JP2011258544A5 - - Google Patents

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Publication number
JP2011258544A5
JP2011258544A5 JP2011058673A JP2011058673A JP2011258544A5 JP 2011258544 A5 JP2011258544 A5 JP 2011258544A5 JP 2011058673 A JP2011058673 A JP 2011058673A JP 2011058673 A JP2011058673 A JP 2011058673A JP 2011258544 A5 JP2011258544 A5 JP 2011258544A5
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JP
Japan
Prior art keywords
fitting
heating element
support
fitted
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011058673A
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English (en)
Japanese (ja)
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JP5787563B2 (ja
JP2011258544A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2011058673A external-priority patent/JP5787563B2/ja
Priority to JP2011058673A priority Critical patent/JP5787563B2/ja
Priority to US13/101,625 priority patent/US9779970B2/en
Priority to KR1020110043653A priority patent/KR101273843B1/ko
Priority to TW103114186A priority patent/TWI555959B/zh
Priority to TW100116455A priority patent/TWI439655B/zh
Publication of JP2011258544A publication Critical patent/JP2011258544A/ja
Priority to KR1020120117401A priority patent/KR101319197B1/ko
Priority to KR1020130044188A priority patent/KR101353231B1/ko
Publication of JP2011258544A5 publication Critical patent/JP2011258544A5/ja
Publication of JP5787563B2 publication Critical patent/JP5787563B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011058673A 2010-05-11 2011-03-17 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース Active JP5787563B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2011058673A JP5787563B2 (ja) 2010-05-11 2011-03-17 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース
US13/101,625 US9779970B2 (en) 2010-05-11 2011-05-05 Heater supporting device
KR1020110043653A KR101273843B1 (ko) 2010-05-11 2011-05-09 히터 지지 장치
TW100116455A TWI439655B (zh) 2010-05-11 2011-05-11 加熱器支撐裝置
TW103114186A TWI555959B (zh) 2010-05-11 2011-05-11 加熱器支撐裝置、加熱器、半導體製造設備、半導體製造方法及支撐構件
KR1020120117401A KR101319197B1 (ko) 2010-05-11 2012-10-22 히터 지지 장치
KR1020130044188A KR101353231B1 (ko) 2010-05-11 2013-04-22 히터 지지 장치

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010108968 2010-05-11
JP2010108968 2010-05-11
JP2011058673A JP5787563B2 (ja) 2010-05-11 2011-03-17 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース

Publications (3)

Publication Number Publication Date
JP2011258544A JP2011258544A (ja) 2011-12-22
JP2011258544A5 true JP2011258544A5 (enExample) 2014-04-17
JP5787563B2 JP5787563B2 (ja) 2015-09-30

Family

ID=44912091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011058673A Active JP5787563B2 (ja) 2010-05-11 2011-03-17 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース

Country Status (4)

Country Link
US (1) US9779970B2 (enExample)
JP (1) JP5787563B2 (enExample)
KR (3) KR101273843B1 (enExample)
TW (2) TWI555959B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014186833A (ja) * 2013-03-22 2014-10-02 Tokyo Electron Ltd ヒータ装置及び熱処理装置
CN104253064A (zh) * 2013-06-28 2014-12-31 上海华虹宏力半导体制造有限公司 一种半导体熔炉加热器固定装置
KR101466816B1 (ko) * 2013-09-23 2014-12-10 국제엘렉트릭코리아 주식회사 히터 부재 및 그것을 갖는 기판 처리 장치
TWI646297B (zh) * 2018-01-24 2019-01-01 鴻成國際科技股份有限公司 加熱器支撐裝置
CN110087354B (zh) * 2018-01-26 2022-05-03 鸿成国际科技股份有限公司 一种加热器支撑装置
CN110081712B (zh) * 2019-05-14 2024-04-30 广东世创金属科技股份有限公司 一种搁丝砖及低热损、高热效电热结构
CN112333855B (zh) * 2019-08-05 2023-02-28 信和发瑞斯股份有限公司 线圈型加热结构
CN112461005A (zh) * 2019-09-09 2021-03-09 信源陶磁股份有限公司 热处理设备载具防破裂的结构及其方法
KR20240072549A (ko) * 2022-11-17 2024-05-24 주식회사 불카누스 배기라인용 히팅 파이프
CN120313356A (zh) * 2024-01-12 2025-07-15 北京北方华创微电子装备有限公司 炉体结构和半导体工艺设备
CN118299324A (zh) * 2024-03-15 2024-07-05 北京北方华创微电子装备有限公司 支撑装置、加热器和半导体工艺设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3846619A (en) * 1973-11-12 1974-11-05 Emerson Electric Co Open coil electric heater
JPH0110921Y2 (enExample) * 1984-11-05 1989-03-29
JPS6410921U (enExample) 1987-07-08 1989-01-20
JPH079036Y2 (ja) * 1990-11-13 1995-03-06 東京エレクトロン東北株式会社 縦型熱処理炉
US5578232A (en) * 1995-05-04 1996-11-26 Hart & Cooley, Inc. Open-coil heater assembly and insulator therefor
JP3848442B2 (ja) * 1997-08-20 2006-11-22 株式会社日立国際電気 ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法
US6596974B2 (en) * 2000-09-21 2003-07-22 Tutco, Inc. Support apparatus for resistive coils and insulators in electric heaters
US20070169701A1 (en) 2006-01-21 2007-07-26 Integrated Materials, Inc. Tubular or Other Member Formed of Staves Bonded at Keyway Interlocks
JP4145328B2 (ja) * 2006-04-05 2008-09-03 株式会社日立国際電気 ヒータ支持装置及び加熱装置及び半導体製造装置及び半導体装置の製造方法
KR20060133505A (ko) * 2006-11-17 2006-12-26 에이스하이텍 주식회사 열처리 장치의 히터 어셈블리
JP5096182B2 (ja) * 2008-01-31 2012-12-12 東京エレクトロン株式会社 熱処理炉

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