JP2012008051A5 - - Google Patents

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Publication number
JP2012008051A5
JP2012008051A5 JP2010145424A JP2010145424A JP2012008051A5 JP 2012008051 A5 JP2012008051 A5 JP 2012008051A5 JP 2010145424 A JP2010145424 A JP 2010145424A JP 2010145424 A JP2010145424 A JP 2010145424A JP 2012008051 A5 JP2012008051 A5 JP 2012008051A5
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JP
Japan
Prior art keywords
moving
inclined surface
drive mechanism
elevating
moving body
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010145424A
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Japanese (ja)
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JP5826466B2 (en
JP2012008051A (en
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Publication date
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Priority to JP2010145424A priority Critical patent/JP5826466B2/en
Priority claimed from JP2010145424A external-priority patent/JP5826466B2/en
Priority to KR1020110058525A priority patent/KR101256306B1/en
Priority to TW100122209A priority patent/TWI503549B/en
Priority to CN201110179929A priority patent/CN102298079A/en
Publication of JP2012008051A publication Critical patent/JP2012008051A/en
Publication of JP2012008051A5 publication Critical patent/JP2012008051A5/ja
Application granted granted Critical
Publication of JP5826466B2 publication Critical patent/JP5826466B2/en
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Description

昇降機構１７Ａは、図１〜図３に示すように、支持柱１６の上面に固定された基体１７Ｂと、基体１７Ｂ上面に沿って移動可能に配置された傾斜面を有する移動体１７Ｃと、ヘッドプレート１５に締結部材１７Ｄによって連結され且つ移動体１７Ｃの傾斜面に沿って昇降可能に配置された傾斜面を有する昇降体１７Ｅと、移動体１７Ｃを支持柱１６の上面に沿って移動させる駆動機構１７Ｆと、を備え、駆動機構１７Ｆが制御装置の制御下で駆動して移動体１７Ｃを前後方向へ（図１〜図３では左右方向）に所定の寸法だけ移動させることにより昇降体１７Ｅが移動体１７Ｃの傾斜面を介して所定の寸法だけ昇降するように構成されている。制御装置は、測定機器の測定結果に基づいて駆動機構１７Ｆを制御するようにしてある。 As shown in FIGS. 1 to 3, the elevating mechanism 17 </ b> A includes a base body 17 </ b> B fixed to the upper surface of the support column 16, a moving body 17 </ b> C having an inclined surface movably disposed along the upper surface of the base body 17 </ b> B, Elevating body 17E having an inclined surface connected to plate 15 by fastening member 17D and arranged so as to be movable up and down along the inclined surface of moving body 17C, and a drive mechanism for moving moving body 17C along the upper surface of support column 16 17F, and the drive mechanism 17F is driven under the control of the control device to move the moving body 17C by a predetermined dimension in the front-rear direction (left-right direction in FIGS. 1 to 3), thereby moving the elevating body 17E. It is configured to move up and down by a predetermined dimension via the inclined surface of the body 17C. The control device controls the drive mechanism 17F based on the measurement result of the measuring device.

JP2010145424A 2010-06-25 2010-06-25 Probe card parallel adjustment mechanism and inspection device Active JP5826466B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010145424A JP5826466B2 (en) 2010-06-25 2010-06-25 Probe card parallel adjustment mechanism and inspection device
KR1020110058525A KR101256306B1 (en) 2010-06-25 2011-06-16 Parallelism adjusting mechanism of probe card and inspection apparatus
TW100122209A TWI503549B (en) 2010-06-25 2011-06-24 Parallel adjustment mechanism of probe card and probe inspection device
CN201110179929A CN102298079A (en) 2010-06-25 2011-06-24 Parallel adjusting mechanism and inspecting device of probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010145424A JP5826466B2 (en) 2010-06-25 2010-06-25 Probe card parallel adjustment mechanism and inspection device

Publications (3)

Publication Number Publication Date
JP2012008051A JP2012008051A (en) 2012-01-12
JP2012008051A5 true JP2012008051A5 (en) 2013-06-27
JP5826466B2 JP5826466B2 (en) 2015-12-02

Family

ID=45358635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010145424A Active JP5826466B2 (en) 2010-06-25 2010-06-25 Probe card parallel adjustment mechanism and inspection device

Country Status (4)

Country Link
JP (1) JP5826466B2 (en)
KR (1) KR101256306B1 (en)
CN (1) CN102298079A (en)
TW (1) TWI503549B (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5277827B2 (en) * 2008-09-22 2013-08-28 東京エレクトロン株式会社 Probe device
JP2013175572A (en) * 2012-02-24 2013-09-05 Tokyo Electron Ltd Probe device and parallelism adjustment mechanism of probe card
JP5819880B2 (en) * 2013-05-08 2015-11-24 本田技研工業株式会社 Parallelism adjusting device and parallelism adjusting method
CN104183515A (en) * 2013-05-24 2014-12-03 标准科技股份有限公司 Wafer testing machine stand
KR101607087B1 (en) * 2014-09-24 2016-03-29 주식회사 디이엔티 Probe
JP6890921B2 (en) 2015-10-21 2021-06-18 株式会社日本マイクロニクス Probe card and contact inspection device
KR102446953B1 (en) * 2016-02-24 2022-09-23 세메스 주식회사 Alignment jig and method of aligning test head with probe station using the same
TWI616664B (en) * 2016-03-23 2018-03-01 創意電子股份有限公司 Method, system for utilizing a probe card device, and the probe card device
CN107422241B (en) * 2016-03-23 2019-10-15 创意电子股份有限公司 Method and system for using probe card
TWI610080B (en) * 2016-05-12 2018-01-01 中華精測科技股份有限公司 Probe card assembly
CN106206355B (en) * 2016-08-30 2018-11-27 重庆市妙格半导体研究院有限公司 Semiconductor detection system based on graphene sensing unit
KR102654604B1 (en) * 2016-11-22 2024-04-03 세메스 주식회사 Probe station
CN108387759B (en) * 2018-01-15 2020-10-16 北京时代民芯科技有限公司 Universal 1553B bus circuit anti-fuse adjusting clamp
KR102115179B1 (en) * 2018-11-20 2020-06-08 주식회사 탑 엔지니어링 Probe device and method for calibrating probe

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Publication number Priority date Publication date Assignee Title
JPH03185327A (en) * 1989-12-15 1991-08-13 Sanwa Musen Sokki Kenkyusho:Kk Vaccum measuring apparatus
JP3163221B2 (en) * 1993-08-25 2001-05-08 東京エレクトロン株式会社 Probe device
JPH08320389A (en) * 1995-05-26 1996-12-03 Dainippon Screen Mfg Co Ltd Measuring stage
JP4300003B2 (en) * 2002-08-07 2009-07-22 東京エレクトロン株式会社 Mounting table driving apparatus and probe method
JP2006098296A (en) * 2004-09-30 2006-04-13 Optrex Corp Lighting inspection device of display panel
JP4102884B2 (en) * 2005-05-13 2008-06-18 東京エレクトロン株式会社 Probe card adjustment mechanism and probe device
JP4685559B2 (en) * 2005-09-09 2011-05-18 東京エレクトロン株式会社 Method for adjusting parallelism between probe card and mounting table, inspection program storage medium, and inspection apparatus
JP4860242B2 (en) * 2005-11-11 2012-01-25 東京エレクトロン株式会社 Probe device
JP2007183194A (en) * 2006-01-10 2007-07-19 Micronics Japan Co Ltd Probing apparatus
JP2008294292A (en) * 2007-05-25 2008-12-04 Tokyo Seimitsu Co Ltd Prober, contacting method and program for prober
KR101093646B1 (en) * 2009-05-01 2011-12-15 가부시키가이샤 니혼 마이크로닉스 A testing apparatus for a plate-shaped object

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