JP2011528765A - 真空ポンプ、特にはルーツ式ポンプ - Google Patents
真空ポンプ、特にはルーツ式ポンプ Download PDFInfo
- Publication number
- JP2011528765A JP2011528765A JP2011519097A JP2011519097A JP2011528765A JP 2011528765 A JP2011528765 A JP 2011528765A JP 2011519097 A JP2011519097 A JP 2011519097A JP 2011519097 A JP2011519097 A JP 2011519097A JP 2011528765 A JP2011528765 A JP 2011528765A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pump
- vacuum pump
- spring
- valve body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
- F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/21—Pressure difference
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Check Valves (AREA)
- Reciprocating Pumps (AREA)
- Details Of Reciprocating Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims (14)
- ポンプ室(10)に配置されたポンプ要素(12)と、
前記ポンプ室(10)の圧力側(30)を吸込み側(20)に接続する接続通路(22)と、
該接続通路(22)に配置されて、通路口(32)を閉じるばね荷重式弁体(28)を有しており、前記圧力側(30)と前記吸込み側(20)との最大圧力差を超えたときに開くべく機能する弁(24)と
を備えた真空ポンプ、特には回転ピストン式ポンプにおいて、
前記弁体(28)は、回転可能なバルブフラップ(28)として形成されていることを特徴とする真空ポンプ。 - ポンプハウジング(16)に平行に延びている前記弁体(50)の幅(b) は、前記弁体(50)の高さ(h) より大きいことを特徴とする請求項1に記載の真空ポンプ。
- 前記バルブフラップ(28)の回転軸(34)が、前記ポンプ室(10)から離れている前記接続通路(22)の側に配置されていることを特徴とする請求項1又は2に記載の真空ポンプ。
- 前記バルブフラップ(28)の回転軸(34)は、回転体(12)として形成された前記ポンプ要素の回転軸(14)に平行に延びていることを特徴とする請求項1乃至3のいずれかに記載の真空ポンプ。
- 前記バルブフラップ(28)、又は該バルブフラップ(28)に接続された回転アーム(42,46) が、ばね(40,44) に接続されていることを特徴とする請求項1乃至4のいずれかに記載の真空ポンプ。
- 前記ばねは、好ましくは前記バルブフラップ(28)の回転軸(34)を囲むねじりばね(40)として形成されていることを特徴とする請求項5に記載の真空ポンプ。
- 前記ばねは、前記回転アーム(46)に接続された引張ばね又は圧力ばね(44)として形成されていることを特徴とする請求項5に記載の真空ポンプ。
- ばね力を設定するための設定要素を更に備えていることを特徴とする請求項1乃至7のいずれかに記載の真空ポンプ。
- 前記バルブフラップ(28)の重心が、前記回転軸(34)と略一致していることを特徴とする請求項1乃至8のいずれかに記載の真空ポンプ。
- ポンプ室(10)に配置されたポンプ要素(12)と、
前記ポンプ室(10)の圧力側(30)を吸込み側(20)に接続する接続通路(22)と、
該接続通路(22)に配置されて、通路口(32)を閉じるばね荷重式弁体(50)を有しており、前記圧力側(30)と前記吸込み側(20)との最大圧力差を超えたときに開くべく機能する弁(24)と
を備えた真空ポンプ、特には回転ピストン式ポンプにおいて、
ポンプハウジング(16)に平行に延びている前記弁体(50)の幅(b) は、前記弁体(50)の高さ(h) より大きいことを特徴とする真空ポンプ。 - 前記通路口(32)は、略矩形状であり、好ましくは前記接続通路(22)の略全幅に亘って延びていることを特徴とする請求項1乃至10のいずれかに記載の真空ポンプ。
- 特には引張ばねの形態の少なくとも2つのばね要素(54)が設けられており、該ばね要素(54)は、好ましくは前記弁体(50)の側縁領域に配置されていることを特徴とする請求項10又は11に記載の真空ポンプ。
- 特には案内ピン又は案内トラックの形態の案内要素を更に備えており、該案内要素は、前記弁体(50)又はポンプハウジング(16)に接続されており、好ましくは前記弁体(50)の側縁領域に配置されていることを特徴とする請求項1乃至12のいずれかに記載の真空ポンプ。
- 複数の前記弁(24)は、前記接続通路(22)の幅に亘って配置されていることを特徴とする請求項1乃至13のいずれかに記載の真空ポンプ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008034073.1 | 2008-07-22 | ||
DE200810034073 DE102008034073A1 (de) | 2008-07-22 | 2008-07-22 | Vakuumpumpe, insbesondere Wälzkolbenpumpe |
DE102008047712.5 | 2008-09-18 | ||
DE102008047712 | 2008-09-18 | ||
PCT/EP2009/057192 WO2010009939A1 (de) | 2008-07-22 | 2009-06-10 | Vakuumpumpe, insbesondere wälzkolbenpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011528765A true JP2011528765A (ja) | 2011-11-24 |
JP5771144B2 JP5771144B2 (ja) | 2015-08-26 |
Family
ID=41259841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011519097A Active JP5771144B2 (ja) | 2008-07-22 | 2009-06-10 | 真空ポンプ、特にはルーツ式ポンプ |
Country Status (6)
Country | Link |
---|---|
US (1) | US8740578B2 (ja) |
EP (1) | EP2310684B1 (ja) |
JP (1) | JP5771144B2 (ja) |
KR (1) | KR20110041538A (ja) |
CN (2) | CN103867436B (ja) |
WO (1) | WO2010009939A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190105595A (ko) * | 2017-01-20 | 2019-09-17 | 에드워즈 리미티드 | 다단식 진공 부스터 펌프 결합부 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103104499A (zh) * | 2012-11-15 | 2013-05-15 | 福建雪人压缩机科技有限公司 | 一种带有止回阀的制冷螺杆压缩机吸气端座 |
US9464563B2 (en) * | 2012-12-05 | 2016-10-11 | Ford Global Technologies, Llc | Turbocharger wastegate and method for operation of a turbocharger wastegate |
KR101413694B1 (ko) * | 2012-12-28 | 2014-07-01 | 계명대학교 산학협력단 | 판 스프링을 구비한 마이크로 기어펌프 |
KR20160072962A (ko) * | 2014-12-16 | 2016-06-24 | 주식회사 우성진공 | 개선된 구조의 루츠펌프 |
CN108317079A (zh) * | 2018-03-30 | 2018-07-24 | 川田机械制造(上海)有限公司 | 一种罗茨风机 |
GB2606224B (en) * | 2021-04-30 | 2024-01-31 | Edwards Ltd | Stator for a vacuum pump |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS5221410U (ja) * | 1975-08-04 | 1977-02-15 | ||
US4470767A (en) * | 1978-10-09 | 1984-09-11 | Leybold-Heraeus Gmbh | Vacuum pump with overload protection valve |
JPS6078987U (ja) * | 1983-11-07 | 1985-06-01 | ダイキン工業株式会社 | 圧縮機用逆止弁 |
JPH0272876U (ja) * | 1988-11-22 | 1990-06-04 |
Family Cites Families (16)
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GB190911193A (en) * | 1909-05-12 | 1910-05-12 | Victor Emil Mertz | Improvements in and connected with Flap Valves for Pumps, Compressors, Blowers and the like. |
FR430357A (fr) * | 1911-05-31 | 1911-10-14 | Eugene Vaultier | Dispositif applicable aux clapets de retenue de vapeur pour permettre la fermeture de l'obturateur sous deux pressions différentes |
US2268806A (en) * | 1939-07-13 | 1942-01-06 | Curtis Pump Co | By-pass valve for aircraft fuel pumps |
US2925786A (en) * | 1956-11-23 | 1960-02-23 | Procon Pump & Engineering Co | Pump |
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US3395727A (en) * | 1965-03-01 | 1968-08-06 | Anderson Greenwood & Co | Check valve |
FR2273990A1 (fr) * | 1974-06-07 | 1976-01-02 | Gerdts Gustav F Kg | Soupape a clapet |
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-
2009
- 2009-06-10 EP EP09779711.2A patent/EP2310684B1/de active Active
- 2009-06-10 JP JP2011519097A patent/JP5771144B2/ja active Active
- 2009-06-10 CN CN201410077978.8A patent/CN103867436B/zh active Active
- 2009-06-10 CN CN200980128458.2A patent/CN102099582B/zh active Active
- 2009-06-10 KR KR1020117003983A patent/KR20110041538A/ko not_active Application Discontinuation
- 2009-06-10 US US13/055,224 patent/US8740578B2/en active Active
- 2009-06-10 WO PCT/EP2009/057192 patent/WO2010009939A1/de active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5221410U (ja) * | 1975-08-04 | 1977-02-15 | ||
US4470767A (en) * | 1978-10-09 | 1984-09-11 | Leybold-Heraeus Gmbh | Vacuum pump with overload protection valve |
JPS6078987U (ja) * | 1983-11-07 | 1985-06-01 | ダイキン工業株式会社 | 圧縮機用逆止弁 |
JPH0272876U (ja) * | 1988-11-22 | 1990-06-04 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190105595A (ko) * | 2017-01-20 | 2019-09-17 | 에드워즈 리미티드 | 다단식 진공 부스터 펌프 결합부 |
JP2020505547A (ja) * | 2017-01-20 | 2020-02-20 | エドワーズ リミテッド | 多段真空ブースタポンプのカップリング |
US11578722B2 (en) | 2017-01-20 | 2023-02-14 | Edwards Limited | Multi-stage vacuum booster pump coupling |
KR102528897B1 (ko) * | 2017-01-20 | 2023-05-03 | 에드워즈 리미티드 | 다단식 진공 부스터 펌프 결합부 |
Also Published As
Publication number | Publication date |
---|---|
EP2310684A1 (de) | 2011-04-20 |
CN102099582B (zh) | 2014-05-28 |
JP5771144B2 (ja) | 2015-08-26 |
CN102099582A (zh) | 2011-06-15 |
US8740578B2 (en) | 2014-06-03 |
US20110129374A1 (en) | 2011-06-02 |
KR20110041538A (ko) | 2011-04-21 |
WO2010009939A1 (de) | 2010-01-28 |
CN103867436A (zh) | 2014-06-18 |
EP2310684B1 (de) | 2018-11-07 |
CN103867436B (zh) | 2016-03-02 |
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