JP2011247788A - Insulation inspection device and insulation inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect a defective part occurring due to application of a high voltage, without the progression of damage.SOLUTION: A processing part 10 executes: high voltage inspection processing of inspecting an insulation state between conductor patterns 3 and 4 as inspection targets on the basis of an insulation resistance R between conductor patterns 3 and 4 at the time when a voltage generation part 7 is controlled to apply a preliminarily determined high voltage between conductor patterns 3 and 4 as an inspection voltage VeH; and low voltage inspection processing of inspecting the insulation state between conductor patterns 3 and 4 on the basis of an insulation resistance R between conductor patterns 3 and 4 at the time when the voltage generation part 7 is controlled to apply an inspection voltage VeL lower than the high voltage between conductor patterns 3 and 4 determined to be in a good insulation state in the high voltage inspection processing.

Description

  The present invention relates to an insulation inspection apparatus and an insulation inspection method for inspecting an insulation state between conductor patterns on a circuit board.

  As this type of insulation inspection method, a circuit board (printed wiring board) electrical inspection method disclosed in Patent Document 1 below is known. This electrical inspection method performs an insulation test between a pair of conductor patterns (between circuits) selected as an inspection target from among a plurality of conductor patterns formed on a circuit board (so-called bare board) on which electronic components are not mounted. An inspection method for performing an inspection in which a low-voltage inspection voltage is applied between a pair of conductor patterns selected as inspection objects between all conductor patterns to be inspected in advance by inspection object data. In the meantime, record the result that the inspection result is defective, and after completing the inspection of all inspection objects using this low voltage, delete the inspection object that became defective from all inspection object data, and leave the remaining inspection For the target data, an inspection in which a high-voltage inspection voltage is applied to a pair of conductor patterns selected as the inspection target is performed on all the inspection targets based on the remaining inspection target data. It is performed continuously for between the body pattern.

  According to this electrical inspection method (insulation inspection method), it is possible to inspect the inspection target without burning out the location of the insulation failure to be inspected or the portion that is about to be disconnected.

JP-A-6-230058 (page 3, FIG. 1)

  However, the above-described insulation inspection method has the following problems to be solved. That is, in the conventional insulation inspection method, an inspection for applying a high inspection voltage is finally performed to complete the inspection between conductor patterns to be inspected. However, after a high-voltage inspection voltage is applied, a defective state progresses at a specific part between the conductor patterns during the inspection being performed, and after the high-voltage inspection voltage is applied, that is, the high-voltage inspection voltage is applied. A phenomenon may occur in which this specific part reaches a state to be determined as a defective part after completion of the inspection to be performed by applying. For this reason, the conventional insulation inspection method has a problem to be solved that a defective portion generated in this way cannot be detected. Although it is possible to detect this defective portion by executing an inspection that applies a high-voltage inspection voltage again, the defective portion is more damaged by applying a high-voltage inspection voltage. Since it progresses, it is not preferable.

  The present invention has been made in view of the problems to be solved, and provides an insulation inspection apparatus and an insulation inspection method that can be detected without causing damage to a defective portion caused by application of a high voltage. Main purpose.

  In order to achieve the above object, the insulation inspection apparatus according to claim 1, wherein a voltage generation unit that generates an inspection voltage to be applied between conductor patterns to be inspected on a circuit board, and the conductor pattern generated by application of the inspection voltage. A circuit board inspection apparatus including a processing unit that performs an inspection process for inspecting an insulation state between the conductor patterns based on a physical quantity therebetween, wherein the processing unit controls the voltage generation unit to determine in advance. A high voltage inspection process for inspecting an insulation state between the conductor patterns based on the physical quantity between the conductor patterns when the applied high voltage is applied as the inspection voltage between the conductor patterns to be inspected. The voltage generator is controlled between the conductor patterns determined to have a good insulation state in the high-voltage inspection process, and the low voltage lower than the high voltage is controlled. That perform low pressure test process for testing the insulation state based on the physical quantity between the conductor patterns obtained while applied as the inspection voltage.

  The insulation inspection apparatus according to claim 2 is the insulation inspection apparatus according to claim 1, wherein the processing unit controls the voltage generation unit prior to the execution of the high-voltage inspection processing, and is lower than the high voltage. Performing a primary low-voltage inspection process for inspecting an insulation state between the conductor patterns based on the physical quantity when a low voltage is applied as the inspection voltage between the conductor patterns to be inspected; The high-pressure inspection process is executed between the conductor patterns that are determined to be good in the insulation state.

  The insulation inspection method according to claim 3 inspects an insulation state between the conductor patterns based on a physical quantity between the conductor patterns when a predetermined high voltage is applied between the conductor patterns to be inspected on the circuit board. The insulation is performed based on the physical quantity when a low voltage lower than the high voltage is applied between the conductor patterns that are determined to have a good insulation state in the high voltage inspection process. A low-pressure inspection process for inspecting the state is executed.

  The insulation inspection method according to claim 4 is the insulation inspection method according to claim 3, wherein the low voltage lower than the high voltage is applied between the conductor patterns prior to the execution of the high voltage inspection process. A primary low-pressure inspection process for inspecting the insulation state based on a physical quantity is executed, and the high-voltage inspection process is executed between the conductor patterns that are determined to be good in the insulation state in the primary low-pressure inspection process.

  In the insulation inspection apparatus according to the first aspect and the insulation inspection method according to the third aspect, the high-pressure inspection process and the low-pressure inspection process are executed in this order between the conductor patterns to be inspected. Therefore, according to the insulation inspection apparatus and the insulation inspection method, it is possible to inspect defects in the insulation state between conductor patterns that cannot be inspected without application of a high voltage for inspection, while applying a high voltage for inspection. Even if the failure state progresses and the phenomenon that the state that should be determined as the failure point after applying the voltage for inspection occurs in a specific part between the conductor patterns, the insulation failure that occurred in this specific part is low-voltage inspection It is possible to reliably detect the damage without advancing the process.

  Further, according to the insulation inspection apparatus according to claim 2 and the insulation inspection method according to claim 4, in the primary low-voltage inspection process executed prior to the high-voltage inspection process, damage is caused when a high-voltage inspection voltage is applied. Since it is possible to detect the presence of a defective portion that may be burned out and avoid execution of the high-pressure inspection process, it is possible to avoid a situation in which the defective portion existing between the pair of conductor patterns is damaged. .

1 is a configuration diagram showing a configuration of an insulation inspection device 1. 5 is a flowchart of insulation inspection processing 50. It is a flowchart of the insulation inspection process 50A.

  Hereinafter, an embodiment of an insulation inspection apparatus and an insulation inspection method will be described with reference to the accompanying drawings.

  First, the configuration of the insulation inspection apparatus 1 will be described with reference to FIG. In the figure, for easy understanding of the invention, only a pair of conductor patterns 3 and 4 are shown on the circuit board (bare board) 2. It is assumed that a conductor pattern is formed.

  The insulation inspection apparatus 1 includes a physical quantity (leakage current or insulation resistance. This example) between a pair of conductor patterns (wiring patterns) 3 and 4 as inspection targets selected from a plurality of conductor patterns formed on the circuit board 2. Then, as an example, it is a device for inspecting the insulation state between the conductor patterns 3 and 4 based on the insulation resistance R), and includes a first probe 5, a second probe 6, a voltage generator 7, a current measuring unit 8, a discharge. Unit 9, processing unit 10, storage unit 11, and output unit 12.

  The first probe 5 is moved by a moving mechanism (not shown) controlled by the processing unit 10 so as to be able to contact a predetermined contact point in one conductor pattern 3 of the pair of conductor patterns 3 and 4. It is configured. Similarly, the second probe 6 is moved by a moving mechanism (not shown) controlled by the processing unit 10, so that the second probe 6 reaches a predetermined contact point in the other conductor pattern 4 of the pair of conductor patterns 3 and 4. It is configured to be contactable.

  The voltage generation unit 7 is controlled by the processing unit 10 to generate and output an inspection voltage (DC voltage) Ve applied between a pair of output terminals (not shown). In addition, the voltage generator 7 is controlled by the processing unit 10, and as an example, the voltage value of the test voltage Ve is set to each power supply voltage (DC 5 volts or DC 12 volts) of all electronic components mounted on the circuit board 2. And a function of generating and outputting a test voltage VeH as a test voltage Ve, defined as a high voltage (high voltage: a predetermined known voltage, for example, about DC 100 volts). And a function of outputting a test voltage VeL as the test voltage Ve by defining a low voltage lower than the test voltage VeH. In this example, as an example, the inspection voltage VeL is the same as the minimum value among the absolute values of the power supply voltages (DC ± 5 volts, DC ± 12 volts, etc.) of all electronic components mounted on the circuit board 2. Or a voltage lower than this minimum value (low voltage: a predetermined known voltage, for example, about DC 2 volts), but there is a defective portion (for example, a thin conductor pattern having a whisker-like shape). Any voltage can be used as long as the voltage is low enough to prevent the defective portion from burning out when applied between a pair of conductive patterns. As an example, one output terminal of the pair of output terminals of the voltage generator 7 is connected to the first probe 5, and the other output terminal is connected to the second probe 6. With this configuration, the voltage generator 7 is configured to be able to apply the generated inspection voltage Ve between the pair of conductor patterns 3 and 4 via the pair of probes 5 and 6.

  The current measuring unit 8 measures the leakage current Im flowing between the pair of conductor patterns 3 and 4 due to the application of the inspection voltage Ve. In this example, as an example, the current measuring unit 8 is interposed between the other output terminal (terminal on the low potential side) of the voltage generating unit 7 and the third probe 6 and measures the leakage current Im. Further, the current measuring unit 8 outputs current data Di indicating the measured current value of the leakage current Im to the processing unit 10.

  As an example, the discharge unit 9 includes a series circuit including a switch whose on / off state is controlled by the processing unit 10 and a discharge resistor (none of which is shown) connected in series to the switch. This series circuit is connected between a pair of input terminals (not shown). One input terminal of the pair of input terminals of the discharge unit 9 is connected to the first probe 5, and the other input terminal is connected to the second probe 6. With this configuration, the discharge unit 9 is controlled by the processing unit 10, whereby charges accumulated in a stray capacitance (not shown) between the pair of conductor patterns 3 and 4 via the pair of probes 5 and 6. It is configured to be capable of discharging.

  The processing unit 10 is constituted by a CPU and executes a moving mechanism for moving the probes 5 and 6, a control for the voltage generation unit 7 and the discharge unit 9, and an insulation inspection process 50 shown in FIG. The insulation state between the conductor patterns 3 and 4 is inspected. The storage unit 11 is composed of a ROM and a RAM, and the inspection point position data defined in advance for each conductor pattern to be inspected on the circuit board 2, the operation program for the processing unit 10, and the insulation resistance A reference value (reference resistance value) A for R is stored in advance. The storage unit 11 also functions as a work memory for the processing unit 10. The output unit 12 is configured by a display device as an example, and displays the result of the insulation inspection process executed by the processing unit 10.

  Next, the operation of the insulation inspection apparatus 1 will be described with reference to FIGS.

  In the insulation inspection apparatus 1, in the operating state, the processing unit 10 executes the insulation inspection process 50 shown in FIG. In the insulation inspection process 50, the processing unit 10 first reads and moves the position data of the inspection point for a pair of conductor patterns to be inspected (conductor patterns 3 and 4 shown in FIG. 1 as an example). By controlling the mechanism, the probes 5 and 6 are moved to contact the inspection point of the conductor pattern 3 for the first probe 5 and the inspection point of the conductor pattern 4 for the second probe 6 (step 51). ).

  Next, the processing unit 10 executes a high-pressure inspection process (step 52). In the high-voltage inspection process, the processing unit 10 first executes control on the voltage generation unit 7 to output the inspection voltage VeH from the voltage generation unit 7. As a result, the inspection voltage VeH is applied between the pair of conductor patterns 3 and 4 via the pair of probes 5 and 6, and the first probe 5, conductor pattern 3, and both conductor patterns 3 are supplied from the voltage generator 7. , 4, a leakage current Im flows through a current path that returns to the voltage generation unit 7 via the insulation resistance R, the conductor pattern 4, and the second probe 6. The current measuring unit 8 disposed in the current path detects the leakage current Im, measures the current value, and outputs current data Di indicating the measured current value of the leakage current Im to the processing unit 10. To do.

  Next, the processing unit 10 calculates the insulation resistance R based on the voltage value of the known inspection voltage VeH and the current value of the leakage current Im specified by the current data Di output from the current measurement unit 8. To do. In addition, the processing unit 10 performs control on the voltage generation unit 7 to stop the output of the inspection voltage VeH. Subsequently, the processing unit 10 compares the calculated insulation resistance R with the reference value A stored in the storage unit 11. As a result of this comparison, when the calculated insulation resistance R is greater than or equal to the reference value A, the processing unit 10 determines that the insulation state between the conductor patterns 3 and 4 is good (normal) (in this case, provisional determination). When the calculated insulation resistance R is less than the reference value A, it is determined that the insulation state between the conductor patterns 3 and 4 is defective (abnormal) (in this case, final determination), and the determination result is an inspection target. The data is stored in the storage unit 11 in correspondence with the set of conductor patterns 3 and 4. Finally, the processing unit 10 is charged between the two conductor patterns 3 and 4 due to the application of the inspection voltage VeH between the two conductor patterns 3 and 4 by executing control on the discharge unit 9. Discharge the charge. Thereby, the high-pressure inspection process is completed.

  Next, the processing unit 10 refers to the determination result in the high-voltage inspection process stored in the storage unit 11 (step 53), and when the insulation state of both the conductor patterns 3 and 4 is good, the same conductor pattern 3 and 4 are subjected to low-pressure inspection processing (step 54). On the other hand, when the insulation state is defective, the conductor patterns 3 and 4 are finally determined as to the insulation state as described above. Therefore, the process proceeds to step 55 without executing the low-pressure inspection process.

  In the low-voltage inspection process, the processing unit 10 first executes control on the voltage generation unit 7 to output the inspection voltage VeL from the voltage generation unit 7. As a result, the inspection voltage VeL is applied between the pair of conductor patterns 3 and 4 via the pair of probes 5 and 6, and the first probe 5, the conductor pattern 3, and the both conductor patterns 3 are supplied from the voltage generator 7. , 4, a leakage current Im flows through a current path that returns to the voltage generation unit 7 via the insulation resistance R, the conductor pattern 4, and the second probe 6. The current measuring unit 8 disposed in the current path detects the leakage current Im, measures the current value, and outputs current data Di indicating the measured current value of the leakage current Im to the processing unit 10. To do.

  Next, the processing unit 10 calculates the insulation resistance R based on the voltage value of the known inspection voltage VeL and the current value of the leakage current Im specified by the current data Di output from the current measurement unit 8. To do. In addition, the processing unit 10 performs control on the voltage generation unit 7 to stop the output of the inspection voltage VeL. Subsequently, the processing unit 10 compares the calculated insulation resistance R with the reference value A stored in the storage unit 11. As a result of this comparison, when the calculated insulation resistance R is greater than or equal to the reference value A, the processing unit 10 determines that the insulation state between the conductor patterns 3 and 4 is good (in this case, final determination) and calculates When the insulation resistance R is less than the reference value A, it is determined that the insulation state between the conductor patterns 3 and 4 is defective (in this case, final determination), and the determination result is the conductor pattern 3 to be inspected. The data is stored in the storage unit 11 in correspondence with the four groups. Finally, the processing unit 10 is charged between the two conductor patterns 3 and 4 due to the application of the inspection voltage VeL between the two conductor patterns 3 and 4 by executing control on the discharge unit 9. Discharge the charge. Thereby, the low-pressure inspection process is completed.

  In this insulation inspection apparatus 1, a high-voltage inspection voltage VeH is applied in order to perform the low-voltage inspection process on the conductor patterns 3 and 4 that have been determined to have good insulation in the high-voltage inspection process. During the high-voltage inspection process being performed (during inspection), the defective state proceeds at a specific portion between the conductor patterns 3 and 4, and after the application of the inspection voltage VeH, that is, after the completion of the high-voltage inspection process, this specification is performed. Even when the phenomenon that the part reaches a state to be determined as a defective part occurs, the defective part can be reliably detected in the low-pressure inspection process.

  In this way, the final determination of the insulation state of the set of conductor patterns 3 and 4 is performed, whereby the insulation inspection process for the set of conductor patterns 3 and 4 is completed.

  In step 55, the processing unit 10 determines whether or not the inspection has been completed for all the conductor patterns to be inspected. If there is a set of uninspected conductor patterns, the uninspected conductor pattern is determined. The position data of the inspection point for the set is read from the storage unit 11 and the above steps 51 to 55 are executed. On the other hand, when it is determined in step 55 that there are no uninspected conductor pattern groups, that is, inspections for all conductor pattern groups to be inspected are completed, for each conductor pattern group to be inspected, The determination result for the insulation state is read from the storage unit 11 and the determination result is output to the output unit 12. In this example, since the output unit 12 is composed of a display device, the determination result is displayed on the screen of the display device (step 56). Thereby, the insulation inspection process is completed.

  Thus, in the insulation inspection apparatus 1 and the insulation inspection method, the high-pressure inspection process (step 52) and the low-pressure inspection process (step 54) are executed in this order for each set of conductor patterns to be inspected. . Therefore, according to the insulation inspection apparatus 1 and the insulation inspection method, a high-voltage inspection voltage can be inspected for defects in the insulation state between conductor patterns that cannot be inspected without application of a high-voltage inspection voltage VeH. Even if the phenomenon that the defective state progresses due to the application of VeH and the state to be determined as the defective portion after the application of the inspection voltage VeH occurs in the specific portion between the conductor patterns, the insulation generated in the specific portion Defects can be reliably detected without causing damage in the low-pressure inspection process.

  In the insulation inspection apparatus 1 and the insulation inspection method, the insulation inspection process 50 employs a configuration in which a high-voltage inspection process is first performed. In this configuration, between the pair of conductor patterns to be inspected. Is already present (for example, when a thin whisker-like conductor pattern is present), the high-voltage inspection voltage VeH is applied in the high-voltage inspection process, so that the defective portion May be damaged (for example, burned out). For this reason, as in the insulation inspection process 50A shown in FIG. 3, prior to the high-pressure inspection process, a low-pressure inspection process (primary low-pressure inspection process) different from the low-pressure inspection process in step 54 is executed in step 61. Can also be adopted. Hereinafter, the same steps as those in the insulation inspection process 50 are denoted by the same reference numerals, and redundant description is omitted.

  In this insulation inspection process 50A, the processing unit 10 executes step 51 to bring the first probe 5 into contact with the inspection point of the conductor pattern 3 and the second probe 6 into contact with the inspection point of the conductor pattern 4. After that, a low pressure inspection process (primary low pressure inspection process) is performed on the conductor patterns 3 and 4 (step 61).

  In the low-voltage inspection process, the processing unit 10 first executes control on the voltage generation unit 7 to output the inspection voltage VeL from the voltage generation unit 7. As a result, the inspection voltage VeL is applied between the pair of conductor patterns 3 and 4 via the pair of probes 5 and 6, and the first probe 5, the conductor pattern 3, and the both conductor patterns 3 are supplied from the voltage generator 7. , 4, a leakage current Im flows through a current path that returns to the voltage generation unit 7 via the insulation resistance R, the conductor pattern 4, and the second probe 6. The current measuring unit 8 disposed in the current path detects the leakage current Im, measures the current value, and outputs current data Di indicating the measured current value of the leakage current Im to the processing unit 10. To do.

  Next, the processing unit 10 calculates the insulation resistance R based on the voltage value of the known inspection voltage VeL and the current value of the leakage current Im specified by the current data Di output from the current measurement unit 8. To do. In addition, the processing unit 10 performs control on the voltage generation unit 7 to stop the output of the inspection voltage VeL. Subsequently, the processing unit 10 compares the calculated insulation resistance R with the reference value A stored in the storage unit 11. As a result of this comparison, when the calculated insulation resistance R is greater than or equal to the reference value A, the processing unit 10 determines that the insulation state between the conductor patterns 3 and 4 is good (in this case, provisional determination) and calculates When the insulation resistance R is less than the reference value A, it is determined that the insulation state between the conductor patterns 3 and 4 is defective (in this case, final determination), and the determination result is the conductor pattern 3 to be inspected. The data is stored in the storage unit 11 in correspondence with the four groups. Finally, the processing unit 10 is charged between the two conductor patterns 3 and 4 due to the application of the inspection voltage VeL between the two conductor patterns 3 and 4 by executing control on the discharge unit 9. Discharge the charge. Thereby, the low-pressure inspection process (primary low-pressure inspection process) is completed. By executing this low-pressure inspection process, when a defective portion such as a thin whisker-like conductor pattern already exists between the two conductor patterns 3 and 4, this defective portion can be detected.

  Next, the processing unit 10 refers to the determination result in the low-pressure inspection process stored in the storage unit 11 (step 62). When the insulation state of both the conductor patterns 3 and 4 is good, the same conductor pattern When the high-pressure inspection process is executed for 3 and 4 (step 52), the low-pressure inspection process is executed (step 54). On the other hand, when the insulation state is defective, the final determination of the insulation state is made for the conductor patterns 3 and 4 as described above. Therefore, the high pressure inspection process (step 52) and the low pressure inspection after step 62 are performed. The process proceeds to step 55 without executing the process (step 54). Thereafter, step 56 is executed in the same manner as the insulation inspection process 50.

  According to the insulation inspection apparatus 1 and the insulation inspection method for executing the insulation inspection process 50A, the high-voltage inspection voltage VeH is applied in the low-voltage inspection process (step 61) executed prior to the high-voltage inspection process (step 52). Since it is possible to detect the existence of a defective portion (for example, a thin whisker-like conductor pattern) that may be damaged when it is applied, it is possible to avoid the execution of the high-voltage inspection process. It is possible to avoid a situation where the defective part is damaged.

  Further, in each of the above-described insulation inspection processes 50 and 50A, a comparison is made with the calculated insulation resistance R using the common reference value A in the high-pressure inspection process (step 52) and the low-pressure inspection processes (steps 54 and 61). However, it is also possible to adopt a configuration in which the reference value used in the high-pressure inspection process (step 52) is different from the reference value used in each of the low-pressure inspection processes (steps 54 and 61). Specifically, the insulation resistance R calculated in each low-pressure inspection process (steps 54 and 61) is empirically smaller than the insulation resistance R calculated in the high-voltage inspection process (step 52). The reference value A (reference value AL) used in the low-pressure inspection process (step 54 or / and step 61) is set to a value smaller than the reference value A (reference value AH) used in the high-pressure inspection process (step 52). be able to. This makes it possible to make the determination of the insulation state in the low-pressure inspection process (step 54 or / and step 61) more severe, and in particular, the low-pressure inspection process (step 52) executed after the high-pressure inspection process (step 52). In 54), it is possible to more reliably detect a defective portion that has progressed to a state that should be determined as a defective portion after application of the inspection voltage VeH by applying the high-voltage inspection voltage VeH.

  In addition, each of the above-described insulation inspection methods is not limited to a flying probe type insulation inspection apparatus in which a plurality of probes are individually moved to contact a conductor pattern, and corresponds to a plurality of conductor patterns formed on a circuit board. The present invention can also be applied to a jig-type insulation inspection apparatus in which a plurality of probes are provided and the plurality of probes are moved in the direction of the circuit board by a common moving mechanism and simultaneously contact the corresponding conductor pattern.

DESCRIPTION OF SYMBOLS 1 Insulation inspection apparatus 2 Circuit board 3, 4 Conductor pattern 7 Voltage generation part 10 Processing part Ve, VeH, VeL Inspection voltage

Claims (4)

A voltage generator for generating a voltage for inspection to be applied between conductor patterns to be inspected on a circuit board;
A circuit board inspection apparatus comprising: a processing unit that performs an inspection process for inspecting an insulation state between the conductor patterns based on a physical quantity between the conductor patterns generated by application of the inspection voltage;
The processing unit controls the voltage generation unit to apply a predetermined high voltage as the inspection voltage between the conductor patterns to be inspected based on the physical quantity between the conductor patterns. A high voltage inspection process for inspecting an insulation state between conductor patterns is executed, and the high voltage is controlled by controlling the voltage generation unit between the conductor patterns determined to be good in the insulation state in the high voltage inspection process. An insulation inspection apparatus that performs a low-pressure inspection process that inspects the insulation state based on the physical quantity between the conductor patterns when a lower voltage lower than that is applied as the inspection voltage.   Prior to the execution of the high voltage inspection process, the processing unit controls the voltage generation unit to apply a low voltage lower than the high voltage as the inspection voltage between the conductor patterns to be inspected. A primary low-voltage inspection process for inspecting an insulation state between the conductor patterns based on the physical quantity is performed, and the high-voltage inspection is performed between the conductor patterns determined to be good in the insulation state in the primary low-voltage inspection process. The insulation inspection apparatus according to claim 1 which performs processing. Performing a high voltage inspection process for inspecting an insulation state between the conductor patterns based on a physical quantity between the conductor patterns when a predetermined high voltage is applied between conductor patterns to be inspected on the circuit board;
Low-pressure inspection processing for inspecting the insulation state based on the physical quantity when a low voltage lower than the high voltage is applied between the conductor patterns determined to be good in the high-voltage inspection processing Perform the insulation inspection method. Prior to the execution of the high-voltage inspection process, performing a primary low-pressure inspection process that inspects the insulation state based on the physical quantity when a low voltage lower than the high voltage is applied between the conductor patterns,
The insulation inspection method according to claim 3, wherein the high-pressure inspection process is performed between the conductor patterns that are determined to be good in the insulation state in the primary low-pressure inspection process.

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