JP2012011374A5 - - Google Patents
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- Publication number
- JP2012011374A5 JP2012011374A5 JP2011101793A JP2011101793A JP2012011374A5 JP 2012011374 A5 JP2012011374 A5 JP 2012011374A5 JP 2011101793 A JP2011101793 A JP 2011101793A JP 2011101793 A JP2011101793 A JP 2011101793A JP 2012011374 A5 JP2012011374 A5 JP 2012011374A5
- Authority
- JP
- Japan
- Prior art keywords
- catalyst nanoparticles
- nanoparticles
- pores
- vapor deposition
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 21
- 239000002105 nanoparticle Substances 0.000 claims 15
- 239000003054 catalyst Substances 0.000 claims 12
- 239000002184 metal Substances 0.000 claims 9
- 229910052751 metal Inorganic materials 0.000 claims 9
- 239000011148 porous material Substances 0.000 claims 6
- 239000002717 carbon nanostructure Substances 0.000 claims 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000005229 chemical vapour deposition Methods 0.000 claims 3
- 238000004070 electrodeposition Methods 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims 2
- 150000003839 salts Chemical class 0.000 claims 2
- 241000894007 species Species 0.000 claims 2
- 241000255925 Diptera Species 0.000 claims 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims 1
- 239000005977 Ethylene Substances 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical group [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 239000002041 carbon nanotube Substances 0.000 claims 1
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 238000000609 electron-beam lithography Methods 0.000 claims 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
- 239000002086 nanomaterial Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 claims 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 159000000000 sodium salts Chemical class 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US35973010P | 2010-06-29 | 2010-06-29 | |
| US61/359,730 | 2010-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2012011374A JP2012011374A (ja) | 2012-01-19 |
| JP2012011374A5 true JP2012011374A5 (https=) | 2014-04-10 |
Family
ID=44838267
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011101793A Pending JP2012011374A (ja) | 2010-06-29 | 2011-04-28 | カーボンナノチューブの成長に適した触媒の形成方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8338296B2 (https=) |
| EP (1) | EP2402082A3 (https=) |
| JP (1) | JP2012011374A (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8735750B2 (en) * | 2010-11-04 | 2014-05-27 | Agency For Science, Technology And Research | Switching device and a method for forming a switching device |
| US8895340B1 (en) * | 2013-09-10 | 2014-11-25 | Georgetown University | Biosensor and system and process for forming |
| CN108504096B (zh) * | 2018-04-19 | 2020-02-18 | 天津大学 | 一种碳纳米管/聚合物复合材料的制备方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3740295B2 (ja) * | 1997-10-30 | 2006-02-01 | キヤノン株式会社 | カーボンナノチューブデバイス、その製造方法及び電子放出素子 |
| US6245849B1 (en) * | 1999-06-02 | 2001-06-12 | Sandia Corporation | Fabrication of ceramic microstructures from polymer compositions containing ceramic nanoparticles |
| JP3610293B2 (ja) * | 1999-09-22 | 2005-01-12 | キヤノン株式会社 | 細孔を有する構造体及び前記細孔を有する構造体を用いたデバイス |
| JP2004502554A (ja) * | 2000-03-22 | 2004-01-29 | ユニバーシティー オブ マサチューセッツ | ナノシリンダー・アレイ |
| WO2002079514A1 (en) * | 2001-01-10 | 2002-10-10 | The Trustees Of Boston College | Dna-bridged carbon nanotube arrays |
| WO2002080360A1 (en) * | 2001-03-30 | 2002-10-10 | California Institute Of Technology | Pattern-aligned carbon nanotube growth and tunable resonator apparatus |
| US6596187B2 (en) * | 2001-08-29 | 2003-07-22 | Motorola, Inc. | Method of forming a nano-supported sponge catalyst on a substrate for nanotube growth |
| US6689674B2 (en) * | 2002-05-07 | 2004-02-10 | Motorola, Inc. | Method for selective chemical vapor deposition of nanotubes |
| KR100455297B1 (ko) * | 2002-06-19 | 2004-11-06 | 삼성전자주식회사 | 무기물 나노튜브 제조방법 |
| AU2003299538B2 (en) * | 2002-09-20 | 2008-05-15 | The Trustees Of Boston College | Nanotube cantilever probes for nanoscale magnetic microscopy |
| US7214303B2 (en) * | 2002-09-20 | 2007-05-08 | The Trustees Of Boston College | Cantilever probes for nanoscale magnetic and atomic force microscopy |
| JP2004202602A (ja) * | 2002-12-24 | 2004-07-22 | Sony Corp | 微小構造体の製造方法、及び型材の製造方法 |
| KR100523767B1 (ko) * | 2003-06-12 | 2005-10-26 | 한국과학기술원 | 유기 초분자의 자기조립과 자외선 에칭을 이용한나노패턴의 형성방법 |
| US7053520B2 (en) * | 2003-07-18 | 2006-05-30 | The Regents Of The University Of California | Rotational actuator or motor based on carbon nanotubes |
| KR100695124B1 (ko) | 2004-02-25 | 2007-03-14 | 삼성전자주식회사 | 카본나노튜브의 수평성장방법 |
| WO2006035325A1 (en) * | 2004-09-27 | 2006-04-06 | Koninklijke Philips Electronics N.V. | Electric device with nanowires comprising a phase change material |
| US7446044B2 (en) * | 2005-09-19 | 2008-11-04 | California Institute Of Technology | Carbon nanotube switches for memory, RF communications and sensing applications, and methods of making the same |
| US7850941B2 (en) * | 2006-10-20 | 2010-12-14 | General Electric Company | Nanostructure arrays and methods for forming same |
| EP2011572B1 (en) * | 2007-07-06 | 2012-12-05 | Imec | Method for forming catalyst nanoparticles for growing elongated nanostructures |
-
2011
- 2011-04-28 EP EP11164022.3A patent/EP2402082A3/en not_active Withdrawn
- 2011-04-28 US US13/096,310 patent/US8338296B2/en active Active
- 2011-04-28 JP JP2011101793A patent/JP2012011374A/ja active Pending
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