JP2011258320A5

JP2011258320A5 -

Info

Publication number: JP2011258320A5
Application number: JP2010129508A
Authority: JP
Filing date: 2010-06-07
Publication date: 2013-07-11
Anticipated expiration: 2030-06-07

Description

この発明は、以上のような問題を解決するためになされたものであり、アークによる金属スパッタなどによるベローズの汚損を防止してベローズの真空劣化を抑制した信頼性の高い真空バルブを得ることを目的とする。 The present invention has been made to solve the above-described problems. It is an object of the present invention to obtain a highly reliable vacuum valve that prevents the bellows from being damaged by metal sputtering caused by an arc and suppresses the vacuum deterioration of the bellows. Objective.

この発明に係る真空バルブは、
ベローズシールド部によって、ベローズシールド部によってベローズの外周を取り囲みアークによる金属スパッタなどによるベローズの汚損を防止できるようにしたため、ベローズの真空劣化に対する信頼性を向上できる真空バルブを得ることができる。 The vacuum valve according to the present invention is
The bellows shield part surrounds the outer periphery of the bellows by the bellows shield part so that the bellows can be prevented from being polluted by metal sputtering due to an arc. Therefore, a vacuum valve capable of improving the reliability of the bellows against vacuum deterioration can be obtained.

Claims

A cylindrical insulating container;
A fixed-side end plate joined to one end of the insulating container to seal the inside of the insulating container in a vacuum, and a fixed-side electrode rod extending toward the axial center of the insulating container;
A movable side end plate joined to the other end of the insulating container coaxially with the insulating container;
A movable-side electrode rod extending through the hole formed in the movable-side end plate so as to be able to advance and retreat and extending toward the center in the axial direction of the insulating container;
A fixed-side electrode attached to an end surface of the fixed-side electrode rod facing the movable-side electrode rod;
A movable side electrode attached to an end face of the movable side electrode rod facing the fixed side electrode rod;
Supported by the inner peripheral surface of the insulating container, an arc shield provided so as to surround the movable side electrode and the fixed side electrode;
One end is fixed to the edge of the hole formed in the movable side end plate, the movable side electrode rod is surrounded and expanded and contracted toward the center in the axial direction of the insulating container, and the other end is joined to the periphery of the movable side electrode rod. In a vacuum valve equipped with a bellows that ensures airtightness inside and outside the insulating container,
A vacuum valve in which the entire outer peripheral surface of the bellows is surrounded by a bellows shield portion fixed to the movable side end plate when the fixed side electrode and the movable side electrode are closed .

The vacuum valve according to claim 1, wherein the insulating container has metallized layers on both end faces, and the bellows shield part is at the same potential as the movable side end plate.

The vacuum valve according to claim 1, wherein the bellows shield part has a cylindrical shape.

The bellows shield part includes a cylindrical side shield part,
The center side end of the insulating container of the side shield part is formed by bending inward in the radial direction of the insulating container, and is configured by an annular end face shield part through which the movable electrode rod penetrates in a movable manner. Item 4. The vacuum valve according to Item 3.

When the inner diameter of the arc shield end portion is R, the inner diameter of the hole of the end face shield portion is φ, and the outer diameter of the movable electrode rod facing the inner peripheral surface of the hole of the end face shield portion is r <φ The vacuum valve according to claim 4, wherein <R and φ ≧ r + 2 mm is established.

The movable side end plate is
An end plate side surface joined so as to protrude in the axial direction of the insulating container to the end of the insulating container;
An end plate end surface portion formed by bending the end plate side surface portion at a substantially right angle inward in the radial direction of the insulating container, and the end plate end surface portion further bent at a substantially right angle toward the fixed side electrode rod. A flange-shaped member formed integrally with the bellows shield part to be formed; and
6. The device according to claim 1, further comprising an annular airtight holding plate connected to the end plate end surface portion and an end portion of the bellows far from the movable electrode to ensure airtightness of the insulating container. The vacuum valve according to item.

The vacuum valve according to any one of claims 1 to 6, wherein the bellows shield part is a step, and the step has a step in which the inner diameter on the movable electrode side becomes smaller across the step.

The vacuum valve according to any one of claims 1 to 7, wherein the bellows shield portion has a tapered shape portion, and has a tapered shape portion in which the inner diameter of the movable side electrode gradually decreases.