JP5885429B2 - Vacuum valve - Google Patents

Vacuum valve Download PDF

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JP5885429B2
JP5885429B2 JP2011185602A JP2011185602A JP5885429B2 JP 5885429 B2 JP5885429 B2 JP 5885429B2 JP 2011185602 A JP2011185602 A JP 2011185602A JP 2011185602 A JP2011185602 A JP 2011185602A JP 5885429 B2 JP5885429 B2 JP 5885429B2
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fixed
getter
vacuum
end plate
plate
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JP2013048034A (en
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友和 吉田
友和 吉田
真一 三木
真一 三木
将司 川田
将司 川田
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Mitsubishi Electric Corp
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Description

この発明は、電気回路を開閉する真空遮断器の消弧室を構成する真空バルブに関するものである。   The present invention relates to a vacuum valve constituting an arc extinguishing chamber of a vacuum circuit breaker that opens and closes an electric circuit.

従来の真空バルブは、例えば特許文献1の図5に開示されているように、絶縁円筒、この絶縁円筒両端の固定フランジと可動フランジ、シールリング等により構成され、真空容器内には、接離可能な固定電極および可動電極が配置され、各電極はそれぞれ固定ロッド、可動ロッドに取り付けられ、可動電極は真空気密を保った状態で軸方向に動作させることができるようになっている。   As shown in FIG. 5 of Patent Document 1, for example, a conventional vacuum valve is composed of an insulating cylinder, fixed flanges and movable flanges at both ends of the insulating cylinder, seal rings, and the like. Possible fixed electrodes and movable electrodes are arranged, and each electrode is attached to a fixed rod and a movable rod, respectively, so that the movable electrode can be operated in the axial direction while maintaining vacuum airtightness.

真空バルブは、本来の遮断絶縁性能を維持するために、真空容器内を長期に渡り高真空に維持する必要がある。そのため部品は、ガス含有量の少ない材料を使用し、熱処理を行って、真空容器内部の放出ガスや吸着ガスの除去を行っている。加えて、真空容器内には、ガス吸着材をベース金属にコーティングしたゲッターが取り付けられている。真空バルブがロウ付けにて真空気密された後、このゲッターにロウ付け時の加熱でガス吸着材の活性化作業を加えることで、わずかのガスの透過やリークおよび容器内部の吸着ガスの放出をゲッターが吸着することで、真空度の低下を防止し容器内部の真空度を良好な状態に維持している。
更に、真空バルブの真空度の信頼性を向上させるため、特許文献1では、図1〜図4に示されたように真空容器内部に凸部を形成し、この凸部にゲッターの一端を固着して他端を浮かせて配設している。この配設により、ゲッターの両面をガス吸着面として有効利用している。
The vacuum valve needs to maintain a high vacuum for a long time in the vacuum container in order to maintain the original cutoff insulation performance. Therefore, the parts are made of a material having a low gas content and subjected to heat treatment to remove the released gas and adsorbed gas inside the vacuum vessel. In addition, a getter in which a gas adsorbent is coated on a base metal is attached in the vacuum vessel. After the vacuum valve is vacuum-sealed by brazing, activation of the gas adsorbent is applied to the getter by heating at the time of brazing, so that slight gas permeation and leakage and release of the adsorbed gas inside the container can be prevented. By adsorbing the getter, a decrease in the degree of vacuum is prevented and the degree of vacuum inside the container is maintained in a good state.
Furthermore, in order to improve the reliability of the vacuum degree of the vacuum valve, in Patent Document 1, a convex portion is formed inside the vacuum vessel as shown in FIGS. 1 to 4, and one end of the getter is fixed to the convex portion. Thus, the other end is placed floating. By this arrangement, both sides of the getter are effectively used as gas adsorption surfaces.

また、真空バルブは、用途拡大のため高圧化が求められているが、特許文献2では、高電界部にゲッターを固着する際、高電界部に凹部(図4)を設けてその凹部にゲッターを固着することで、ゲッターが高電界になることで発生する耐電圧性能の低下を防止している。   In addition, the vacuum valve is required to have a high pressure in order to expand its application. However, in Patent Document 2, when a getter is fixed to a high electric field portion, a concave portion (FIG. 4) is provided in the high electric field portion, and the getter is provided in the concave portion. By fixing, the withstand voltage performance deterioration caused by the getter becoming a high electric field is prevented.

特開平8−315695号公報JP-A-8-315695 特開昭60−175331号公報JP 60-175331 A

特許文献1および特許文献2に記載された真空バルブの構造においては、どちらも、ゲッターを取り付ける際に、ゲッターを取り付ける部材に合わせてゲッターを変形させて、例えばスポット溶接で固着する必要があり、ゲッターに無理な変形力が加わり、コーティングされたガス吸着材が破損し易い状況であった。
また、特許文献1のように、一端を固着して他端を浮かせる構造では、他端がフリーのため固定が不安定であった。これらの構造においては、真空バルブとして完成後、操作機構に接続されて接点の開閉動作が行われるとき、その動作による衝撃振動が真空バルブに加わることで、ゲッターにコーティングされたガス吸着材が割れて剥がれ落ちる状況がある。その脱落物は、高電界部まで拡散すると耐電圧性能の低下を招く恐れがあるため、この脱落物を高電界部まで拡散するのを防止する必要がある。
In the structure of the vacuum valve described in Patent Document 1 and Patent Document 2, when the getter is attached, it is necessary to deform the getter according to the member to which the getter is attached, for example, to be fixed by spot welding, An excessive deformation force was applied to the getter, and the coated gas adsorbent was easily damaged.
Moreover, in the structure which fixes one end and floats the other end like patent document 1, since the other end was free, fixation was unstable. In these structures, when the contact is opened and closed by connecting to the operating mechanism after completion as a vacuum valve, the shock vibration due to that operation is applied to the vacuum valve, so that the gas adsorbent coated on the getter is cracked. There is a situation that falls off. If the fallen matter diffuses to the high electric field part, the withstand voltage performance may be lowered, so it is necessary to prevent the fallen matter from diffusing to the high electric field part.

この発明に係わる真空バルブは、絶縁容器の両端部を端板組立体により気密に封止した真空容器と、この真空容器内に接離可能に設けられた一対の電極を備えた真空バルブであって、両方又はいずれか一方の上記端板組立体は、上記電極を固定させた端板と、この端板と共に上記絶縁容器の端部に接合されシールド機能を有する端部金具とで構成されると共に、上記端板と上記端部金具とによって上記真空容器内に空間部を形成し、この空間部にゲッターを封入して配置したものである。 A vacuum valve according to the present invention is a vacuum valve provided with a vacuum container in which both end portions of an insulating container are hermetically sealed by an end plate assembly, and a pair of electrodes provided in the vacuum container so as to be able to contact and separate. Both or any one of the end plate assemblies includes an end plate to which the electrode is fixed, and an end fitting that is joined to the end of the insulating container together with the end plate and has a shielding function. At the same time, a space is formed in the vacuum vessel by the end plate and the end fitting, and a getter is enclosed in the space.

この発明の真空バルブによれば、ゲッターの脱落物を、端部金具と端板との間の空間部に閉じ込めることができるため、ゲッターの脱落物が高電界部まで拡散することはなく、耐電圧性能を安定、向上することができる。
また、ゲッターは、空間部に閉じ込められるので、端部金具に固着させる必要はなく、ゲッター両面のガス吸着機能を活用できるため、真空度の信頼性を向上させることができる。また、ゲッターは、スポット溶接やロウ付けなどの取り付け作業をすることなく空間部内に封入することができるため、真空バルブの組立作業性を良くすることができる。
According to the vacuum valve of the present invention, since the getter fallout can be confined in the space between the end fitting and the end plate, the getter fallout does not diffuse to the high electric field portion and is resistant to damage. Voltage performance can be stabilized and improved.
Further, since the getter is confined in the space portion, it is not necessary to fix the getter to the end fitting, and the gas adsorption function on both sides of the getter can be utilized, so that the reliability of the degree of vacuum can be improved. In addition, since the getter can be enclosed in the space without performing attachment work such as spot welding or brazing, the assembly workability of the vacuum valve can be improved.

この発明の実施の形態1における真空バルブの側断面図である。It is a sectional side view of the vacuum valve in Embodiment 1 of this invention. この発明の実施の形態2における真空バルブの側断面図である。It is a sectional side view of the vacuum valve in Embodiment 2 of this invention. この発明の実施の形態3における真空バルブの側断面図である。It is a sectional side view of the vacuum valve in Embodiment 3 of this invention. この発明の実施の形態3における真空バルブの固定側部分のみを示す拡大断面図である。It is an expanded sectional view which shows only the stationary side part of the vacuum valve in Embodiment 3 of this invention. この発明の実施の形態4における真空バルブの側断面図である。It is a sectional side view of the vacuum valve in Embodiment 4 of this invention. この発明の実施の形態4における固定側補強板を示す斜視図である。It is a perspective view which shows the stationary-side reinforcement board in Embodiment 4 of this invention.

以下、図面に基づいて、この発明の各実施の形態を説明する。
なお、各図間において、同一符号は同一あるいは相当部分を示す。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In addition, the same code | symbol shows the same or an equivalent part between each figure.

実施の形態1.
図1に示す実施の形態1における真空バルブは、固定側構造において、円筒状の絶縁容器1の端部に気密に接合された端板組立体により内部を真空封止した真空容器と、この真空容器内に接離可能に設けられた一対の電極を備えた真空バルブであって、端板組立体は、例えば電極棒4に接合され且つ電極を気密に貫通させた内端部と絶縁容器1に向かって延びた外端部を有する円板状端板2と、絶縁容器1に接合された外端部および円板状端板2に連結された連結部を有すると共にシールド機能を有する固定側端部金具15とで構成されている。
固定側端部金具15は、例えばその内周縁部を延長し、その延長部を折り曲げ且つその折り返した先端部15aを円板状端板2まで延長する加工を行い、円板状端板2と共に真空容器内に小隙間Sを有する環状の空間部17を形成し、この空間部17にゲッターを配置している。
Embodiment 1 FIG.
The vacuum valve according to the first embodiment shown in FIG. 1 includes a vacuum vessel having a fixed structure and a vacuum vessel whose inside is vacuum-sealed by an end plate assembly that is airtightly joined to an end of a cylindrical insulating vessel 1. A vacuum valve provided with a pair of electrodes provided in the container so as to be able to contact and separate. The end plate assembly includes, for example, an inner end joined to the electrode rod 4 and hermetically penetrating the electrode, and the insulating container 1. A disc-like end plate 2 having an outer end extending toward the outer side, a outer end joined to the insulating container 1 and a connecting portion connected to the disc-like end plate 2 and having a shielding function It is composed of an end fitting 15.
For example, the fixed-side end fitting 15 extends the inner peripheral edge, bends the extension, and extends the folded tip 15a to the disc-like end plate 2 together with the disc-like end plate 2. An annular space 17 having a small gap S is formed in the vacuum vessel, and a getter is arranged in the space 17.

また、このゲッター16は、固定側端部金具15内に配置して、その後、円板状の固定側端板2の外端部と固定側端部金具15の連結部をロウ付けすることで空間部17に配置される。このゲッター16は、例えばスポット溶接やロウ付けなどによって、固定側端部金具15に固着する必要はない。ゲッター16は、ボタンタイプ、板状タイプどちらでも適用でき、かつ複数個配置してもよい。この端部構造は、固定側のみならず、可動側に適用しても、固定側と固定側の両側に適用してもよい。ゲッター16は、固定側の空間部にのみ、可動側の空間部にのみ、固定側と可動側の両方の空間部に配置してもよい。 Further, the getter 16 is disposed in the fixed side end fitting 15, and then the outer end portion of the disk-shaped fixed side end plate 2 and the connection portion of the fixed side end fitting 15 are brazed. Arranged in the space 17. The getter 16 need not be fixed to the fixed-side end fitting 15 by spot welding or brazing, for example. The getter 16 can be either a button type or a plate type, and a plurality of getters 16 may be arranged. This end structure may be applied not only to the fixed side but also to the movable side, or to both sides of the fixed side and the fixed side. The getter 16 may be arranged only in the space portion on the fixed side, only in the space portion on the movable side, and in both space portions on the fixed side and the movable side.

この実施の形態1に示す真空バルブでは、ゲッター16は固定側端板2と固定側端部金具15によってできる空間部17に封入されており、開閉衝撃により脱落し易くなっているガス吸着材がゲッター16から脱落しても、その固定側端板2と固定側端部金具15との空間部17に脱落物の存在が限られて、その空間部17外の高電界部分であるシールド13、固定側端部金具15の電界緩和部外面、絶縁容器1の沿面、固定側接点5、可動側接点6、電極棒4と7にまで脱落物が拡散することはない。また、ゲッター16は、空間部17に配置され、ガス吸着材がコーティングされている面が固定側端板2、固定側端部金具15に接着することはない。固定側端板2と固定側端部金具15は、ロウ材で気密に固着されないため、真空バルブ内部のガスは空間部17外から空間部17内に自由に移動しゲッター16に吸着される。   In the vacuum valve shown in the first embodiment, the getter 16 is enclosed in a space portion 17 formed by the fixed side end plate 2 and the fixed side end fitting 15, and a gas adsorbing material that is easy to fall off due to an opening / closing impact is formed. Even if the getter 16 falls off, the presence of a dropout is limited in the space 17 between the fixed-side end plate 2 and the fixed-side end fitting 15, and the shield 13 is a high electric field portion outside the space 17. The fallout does not diffuse to the outer surface of the electric field relaxation portion of the fixed-side end fitting 15, the creeping surface of the insulating container 1, the fixed-side contact 5, the movable-side contact 6, and the electrode rods 4 and 7. Further, the getter 16 is disposed in the space portion 17, and the surface coated with the gas adsorbent does not adhere to the fixed side end plate 2 and the fixed side end fitting 15. Since the fixed side end plate 2 and the fixed side end fitting 15 are not airtightly fixed by the brazing material, the gas inside the vacuum valve freely moves from the outside of the space portion 17 into the space portion 17 and is adsorbed by the getter 16.

以上の、実施の形態1の真空バルブにおいては、脱落物が高電界部に拡散することがないため、耐電圧性能の低下を抑制することができ、耐電圧性能を安定化、向上することができる。また、ゲッター16は、空間部17に閉じ込められるので、固定側端部金具15に固着させる必要はないため、ゲッター16両面のガス吸着機能を活用できるため、真空度の信頼性を向上させることができる。また、ゲッター16は、ロウ付けの際に固定側端部金具15内に配置するだけであるため、スポット溶接やロウ付けなどの取り付け作業をすることなく空間部内に封入することができるため、真空バルブの組立作業性を良くすることができる。   In the vacuum valve of the first embodiment described above, since the fallout does not diffuse into the high electric field part, it is possible to suppress a decrease in the withstand voltage performance, and to stabilize and improve the withstand voltage performance. it can. In addition, since the getter 16 is confined in the space portion 17, it is not necessary to fix the getter 16 to the fixed-side end fitting 15, and the gas adsorption function on both sides of the getter 16 can be utilized, thereby improving the reliability of the degree of vacuum. it can. Further, since the getter 16 is only disposed in the fixed-side end fitting 15 at the time of brazing, the getter 16 can be sealed in the space without performing mounting work such as spot welding or brazing. Assembling workability of the valve can be improved.

実施の形態2.
図2に示す実施の形態2における真空バルブは、固定側構造において、固定側電極棒4
円板状の固定側端板2の間に固定側補強板18が固着されており、固定側端板2に重ね合わせた固定側補強板18の外周側先端(周縁部)が、固定側端部金具3の内周縁部と所定の間隔をおいて互いに平行して下向き先端まで延びており、かつその固定側補強板18の先端延長先を固定側端部金具3の樋状の先端部(固定側端部金具3の先端部を内周方向に向かって曲率半径をもって折り曲げ形成した曲部)に突合させ極小の隙間Sを設けて、その固定側補強板18と固定側端部金具3で形成される環状の空間部19にゲッター16を配置している。
Embodiment 2. FIG.
The vacuum valve in the second embodiment shown in FIG. 2 has a fixed-side electrode rod 4 in a fixed-side structure.
The fixed-side reinforcing plate 18 is fixed between the fixed-side end plate 2 and the disk-shaped fixed-side end plate 2, and the outer peripheral side tip (peripheral portion) of the fixed-side reinforcing plate 18 superimposed on the fixed-side end plate 2 is fixed side Extending parallel to each other at a predetermined distance from the inner peripheral edge of the end fitting 3 to the downward tip, and extending the tip of the fixed reinforcing plate 18 to the hook-shaped tip of the fixed end fitting 3 (A curved portion formed by bending the distal end portion of the fixed-side end fitting 3 with a radius of curvature toward the inner circumferential direction) is provided to provide a minimal gap S, and the fixed-side reinforcing plate 18 and the fixed-side end fitting 3 The getter 16 is disposed in an annular space 19 formed by

このゲッター16は、実施の形態1と同様、例えばスポット溶接やロウ付けなどによって、固定側端部金具3に固着する必要はない。ゲッター16はボタンタイプ、板状タイプどちらでも適用でき、かつ複数個配置してもよい。この端部構造は、固定側のみならず、可動側に適用しても、固定側と可動側の両側に適用してもよい。ゲッター16は、固定側の空間部にのみ、可動側の空間部にのみ、固定側と可動側の両方の空間部に配置してもよい。   Similar to the first embodiment, the getter 16 does not have to be fixed to the fixed-side end fitting 3 by spot welding or brazing, for example. The getter 16 may be either a button type or a plate type, and a plurality of getters 16 may be arranged. This end structure may be applied not only to the fixed side but also to the movable side, or to both sides of the fixed side and the movable side. The getter 16 may be arranged only in the space portion on the fixed side, only in the space portion on the movable side, and in both space portions on the fixed side and the movable side.

この実施の形態2に示す真空バルブでは、固定側端部金具3と固定側補強板18によってできる空間部19にゲッター16は封入されており、開閉衝撃により脱落し易くなっているガス吸着材がゲッター16から脱落しても、その固定側端部金具3と固定側補強板18によってできる空間部19に脱落物の存在が限られて、その空間部19外の高電界部分であるシールド13、固定側端部金具15の電界緩和部外面、絶縁容器1の沿面、固定側接点5、可動側接点6、電極棒4、7にまで脱落物が拡散することはない。   In the vacuum valve shown in the second embodiment, the getter 16 is enclosed in a space portion 19 formed by the fixed-side end fitting 3 and the fixed-side reinforcing plate 18, and a gas adsorbent that is easy to drop off due to an opening / closing impact is provided. Even if the getter 16 falls off, the presence of a dropout is limited in the space 19 formed by the fixed-side end fitting 3 and the fixed-side reinforcing plate 18, and the shield 13, which is a high electric field portion outside the space 19, The fallen objects do not diffuse to the outer surface of the electric field relaxation portion of the fixed-side end fitting 15, the creeping surface of the insulating container 1, the fixed-side contact 5, the movable-side contact 6, and the electrode rods 4 and 7.

また、ゲッター16は、空間部19に配置され、ガス吸着材がコーティングされている面が固定側端板2、固定側端部金具3、固定側補強板18に接着しない。また、固定側補強板18が固定側端板2に固着され固定側端板2の板厚が増えて、開閉衝撃力、軸ずれによる開閉衝撃力の拡大、大電流通電時や遮断時の電磁力に対する固定側端板2の機械的強度補強になっている。   Further, the getter 16 is disposed in the space portion 19, and the surface coated with the gas adsorbent does not adhere to the fixed side end plate 2, the fixed side end metal fitting 3, and the fixed side reinforcing plate 18. Further, the fixed-side reinforcing plate 18 is fixed to the fixed-side end plate 2, and the thickness of the fixed-side end plate 2 is increased. It is mechanical strength reinforcement of the fixed side end plate 2 against force.

以上の実施の形態2の真空バルブにおいては、実施の形態1と同様、脱落物が高電界部に拡散することがないため、耐電圧性能の低下を抑制でき、耐電圧性能を安定化、向上することができる。また、ゲッター16は空間部19に閉じ込められるので、固定側端部金具3に固着させる必要はないため、ゲッター16両面のガス吸着機能を活用できるため、真空度の信頼性を向上させることができる。また、ゲッター16は、ロウ付けの際に固定側端部金具3内に配置するだけであるため、スポット溶接やロウ付けなどの取り付け作業をすることなく空間部19に封入することができるため、真空バルブの組立作業性を良くすることができる。また、固定側補強板18によって、固定側端板2の板厚が増えるため、真空バルブの強度を向上させることができる。   In the vacuum valve of the second embodiment described above, since the fallen objects do not diffuse into the high electric field part as in the first embodiment, it is possible to suppress a decrease in the withstand voltage performance and to stabilize and improve the withstand voltage performance. can do. Further, since the getter 16 is confined in the space portion 19, it is not necessary to fix the getter 16 to the fixed-side end fitting 3, and the gas adsorption function on both sides of the getter 16 can be utilized, so that the reliability of the degree of vacuum can be improved. . Further, since the getter 16 is only disposed in the fixed side end fitting 3 at the time of brazing, it can be enclosed in the space portion 19 without performing mounting work such as spot welding or brazing. Assembling workability of the vacuum valve can be improved. Moreover, since the plate | board thickness of the fixed side end plate 2 increases with the fixed side reinforcement board 18, the intensity | strength of a vacuum valve can be improved.

実施の形態3.
図3、図4に示す実施の形態3における真空バルブについて説明する。なお、図4は、真空バルブ固定側部分の拡大断面図で、固定側端部金具3と固定側補強板20の寸法関係を示す説明図である。
実施の形態3における固定側補強板20の先端部は、実施の形態2における固定側補強板18の先端部を外周方向に向かって曲率半径をもって折り曲げられて、最大高さがh1で、この最大高さ部からの軸方向寸法(最大高さ部と電極棒軸心間の寸法)がL2、固定側補強板20先端部からの軸方向寸法(その先端部と電極棒軸心間の寸法)がL1である曲部(樋状の曲部)を形成している。
また、上記固定側端部金具3は、実施の形態2における固定側端部金具3と同様に、先端部を内周方向に向かって曲率半径をもって折り曲げられて、先端部の高さがh2、固定側端部金具3先端部からの軸方向寸法(その先端部と電極棒軸心間の寸法)がL3である曲部(樋状の曲部)を有している。
Embodiment 3 FIG.
A vacuum valve according to Embodiment 3 shown in FIGS. 3 and 4 will be described. FIG. 4 is an enlarged cross-sectional view of the vacuum valve fixed side portion, and is an explanatory view showing the dimensional relationship between the fixed side end fitting 3 and the fixed side reinforcing plate 20.
The distal end portion of the fixed-side reinforcing plate 20 in the third embodiment is bent with a radius of curvature toward the outer peripheral direction of the distal end portion of the fixed-side reinforcing plate 18 in the second embodiment, and the maximum height is h1. The axial dimension from the height part (the dimension between the maximum height part and the electrode rod axis) is L2, and the axial dimension from the tip of the fixed reinforcing plate 20 (dimension between the tip part and the electrode rod axis) Is a curved portion (a bowl-shaped curved portion) having L1.
Further, the fixed-side end fitting 3 is bent with a radius of curvature toward the inner circumferential direction in the same manner as the fixed-side end fitting 3 in the second embodiment, and the height of the tip is h2. The fixed side end metal fitting 3 has a curved portion (a bowl-shaped curved portion) whose axial dimension from the distal end portion (the dimension between the distal end portion and the electrode rod axis) is L3.

その寸法関係において、固定側補強板20先端の曲部の最大高さh1が固定側端部金具3の先端部の高さh2より高く、かつその固定側補強板20の先端部からの軸方向寸法L1が固定側端部金具3の先端部からの軸方向寸法L3より大きく、固定側補強板20の最大高さ部からの軸方向寸法L2が固定側端部金具3の先端部からの軸方向寸法L3より小さくて、固定側補強板20の先端と固定側端部金具3の先端との隙間Sをゲッター16の厚み以下として、固定側補強板20と固定側端部金具3で形成された空間部21にゲッター16を配置している。   In the dimensional relationship, the maximum height h1 of the curved portion at the tip of the fixed-side reinforcing plate 20 is higher than the height h2 of the tip portion of the fixed-side end fitting 3, and the axial direction from the tip of the fixed-side reinforcing plate 20 The dimension L1 is larger than the axial dimension L3 from the distal end portion of the fixed side end fitting 3, and the axial dimension L2 from the maximum height portion of the fixed side reinforcing plate 20 is the axis from the distal end portion of the fixed side end fitting 3. The fixed dimension reinforcing plate 20 and the fixed side end fitting 3 are formed so that the gap S between the tip of the fixed side reinforcing plate 20 and the tip of the fixed side end fitting 3 is less than the thickness of the getter 16 and is smaller than the direction dimension L3. A getter 16 is disposed in the space 21.

このゲッター16は、実施の形態1と同様、例えばスポット溶接やロウ付けなどによって、固定側端部金具3に固着する必要はない。ゲッター16は、ボタンタイプ、板状タイプどちらでも適用でき、かつ複数個配置してもよい。この端部構造は、固定側のみならず、可動側に適用しても、固定側と可動側の両側に適用してもよい。ゲッター16は、固定側の空間部にのみ、可動側の空間部にのみ、固定側と可動側の両方の空間部に配置してもよい。   Similar to the first embodiment, the getter 16 does not have to be fixed to the fixed-side end fitting 3 by spot welding or brazing, for example. The getter 16 can be either a button type or a plate type, and a plurality of getters 16 may be arranged. This end structure may be applied not only to the fixed side but also to the movable side, or to both sides of the fixed side and the movable side. The getter 16 may be arranged only in the space portion on the fixed side, only in the space portion on the movable side, and in both space portions on the fixed side and the movable side.

この実施の形態3に示す真空バルブでは、固定側端部金具3と固定側補強板20によってできる空間部21にゲッター16は封入されていて、開閉衝撃により脱落し易くなっているガス吸着材がゲッター16から脱落しても、脱落物の挙動は、まず固定側端部金具3の先端部に溜り、次に重力の変化があって固定側補強板20の先端部の傾斜をともなった面に載るため、最後には空間部21内に戻っていき、その空間部21に脱落物の存在が限られて、その空間部21外の高電界部分であるシールド13、固定側端部金具3の電界緩和部外面、絶縁容器1の沿面、固定側接点5、可動側接点6、電極棒4、7にまで脱落物が拡散することはない。   In the vacuum valve shown in the third embodiment, the getter 16 is enclosed in a space portion 21 formed by the fixed-side end fitting 3 and the fixed-side reinforcing plate 20, and a gas adsorbent that is easy to drop off due to an open / close impact is provided. Even if the getter 16 falls off, the behavior of the fallen object is first accumulated at the tip of the fixed-side end fitting 3, and then on the surface with the change in gravity and the tip of the fixed-side reinforcing plate 20 being inclined. Therefore, it finally returns to the inside of the space portion 21, and the presence of dropped objects is limited in the space portion 21, so that the shield 13, which is a high electric field portion outside the space portion 21, and the fixed-side end fitting 3 The fallen object does not diffuse to the outer surface of the electric field relaxation portion, the creeping surface of the insulating container 1, the fixed contact 5, the movable contact 6, and the electrode rods 4 and 7.

また、ゲッターは空間部21に配置され、ガス吸着材がコーティングされている面が円板状の固定側端板2、固定側端部金具3、固定側補強板20に接着することはない。固定側補強板20の先端と固定側端部金具3の間に設けた隙間Sからゲッター16がガスを吸着する。また、固定側補強板20が固定側端板2に固着され固定側端板2の板厚が増えて、固定側端板2の機械的強度補強になっている。 Further, the getter is disposed in the space portion 21 and the surface coated with the gas adsorbent is not bonded to the disk-shaped fixed side end plate 2, fixed side end fitting 3, and fixed side reinforcing plate 20. The getter 16 adsorbs the gas from the gap S provided between the tip of the fixed side reinforcing plate 20 and the fixed side end fitting 3. Further, the fixed-side reinforcing plate 20 is fixed to the fixed-side end plate 2, and the thickness of the fixed-side end plate 2 is increased, thereby reinforcing the mechanical strength of the fixed-side end plate 2.

以上の実施の形態3の真空バルブにおいては、実施の形態1と同様、脱落物が高電界部に拡散することがないため、耐電圧性能の低下を抑制することができ、耐電圧性能を安定化、向上することができる。また、ゲッター16は、空間部21に閉じ込められるので、固定側端部金具3に固着させる必要がないため、ゲッター16両面のガス吸着機能を活用できるため、真空度の信頼性を向上させることができる。   In the vacuum valve of the above-described third embodiment, the fallout does not diffuse into the high electric field part as in the first embodiment, so that it is possible to suppress a decrease in the withstand voltage performance and to stabilize the withstand voltage performance. Can be improved. In addition, since the getter 16 is confined in the space portion 21, it is not necessary to fix the getter 16 to the fixed-side end fitting 3, and the gas adsorption function on both sides of the getter 16 can be utilized, thereby improving the reliability of the degree of vacuum. it can.

また、ゲッター16は、ロウ付けの際に固定側端部金具3内に配置するだけであるため、スポット溶接やロウ付けなどの取り付け作業をすることなく空間部21に封入することができるため、真空バルブの組立作業性を良くすることができる。また、固定側補強板20によって、固定側端板2の板厚が増えるため、真空バルブの強度を向上させることができる。また、固定側補強板20の先端と固定側端部金具3の先端に隙間Sを設けているため、ガス吸着性能の信頼性が向上する。   Further, since the getter 16 is only disposed in the fixed side end fitting 3 at the time of brazing, it can be enclosed in the space portion 21 without performing mounting work such as spot welding or brazing. Assembling workability of the vacuum valve can be improved. Moreover, since the plate | board thickness of the fixed side end plate 2 increases with the fixed side reinforcement board 20, the intensity | strength of a vacuum valve can be improved. Moreover, since the clearance S is provided between the distal end of the fixed-side reinforcing plate 20 and the distal end of the fixed-side end fitting 3, the reliability of the gas adsorption performance is improved.

実施の形態4.
図5に示す実施の形態4における真空バルブは、固定側構造において、固定側電極棒4と円板状の固定側端板2の間に固定側補強板22が固着されており、図6に示すように、その固定側補強板22の外周縁部側に段差部22aを設けており、真空容器内において固定側補強板22を固定側端板2に重ね合わせたとき、その段差部22aと固定側端板2との間に空間部を形成し、その空間部にゲッター23を収納している。
Embodiment 4 FIG.
The vacuum valve according to Embodiment 4 shown in FIG. 5 has a fixed-side structure in which a fixed-side reinforcing plate 22 is fixed between the fixed-side electrode rod 4 and the disk-shaped fixed-side end plate 2. As shown, a stepped portion 22a is provided on the outer peripheral edge side of the fixed-side reinforcing plate 22, and when the fixed-side reinforcing plate 22 is superimposed on the fixed-side end plate 2 in the vacuum vessel, the stepped portion 22a A space is formed between the fixed end plate 2 and a getter 23 is accommodated in the space.

このゲッター23は、ボタンタイプ、板状タイプどちらでも適用でき、かつ固定側補強板22に複数個の段差部を設けることでゲッター23を複数個配置してもよい。この端部構造は、固定側のみならず、可動側に適用しても、固定側と可動側の両側に適用してもよい。ゲッター23は、固定側のみ、可動側のみ、固定側と可動側の両方に収納してもよい。その段差部22aと固定側端板2との間にゲッター23を収納し、その後に固定側端部金具3をロウ付けすることでゲッター23は、空間部の収納部に格納されている。   This getter 23 can be applied to either a button type or a plate type, and a plurality of getters 23 may be arranged by providing a plurality of stepped portions on the fixed reinforcing plate 22. This end structure may be applied not only to the fixed side but also to the movable side, or to both sides of the fixed side and the movable side. The getter 23 may be stored only on the fixed side, only on the movable side, or on both the fixed side and the movable side. The getter 23 is stored in the storage portion of the space portion by storing the getter 23 between the stepped portion 22a and the fixed-side end plate 2 and brazing the fixed-side end metal fitting 3 thereafter.

この実施の形態4に示す真空バルブでは、ゲッター23は初期の形状のまま固定側補強板22と固定側端板2の間の段差22aに収納されており、収納の際にゲッター23に無理な変形力を加えることなく配置される。また、ゲッター23は段差22a内部に空間の余裕をもって配置され、ガス吸着材がコーティングされている面が固定側端板2、固定側補強板22に接着することはない。また、固定側補強板22が固定側端板2に固着され固定側端板2の板厚が増えて、固定側端板2の機械的強度補強になっている。   In the vacuum valve shown in the fourth embodiment, the getter 23 is stored in the step 22a between the fixed-side reinforcing plate 22 and the fixed-side end plate 2 in its initial shape, and it is impossible for the getter 23 to be stored. Arranged without applying deformation force. Further, the getter 23 is disposed in the step 22 a with a sufficient space, and the surface coated with the gas adsorbent does not adhere to the fixed side end plate 2 and the fixed side reinforcing plate 22. Further, the fixed-side reinforcing plate 22 is fixed to the fixed-side end plate 2, and the thickness of the fixed-side end plate 2 is increased, thereby reinforcing the mechanical strength of the fixed-side end plate 2.

以上の実施の形態4の真空バルブにおいては、ゲッター23には、取り付け箇所に合わせるための無理な変形力を加える必要がないため、ゲッター23のベース板にコーティングされたガス吸着材が剥がれ易い状態になりにくいので脱落物の生成を抑制することができるため、耐電圧性能の低下を抑制することができ、耐電圧性能を安定化、向上することができる。   In the vacuum valve of the fourth embodiment described above, since it is not necessary to apply an excessive deformation force to the getter 23 to match the attachment location, the gas adsorbent coated on the base plate of the getter 23 is easily peeled off. Therefore, it is possible to suppress the generation of fallout, so that it is possible to suppress a decrease in withstand voltage performance, and to stabilize and improve the withstand voltage performance.

また、ゲッター23は、空間部に閉じ込められるので、固定側端部金具3に固着させる必要がないため、ゲッター23両面のガス吸着機能を活用できるため、真空度の信頼性を向上させることができる。また、ゲッター23は、ロウ付けの際に固定側端部金具3内に配置するだけであるため、スポット溶接やロウ付けなどの取り付け作業をすることなく封入することができるため、真空バルブの組立作業性を良くすることができる。また、固定側補強板22によって、固定側端板2の板厚が増えるため、真空バルブの強度を向上させることができる。   Further, since the getter 23 is confined in the space portion, it is not necessary to fix the getter 23 to the fixed-side end fitting 3. Therefore, since the gas adsorption function on both sides of the getter 23 can be utilized, the reliability of the degree of vacuum can be improved. . Further, since the getter 23 is only disposed in the fixed-side end fitting 3 at the time of brazing, it can be sealed without performing mounting work such as spot welding or brazing. Workability can be improved. Moreover, since the plate | board thickness of the fixed side end plate 2 increases with the fixed side reinforcement board 22, the intensity | strength of a vacuum valve can be improved.

1 絶縁容器 2 固定側端板
3、15 固定側端部金具 4 電極棒(固定側電極棒)
5 固定側接点 6 可動側接点
7 電極棒(可動側電極棒) 8 ベローズカバー
9 ベローズ 10 可動側端部金具
11 可動側端板 12 ガイド
13 シールド 14、16、23 ゲッター
18、20、22 固定側補強板
17、19、21 空間部。
DESCRIPTION OF SYMBOLS 1 Insulation container 2 Fixed side end plate 3, 15 Fixed side end metal fittings 4 Electrode rod (fixed side electrode rod)
DESCRIPTION OF SYMBOLS 5 Fixed side contact 6 Movable side contact 7 Electrode rod (movable side electrode rod) 8 Bellows cover 9 Bellows 10 Movable side end fitting 11 Movable side end plate 12 Guide 13 Shield 14, 16, 23 Getter 18, 20, 22 Fixed side Reinforcing plate 17, 19, 21 Space.

Claims (6)

絶縁容器の両端部を端板組立体により気密に封止した真空容器と、この真空容器内に接離可能に設けられた一対の電極を備えた真空バルブであって、両方又はいずれか一方の上記端板組立体は、上記電極を固定させた端板と、この端板と共に上記絶縁容器の端部に接合されシールド機能を有する端部金具とで構成されると共に、上記端板と上記端部金具とによって上記真空容器内に空間部を形成し、この空間部にゲッターを封入して配置したことを特徴とする真空バルブ。 A vacuum vessel comprising a vacuum vessel in which both end portions of an insulating vessel are hermetically sealed by an end plate assembly, and a pair of electrodes provided in the vacuum vessel so as to be able to come in contact with and away from each other. The end plate assembly includes an end plate to which the electrode is fixed, and an end fitting that is joined to the end of the insulating container together with the end plate and has a shielding function, and the end plate and the end. A vacuum valve characterized in that a space is formed in the vacuum vessel by a metal fitting and a getter is enclosed in the space. 絶縁容器の両端部を端板組立体により気密に封止した真空容器と、この真空容器内に接離可能に設けられた一対の電極を備えた真空バルブであって、
両方又はいずれか一方の上記端板組立体は、上記電極を固定させた端板と、この端板と共に上記絶縁容器の端部に接合されシールド機能を有する端部金具とで構成され、
上記端板に補強板を重ね合わせ、この補強板の周縁部と上記端部金具の周縁部を所定の間隔をおいて互いに平行して延長すると共にその両先端部を接合して上記真空容器内に空間部を形成し、この空間部にゲッターを配置したことを特徴とする真空バルブ。
A vacuum valve comprising a vacuum container in which both end portions of an insulating container are hermetically sealed by an end plate assembly, and a pair of electrodes provided in the vacuum container so as to be able to contact and separate from each other,
Both or any one of the end plate assemblies is composed of an end plate to which the electrode is fixed, and an end fitting that is joined to the end of the insulating container together with the end plate and has a shielding function,
A reinforcing plate is overlaid on the end plate, and the peripheral edge of the reinforcing plate and the peripheral edge of the end fitting are extended in parallel with each other at a predetermined interval, and both ends are joined to each other in the vacuum vessel. vacuum valve form a space, you characterized in that a getter in this space portion.
絶縁容器の両端部を端板組立体により気密に封止した真空容器と、この真空容器内に接離可能に設けられた一対の電極を備えた真空バルブであって、
両方又はいずれか一方の上記端板組立体は、上記電極を固定させた端板と、この端板と共に上記絶縁容器の端部に接合されシールド機能を有する端部金具とで構成され、
上記端部金具は、その内周縁部を延長し、その延長部を曲げ且つその折り返し先端部を上記端板まで延長することにより上記端板と共に上記真空容器内に空間部を形成し、この空間部にゲッターを配置したことを特徴とする真空バルブ。
A vacuum valve comprising a vacuum container in which both end portions of an insulating container are hermetically sealed by an end plate assembly, and a pair of electrodes provided in the vacuum container so as to be able to contact and separate from each other,
Both or any one of the end plate assemblies is composed of an end plate to which the electrode is fixed, and an end fitting that is joined to the end of the insulating container together with the end plate and has a shielding function,
The end fitting extends the inner peripheral edge, bends the extension and extends the folded tip to the end plate to form a space in the vacuum vessel together with the end plate. vacuum valve shall be the characterized in that a getter section.
上記補強板は、その先端部が外周方向に向かって曲げられた樋状の曲部を有し、上記端部金具は、その先端部が内周方向に向かって曲げられた樋状の曲部を有し、上記補強板の先端部の最大高さh1が上記端部金具の先端部の先端高さh2より高く、かつ上記補強板の先端部からの軸方向寸法L1が上記端部金具の先端部からの軸方向寸法L3より大きく、上記補強板の最大高さからの軸方向寸法L2が上記端部金具の先端部の最高部からの軸方向寸法L3より小さくて、上記補強板の先端と上記端部金具の先端との隙間Sを、上記ゲッターの厚み以下として、上記補強板と上記端部金具で形成された空間部に上記ゲッターを配置したことを特徴とする請求項2に記載の真空バルブ。   The reinforcing plate has a bowl-shaped bent portion whose tip is bent in the outer circumferential direction, and the end fitting is a bowl-shaped bent portion whose tip is bent in the inner circumferential direction. The maximum height h1 of the tip end portion of the reinforcing plate is higher than the tip height h2 of the tip end portion of the end fitting, and the axial dimension L1 from the tip end portion of the reinforcing plate is It is larger than the axial dimension L3 from the distal end, the axial dimension L2 from the maximum height of the reinforcing plate is smaller than the axial dimension L3 from the highest portion of the distal end of the end fitting, and the distal end of the reinforcing plate 3. The getter is disposed in a space formed by the reinforcing plate and the end fitting, with a gap S between the end plate and the tip of the end fitting being equal to or less than the thickness of the getter. Vacuum valve. 絶縁容器の両端部を端板組立体により気密に封止した真空容器と、この真空容器内に接離可能に設けられた一対の電極を備えた真空バルブであって、両方又はいずれか一方の上記端板組立体は、上記電極を固定させた端板と、この端板と共に上記絶縁容器の端部に接合されシールド機能を有する端部金具とで構成されると共に、上記端板に補強板を重ね合わせ、この補強板の周縁部の一部に段差を設け、この段差により上記真空容器内に空間部を形成し、この空間部にゲッターを配置したことを特徴とする真空バルブ。   A vacuum vessel comprising a vacuum vessel in which both end portions of an insulating vessel are hermetically sealed by an end plate assembly, and a pair of electrodes provided in the vacuum vessel so as to be able to come in contact with and away from each other. The end plate assembly includes an end plate to which the electrode is fixed, and an end fitting that is joined to the end portion of the insulating container together with the end plate and has a shielding function. A vacuum valve characterized in that a step is provided in a part of the peripheral portion of the reinforcing plate, a space is formed in the vacuum container by the step, and a getter is disposed in the space. 上記空間部を形成した部材は、金属部材で形成し電界緩和機能を有するシールド部材であることを特徴とする請求項1から請求項5のいずれか1項に記載の真空バルブ。   The vacuum valve according to any one of claims 1 to 5, wherein the member in which the space portion is formed is a shield member formed of a metal member and having an electric field relaxation function.
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