiring 83 is increased. Further, since the through holes 36c and 36d of the buried wiring 36 serve as a mask when forming the via holes 21 and 72, the via holes 21 and 72 can be formed with high accuracy.

<Modification 3>
In the above embodiment, you may use 101 A of lower base materials which consist of a peelable copper foil board. As shown in FIG. 40, the peelable copper foil plate is formed by forming a peeling layer 101b on the upper surface of a carrier metal plate 101c made of a copper plate or a thick copper foil, and forming the copper foil 101a on the upper surface of the peeling layer 101b by electrolytic plating. It is a thing.

  When the lower substrate 101A made of a peelable copper foil plate is used, as shown in FIG. 40, a lower insulating film 30 is formed on the surface on which the copper foil 101a is formed, and an adhesive resin is formed on the lower insulating film 30. The layer 20 is applied, and the semiconductor structure 10 is face-down bonded so that the electrode 12 is disposed on the through hole 36c.

  Next, a material in which an upper insulating film 80 is formed on one surface of the upper substrate 102 made of metal is prepared, and a thermosetting resin sheet 70a is prepared. Then, the thermosetting resin sheet 70a is placed on the post 40, and the upper base material 102 is placed on the thermosetting resin sheet 70a and the semiconductor structure 10 with the upper insulating film 80 side down, By hot pressing these, as shown in FIG. 41, a sealing layer 70 for sealing the semiconductor structure 10 and the adhesive resin layer 20 is formed.

Next, as shown in FIG. 42, the carrier metal plate 101c of the lower substrate 101A is peeled off. Thereafter, as shown in FIG. 43, the remaining peeling layer 101b, copper foil 101a, and upper substrate 102 are removed by etching (for example, chemical etching or wet etching). Thus, the etching process can be shortened by removing the carrier metal plate 101c by peeling off.
Note that a peelable copper foil plate may be used for the upper substrate 102.

<Modification 4>
Moreover, you may use the existing board | substrate material 101d by which copper foil 101f and 101f are formed on both surfaces of the resin layer 101e as shown in FIGS. 44-46 instead of the carrier metal plate 101c.

  When the lower substrate 101B using the existing substrate material 101d is used, as shown in FIG. 44, the lower insulating film 30 is formed on the surface on which the copper foil 101a is formed, and the lower insulating film 30 is formed on the lower insulating film 30. The adhesive resin layer 20 is applied, and the semiconductor structure 10 is face-down bonded so that the electrode 12 is disposed on the through hole 36c.

  Next, a material in which an upper insulating film 80 is formed on one surface of the upper substrate 102 made of metal is prepared, and a thermosetting resin sheet 70a is prepared. Then, the thermosetting resin sheet 70a is placed on the post 40, and the upper base material 102 is placed on the thermosetting resin sheet 70a and the semiconductor structure 10 with the upper insulating film 80 side down, By hot-pressing these, as shown in FIG. 45, a sealing layer 70 for sealing the semiconductor structure 10 and the adhesive resin layer 20 is formed.

Next, as shown in FIG. 46, the substrate material 101d of the lower base material 101B is peeled off. Thereafter, similarly to FIG. 43, the remaining peeling layer 101b, copper foil 101a, and upper base material 102 are removed by etching (for example, chemical etching or wet etching). Thus, also in this modification, a semiconductor device can be manufactured by the same process as that of Modification 3. By using the existing substrate material 101D, there is an advantage that the compatibility with the existing production line is high.
Note that the same substrate material may be used for the upper base material 102.

In the above-described embodiment, the semiconductor structure 10 before being sealed may have any one of the shapes shown in FIGS.
That is, as shown in FIG. 47A, a semiconductor having a shape in which an insulating film 13 is formed on a temporary surface of a semiconductor chip 11, a via hole 14 is formed in the insulating film 13, and the via hole 14 is filled with a part of the electrode 12. The structure 10A may be used. The insulating film 13 is an inorganic insulating layer (for example, a silicon oxide layer or a silicon nitride layer), a resin insulating layer (for example, a polyimide resin layer), or a laminate thereof. When the insulating film 13 is a laminate, the inorganic insulating layer may be formed on the lower surface of the semiconductor chip 11 and the resin insulating layer may be formed on the surface of the inorganic insulating layer, or vice versa. Good.

Further, as shown in FIG. 47B, a semiconductor structure 10B having a shape in which a post 15 made of copper, for example, is provided on the electrode 12 may be used.
Alternatively, as shown in FIG. 47C, a semiconductor structure 10C having a shape in which a cover coat 16 that covers the electrode 12 and the insulating film 13 is formed may be used. Even when the post 15 is formed as shown in FIG. 47B, the electrode 12 and the insulating film 13 may be covered with the cover coat 16 as shown in FIG. 47C. In that case, the post 15 may be covered with the cover coat 16 or may not be covered.

1A, 1B, 1E Semiconductor device 11 Semiconductor chip 12 Electrode 20 Adhesive resin layer 21, 31 Via hole (first via hole)
30 Lower insulating film (first insulating film)
32 Via hole (third via hole)
32, 72 Via hole (third via hole)
33 Lower layer wiring (first wiring)
36 Embedded wiring (embedded wiring, first embedded wiring)
36c Through hole (through hole, first through hole)
36d Through hole (second through hole)
37 Filler (filler, first filler)
38 Filler (second filler)
40 Post 41 Metal layer 70 Sealing layer 70a Thermosetting resin sheet 80 Upper insulating film (second insulating film)
71, 81 Via hole (second via hole)
82 Via hole (second via hole)
83 Upper layer wiring (second wiring, wiring)
86 Embedded wiring (second embedded wiring)
101 First base material 102 Second base material

Claims (7)

The conductor post formed on the first insulating film formed on the first substrate is disposed around the semiconductor chip having the electrode formed on the lower surface, and the lower surface of the semiconductor chip is bonded. A first step of adhering to the first insulating film by a resin layer;
After the first step, a thermosetting resin sheet is sandwiched between the second insulating film formed on the second base material and the first insulating film, and the first base material, the first base material, A sealing layer for sealing the semiconductor chip and the post by heating and pressurizing the insulating film, the thermosetting resin sheet, the second insulating film, and the second base material; A second step of forming from a thermosetting resin sheet;
A third step of removing the first base material and the second base material after the second step;
After the third step, a fourth step of forming a first via hole at a position overlapping the electrode in the first insulating film and the adhesive resin layer;
A fifth step of forming a second via hole at a position overlapping the post in the second insulating film and the sealing layer after the third step;
A sixth step of forming a third via hole at a position overlapping the post in the first insulating film after the third step;
After the fourth step and the sixth step, a first wiring is patterned on the surface of the first insulating film, and a part of the first wiring is formed into the first via hole and the third via hole. A seventh step of filling and electrically connecting the first wiring to the electrode and the post;
After the fifth step, the second wiring is patterned on the surface of the second insulating film, a part of the second wiring is buried in the second via hole, and the second wiring is used as the post. And an eighth step of conducting the semiconductor device.   2. The method according to claim 1, further comprising a step of forming the post from the metal layer by partially etching the metal layer formed on the first insulating film before the first step. The manufacturing method of the semiconductor device of description. The conductor post formed on the first insulating film is connected to the embedded wiring formed on the first insulating film formed on the first base, and the electrode is formed on the lower surface. The lower surface of the semiconductor chip is adhered to the first insulating film by an adhesive resin layer so as to be disposed around the semiconductor chip and to overlap the electrode in the through hole formed in the embedded wiring. A first step of
After the first step, a thermosetting resin sheet is sandwiched between the second insulating film formed on the second base material and the first insulating film, and the first base material, the first base material, A sealing layer for sealing the semiconductor chip and the post by heating and pressurizing the insulating film, the thermosetting resin sheet, the second insulating film, and the second base material; A second step of forming from a thermosetting resin sheet;
A third step of removing the first base material and the second base material after the second step;
A fourth step of forming a first via hole at a position overlapping the electrode and the through hole in the first insulating film and the adhesive resin layer after the third step;
A fifth step of forming a second via hole at a position overlapping the post in the second insulating film and the sealing layer after the third step;
After the fourth step, a sixth step of filling the first via hole and the through-hole with a conductor filler and electrically connecting the filler to the electrode and the embedded wiring;
After the fifth step, a seventh step of patterning a wiring on the surface of the second insulating film, filling a part of the wiring in the second via hole, and conducting the wiring to the post is included. A method for manufacturing a semiconductor device. The electrode formed on the lower surface of the semiconductor chip is overlaid on the first through hole formed in the first embedded wiring formed on the first insulating film formed on the first base material. A first step of bonding the lower surface of the semiconductor chip to the first insulating film by an adhesive resin layer;
A conductor post connected to the second embedded wiring formed on the second insulating film formed on the second base material and formed on the second insulating film is connected to the semiconductor chip. A thermoset between the second insulating film and the first insulating film is arranged around the second through hole formed in the first embedded wiring and overlapped with the post. By sandwiching a resin sheet, heating and pressurizing the first base material, the first insulating film, the thermosetting resin sheet, the second insulating film, and the second base material, A second step of forming a sealing layer for sealing the semiconductor chip and the post from the thermosetting resin sheet;
A third step of removing the first base material and the second base material after the second step;
A fourth step of forming a first via hole at a position overlapping the electrode and the first through hole in the first insulating film and the adhesive resin layer after the third step;
After the third step, a fifth step of forming a second via hole at a position overlapping the second embedded wiring in the second insulating film;
After the third step, a sixth step of forming a third via hole at a position overlapping the post and the second through hole in the first insulating film and the sealing layer;
After the fourth step and the sixth step, the first via hole and the first through hole are filled with a first filling material of a conductor, and the first filling material is filled with the first embedded wiring and the first filling wire. A second conductive material is filled in the third via hole and the second through hole, and the second filler is conducted to the post and the first embedded wiring. 7 steps,
After the fifth step, an eighth step of patterning a wiring on the surface of the second insulating film, filling a part of the wiring in the second via hole, and conducting the wiring to the embedded wiring; A method for manufacturing a semiconductor device, comprising: A first insulating film;
A semiconductor chip having a lower surface facing the first insulating film;
An electrode formed on the lower surface of the semiconductor chip;
An adhesive resin layer sandwiched between the lower surface of the semiconductor chip and the first insulating film and bonding the lower surface of the semiconductor chip to the first insulating film;
A conductor post formed on the first insulating film around the semiconductor chip;
A sealing layer formed on the first insulating film and sealing the post and the semiconductor chip;
A second insulating film formed on the sealing layer and sandwiching the sealing layer with the first insulating film;
A first wiring formed on the surface of the first insulating film on the opposite side of the sealing layer;
A second wiring formed on the surface of the second insulating film on the opposite side of the sealing layer,
A first via hole is formed at a position overlapping the electrode in the first insulating film and the adhesive resin layer,
A second via hole is formed at a position overlapping the post in the second insulating film and the sealing layer;
A third via hole is formed at a position overlapping the post in the first insulating film;
A part of the first wiring is buried in the first via hole and the third via hole, and the first wiring is electrically connected to the post and the electrode;
A semiconductor device, wherein a part of the second wiring is buried in the second via hole, and the second wiring is electrically connected to the post. A first insulating film;
An embedded wiring formed on the first insulating film and having a through hole;
A semiconductor chip having a lower surface facing the first insulating film;
An electrode formed on the lower surface of the semiconductor chip and disposed so as to overlap the through hole;
An adhesive resin layer sandwiched between the lower surface of the semiconductor chip and the first insulating film and bonding the lower surface of the semiconductor chip to the first insulating film;
A conductor post formed on the first insulating film around the semiconductor chip and connected to the embedded wiring;
A sealing layer formed on the first insulating film and sealing the post and the semiconductor chip;
A second insulating film formed on the sealing layer and sandwiching the sealing layer with the first insulating film;
Wiring formed on the surface of the second insulating film on the opposite side of the sealing layer;
A conductor filler;
A first via hole is formed at a position overlapping the electrode and the through hole in the first insulating film and the adhesive resin layer,
A second via hole is formed at a position overlapping the post in the second insulating film and the sealing layer;
The filler is embedded in the first via hole and the through hole, and the filler is electrically connected to the electrode and the embedded wiring;
A semiconductor device, wherein a part of the wiring is buried in the second via hole, and the wiring is conducted to the post. A first insulating film;
A first embedded wiring formed on the first insulating film and having a first through hole and a second through hole;
A semiconductor chip having a lower surface facing the first insulating film;
An electrode formed on the lower surface of the semiconductor chip and disposed to overlap the first through hole;
An adhesive resin layer sandwiched between the lower surface of the semiconductor chip and the first insulating film and bonding the lower surface of the semiconductor chip to the first insulating film;
A second insulating film facing the first insulating film by placing the semiconductor chip between the first insulating film and the first insulating film;
A second embedded wiring formed on a side of the second insulating film facing the first insulating film;
Formed on the side of the second insulating film facing the first insulating film around the semiconductor chip, arranged to overlap the second through hole, and connected to the second embedded wiring A conductor post;
A sealing layer sandwiched between the first insulating film and the second insulating film and sealing the post and the semiconductor chip;
Wiring formed on the surface of the second insulating film on the opposite side of the sealing layer;
A first filler for the conductor;
A second filler for the conductor,
A first via hole is formed at a position overlapping the electrode and the first through hole in the first insulating film and the adhesive resin layer,
A second via hole is formed at a position overlapping the second embedded wiring in the second insulating film;
A third via hole is formed at a position overlapping the post and the second through hole in the first insulating film and the sealing layer,
The first filler is filled in the first via hole and the first through hole and is electrically connected to the first embedded wiring and the electrode;
The second filler is filled in the third via hole and the second through hole and is electrically connected to the post and the first embedded wiring;
A part of the wiring is buried in the second via hole, and the wiring is electrically connected to the buried wiring.

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