JP6846878B2 - Vacuum valve - Google Patents

Vacuum valve Download PDF

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JP6846878B2
JP6846878B2 JP2016110699A JP2016110699A JP6846878B2 JP 6846878 B2 JP6846878 B2 JP 6846878B2 JP 2016110699 A JP2016110699 A JP 2016110699A JP 2016110699 A JP2016110699 A JP 2016110699A JP 6846878 B2 JP6846878 B2 JP 6846878B2
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side electrode
fixed
engaging portion
vacuum valve
movable
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JP2017216198A5 (en
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高井 雄一
雄一 高井
越智 聡
聡 越智
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Mitsubishi Electric Corp
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Description

この発明は、例えば真空遮断器などに搭載される真空バルブに関するものである。 The present invention relates to a vacuum valve mounted on, for example, a vacuum circuit breaker.

一般的な真空バルブの構造について説明する。絶縁容器の両端にそれぞれ固定側端板及び可動側端板が接合されており、内部が密閉された真空容器を形成している。この真空容器内に互いに対向する固定側電極及び接離可能な可動側電極が配置されており、固定側電極には固定側電極棒が、可動側電極には可動側電極棒がそれぞれ取り付けられ、固定側電極棒は固定側端板に接合される。 The structure of a general vacuum valve will be described. A fixed side end plate and a movable side end plate are joined to both ends of the insulated container, respectively, to form a vacuum container in which the inside is sealed. Fixed side electrodes facing each other and movable side electrodes that can be brought into contact with each other are arranged in this vacuum vessel. A fixed side electrode rod is attached to the fixed side electrode, and a movable side electrode rod is attached to the movable side electrode. The fixed side electrode rod is joined to the fixed side end plate.

ステンレス等の薄い金属で蛇腹状に形成されたベローズの端部が可動側端板に接合され、もう一方のベローズ端部は可動側電極棒と接合されており気密を保って開閉を可能にする。 The end of the bellows formed in a bellows shape with a thin metal such as stainless steel is joined to the movable side end plate, and the other bellows end is joined to the movable side electrode rod to maintain airtightness and enable opening and closing. ..

可動側端板には可動側電極棒の軸方向の動作を案内するガイドを固定するためのガイド取付板が接合され、ガイドはネジ止めによってガイド取付板に固定されている。ガイド内径及び可動側電極棒のガイドとの摺動部は六角形等の多角形形状となっており、可動側電極棒の傾き及び回転を抑制することで、ベローズが捻じれた状態で伸縮されるのを防ぎベローズの機械寿命性能を確保する。 A guide mounting plate for fixing a guide for guiding the axial movement of the movable side electrode rod is joined to the movable side end plate, and the guide is fixed to the guide mounting plate by screwing. The inner diameter of the guide and the sliding part of the movable side electrode rod with the guide have a polygonal shape such as a hexagon, and by suppressing the inclination and rotation of the movable side electrode rod, the bellows is expanded and contracted in a twisted state. Prevents the bellows from coming out and secures the machine life performance of the bellows.

特開平5−101754号公報Japanese Unexamined Patent Publication No. 5-101754 特開2015−210850号公報JP-A-2015-210850

上述した従来の真空バルブは、真空バルブの接触抵抗の低減及び安定した遮断性能を確保するために、真空バルブの固定側電極と可動側電極の位置ずれを抑制する必要がある。
固定側電極と可動側電極の位置ずれが発生した真空バルブでは、接触抵抗の増大及び固定側電極と可動側電極間の電界値上昇による遮断性能の低下が起こる。固定側電極と可動側電極の位置ずれを抑制するために、一般に真空バルブの可動側端板に接合されたガイド取付板に合成樹脂で成形されたガイドを固定し、上記ガイドの孔内を可動側電極棒が摺動することで可動側電極棒の傾きを抑制する構造となっている。
In the conventional vacuum valve described above, in order to reduce the contact resistance of the vacuum valve and ensure stable breaking performance, it is necessary to suppress the misalignment between the fixed side electrode and the movable side electrode of the vacuum valve.
In a vacuum valve in which the positions of the fixed side electrode and the movable side electrode are displaced, the contact resistance is increased and the breaking performance is lowered due to the increase in the electric field value between the fixed side electrode and the movable side electrode. In order to suppress the misalignment between the fixed side electrode and the movable side electrode, a guide molded of synthetic resin is generally fixed to a guide mounting plate joined to the movable side end plate of the vacuum valve, and the inside of the hole of the guide is movable. The structure is such that the tilt of the movable side electrode rod is suppressed by sliding the side electrode rod.

しかし、ガイドから可動側電極までの距離が長いため、僅かな可動側電極棒の傾きでも可動側電極の軸心ずれは大きくなり、固定側電極と可動側電極の位置ずれを抑制できない問題がある。 However, since the distance from the guide to the movable electrode is long, even a slight tilt of the movable electrode rod causes a large misalignment of the movable electrode, and there is a problem that the misalignment between the fixed electrode and the movable electrode cannot be suppressed. ..

また、ガイドを固定するためには、ガイド取付板を可動側端板に接合する必要があり、ガイドはそのガイド取付板にネジ止めなどで固定するため、部品点数及び作業工程が増大する問題がある。 Further, in order to fix the guide, it is necessary to join the guide mounting plate to the movable side end plate, and since the guide is fixed to the guide mounting plate by screwing or the like, there is a problem that the number of parts and the work process increase. is there.

この発明は、上記のような課題を解決するためになされたものであり、その目的は、固定側電極と可動側電極の位置ずれを抑制でき、簡易な構成の真空バルブを提供するものである。 The present invention has been made to solve the above problems, and an object of the present invention is to provide a vacuum valve having a simple structure capable of suppressing a displacement between a fixed side electrode and a movable side electrode. ..

この発明に係わる真空バルブは、両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記絶縁容器の内面の1箇所又は複数箇所に設けたられた第1係合部と、前記ベローズの前記可動側電極側の端部に設けられたベローズカバーと、前記ベローズカバーと前記可動側電極との間に配置されて前記可動側電極棒に前記絶縁容器の内面を摺動可能に取り付けられ、前記第1係合部と係合する第2係合部を有するガイド板とを備えたものである。 The vacuum valve according to the present invention has an insulating container whose inside is closed by a fixed side end plate and a movable side end plate joined to both ends, respectively, and a fixed side electrode fixed to the fixed side end plate at the end. A fixed-side electrode rod provided, a movable-side electrode rod arranged coaxially with the fixed-side electrode rod, and a movable-side electrode provided at an end capable of contacting and detaching from the fixed-side electrode, and the movable-side electrode. A vacuum valve including a bellows airtightly joined between a rod and the movable end plate, the first engaging portion provided at one or a plurality of places on the inner surface of the insulating container, and the bellows. The bellows cover provided at the end on the movable side electrode side is arranged between the bellows cover and the movable side electrode, and the inner surface of the insulating container is slidably attached to the movable side electrode rod. It is provided with a guide plate having a second engaging portion that engages with the first engaging portion.

また、この発明に係わる真空バルブは、両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記絶縁容器の内面に配置されたシールドと、前記シールドの1箇所又は複数箇所に設けたられた第4係合部と、前記ベローズの前記可動側電極側の端部に設けられたベローズカバーと、前記ベローズカバーと前記可動側電極との間に配置されて前記可動側電極棒に前記シールドの内面を摺動可能に取り付けられ、前記第4係合部と係合する第5係合部を有するガイド板とを備えたものである。 Further, the vacuum valve according to the present invention has an insulating container whose inside is closed by a fixed side end plate and a movable side end plate joined to both ends, respectively, and a fixed side fixed to the fixed side end plate. A fixed-side electrode rod provided with an electrode, a movable-side electrode rod arranged coaxially with the fixed-side electrode rod, and a movable-side electrode provided at an end capable of contacting and detaching from the fixed-side electrode, and the movable side electrode rod. A vacuum valve provided with a bellows airtightly joined between a side electrode rod and the movable side end plate, the shield arranged on the inner surface of the insulating container, and one or a plurality of shields provided. The fourth engaging portion, the bellows cover provided at the end of the bellows on the movable side electrode side, and the shield provided on the movable side electrode rod are arranged between the bellows cover and the movable side electrode. A guide plate having a fifth engaging portion that is slidably attached to the inner surface of the fourth engaging portion and engages with the fourth engaging portion is provided.

また、この発明に係わる真空バルブは、両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記固定側電極と前記可動側電極は風車形電極で構成され、前記固定側電極の裏面に設けられた固定側アーク拡散防止板と、前記可動側電極の裏面に設けられた可動側アーク拡散防止板と、前記絶縁容器の内面の1箇所又は複数箇所に設けたられた第1係合部と、前記ベローズの前記可動側電極側の端部に設けられたベローズカバーと、前記可動側アーク拡散防止板のガイド板の機能を持たせた外周に設けられ、前記絶縁容器の内面を摺動可能に構成され、前記第1係合部と係合する第7係合部とを備えたものである。 Further, the vacuum valve according to the present invention has an insulating container whose inside is closed by a fixed side end plate and a movable side end plate joined to both ends, respectively, and a fixed side fixed to the fixed side end plate. A fixed-side electrode rod provided with an electrode, a movable-side electrode rod arranged coaxially with the fixed-side electrode rod, and a movable-side electrode provided at an end capable of contacting and detaching from the fixed-side electrode, and the movable side electrode rod. A vacuum valve provided with a bellows airtightly bonded between a side electrode rod and the movable end plate. The fixed side electrode and the movable side electrode are composed of a windmill-shaped electrode, and are formed on the back surface of the fixed side electrode. A fixed-side arc diffusion prevention plate provided, a movable-side arc diffusion prevention plate provided on the back surface of the movable-side electrode, and a first engaging portion provided at one or a plurality of locations on the inner surface of the insulating container. The bellows cover provided at the end of the bellows on the movable side electrode side and the bellows cover provided on the outer periphery having the function of the guide plate of the movable side arc diffusion prevention plate slide on the inner surface of the insulating container. It is configured to be possible and includes a seventh engaging portion that engages with the first engaging portion.

また、この発明に係わる真空バルブは、両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記絶縁容器の内面の1箇所又は複数箇所に設けたられた第1係合部と、前記ベローズの前記可動側電極側の端部に前記絶縁容器の内面を摺動可能に設けられ、前記可動側電極棒の傾きを抑制できる厚さで構成され、前記第1係合部と係合する第8係合部を有するベローズカバーとを備えたものである。 Further, the vacuum valve according to the present invention has an insulating container whose inside is closed by a fixed side end plate and a movable side end plate joined to both ends, respectively, and a fixed side fixed to the fixed side end plate. A fixed-side electrode rod provided with an electrode, a movable-side electrode rod arranged coaxially with the fixed-side electrode rod, and a movable-side electrode provided at an end capable of contacting and detaching from the fixed-side electrode, and the movable side electrode rod. A vacuum valve provided with a bellows airtightly bonded between a side electrode rod and the movable side end plate, the first engaging portion provided at one or a plurality of locations on the inner surface of the insulating container, and the said. The inner surface of the insulating container is slidably provided at the end of the bellows on the movable side electrode side, has a thickness capable of suppressing the inclination of the movable side electrode rod, and engages with the first engaging portion. It is provided with a bellows cover having an eighth engaging portion.

この発明に係わる真空バルブによれば、ガイド板及びベローズカバーによって可動側電極から近い箇所で可動側電極棒を摺動可能に支持することができるので、可動側電極の位置ずれを抑制することができ、簡易な構成の真空バルブを得ることができる。 According to the vacuum valve according to the present invention, the movable side electrode rod can be slidably supported at a position close to the movable side electrode by the guide plate and the bellows cover, so that the displacement of the movable side electrode can be suppressed. It is possible to obtain a vacuum valve having a simple structure.

この発明の実施の形態1に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve which concerns on Embodiment 1 of this invention. この発明の実施の形態1に係わる真空バルブを示す図1のII−II線における断面図である。FIG. 5 is a cross-sectional view taken along the line II-II of FIG. 1 showing a vacuum valve according to a first embodiment of the present invention. この発明の実施の形態2に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve which concerns on Embodiment 2 of this invention. この発明の実施の形態2に係わる真空バルブを示す図3のIV−IV線における断面図である。It is sectional drawing in the IV-IV line of FIG. 3 which shows the vacuum valve which concerns on Embodiment 2 of this invention. この発明の実施の形態3に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve which concerns on Embodiment 3 of this invention. この発明の実施の形態3に係わる真空バルブを示す図5のVI−VI線における断面図である。FIG. 5 is a cross-sectional view taken along the line VI-VI of FIG. 5 showing a vacuum valve according to a third embodiment of the present invention. この発明の実施の形態4に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve which concerns on Embodiment 4 of this invention. この発明の実施の形態4に係わる真空バルブを示す図7のVIII−VIII線における断面図である。FIG. 5 is a cross-sectional view taken along the line VIII-VIII of FIG. 7 showing a vacuum valve according to a fourth embodiment of the present invention. この発明の実施の形態5に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve which concerns on Embodiment 5 of this invention. この発明の実施の形態5に係わる真空バルブを示す図9のX−X線における断面図である。It is sectional drawing in X-ray of FIG. 9 which shows the vacuum valve which concerns on Embodiment 5 of this invention.

実施の形態1.
以下、この発明の実施の形態1を図1および図2に基づいて説明するが、各図において、同一、または相当部材、部位については同一符号を付して説明する。図1はこの発明の実施の形態1に係わる真空バルブを示す断面図である。図2はこの発明の実施の形態1に係わる真空バルブを示す図1のII−II線における断面図である。
Embodiment 1.
Hereinafter, Embodiment 1 of the present invention will be described with reference to FIGS. 1 and 2, but in each of the drawings, the same or corresponding members and parts will be described with the same reference numerals. FIG. 1 is a cross-sectional view showing a vacuum valve according to a first embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1 showing a vacuum valve according to the first embodiment of the present invention.

図1および図2において、1は内面の一箇所又は複数箇所に凸部1aを設けたアルミナセラミック等から構成される円筒状の絶縁容器である。2は固定側端板、3は可動側端板であり、固定側端板2及び可動側端板3は、それぞれ絶縁容器1の両端の同軸上に接合されている。 In FIGS. 1 and 2, reference numeral 1 denotes a cylindrical insulating container made of alumina ceramic or the like having convex portions 1a provided at one or a plurality of locations on the inner surface. Reference numeral 2 is a fixed side end plate, 3 is a movable end plate, and the fixed side end plate 2 and the movable end plate 3 are joined coaxially at both ends of the insulating container 1, respectively.

固定側端板2には固定側電極棒4が、可動側端板3にはベローズ6を介して可動側電極棒5が接合され、固定側電極棒4と可動側電極棒5とは同軸上に配置されている。7は絶縁容器1内の固定側電極棒4端部に接合された固定側電極、8は絶縁容器1内の可動側電極棒5端部に接合された可動側電極で、固定側電極7と可動側電極8とは互いに対向して配置され、可動側電極8は固定側電極7に接離可能となっている。 The fixed side electrode rod 4 is joined to the fixed side end plate 2, and the movable side electrode rod 5 is joined to the movable side end plate 3 via the bellows 6, and the fixed side electrode rod 4 and the movable side electrode rod 5 are coaxially on the same axis. It is located in. Reference numeral 7 denotes a fixed side electrode bonded to the 4 ends of the fixed side electrode rods in the insulating container 1, and 8 is a movable side electrode bonded to the 5 ends of the movable side electrode rods in the insulated container 1. The movable side electrodes 8 are arranged so as to face each other, and the movable side electrodes 8 can be brought into contact with and separated from the fixed side electrodes 7.

ベローズ6の可動側電極8側の端部には、ベローズカバー9が可動側電極棒5に接合されている。ベローズカバー9は電流遮断時に固定側電極7及び可動側電極8から発生する金属蒸気によってベローズ6の表面が汚損されることを防いでいる。 A bellows cover 9 is joined to the movable side electrode rod 5 at the end of the bellows 6 on the movable side electrode 8 side. The bellows cover 9 prevents the surface of the bellows 6 from being contaminated by the metal vapor generated from the fixed side electrode 7 and the movable side electrode 8 when the current is cut off.

ベローズカバー9と可動側電極8の間にガイド板10が可動側電極棒5に接合され、ベローズカバー9及びガイド板10の外周と絶縁容器1の内面の間には摺動のための隙間が設けられている。 The guide plate 10 is joined to the movable side electrode rod 5 between the bellows cover 9 and the movable side electrode 8, and there is a gap for sliding between the outer circumference of the bellows cover 9 and the guide plate 10 and the inner surface of the insulating container 1. It is provided.

ベローズカバー9及びガイド板10の外周面が絶縁容器1の内面と摺動することにより可動側電極棒5の傾きを抑制し、絶縁容器1に設けられた例えば凸部からなる第1係合部1aと、ベローズカバー9及びガイド板10にそれぞれ設けられた例えば凹部からなる第3係合部9a、第2係合部10aの係合により可動側電極棒5が円周方向に捻じれるのを防止する。 The outer peripheral surfaces of the bellows cover 9 and the guide plate 10 slide with the inner surface of the insulating container 1 to suppress the inclination of the movable side electrode rod 5, and the first engaging portion formed of, for example, a convex portion provided on the insulating container 1. The movable side electrode rod 5 is twisted in the circumferential direction due to the engagement of 1a and the third engaging portion 9a and the second engaging portion 10a, which are provided on the bellows cover 9 and the guide plate 10, respectively. To prevent.

この実施の形態1における真空バルブにおいて、固定側電極7と可動側電極8が接離することにより、電流の遮断及び投入を行う。ガイド機能を備えたベローズカバー9及びガ
イド板10は固定側電極7と可動側電極8の軸心を合わせており、大電流通電時に可動側電極棒5に発生する電磁力に耐えることができ、可動側電極棒5を滑らかに摺動させるという機能がある。
In the vacuum valve according to the first embodiment, the fixed side electrode 7 and the movable side electrode 8 are brought into contact with each other to cut off and input the current. The bellows cover 9 and the guide plate 10 having the guide function align the axes of the fixed side electrode 7 and the movable side electrode 8, and can withstand the electromagnetic force generated in the movable side electrode rod 5 when a large current is applied. It has a function of smoothly sliding the movable side electrode rod 5.

上記機能を満足させるため、可動側電極8の接離時には、絶縁容器1の内面とベローズカバー9及びガイド板10の外周が摺動することにより可動側電極8の位置ずれを防いでいる。絶縁容器1の内面に設けられた凸部からなる第1係合部1aにベローズカバー9及びガイド板10にそれぞれ設けられた凹部からなる第3係合部9a、第2係合部10aが係合することにより、可動側電極棒5が円周方向に捻じれるのを防止している。尚、ベローズカバー9及びガイド板10は絶縁体で構成され、絶縁容器1と滑らかに摺動する構造としている。 In order to satisfy the above functions, the movable side electrode 8 is prevented from being displaced by sliding the inner surface of the insulating container 1 and the outer circumferences of the bellows cover 9 and the guide plate 10 when the movable side electrode 8 is brought into contact with each other. The bellows cover 9 and the third engaging portion 9a and the second engaging portion 10a formed of the concave portions provided on the guide plate 10 are engaged with the first engaging portion 1a formed of the convex portion provided on the inner surface of the insulating container 1. By fitting, the movable side electrode rod 5 is prevented from being twisted in the circumferential direction. The bellows cover 9 and the guide plate 10 are made of an insulator and have a structure that smoothly slides with the insulating container 1.

以上のように、この実施の形態1によれば、可動側電極棒5を案内する機能を備えたベローズカバー9及びガイド板10と絶縁容器1により、可動側電極8に近い場所で可動側電極棒5を摺動可能に支持することができるので、固定側電極7と可動側電極8の軸心を正確に合わすことができる。固定側電極7と可動側電極8の位置ずれを抑制することにより接触抵抗の低減及び安定した遮断性能を確保することができる。 As described above, according to the first embodiment, the movable side electrode is located near the movable side electrode 8 by the bellows cover 9, the guide plate 10, and the insulating container 1 having a function of guiding the movable side electrode rod 5. Since the rod 5 can be slidably supported, the axes of the fixed side electrode 7 and the movable side electrode 8 can be accurately aligned. By suppressing the misalignment between the fixed side electrode 7 and the movable side electrode 8, it is possible to reduce the contact resistance and secure stable blocking performance.

また、上述した従来の真空バルブのように、可動側端板3に接合されるガイド取付板及びガイド取付板にネジ止め等で取り付けられるガイドが不要となるため、簡易な構成で部品点数及び部品組立工程を削減することができ、安価に真空バルブを製作することができる。 Further, unlike the conventional vacuum valve described above, the guide mounting plate to be joined to the movable side end plate 3 and the guide to be attached to the guide mounting plate by screwing or the like are not required. The assembly process can be reduced, and the vacuum valve can be manufactured at low cost.

さらに、可動側電極棒5の断面を円形にすることができ、同外径の多角断面の可動側電極棒と比較すると断面積が広く、通電容量の増大が可能となる。また、ベローズカバー9及びガイド板10が金属製の場合、絶縁容器1の内面と摺動する外周部のみ絶縁体で構成することで同様の効果を得ることができる。 Further, the cross section of the movable side electrode rod 5 can be made circular, and the cross-sectional area is wider than that of the movable side electrode rod having a polygonal cross section having the same outer diameter, and the energization capacity can be increased. Further, when the bellows cover 9 and the guide plate 10 are made of metal, the same effect can be obtained by forming only the outer peripheral portion sliding with the inner surface of the insulating container 1 with an insulator.

実施の形態2.
この発明の実施の形態2を図3および図4に基づいて説明するが、各図において、同一、または相当部材、部位については同一符号を付して説明する。図3はこの発明の実施の形態2に係わる真空バルブを示す断面図である。図4はこの発明の実施の形態2に係わる真空バルブを示す図3のIV−IV線における断面図である。
Embodiment 2.
Embodiment 2 of the present invention will be described with reference to FIGS. 3 and 4, but in each of the drawings, the same or corresponding members and parts will be described with the same reference numerals. FIG. 3 is a cross-sectional view showing a vacuum valve according to a second embodiment of the present invention. FIG. 4 is a cross-sectional view taken along the line IV-IV of FIG. 3 showing a vacuum valve according to a second embodiment of the present invention.

この実施の形態2における真空バルブにおいて、絶縁容器1の内面は例えば六角形状などの多角形状面からなる第1係合部1bとし、ベローズカバー11及びガイド板12の外周は絶縁容器1の内面の多角形状面からなる第1係合部1bと合わせて例えば六角形状などの多角形状体からなる第3係合部11a、第2係合部12aとしている。 In the vacuum valve according to the second embodiment, the inner surface of the insulating container 1 is a first engaging portion 1b made of a polygonal surface such as a hexagon, and the outer periphery of the bellows cover 11 and the guide plate 12 is the inner surface of the insulating container 1. Together with the first engaging portion 1b made of a polygonal surface, the third engaging portion 11a and the second engaging portion 12a made of a polygonal body such as a hexagon are formed.

この実施の形態2における真空バルブにおいて、絶縁容器1の内面を例えば六角形状などの多角形状面からなる第1係合部1bとし、ベローズカバー11及びガイド板12の外周を例えば六角形状などの多角形状体からなる第3係合部11a、第2係合部12aとすることによって、絶縁容器1の内面の多角状面からなる第1係合部1bをベローズカバー11及びガイド板12の多角状体からなる第3係合部11a、第2係合部12aが摺動することにより、上述した実施の形態1と同様に可動側電極棒5の軸心ずれを防ぐとともに可動側電極棒5が円周方向に捻じれるのを抑制できる。 In the vacuum valve according to the second embodiment, the inner surface of the insulating container 1 is a first engaging portion 1b made of a polygonal surface such as a hexagon, and the outer circumferences of the bellows cover 11 and the guide plate 12 are polygons such as a hexagon. By forming the third engaging portion 11a and the second engaging portion 12a made of the shaped body, the first engaging portion 1b made of the polygonal surface of the inner surface of the insulating container 1 is formed into the polygonal shape of the bellows cover 11 and the guide plate 12. By sliding the third engaging portion 11a and the second engaging portion 12a made of the body, the movable side electrode rod 5 is prevented from being displaced from the axis as in the above-described first embodiment, and the movable side electrode rod 5 is moved. It is possible to suppress twisting in the circumferential direction.

以上のように、この実施の形態2によれば、可動側電極棒5を案内する機能を備えたベローズカバー11及びガイド板12と絶縁容器1により、可動側電極8に近い場所で可動側電極棒5を摺動可能に支持することができるので、固定側電極7と可動側電極8の軸心を正確に合わすことができる。固定側電極7と可動側電極8の位置ずれを抑制することにより接触抵抗の低減及び安定した遮断性能を確保することができる。 As described above, according to the second embodiment, the movable side electrode is located near the movable side electrode 8 by the bellows cover 11, the guide plate 12, and the insulating container 1 having a function of guiding the movable side electrode rod 5. Since the rod 5 can be slidably supported, the axes of the fixed side electrode 7 and the movable side electrode 8 can be accurately aligned. By suppressing the misalignment between the fixed side electrode 7 and the movable side electrode 8, it is possible to reduce the contact resistance and secure stable blocking performance.

また、上述した従来の真空バルブのように、可動側端板3に接合されるガイド取付板及びガイド取付板にネジ止め等で取り付けられるガイドが不要となるため、簡易な構成で部品点数及び部品組立工程を削減することができ、安価に真空バルブを製作することが可能である。 Further, unlike the conventional vacuum valve described above, the guide mounting plate to be joined to the movable side end plate 3 and the guide to be attached to the guide mounting plate by screwing or the like are not required. The assembly process can be reduced, and the vacuum valve can be manufactured at low cost.

さらに、可動側電極棒5の断面を円形にすることができ、同外径の多角断面の可動側電極棒と比較すると断面積が広く、通電容量の増大が可能となる。なお、この実施の形態2では絶縁容器1の内面は六角形状面とし、ベローズカバー11及びガイド板12の外周は六角形状体とした場合について述べたが、これに限定されるものではなく、絶縁容器1の内面を六角形状以外の多角形状面とし、ベローズカバー11及びガイド板12の外周を六角形状以外の多角形状体としてもよく、同様の効果を得ることができる。 Further, the cross section of the movable side electrode rod 5 can be made circular, and the cross-sectional area is wider than that of the movable side electrode rod having a polygonal cross section having the same outer diameter, and the energization capacity can be increased. In the second embodiment, the case where the inner surface of the insulating container 1 is a hexagonal surface and the outer periphery of the bellows cover 11 and the guide plate 12 is a hexagonal body is described, but the present invention is not limited to this, and insulation is provided. The inner surface of the container 1 may be a polygonal surface other than the hexagonal shape, and the outer periphery of the bellows cover 11 and the guide plate 12 may be a polygonal body other than the hexagonal shape, and the same effect can be obtained.

実施の形態3.
この発明の実施の形態3を図5および図6に基づいて説明するが、各図において、同一、または相当部材、部位については同一符号を付して説明する。図5はこの発明の実施の形態3に係わる真空バルブを示す断面図である。図6はこの発明の実施の形態3に係わる真空バルブを示す図5のVI−VI線における断面図である。
Embodiment 3.
Embodiment 3 of the present invention will be described with reference to FIGS. 5 and 6, but in each of the drawings, the same or corresponding members and parts will be described with the same reference numerals. FIG. 5 is a cross-sectional view showing a vacuum valve according to a third embodiment of the present invention. FIG. 6 is a cross-sectional view taken along the line VI-VI of FIG. 5 showing a vacuum valve according to a third embodiment of the present invention.

この実施の形態3における真空バルブにおいて、13は固定側電極7及び可動側電極8を囲むように配置され、絶縁容器1に固定されたシールドであり、電流遮断時に絶縁容器1の内面が固定側電極7及び可動側電極8から発生する金属蒸気によって汚損されることを防止している。 In the vacuum valve according to the third embodiment, 13 is a shield arranged so as to surround the fixed side electrode 7 and the movable side electrode 8 and fixed to the insulating container 1, and the inner surface of the insulating container 1 is fixed on the fixed side when the current is cut off. It is prevented from being polluted by the metal vapor generated from the electrode 7 and the movable electrode 8.

また、シールド13の内面は一箇所又は複数箇所に例えば凸部からなる第4係合部13aを設けた構造とし、シールド13の例えば凸部からなる第4係合部13aとベローズカバー14及びガイド板15にそれぞれ設けられた例えば凹部からなる第6係合部14a、第5係合部15aの係合により可動側電極棒5が円周方向に捻じれるのを防止する。そして、ベローズカバー14及びガイド板15の外周はシールド13の内面と摺動するように隙間が設けられており、シールド13の内面形状より僅かに小さい形状となる。 Further, the inner surface of the shield 13 has a structure in which a fourth engaging portion 13a formed of, for example, a convex portion is provided at one or a plurality of locations, and the fourth engaging portion 13a formed of, for example, a convex portion of the shield 13, a bellows cover 14, and a guide. The movable side electrode rod 5 is prevented from being twisted in the circumferential direction due to the engagement of the sixth engaging portion 14a and the fifth engaging portion 15a, which are formed of, for example, recesses provided on the plate 15, respectively. The outer circumferences of the bellows cover 14 and the guide plate 15 are provided with a gap so as to slide with the inner surface of the shield 13, and the shape is slightly smaller than the inner surface shape of the shield 13.

この実施の形態3のように、絶縁容器1の内面にシールド13が配置された真空バルブにおいても、シールド13の内面とベローズカバー14及びガイド板15の外周が摺動することで、上述した実施の形態1と同様に可動側電極棒5の軸心ずれを防ぐと共に可動側電極棒5が円周方向に捻じれるのを抑制できる。 Even in the vacuum valve in which the shield 13 is arranged on the inner surface of the insulating container 1 as in the third embodiment, the inner surface of the shield 13 and the outer circumferences of the bellows cover 14 and the guide plate 15 slide, so that the above-described embodiment is performed. Similar to the first embodiment, it is possible to prevent the movable side electrode rod 5 from being displaced from the axis and to prevent the movable side electrode rod 5 from being twisted in the circumferential direction.

以上のように、この実施の形態3によれば、可動側電極棒5を案内する機能を備えたベローズカバー14及びガイド板15とシールド13により、可動側電極8に近い場所で可動側電極棒5を摺動可能に支持することができるので、固定側電極7と可動側電極8の軸心を正確に合わすことができる。固定側電極7と可動側電極8の位置ずれを抑制することにより接触抵抗の低減及び安定した遮断性能を確保することができる。 As described above, according to the third embodiment, the movable side electrode rod is located near the movable side electrode 8 by the bellows cover 14, the guide plate 15, and the shield 13 having a function of guiding the movable side electrode rod 5. Since 5 can be slidably supported, the axes of the fixed side electrode 7 and the movable side electrode 8 can be accurately aligned. By suppressing the misalignment between the fixed side electrode 7 and the movable side electrode 8, it is possible to reduce the contact resistance and secure stable blocking performance.

また、上述した従来の真空バルブのように、可動側端板3に接合されるガイド取付板及びガイド取付板にネジ止め等で取り付けられるガイドが不要となるため、簡易な構成で部品点数及び部品組立工程を削減することができ、安価に真空バルブを製作することが可能である。 Further, unlike the conventional vacuum valve described above, the guide mounting plate to be joined to the movable side end plate 3 and the guide to be attached to the guide mounting plate by screwing or the like are not required. The assembly process can be reduced, and the vacuum valve can be manufactured at low cost.

さらに、可動側電極棒5の断面を円形にすることができ、同外径の多角断面の可動側電極棒と比較すると断面積が広く、通電容量の増大が可能となる。なお、この実施の形態3ではシールド13の内面及びベローズカバー14及びガイド板15の外周を凸凹構造したが、上述した実施の形態2のように六角形状等の多角形状構造であっても同様の効果を得ることができる。 Further, the cross section of the movable side electrode rod 5 can be made circular, and the cross-sectional area is wider than that of the movable side electrode rod having a polygonal cross section having the same outer diameter, and the energization capacity can be increased. In the third embodiment, the inner surface of the shield 13 and the outer periphery of the bellows cover 14 and the guide plate 15 have an uneven structure, but the same applies to a polygonal structure such as a hexagonal shape as in the second embodiment described above. The effect can be obtained.

実施の形態4.
この発明の実施の形態4を図7および図8に基づいて説明するが、各図において、同一、または相当部材、部位については同一符号を付して説明する。図7はこの発明の実施の形態4に係わる真空バルブを示す断面図である。図8はこの発明の実施の形態4に係わる真空バルブを示す図7のVIII−VIII線における断面図である。
Embodiment 4.
Embodiment 4 of the present invention will be described with reference to FIGS. 7 and 8, but in each of the drawings, the same or corresponding members and parts will be described with the same reference numerals. FIG. 7 is a cross-sectional view showing a vacuum valve according to a fourth embodiment of the present invention. FIG. 8 is a cross-sectional view taken along the line VIII-VIII of FIG. 7 showing the vacuum valve according to the fourth embodiment of the present invention.

この実施の形態4における真空バルブにおいて、固定側電極7及び可動側電極8は風車形の電極構造となっている。風車形電極は、電流遮断時に固定側電極7と可動側電極8間に発生する電磁力により固定側電極7と可動側電極8間に発生したアークを周回させてアークを消弧するものである。 In the vacuum valve according to the fourth embodiment, the fixed side electrode 7 and the movable side electrode 8 have a windmill-shaped electrode structure. The wind turbine-shaped electrode extinguishes the arc by circulating the arc generated between the fixed side electrode 7 and the movable side electrode 8 by the electromagnetic force generated between the fixed side electrode 7 and the movable side electrode 8 when the current is cut off. ..

電流遮断時には、固定側電極7及び可動側電極8から金属蒸気が発生し、上記金属蒸気が固定側電極7及び可動側電極8に設けられたスリット7a、8aから固定側端板2の方向及び可動側端板3の方向へそれぞれ拡散するため、固定側電極7及び可動側電極8に隣接するように固定側アーク拡散防止板16及び可動側アーク拡散防止板17が接合される。 When the current is cut off, metal vapor is generated from the fixed side electrode 7 and the movable side electrode 8, and the metal steam is emitted from the slits 7a and 8a provided in the fixed side electrode 7 and the movable side electrode 8 in the direction of the fixed side end plate 2 and. Since the current diffuses in the direction of the movable end plate 3, the fixed arc diffusion prevention plate 16 and the movable arc diffusion prevention plate 17 are joined so as to be adjacent to the fixed electrode 7 and the movable electrode 8.

可動側アーク拡散防止板17の外側周縁部をガイド板の機能を持たせた構成とし、可動側アーク拡散防止板17及びベローズカバー9の外周は上述した実施の形態1と同様に絶縁容器1の内面と摺動するための隙間が設けられており、絶縁容器1の内面より僅かに小さい形状となる。 The outer peripheral edge of the movable arc diffusion prevention plate 17 is configured to have the function of a guide plate, and the outer periphery of the movable arc diffusion prevention plate 17 and the bellows cover 9 is the insulating container 1 as in the above-described first embodiment. A gap for sliding with the inner surface is provided, and the shape is slightly smaller than the inner surface of the insulating container 1.

この実施の形態4における真空バルブにおいて、可動側アーク拡散防止板17の外側周縁部をガイド板の機能を持たせた構成とすることにより、絶縁容器1の内面に設けられた凸部からなる第1係合部1aにベローズカバー9及びガイド板18にそれぞれ設けられた例えば凹部からなる第3係合部9a、第7係合部18aが係合することにより、可動側電極棒5が円周方向に捻じれるのを防止している。上述した実施の形態1と同様に可動側電極棒5の軸心ずれを防ぐと共に可動側電極棒5の円周方向への捻じれを抑制できる。 In the vacuum valve according to the fourth embodiment, the outer peripheral edge of the movable arc diffusion prevention plate 17 is configured to have the function of a guide plate, so that the vacuum valve is composed of a convex portion provided on the inner surface of the insulating container 1. When the third engaging portion 9a and the seventh engaging portion 18a, which are provided on the bellows cover 9 and the guide plate 18, respectively, are engaged with the engaging portion 1a, the movable side electrode rod 5 is rotated. It prevents it from twisting in the direction. Similar to the first embodiment described above, it is possible to prevent the movable side electrode rod 5 from being displaced from the axis and to suppress the movable side electrode rod 5 from being twisted in the circumferential direction.

以上のように、この実施の形態4によれば、可動側電極棒5を案内する機能を備えたベローズカバー9及び可動側アーク拡散防止板17と絶縁容器1により、可動側電極8により近い場所で可動側電極棒5を支持することが可能となり、固定側電極7と可動側電極8の軸心を正確に合わすことができる。固定側電極7と可動側電極8の位置ずれを抑制することで接触抵抗の低減及び安定した遮断性能を確保することができる。 As described above, according to the fourth embodiment, the bellows cover 9 having a function of guiding the movable side electrode rod 5, the movable side arc diffusion prevention plate 17, and the insulating container 1 provide a place closer to the movable side electrode 8. The movable side electrode rod 5 can be supported by the above method, and the axes of the fixed side electrode 7 and the movable side electrode 8 can be accurately aligned with each other. By suppressing the misalignment between the fixed side electrode 7 and the movable side electrode 8, it is possible to reduce the contact resistance and ensure stable blocking performance.

また、上述した従来の真空バルブのように、可動側端板3に接合されるガイド取付板及びガイド取付板にネジ止め等で取り付けられるガイドが不要となるため、簡易な構成で部品点数及び部品組立工程を削減することができ、より安価に真空バルブを製作することが可能である。 Further, unlike the conventional vacuum valve described above, the guide mounting plate to be joined to the movable side end plate 3 and the guide to be attached to the guide mounting plate by screwing or the like are not required. The assembly process can be reduced, and the vacuum valve can be manufactured at a lower cost.

さらに、可動側電極棒5の断面を円形にすることができ、同外径の多角断面の可動側電極棒と比較すると断面積が広く、通電容量の増大が可能となる。なお、この実施の形態4では絶縁容器1の内面及びベローズカバー9及び可動側アーク拡散防止板17の外周を凸凹構造としたが、上述した実施の形態2のように六角形状等の多角形状構造であっても同様の効果を得ることができる。 Further, the cross section of the movable side electrode rod 5 can be made circular, and the cross-sectional area is wider than that of the movable side electrode rod having a polygonal cross section having the same outer diameter, and the energization capacity can be increased. In the fourth embodiment, the inner surface of the insulating container 1 and the outer periphery of the bellows cover 9 and the movable arc diffusion prevention plate 17 have an uneven structure, but as in the second embodiment described above, a polygonal structure such as a hexagonal shape is used. However, the same effect can be obtained.

また、上述した実施の形態3と同様に、絶縁容器1に固定されたシールド13を備えた真空バルブの場合、シールド13とベローズカバー9及び可動側アーク拡散防止板17が摺動する構造の場合でも同様の効果を得ることができる。 Further, as in the case of the third embodiment described above, in the case of the vacuum valve provided with the shield 13 fixed to the insulating container 1, in the case of the structure in which the shield 13, the bellows cover 9 and the movable arc diffusion prevention plate 17 slide. However, the same effect can be obtained.

実施の形態5.
この発明の実施の形態5を図9および図10に基づいて説明するが、各図において、同一、または相当部材、部位については同一符号を付して説明する。図9はこの発明の実施の形態5に係わる真空バルブを示す断面図である。図10はこの発明の実施の形態5に係わる真空バルブを示す図9のX−X線における断面図である。
Embodiment 5.
Embodiment 5 of the present invention will be described with reference to FIGS. 9 and 10, but in each of the drawings, the same or corresponding members and parts will be described with the same reference numerals. FIG. 9 is a cross-sectional view showing a vacuum valve according to a fifth embodiment of the present invention. FIG. 10 is a cross-sectional view taken along line XX of FIG. 9 showing a vacuum valve according to a fifth embodiment of the present invention.

この実施の形態5における真空バルブにおいて、可動側電極棒5の傾きを抑制できる厚さを有したベローズカバー19を設け、ベローズカバー19外周は絶縁容器1の内面と摺動するための隙間が設けられており、絶縁容器1の内面より僅かに小さい形状とする。 In the vacuum valve according to the fifth embodiment, the bellows cover 19 having a thickness capable of suppressing the inclination of the movable side electrode rod 5 is provided, and the outer circumference of the bellows cover 19 is provided with a gap for sliding with the inner surface of the insulating container 1. The shape is slightly smaller than the inner surface of the insulating container 1.

この実施の形態5において、ベローズカバー19が絶縁容器1の内面と摺動することで、可動側電極棒5の軸心ずれを防ぐと共に可動側電極棒5の円周方向への捻じれを抑制できる。 In the fifth embodiment, the bellows cover 19 slides on the inner surface of the insulating container 1 to prevent the movable side electrode rod 5 from being displaced from the axis and to suppress the movable side electrode rod 5 from being twisted in the circumferential direction. it can.

この実施の形態5において、絶縁容器1の内面に設けられた凸部からなる第1係合部1aにベローズカバー19に設けられた例えば凹部からなる第8係合部19aが係合することにより、可動側電極棒5が円周方向に捻じれるのを防止している。上述した実施の形態1と同様に可動側電極棒5の軸心ずれを防ぐと共に可動側電極棒5の円周方向への捻じれを抑制できる。 In the fifth embodiment, the first engaging portion 1a formed of the convex portion provided on the inner surface of the insulating container 1 is engaged with the eighth engaging portion 19a formed of, for example, the concave portion provided on the bellows cover 19. , The movable side electrode rod 5 is prevented from being twisted in the circumferential direction. Similar to the first embodiment described above, it is possible to prevent the movable side electrode rod 5 from being displaced from the axis and to suppress the movable side electrode rod 5 from being twisted in the circumferential direction.

以上のように、この実施の形態5によれば、可動側電極棒5を案内する機能を備えた肉厚が厚いベローズカバー19と絶縁容器1により、可動側電極8に近い場所で可動側電極棒5を摺動可能に支持することができるので、固定側電極7と可動側電極8の軸心を正確に合わすことができる。固定側電極7と可動側電極8の位置ずれを抑制することで接触抵抗の低減及び安定した遮断性能を確保することができる。 As described above, according to the fifth embodiment, the movable side electrode is located near the movable side electrode 8 by the thick bellows cover 19 having the function of guiding the movable side electrode rod 5 and the insulating container 1. Since the rod 5 can be slidably supported, the axes of the fixed side electrode 7 and the movable side electrode 8 can be accurately aligned. By suppressing the misalignment between the fixed side electrode 7 and the movable side electrode 8, it is possible to reduce the contact resistance and ensure stable blocking performance.

また、上述した従来の真空バルブのように、可動側端板3に接合されるガイド取付板及びガイド取付板にネジ止め等で取り付けられるガイド並びに上述した各実施の形態におけるガイド板が不要となるため、簡易な構成で部品点数及び部品組立工程を削減することができ、より安価に真空バルブを製作することが可能である。 Further, unlike the conventional vacuum valve described above, the guide mounting plate joined to the movable side end plate 3, the guide attached to the guide mounting plate by screwing or the like, and the guide plate in each of the above-described embodiments are not required. Therefore, the number of parts and the parts assembly process can be reduced with a simple configuration, and the vacuum valve can be manufactured at a lower cost.

さらに、可動側電極棒5の断面を円形にすることができ、同外径の多角断面の可動側電極棒と比較すると断面積が広く、通電容量の増大が可能となる。なお、この実施の形態5では絶縁容器1の内面及びベローズカバー19の外周を凸凹構造としたが、上述した実施の形態2のように六角形状等の多角形状であっても同様の効果を得ることができる。 Further, the cross section of the movable side electrode rod 5 can be made circular, and the cross-sectional area is wider than that of the movable side electrode rod having a polygonal cross section having the same outer diameter, and the energization capacity can be increased. In the fifth embodiment, the inner surface of the insulating container 1 and the outer circumference of the bellows cover 19 have an uneven structure, but the same effect can be obtained even with a polygonal shape such as a hexagonal shape as in the second embodiment described above. be able to.

また、上述した実施の形態3と同様に、絶縁容器1に固定されたシールド13を備えた真空バルブの場合、シールド13とベローズカバー19が摺動する構造としても同様の効果を得ることができる。 Further, as in the case of the third embodiment described above, in the case of the vacuum valve provided with the shield 13 fixed to the insulating container 1, the same effect can be obtained even if the shield 13 and the bellows cover 19 are slid. ..

なお、この発明は、その発明の範囲内において、各実施の形態を自由に組み合わせたり、各実施の形態を適宜、変形、省略することが可能である。 In the present invention, each embodiment can be freely combined, and each embodiment can be appropriately modified or omitted within the scope of the invention.

この発明は、可動側電極の位置ずれを抑制することができる簡易な構成の真空バルブの実現に好適である。 The present invention is suitable for realizing a vacuum valve having a simple structure capable of suppressing the displacement of the movable electrode.

1 絶縁容器、1a 凸部、2 固定側端板、3 可動側端板、4 固定側電極棒、5 可動側電極棒、6 ベローズ、7 固定側電極、7a スリット、8 可動側電極、8a スリット、9 ベローズカバー、10 ガイド板、11 ベローズカバー、12 ガイド板、13 シールド、14 ベローズカバー、15 ガイド板、16 固定側アーク拡散防止板、17 可動側アーク拡散防止板、19 ベローズカバ

1 the insulating container, 1a protrusions, 2 fixed side end plate, 3 movable side end plate, 4 fixed side electrode rod, 5-friendly dynamic side electrode rod, 6 bellows, 7 fixed electrode, 7a slit, 8 movable side electrode, 8 a slits, 9 bellows cover, 1 0 guide plate, 1 1 bellows cover, 1 second guide plate, 1 3 shield, 1 4 bellows cover, 1 5 the guide plate, 1 6 stationary arc diffusion prevention plate, 17 movable arc diffusion preventing plate, 1 9 Berozukaba over

Claims (19)

両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記絶縁容器の内面の1箇所又は複数箇所に設けたられた第1係合部と、前記ベローズの前記可動側電極側の端部に設けられたベローズカバーと、前記ベローズカバーと前記可動側電極との間に配置されて前記可動側電極棒に前記絶縁容器の内面を摺動可能に取り付けられ、前記第1係合部と係合する第2係合部を有するガイド板とを備えたことを特徴とする真空バルブ。 An insulating container whose inside is closed by a fixed-side end plate and a movable-side end plate joined to both ends, and a fixed-side electrode rod fixed to the fixed-side end plate and provided with a fixed-side electrode at the end. , A movable side electrode rod arranged coaxially with the fixed side electrode rod and provided with a movable side electrode at the end which can be brought into contact with and separated from the fixed side electrode, and between the movable side electrode rod and the movable side end plate. A vacuum valve provided with an airtightly joined bellows, a first engaging portion provided at one or a plurality of locations on the inner surface of the insulating container, and an end portion of the bellows on the movable side electrode side. Is arranged between the bellows cover and the movable electrode, and the inner surface of the insulating container is slidably attached to the movable electrode rod, and is engaged with the first engaging portion. A vacuum valve comprising a guide plate having a matching second engaging portion. 前記ベローズカバーは前記絶縁容器の内面を摺動可能に設けられ、前記第1係合部と係合する第3係合部を有することを特徴とする請求項1に記載の真空バルブ。 The vacuum valve according to claim 1, wherein the bellows cover is slidably provided on the inner surface of the insulating container and has a third engaging portion that engages with the first engaging portion. 前記第1係合部は凸部であり、前記第2係合部および前記第3係合部は凹部であることを特徴とする請求項2に記載の真空バルブ。 It said first engaging portion is a convex portion, the vacuum valve according toMotomeko 2 you, wherein the second engaging portion and the third engaging portion is concave. 前記第1係合部は多角形状面であり、前記第2係合部および前記第3係合部は多角形状体であることを特徴とする請求項2に記載の真空バルブ。 The first Kakarigobu is polygonal surface, a vacuum valve according toMotomeko 2 you, wherein the second engaging portion and the third Kakarigobu is polygonal body. 両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記絶縁容器の内面に配置されたシールドと、前記シールドの1箇所又は複数箇所に設けたられた第4係合部と、前記ベローズの前記可動側電極側の端部に設けられたベローズカバーと、前記ベローズカバーと前記可動側電極との間に配置されて前記可動側電極棒に前記絶縁容器の内面を摺動可能に取り付けられ、前記第4係合部と係合する第5係合部を有するガイド板とを備えたことを特徴とする真空バルブ。 An insulating container whose inside is closed by a fixed-side end plate and a movable-side end plate joined to both ends, and a fixed-side electrode rod fixed to the fixed-side end plate and provided with a fixed-side electrode at the end. , A movable side electrode rod arranged coaxially with the fixed side electrode rod and provided with a movable side electrode at the end which can be brought into contact with and separated from the fixed side electrode, and between the movable side electrode rod and the movable side end plate. A vacuum valve provided with an airtightly joined bellows, the shield arranged on the inner surface of the insulating container, the fourth engaging portion provided at one or a plurality of places of the shield, and the bellows. The bellows cover provided at the end of the movable side electrode side is arranged between the bellows cover and the movable side electrode, and the inner surface of the insulating container is slidably attached to the movable side electrode rod. , A vacuum valve comprising a guide plate having a fifth engaging portion that engages with the fourth engaging portion. 前記ベローズカバーは前記シールドの内面を摺動可能に設けられ、前記第4係合部と係合する第6係合部を有することを特徴とする請求項5に記載の真空バルブ。 The vacuum valve according to claim 5, wherein the bellows cover is slidably provided on an inner surface of the shield and has a sixth engaging portion that engages with the fourth engaging portion. 前記第4係合部は凸部であり、前記第5係合部および前記第6係合部は凹部であることを特徴とする請求項6に記載の真空バルブ。 The fourth engaging portion is convex portion, the vacuum valve according toMotomeko 6 you wherein the fifth engagement portion and the sixth engaging portion is concave. 前記第4係合部は多角形状面であり、前記第5係合部および前記第6係合部は多角形状体であることを特徴とする請求項6に記載の真空バルブ。 The fourth Kakarigobu is polygonal surface, a vacuum valve according toMotomeko 6 you wherein the fifth engagement portion and the sixth Kakarigobu is polygonal body. 両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記固定側電極と前記可動側電極は風車形電極で構成され、前記固定側電極の裏面に設けられた固定側アーク拡散防止板と、前記可動側電極の裏面に設けられた可動側アーク拡散防止板と、前記絶縁容器の内面の1箇所又は複数箇所に設けたられた第1係合部と、前記ベローズの前記可動側電極側の端部に設けられたベローズカバーと、前記可動側アーク拡散防止板のガイド板の機能を持たせた外周に設けられ、前記絶縁容器の内面を摺動可能に構成され、前記第1係合部と係合する第7係合部とを備えたことを特徴とする真空バルブ。 An insulating container whose inside is closed by a fixed-side end plate and a movable-side end plate joined to both ends, and a fixed-side electrode rod fixed to the fixed-side end plate and provided with a fixed-side electrode at the end. , A movable side electrode rod arranged coaxially with the fixed side electrode rod and provided with a movable side electrode at the end which can be brought into contact with and separated from the fixed side electrode, and between the movable side electrode rod and the movable side end plate. A vacuum valve provided with an airtightly joined bellows, wherein the fixed side electrode and the movable side electrode are composed of a windmill-shaped electrode, and a fixed side arc diffusion prevention plate provided on the back surface of the fixed side electrode. , The movable side arc diffusion prevention plate provided on the back surface of the movable side electrode, the first engaging portion provided at one or a plurality of places on the inner surface of the insulating container, and the movable side electrode side of the bellows. The bellows cover provided at the end of the case and the outer periphery of the movable side arc diffusion prevention plate having the function of a guide plate are provided so as to be slidable on the inner surface of the insulating container, and the first engagement is performed. A vacuum valve characterized by having a seventh engaging portion that engages with the portion. 前記ベローズカバーは前記絶縁容器の内面を摺動可能に設けられ、前記第1係合部と係合する第3係合部を有することを特徴とする請求項9に記載の真空バルブ。 The vacuum valve according to claim 9, wherein the bellows cover is slidably provided on the inner surface of the insulating container and has a third engaging portion that engages with the first engaging portion. 前記第1係合部は凸部であり、前記第7係合部は凹部であることを特徴とする請求項9または請求項10に記載の真空バルブ。 It said first engaging portion is a convex portion, the vacuum valve according to claim 9 or claim 10 prior Symbol seventh engagement portion, characterized in that a recess. 前記第1係合部は多角形状面であり、前記第7係合部は多角形状体であることを特徴とする請求項9または請求項10に記載の真空バルブ。 The first Kakarigobu is polygonal surface, a vacuum valve according to claim 9 or claim 10 prior Symbol seventh Kakarigobu is characterized by a polygonal shape body. 両端部にそれぞれ接合された固定側端板及び可動側端板によって内部が閉塞された絶縁容器と、前記固定側端板に固定され、端部に固定側電極が設けられた固定側電極棒と、前記固定側電極棒と同軸上に配置され、端部に前記固定側電極と接離可能な可動側電極が設けられた可動側電極棒と、前記可動側電極棒と前記可動側端板の間に気密に接合されたベローズとを備えた真空バルブであって、前記絶縁容器の内面の1箇所又は複数箇所に設けたられた第1係合部と、前記ベローズの前記可動側電極側の端部に前記絶縁容器の内面を摺動可能に設けられ、前記可動側電極棒の傾きを抑制できる厚さで構成され、前記第1係合部と係合する第8係合部を有するベローズカバーとを備えたことを特徴とする真空バルブ。 An insulating container whose inside is closed by a fixed-side end plate and a movable-side end plate joined to both ends, and a fixed-side electrode rod fixed to the fixed-side end plate and provided with a fixed-side electrode at the end. , A movable side electrode rod arranged coaxially with the fixed side electrode rod and provided with a movable side electrode at the end which can be brought into contact with and separated from the fixed side electrode, and between the movable side electrode rod and the movable side end plate. A vacuum valve provided with an airtightly joined bellows, a first engaging portion provided at one or a plurality of locations on the inner surface of the insulating container, and an end portion of the bellows on the movable side electrode side. With a bellows cover slidably provided on the inner surface of the insulating container, having a thickness capable of suppressing the inclination of the movable side electrode rod, and having an eighth engaging portion that engages with the first engaging portion. A vacuum valve characterized by being equipped with. 前記第1係合部は凸部であり、前記第8係合部は凹部であることを特徴とする請求項13に記載の真空バルブ。 The vacuum valve according to claim 13, wherein the first engaging portion is a convex portion and the eighth engaging portion is a concave portion. 前記第1係合部は多角形状面であり、前記第8係合部は多角形状体であることを特徴とする請求項13に記載の真空バルブ。 The vacuum valve according to claim 13, wherein the first engaging portion is a polygonal surface, and the eighth engaging portion is a polygonal body. 前記ベローズカバーは金属で構成され、前記絶縁容器の内周と摺動する外周部のみ絶縁体で構成されたことを特徴とする請求項1から請求項15のいずれか1項に記載の真空バルブ。 The vacuum valve according to any one of claims 1 to 15, wherein the bellows cover is made of metal, and only the outer peripheral portion that slides with the inner circumference of the insulating container is made of an insulator. .. 前記ベローズカバーは絶縁体で構成されたことを特徴とする請求項1から請求項15のいずれか1項に記載の真空バルブ。 The vacuum valve according to any one of claims 1 to 15, wherein the bellows cover is made of an insulator. 前記ガイド板は金属で構成され、前記絶縁容器の内周と摺動する外周部のみ絶縁体で構成されたことを特徴とする請求項1から請求項12のいずれか1項に記載の真空バルブ。 The vacuum valve according to any one of claims 1 to 12, wherein the guide plate is made of metal, and only the outer peripheral portion that slides with the inner circumference of the insulating container is made of an insulator. .. 前記ガイド板は絶縁体で構成されたことを特徴とする請求項1から請求項12のいずれか1項に記載の真空バルブ。 The vacuum valve according to any one of claims 1 to 12, wherein the guide plate is made of an insulator.
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