JP2011236488A

JP2011236488A - Chemical treatment apparatus

Info

Publication number: JP2011236488A
Application number: JP2010111068A
Authority: JP
Inventors: Takashi Kobayashi; 小林　　隆; Takio Sekino; 滝夫関野; Yasutaka Naito; 泰敬内藤
Original assignee: Sumitomo Metal Mining Co Ltd
Current assignee: Sumitomo Metal Mining Co Ltd
Priority date: 2010-05-13
Filing date: 2010-05-13
Publication date: 2011-11-24
Anticipated expiration: 2030-05-13
Also published as: JP5488191B2

Abstract

PROBLEM TO BE SOLVED: To provide a chemical treatment apparatus capable of performing a chemical treatment without causing slack of a workpiece.SOLUTION: The chemical treatment apparatus includes: a workpiece transferring device 20 for transferring long sheet-like workpieces 1 in such a manner that the width direction is the vertical direction; and a chemical treatment tank 4 for performing a chemical treatment of each workpiece, and has upper and lower end transferring clamp 5, 6 groups which clamp the upper end and the lower end of each workpiece when the workpiece is transferred into the chemical treatment tank 4 and release the workpiece when the workpiece is transferred out of the tank 4. In the chemical treatment apparatus, an upper end transferring clamp 5 group of the workpiece transferring device 20 is fixed to an upper side endless belt 81 and a lower end transferring clamp 6 group is attached to a lower side endless belt 82 movably in the vertical direction. Further, an energizing implement for energizing each lower end transferring clamp vertically downward is provided between the lower side endless belt 82 and each lower end transferring clamp 6. Thereby, the occurrence of the slack of each workpiece is prevented, because each workpiece is transferred in such a state that the lower end side of the workpiece is pulled vertically downward by an appropriate energizing force caused by the action of the energizing implement.

Description

本発明は、フレキシブル基板のように極めて薄く柔軟性のある長尺シート状のワークを一定速度で搬送しながら化学処理を行う化学処理装置に係り、特に、ワークにタルミを発生させることなく化学処理が行える化学処理装置の改良に関するものである。 The present invention relates to a chemical processing apparatus that performs chemical processing while conveying an extremely thin and flexible long sheet-like workpiece such as a flexible substrate at a constant speed, and in particular, chemical processing without generating tarmi on the workpiece. It is related with the improvement of the chemical processing apparatus which can perform.

近年、電子機器は極めて薄く柔軟性のあるフレキシブル基板を使用することが多くなってきている。こうしたフレキシブル基板に対応させて、特許文献１には、リールに巻かれた長尺シート状のワーク（基板材料）をその幅方向を上下方向にして（すなわち、ワーク面を垂直方向にして）連続的に供給するワーク供給装置と、上記ワークをその幅方向を上下方向にして連続的にリールに巻き取るワーク巻取装置との間にメッキ処理槽を配置し、ワーク（基板材料）を長尺シート状のままメッキ処理する装置が提案されている。 In recent years, electronic devices have increasingly used flexible substrates that are extremely thin and flexible. Corresponding to such a flexible substrate, Patent Document 1 discloses that a long sheet-like workpiece (substrate material) wound on a reel is continuously arranged with its width direction set in the vertical direction (that is, with the workpiece surface set in the vertical direction). A plating tank is placed between the workpiece supply device that supplies the workpiece and the workpiece winding device that continuously winds the workpiece on the reel with the width direction set to the vertical direction, and the workpiece (substrate material) is long. An apparatus for performing a plating process in a sheet form has been proposed.

しかし、特許文献１に記載されたメッキ装置においては、長尺シート状ワーク（基板材料）の上端のみをクランプしながら搬送を行う構造になっているため、上記ワークの幅が広くかつ厚みが極めて薄い場合にはワークの搬送を行う工程あるいはメッキ処理を行う工程の際にワークにタルミが発生し、ワークの幅方向を上下方向にしながら安定して搬送することが困難となる問題点を有していた。 However, since the plating apparatus described in Patent Document 1 has a structure in which only the upper end of a long sheet-like workpiece (substrate material) is clamped and transported, the workpiece is wide and extremely thick. If it is thin, there is a problem that tarmi occurs in the work during the process of transferring the work or the process of plating, making it difficult to stably transfer the work in the vertical direction. It was.

そこで、本出願人は、長尺シート状ワーク（基板材料）の上端に加えて長尺シート状ワークの下端をもクランプしながら搬送するワーク搬送装置が付設された化学処理装置を提案している（特許文献２参照）。 In view of this, the present applicant has proposed a chemical processing apparatus provided with a work transfer device for transferring while clamping the lower end of the long sheet-like workpiece in addition to the upper end of the long sheet-like workpiece (substrate material). (See Patent Document 2).

すなわち、本出願人が提案した化学処理装置は、リールに巻かれた長尺シート状のワークをその幅方向を上下方向にして連続的に供給するワーク供給装置と、上記ワークをその幅方向を上下方向にして連続的にリールに巻き取るワーク巻取装置と、上記ワーク供給装置とワーク巻取装置との間に配置されかつその幅方向を上下方向にして搬送される上記ワークに対し化学処理を行う化学処理槽とを具備する化学処理装置であって、上記ワークの化学処理槽搬入時にワークの上端および下端をそれぞれクランプする上下端搬送クランプ群を有しかつ上下端搬送クランプ群は独立駆動される一対のエンドレスベルトにそれぞれ等間隔で取付けられて定寸毎に上記ワークをクランプしながらその幅方向を上下方向にして搬送すると共に、上記ワークの化学処理槽搬出時に上下端搬送クランプが順次開放されて化学処理されたワークのみをその幅方向を上下方向にしてワーク巻取装置のリールに巻き取らせるワーク搬送装置が設けられていることを特徴とするものであった。 That is, the chemical processing apparatus proposed by the present applicant includes a workpiece supply device that continuously feeds a long sheet-shaped workpiece wound on a reel with its width direction set up and down, and the workpiece in the width direction. Chemical treatment for the workpiece winding device that is continuously wound on a reel in the vertical direction, and the workpiece that is disposed between the workpiece supply device and the workpiece winding device and that is conveyed with its width direction being the vertical direction A chemical treatment tank having a top and bottom conveyance clamp group that clamps the upper and lower ends of the workpiece when the workpiece is loaded into the chemical treatment tank, and the upper and lower conveyance clamp groups are independently driven. A pair of endless belts are attached at equal intervals, and the workpiece is conveyed with its width direction being set up and down while clamping the workpiece for each fixed size. A workpiece transfer device is provided in which the upper and lower transfer clamps are sequentially opened at the time of carrying out the chemical treatment tank and only the workpiece that has been chemically processed is wound up on the reel of the workpiece take-up device with its width direction set to the vertical direction. Was.

そして、ワーク搬送装置が付設された上記化学処理装置によれば、長尺シート状ワークの上端および下端をそれぞれクランプしながら搬送する構造になっているため、上記ワークの幅が広くかつ厚みが極めて薄い場合でも、ワーク搬送を行う工程あるいは化学処理を行う工程の際にワークにタルミが発生し難くなる利点を有するものであった。特に、上方側に配置された上側エンドレスベルトに上端搬送クランプ群が固定して取付けられ、下方側に配置された下側エンドレスベルトに下端搬送クランプ群が鉛直方向へ移動可能な状態で取付けられる構造にした場合、下端搬送クランプ群の自重により鉛直方向へ力を作用させながら上記ワークが搬送されることになるため、更にワークにタルミが発生し難くなってワークの幅方向を上下方向にしながら安定して搬送できる利点を有するものであった。 And according to the said chemical processing apparatus with which the workpiece conveyance apparatus was attached, since it has the structure conveyed while clamping the upper end and lower end of a long sheet-like workpiece, respectively, the width | variety of the said workpiece | work is wide, and thickness is extremely Even when the workpiece is thin, there is an advantage that it is difficult for the workpiece to be damaged during the step of carrying the workpiece or the step of performing the chemical treatment. In particular, a structure in which the upper end transport clamp group is fixedly attached to the upper endless belt disposed on the upper side, and the lower end transport clamp group is mounted on the lower endless belt disposed on the lower side so as to be movable in the vertical direction. In this case, the workpiece is transported while applying a force in the vertical direction due to the weight of the lower-end transport clamp group. Thus, it has the advantage that it can be conveyed.

但し、特許文献２に記載された化学処理装置においては、ワークに作用する鉛直方向への力が上記下端搬送クランプ群の自重により決まってしまうため、化学処理槽内において上下端搬送クランプ群やワーク等に大きな浮力が作用するような場合、ワークタルミを防止する最適な力が得られなくなることがあり、未だ改善の余地を残していた。 However, in the chemical processing apparatus described in Patent Document 2, the force in the vertical direction acting on the workpiece is determined by the weight of the lower end conveyance clamp group. When a large buoyancy acts on the surface, it may not be possible to obtain the optimum force to prevent work tarmi, and there is still room for improvement.

また、従来よりも幅が更に広くかつ厚みが更に薄いワークを搬送させるような場合、ワークに対し下端方向からの引っ張り力を作用させただけでは上記ワークタルミを完全に解消させることは困難であった。 Also, when transporting a workpiece that is wider and thinner than conventional ones, it is difficult to completely eliminate the workpiece tarmi by simply applying a tensile force from the lower end direction to the workpiece. It was.

特開２００６−１９３７９４号公報JP 2006-193794 A 特開２００９−１２０８８９号公報JP 2009-120889 A

本発明はこのような問題点に着目してなされたもので、その課題とするところは、ワークに作用する鉛直方向への力が任意に調整できる化学処理装置を提供し、長尺シート状ワークの幅が更に広くかつ厚みが更に薄い場合でもワークタルミを発生させることなく安定して化学処理が行える化学処理装置を提供することにある。 The present invention has been made paying attention to such problems, and the object of the present invention is to provide a chemical processing apparatus capable of arbitrarily adjusting the vertical force acting on the workpiece, and to provide a long sheet-like workpiece. It is an object of the present invention to provide a chemical processing apparatus capable of stably performing chemical processing without generating work tarmi even when the width of the substrate is wider and thinner.

すなわち、請求項１に係る発明は、
リールに巻かれた長尺シート状のワークをその幅方向を上下方向にして連続的に供給するワーク供給装置と、上記ワークをその幅方向を上下方向にして連続的にリールに巻き取るワーク巻取装置と、上記ワーク供給装置とワーク巻取装置との間に配置されかつその幅方向を上下方向にして搬送される上記ワークに対し化学処理を行う化学処理槽と、上記ワークの化学処理槽搬入時にワークの上端および下端をそれぞれクランプする上下端搬送クランプ群を有しかつ上下端搬送クランプ群は独立駆動される一対のエンドレスベルトにそれぞれ等間隔で取付けられて定寸毎に上記ワークをクランプしながらその幅方向を上下方向にして搬送すると共に上記ワークの化学処理槽搬出時に上下端搬送クランプが順次開放されて化学処理されたワークのみをその幅方向を上下方向にして上記ワーク巻取装置のリールに巻き取らせるワーク搬送装置とを備える化学処理装置において、
上方側に配置された上側エンドレスベルトに上記上端搬送クランプ群が固定して取付けられ、下方側に配置された下側エンドレスベルトに上記下端搬送クランプ群が鉛直方向へ移動可能に取り付けられると共に、上記下側エンドレスベルトと各下端搬送クランプとの間には各下端搬送クランプを鉛直下方向へ向けて付勢する付勢手段が設けられていることを特徴とし、
また、請求項２に係る発明は、
請求項１に記載の発明に係る化学処理装置において、
上記下側エンドレスベルトに着脱可能に取り付けられる上側部材並びに下側部材と、上記上側部材と下側部材間に設けられた隙間を上下方向へ移動すると共に上記下端搬送クランプが固定されるスライドブロックと、上側部材とスライドブロックとの隙間に設けられかつ上記スライドブロックを上側部材側から下側部材側へ向けて付勢する圧縮バネと、上記上側部材と下側部材間の上記隙間に設けられかつ圧縮バネとスライドブロックを案内するためのシャフトとで上記付勢手段が構成されていることを特徴とする。 That is, the invention according to claim 1
A workpiece supply device that continuously feeds a long sheet-shaped workpiece wound around a reel with its width direction set up and down, and a workpiece winding that winds the workpiece continuously around the reel with its width direction set up and down A chemical treatment tank that performs chemical treatment on the workpiece that is disposed between the workpiece take-up device, the workpiece supply device, and the workpiece take-up device and that has its width direction set in the vertical direction; It has upper and lower end conveyance clamp groups that clamp the upper and lower ends of the workpiece at the time of loading, and the upper and lower end conveyance clamp groups are attached to a pair of independently driven endless belts at equal intervals to clamp the workpiece for each fixed size. While the workpiece is transported with its width direction set up and down, the upper and lower end transport clamps are opened sequentially when the workpiece is unloaded in the chemical treatment tank. In the chemical treatment system and a workpiece transfer device for wound on the reel of the work take-up device with its width direction in the vertical direction,
The upper end transport clamp group is fixedly attached to the upper endless belt disposed on the upper side, and the lower end transport clamp group is attached to the lower endless belt disposed on the lower side so as to be movable in the vertical direction. A biasing means is provided between the lower endless belt and each lower end transport clamp to bias each lower end transport clamp in a vertically downward direction.
The invention according to claim 2
In the chemical processing apparatus according to the invention of claim 1,
An upper member and a lower member that are detachably attached to the lower endless belt, and a slide block that moves up and down a gap provided between the upper member and the lower member and to which the lower end conveyance clamp is fixed. A compression spring provided in a gap between the upper member and the slide block and biasing the slide block from the upper member side toward the lower member side; and provided in the gap between the upper member and the lower member; The biasing means is constituted by a compression spring and a shaft for guiding the slide block.

次に、請求項３に係る発明は、
請求項１または２に記載の発明に係る化学処理装置において、
上記上端搬送クランプにおける一対のクランプ先端が断面略Ｊ字形状の弾性材料により構成され、ワークの上端をクランプしたときにクランプ先端が弾性変形してワークの上端を鉛直上方向へ引き上げる構造になっていることを特徴とし、
請求項４に係る発明は、
請求項１、２または３に記載の発明に係る化学処理装置において、
上記化学処理槽に搬入されかつ搬出される上端搬送クランプ群の化学処理槽内における搬送位置を、上端搬送クランプ群の搬入前と搬出後における搬送基準位置より上方側へ変位させる変位レールが化学処理槽内に設けられ、ワークの上端に張りを与えながらワークが化学処理槽内を搬送される構造になっていることを特徴とするものである。 Next, the invention according to claim 3 is
In the chemical processing apparatus according to the invention of claim 1 or 2,
A pair of clamp tips in the upper end transport clamp is made of an elastic material having a substantially J-shaped cross section, and when the upper end of the workpiece is clamped, the clamp tip is elastically deformed to pull up the upper end of the workpiece vertically upward. It is characterized by
The invention according to claim 4
In the chemical processing apparatus according to the invention of claim 1, 2, or 3,
A displacement rail that displaces the transfer position in the chemical treatment tank of the upper end transfer clamp group carried into and out of the chemical treatment tank upward from the transfer reference position before and after the upper end transfer clamp group is carried in is chemically processed. It is provided in the tank, and the work is transported through the chemical processing tank while applying tension to the upper end of the work.

上記ワーク搬送装置が付設された請求項１〜２に係る化学処理装置によれば、
上方側に配置された上側エンドレスベルトに上端搬送クランプ群が固定して取付けられ、下方側に配置された下側エンドレスベルトに下端搬送クランプ群が鉛直方向へ移動可能に取り付けられると共に、上記下側エンドレスベルトと各下端搬送クランプとの間には各下端搬送クランプを鉛直下方向へ向けて付勢する付勢手段が設けられていることから、ワークに作用させる鉛直方向への力に関し、下端搬送クランプ群の自重による作用に加えて上記付勢手段の付勢力をも作用させることができるため、ワークに作用させる鉛直方向への力を任意に調整することが可能となる。 According to the chemical processing apparatus according to claim 1 or 2, wherein the work conveying device is attached.
The upper end conveyance clamp group is fixedly attached to the upper endless belt arranged on the upper side, and the lower end conveyance clamp group is attached to the lower endless belt arranged on the lower side so as to be movable in the vertical direction. Since an urging means is provided between the endless belt and each lower-end conveyance clamp to urge each lower-end conveyance clamp vertically downward, the lower-end conveyance is related to the vertical force acting on the workpiece. Since the urging force of the urging means can be applied in addition to the action due to the weight of the clamp group, the force in the vertical direction applied to the workpiece can be arbitrarily adjusted.

従って、長尺シート状ワークの幅が更に広くかつ厚みが更に薄くなるような場合でも、ワークの搬送を行う工程あるいは化学処理を行う工程の際にワークタルミが発生し難くなるため、ワークの幅方向を上下方向にしながら安定して搬送することが可能となる。 Accordingly, even when the width of the long sheet-like workpiece is wider and the thickness is further reduced, it is difficult for workpiece tarmi to occur during the workpiece transfer process or the chemical treatment process. It becomes possible to convey stably while keeping the direction up and down.

特に、請求項３〜４に係る化学処理装置によれば、
上記上端搬送クランプ群の作用によりワーク上端が鉛直上方向へ引き上げられ、かつ、上記下端搬送クランプ群の作用によりワーク下端が鉛直下方向へ引き下げられる構造になっていることから、上記長尺シート状ワークはその幅方向を上下方向とした両端が引っ張られた状態で搬送されることになるため、ワークタルミが更に発生し難くなってワークの搬送並びに化学処理を更に安定して行なうことが可能となる。 In particular, according to the chemical processing apparatus according to claims 3 to 4,
The upper end of the workpiece is pulled up vertically by the action of the upper end transport clamp group, and the lower end of the work is pulled down vertically by the action of the lower end transport clamp group. Since the workpiece is transported in a state where both ends of the width direction are pulled up and down, workpiece tarmi is less likely to occur, and it is possible to perform workpiece transportation and chemical treatment more stably. Become.

本発明に係る化学処理装置の側面図。The side view of the chemical processing apparatus which concerns on this invention. 本発明に係る化学処理装置の平面図。The top view of the chemical processing apparatus which concerns on this invention. 本発明に係る化学処理装置に組み込まれたワーク搬送装置の上端搬送クランプが開放された状態を示す説明図。Explanatory drawing which shows the state by which the upper end conveyance clamp of the workpiece conveyance apparatus integrated in the chemical processing apparatus which concerns on this invention was open | released. ワーク搬送装置の下端搬送クランプが開放された状態を示す説明図。Explanatory drawing which shows the state by which the lower end conveyance clamp of the workpiece conveyance apparatus was open | released. ワークの上端および下端がワーク搬送装置の上下搬送クランプにそれぞれクランプされて搬送される状態を示す説明図。Explanatory drawing which shows the state which the upper end and lower end of a workpiece | work are clamped and conveyed by the up-and-down conveyance clamp of a workpiece conveyance apparatus, respectively.

次に、本発明の実施の形態について図面を参照し詳細に説明する。 Next, embodiments of the present invention will be described in detail with reference to the drawings.

尚、図１は本発明に係る化学処理装置の側面図、図２はその平面図を示しており、また、図３は上記化学処理装置に組み込まれたワーク搬送装置の上端クランプが開放された状態を示す説明図、図４は上記ワーク搬送装置の下端搬送クランプが開放された状態を示す説明図、図５はワークの上端および下端がワーク搬送装置の上下端搬送クランプにそれぞれクランプされて搬送される状態を示す説明図である。 FIG. 1 is a side view of the chemical processing apparatus according to the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a diagram illustrating that the upper end clamp of the workpiece transfer apparatus incorporated in the chemical processing apparatus is opened. FIG. 4 is an explanatory view showing a state in which the lower end conveyance clamp of the workpiece conveying device is opened, and FIG. 5 is an example in which the upper end and the lower end of the workpiece are clamped by the upper and lower end conveying clamps of the workpiece conveying device. It is explanatory drawing which shows the state performed.

まず、本発明に係る化学処理装置は、図１および図２に示すようにリールに巻かれた長尺シート状のワーク１をその幅方向を上下方向にして連続的に供給するワーク供給装置２と、上記ワーク１をその幅方向を上下方向にして連続的にリールに巻き取るワーク巻取装置３と、上記ワーク供給装置２とワーク巻取装置３との間に配置されて上記ワーク１に対しメッキ等の化学処理を行う化学処理槽４と、この化学処理槽４内に未処理のワーク１をその幅方向を上下方向にして搬入しかつ処理後のワーク１をその幅方向を上下方向にして搬出するワーク搬送装置２０とでその主要部が構成されている。 First, a chemical processing apparatus according to the present invention is a work supply apparatus 2 that continuously supplies a long sheet-shaped work 1 wound around a reel with its width direction set up and down as shown in FIGS. And a work take-up device 3 that continuously winds the work 1 on a reel with the width direction thereof being an up-down direction, and the work 1 is disposed between the work supply device 2 and the work take-up device 3. A chemical treatment tank 4 for performing chemical treatment such as plating, and an untreated workpiece 1 is carried into the chemical treatment tank 4 with its width direction set to the vertical direction, and the processed work 1 is set to the vertical direction with respect to the width direction. The main part is comprised by the workpiece conveyance apparatus 20 carried out in this way.

すなわち、リールに巻かれた長尺シート状のワーク１を供給するワーク供給装置２と、このワーク１をリールに巻き取るワーク巻取装置３と、これ等ワーク供給装置２とワーク巻取装置３間に配置された化学処理槽４を備えており、この化学処理槽４は必要な工程に応じ複数の槽により構成されている。また、ワーク１はその幅方向を上下方向にしてワーク供給装置２からワーク巻取装置３へ連続して搬送されるため、上記化学処理槽４への搬入時にワーク１の上端と下端をそれぞれクランプしながら搬送するワーク搬送装置２０が設けられている。 That is, a workpiece supply device 2 for supplying a long sheet-like workpiece 1 wound on a reel, a workpiece winding device 3 for winding the workpiece 1 on a reel, and the workpiece supply device 2 and the workpiece winding device 3. A chemical treatment tank 4 is provided between them, and the chemical treatment tank 4 is composed of a plurality of tanks according to necessary steps. In addition, since the workpiece 1 is continuously conveyed from the workpiece supply device 2 to the workpiece winding device 3 with its width direction set to the vertical direction, the upper end and the lower end of the workpiece 1 are clamped at the time of loading into the chemical treatment tank 4. A workpiece transfer device 20 is provided for transferring the workpiece.

このワーク搬送装置２０は、ワーク１上端をクランプする複数の上端搬送クランプ５並びにワーク１下端をクランプする複数の下端搬送クランプ６と、ゴムが被覆された上側プーリー１０１と所定距離を介し対向配置された上側プーリー１２１との間に巻回され上記上端搬送クランプ５群が取付けられる上側エンドレスベルト８１と、ゴムが被覆された下側プーリー１０２と所定距離を介し対向配置された下側プーリー１２２との間に巻回され上記下端搬送クランプ６群が取付けられる下側エンドレスベルト８２と、上記上側プーリー１０１と下側プーリー１０２にそれぞれ設けられて上側エンドレスベルト８１と下側エンドレスベルト８２とを独立駆動する上下独立した一対のサーボモータ９１、９２と、上記エンドレスベルト８１、８２の近傍に付設されかつ各エンドレスベルトに設けられたマーク（図示せず）を検知して各エンドレスベルトの移動量をそれぞれに検出する光電センサー１１と、上記上側プーリー１０１と下側プーリー１０２の外周面近傍に沿って設けられかつ上端搬送クランプ５群と下端搬送クランプ６群に付帯されたローラー２１、２２（図３および図４参照）が接触するタイミングで上端搬送クランプ５群と下端搬送クランプ６群の各クランプが開放される円弧形状の当て板７を備えている。 The workpiece transfer device 20 is arranged to face a plurality of upper end transfer clamps 5 for clamping the upper end of the workpiece 1 and a plurality of lower end transfer clamps 6 for clamping the lower end of the workpiece 1 and an upper pulley 101 covered with rubber through a predetermined distance. An upper endless belt 81 wound between the upper pulley 121 and attached to the upper end conveying clamp 5 group, and a lower pulley 122 disposed opposite to the lower pulley 102 covered with rubber through a predetermined distance. A lower endless belt 82 wound around and attached to the lower end transport clamp 6 group, and provided on the upper pulley 101 and the lower pulley 102, respectively, and independently drives the upper endless belt 81 and the lower endless belt 82. A pair of upper and lower independent servo motors 91, 92 and the endless belts 81, 82 A photoelectric sensor 11 that detects a mark (not shown) attached to each endless belt and is provided in the vicinity thereof to detect the amount of movement of each endless belt, and outer peripheral surfaces of the upper pulley 101 and the lower pulley 102 The upper end transport clamp 5 group and the lower end transport clamp 6 group are provided at a timing when rollers 21 and 22 (see FIGS. 3 and 4) provided along the vicinity and attached to the upper end transport clamp 5 group and the lower end transport clamp 6 group contact each other. Each of the clamps is provided with an arc-shaped contact plate 7 that is opened.

そして、上記ワーク１の化学処理槽４搬入時に、上端搬送クランプ５群と下端搬送クランプ６群に付帯されたローラー２１、２２が上記当て板７に押し当てられて開放されていた各クランプが、ローラー２１、２２と当て板７との接触が終了して各クランプが閉止するタイミングで、ワーク供給装置２からその幅方向を上下方向にして供給されてきたワーク１の上端および下端を上端搬送クランプ５群と下端搬送クランプ６群とで滑らかにクランプすると共に、上端搬送クランプ５群と下端搬送クランプ６群は独立駆動される一対のエンドレスベルト８１、８２にそれぞれ等間隔で取付けられて定寸毎に上記ワーク１をクランプしながらその幅方向を上下方向にして化学処理槽４内に搬入させる。 Then, when the workpiece 1 is loaded into the chemical treatment tank 4, the rollers 21 and 22 attached to the upper end transport clamp 5 group and the lower end transport clamp 6 group are pressed against the abutting plate 7 and opened, At the timing when the contact between the rollers 21 and 22 and the contact plate 7 is completed and each clamp is closed, the upper end and the lower end of the work 1 supplied from the work supply device 2 with the width direction set in the vertical direction are the upper end conveyance clamps. The 5 group and the lower end transport clamp 6 group are smoothly clamped, and the upper end transport clamp 5 group and the lower end transport clamp 6 group are attached to a pair of endless belts 81 and 82 that are independently driven at regular intervals, respectively. Then, the workpiece 1 is carried into the chemical treatment tank 4 with its width direction set up and down while being clamped.

また、化学処理された上記ワーク１の化学処理槽４搬出時には、上端搬送クランプ５群と下端搬送クランプ６群に付帯されたローラー２１、２２が上記当て板７に順次押し当てられて各クランプが開放され、化学処理されたワーク１のみがその幅方向を上下方向にしてワーク巻取装置３のリールに巻き取られる。 When the chemically treated workpiece 1 is carried out in the chemical treatment tank 4, the rollers 21 and 22 attached to the upper end conveyance clamp 5 group and the lower end conveyance clamp 6 group are sequentially pressed against the abutting plate 7, and each clamp is moved. Only the workpiece 1 that has been opened and chemically treated is wound on the reel of the workpiece winding device 3 with its width direction set to the vertical direction.

尚、上端搬送クランプ５群と下端搬送クランプ６群が取付けられた上端エンドレスベルト８１と下端エンドレスベルト８２は、独立駆動する上下独立したサーボモータ９１、９２とこれ等サーボモータ９１、９２に直結されたゴム被覆の上側プーリー１０１と下側プーリー１０２によって滑り無く回転し、かつ、各エンドレスベルトに設けられた上記マークが光電センサー１１により検出されて各エンドレスベルトの移動量に変換され、この移動量に基づき上下独立したサーボモータ９１、９２により上端搬送クランプ５群と下端搬送クランプ６群の搬送速度が制御されて、上端搬送クランプ５群と下端搬送クランプ６群が同期しながら上記ワーク１を搬送することが可能となる。 The upper end endless belt 81 and the lower end endless belt 82 to which the upper end transport clamp 5 group and the lower end transport clamp 6 group are attached are directly connected to the servo motors 91 and 92 which are independently driven and the servo motors 91 and 92. The rubber-coated upper pulley 101 and lower pulley 102 rotate without slipping, and the mark provided on each endless belt is detected by the photoelectric sensor 11 and converted into a moving amount of each endless belt. The upper and lower conveying clamps 5 and 6 are controlled by the servo motors 91 and 92 which are independent from each other on the upper and lower sides, and the workpiece 1 is conveyed while the upper and lower conveying clamps 5 and 6 are synchronized. It becomes possible to do.

ところで、上側エンドレスベルト８１に取付けられる上端搬送クランプ５群と下側エンドレスベルト８２に取付けられる下端搬送クランプ６群との間隔を、長尺シート状ワーク１の幅寸法に対応させて機械的に一定の間隔に配置させることは機械組立精度上困難である。このため、上端搬送クランプ５群に関しては、図３に示すように止め具２００を用いて上側エンドレスベルト８１に上端搬送クランプ５群を固定し搬送中の基準位置とし、上端搬送クランプ５群がゴム被覆の上側プーリー１０１位置に搬送されたときには、上側プーリー１０１に設けられた溝１３により位置規制して上側プーリー１０１搬送中の基準位置とするようになっている。他方、下側エンドレスベルト８２に取付けられる下端搬送クランプ６群に関しては、上記ワーク１に作用させる鉛直方向への力を任意に調整できるようにするため、図４に示すように下側エンドレスベルト８２に対し下端搬送クランプ６群が鉛直方向へ移動可能に取付けられており、かつ、上記下側エンドレスベルト８２と各下端搬送クランプ６との間には各下端搬送クランプ６を鉛直下方向へ向けて付勢する以下の付勢手段が設けられている。すなわち、図４と図５に示すように、上記付勢手段は、下側エンドレスベルト８２の上端側と下端側に止め具２００を用いて着脱可能に取り付けられた上側部材３０ａ並びに下側部材３０ａと、上側部材３０ａと下側部材３０ａ間の隙間を上下方向へ移動すると共に上記下端搬送クランプ６が固定されるスライドブロック３１と、上側部材３０ａとスライドブロック３１との隙間に設けられかつ上記スライドブロック３１を上側部材３０ａ側から下側部材３０ａ側へ向けて付勢する圧縮バネ３０と、上記上側部材３０ａと下側部材３０ａ間の上記隙間に設けられかつ圧縮バネ３０とスライドブロック３１を案内するためのシャフト３２とで構成されており、上記上側部材３０ａとスライドブロック３１との隙間に設けられる圧縮バネ３０の種類を適宜変更することで上記ワーク１に作用させる鉛直方向への力を任意に調整することが可能となる。 By the way, the interval between the upper end conveyance clamp 5 group attached to the upper endless belt 81 and the lower end conveyance clamp 6 group attached to the lower endless belt 82 is mechanically constant corresponding to the width dimension of the long sheet-like workpiece 1. It is difficult to arrange them at intervals of machine assembly accuracy. For this reason, as shown in FIG. 3, with respect to the upper end transport clamp 5 group, the upper end transport clamp 5 group is fixed to the upper endless belt 81 using a stopper 200 as a reference position during transport. When transported to the position of the upper pulley 101 of the covering, the position is regulated by the groove 13 provided in the upper pulley 101 so as to be a reference position during the transport of the upper pulley 101. On the other hand, with respect to the lower end conveying clamp 6 group attached to the lower endless belt 82, the lower endless belt 82 can be adjusted as shown in FIG. The lower end conveyance clamps 6 are attached to be movable in the vertical direction, and the lower end conveyance clamps 6 are directed vertically downward between the lower endless belt 82 and the lower end conveyance clamps 6. The following biasing means for biasing is provided. That is, as shown in FIGS. 4 and 5, the urging means includes an upper member 30a and a lower member 30a that are detachably attached to the upper end side and the lower end side of the lower endless belt 82 using the stoppers 200. And the slide block 31 that moves in the vertical direction between the upper member 30a and the lower member 30a and to which the lower end conveyance clamp 6 is fixed, and is provided in the gap between the upper member 30a and the slide block 31 and the slide. A compression spring 30 that urges the block 31 from the upper member 30a side toward the lower member 30a side, and the compression spring 30 and the slide block 31 that are provided in the gap between the upper member 30a and the lower member 30a. And a type of compression spring 30 provided in the gap between the upper member 30a and the slide block 31. It is possible to arbitrarily adjust the force in the vertical direction to act on the workpiece 1 by the appropriate changes.

尚、図４と図５においては、上側部材３０ａと下側部材３０ａがそれぞれ板状の別部材で構成され、別部材の上記上側部材３０ａを取り外すことにより圧縮バネ３０の交換が可能となるようになっているが、必ずしもこのような構造に限定されることはなく、例えば、帯状板材とその両端側から上側部材３０ａ側に向けて延びる一対の板材とでコ字形状の下側部材３０ａを形成し、かつ、コ字形状の下側部材３０ａと板状の上側部材３０ａとで中央に矩形状開口部を有する額縁状の取付け材としてもよく、かつ、額縁状の取付け材の下側部材３０ａのみが下側エンドレスベルト８２の下端側に止め具２００を用いて着脱可能に取り付けられる構造としてもよい。 In FIGS. 4 and 5, the upper member 30a and the lower member 30a are each constituted by separate plate-like members, and the compression spring 30 can be replaced by removing the upper member 30a, which is a separate member. However, the structure is not necessarily limited to such a structure. For example, the U-shaped lower member 30a is composed of a strip-shaped plate material and a pair of plate materials extending from both ends thereof toward the upper member 30a side. It is good also as a frame-shaped attachment material which has a rectangular-shaped opening part in the center by the lower member 30a and plate-shaped upper member 30a which are formed, and a lower member of a frame-shaped attachment material Only 30a may be detachably attached to the lower end side of the lower endless belt 82 using the stopper 200.

また、上記長尺シート状ワーク１の幅方向両端が上端搬送クランプ５群と下端搬送クランプ６群により引っ張られた状態で搬送されるようにするため、上端搬送クランプ５における一対のクランプ先端を図３に示すように断面略Ｊ字形状の弾性材料により構成し、長尺シート状ワーク１の上端をクランプしたときに上記クランプ先端が弾性変形してワーク１の上端を鉛直上方向へ引き上げる構造にしてもよい。更に、上記長尺シート状ワーク１の上端に張りを与えながらワーク１が化学処理槽４内を搬送されるようにするため、上記化学処理槽４に搬入されかつ搬出される上端搬送クランプ５群の化学処理槽４内における搬送位置を、上端搬送クランプ５群の搬入前と搬出後における搬送基準位置より上方側へ変位させる変位レール４０（図５参照）を化学処理槽４内に設ける構造にしてもよい。尚、化学処理槽４内に変位レール４０を設ける場合、変位レール４０を複数のレールで構成し、上端搬送クランプ５群の搬入前と搬出後における搬送基準位置と変位レール４０による搬送位置との変位がスムーズになされるように調整することが好ましく、かつ、変位レール４０の高さ方向の位置をボルト等により適宜調整して長尺シート状ワーク１の上端に張りを与えながらワーク１が化学処理槽４内を搬送されるようにすることが望ましい。 In addition, in order for the both ends of the long sheet-like workpiece 1 in the width direction to be transported while being pulled by the upper end transport clamp 5 group and the lower end transport clamp 6 group, a pair of clamp tips in the upper end transport clamp 5 is illustrated. 3 is made of an elastic material having a substantially J-shaped cross section, and when the upper end of the long sheet-like workpiece 1 is clamped, the clamp tip is elastically deformed to pull up the upper end of the workpiece 1 vertically upward. May be. Furthermore, in order to allow the work 1 to be transported in the chemical treatment tank 4 while applying tension to the upper end of the long sheet-like work 1, the upper end transport clamp 5 group carried into and out of the chemical treatment tank 4 is used. The chemical treatment tank 4 has a structure in which a displacement rail 40 (see FIG. 5) is provided in the chemical treatment tank 4 for displacing the conveyance position in the chemical treatment tank 4 upward from the conveyance reference position before and after the upper end conveyance clamp 5 group is carried in. May be. In addition, when providing the displacement rail 40 in the chemical processing tank 4, the displacement rail 40 is comprised with several rails, and the conveyance reference position and the conveyance position by the displacement rail 40 before carrying in and after carrying out of the upper end conveyance clamp 5 group are defined. It is preferable to adjust so that the displacement can be made smoothly, and the workpiece 1 can be chemically adjusted while applying a tension to the upper end of the long sheet-like workpiece 1 by appropriately adjusting the height direction position of the displacement rail 40 with a bolt or the like. It is desirable that the inside of the processing tank 4 is conveyed.

上述した構成を採ることで、長尺シート状ワーク１搬送時におけるワーク１上端の位置が上端搬送クランプ５群により決定され、ワーク１の幅にならいながら下端搬送クランプ６群が上記ワーク１に対し鉛直下方向に力を作用させ、かつ、ワーク１の幅方向を上下方向とした両端に張りを与えながらワーク１の搬送を行うことができるため、ワーク搬送時におけるワークタルミを解消させることが可能となる。但し、ワーク１が存在しないクランプ開始前の下端搬送クランプ６群に関しては下端搬送クランプ６群の位置を決める必要があるため、図４に示すように下端搬送クランプ６群には専用のベアリング１４が備えられており、下端搬送クランプ６群の位置を決めるための位置きめ板１５がクランプ開始前の下端クランプ位置に付帯されている。 By adopting the above-described configuration, the position of the upper end of the workpiece 1 when the long sheet-shaped workpiece 1 is conveyed is determined by the upper end conveying clamp 5 group, and the lower end conveying clamp 6 group follows the workpiece 1 while following the width of the workpiece 1. Since the workpiece 1 can be conveyed while applying a force in the vertically downward direction and tensioning both ends with the width direction of the workpiece 1 being the vertical direction, it is possible to eliminate workpiece tarmi during workpiece conveyance. It becomes. However, since it is necessary to determine the position of the lower end transport clamp 6 group with respect to the lower end transport clamp 6 group before the start of clamping where the workpiece 1 does not exist, a dedicated bearing 14 is provided in the lower end transport clamp 6 group as shown in FIG. A positioning plate 15 for determining the position of the lower end conveyance clamp 6 group is attached to the lower end clamp position before the start of clamping.

本発明に係る化学処理装置によれば、長尺シート状ワーク上端と下端がそれぞれクランプされると共に、少なくともワーク下端側が適正な引っ張り力により鉛直下方向へ引っ張られた状態で搬送される構造になっているため、ワーク幅が広くかつ厚みが極めて薄い場合でもワークタルミを発生させること無く安定してワークの搬送並びに化学処理を行なうことが可能となる。従って、フレキシブル基板のメッキ等の化学処理装置に用いられる産業上の利用可能性を有している。 According to the chemical treatment apparatus of the present invention, the upper and lower ends of the long sheet-like workpiece are clamped, and at least the lower end side of the workpiece is transported in a state of being pulled vertically downward by an appropriate pulling force. Therefore, even when the workpiece width is wide and the thickness is extremely thin, it is possible to stably carry the workpiece and perform chemical treatment without generating workpiece tarmi. Therefore, it has industrial applicability for use in chemical processing equipment such as plating of flexible substrates.

１ワーク
２ワーク供給装置
３ワーク巻取装置
４化学処理槽
５上端搬送クランプ
６下端搬送クランプ
７当て板
１１光電センサー
１３溝
１４ベアリング
１５位置決め板
２０ワーク搬送装置
２１ローラー
２２ローラー
３０圧縮バネ
３０ａ上側部材、下側部材
３１スライドブロック
３２シャフト
４０複数に分割された搬送レール
８１上側エンドレスベルト
８２下側エンドレスベルト
９１サーボモータ
９２サーボモータ
１０１ゴムが被覆された上側プーリー
１０２ゴムが被覆された下側プーリー
１２１上側プーリー
１２２下側プーリー
２００止め具 DESCRIPTION OF SYMBOLS 1 Work 2 Work supply apparatus 3 Work winding apparatus 4 Chemical processing tank 5 Upper end conveyance clamp 6 Lower end conveyance clamp 7 Abutting plate 11 Photoelectric sensor 13 Groove 14 Bearing 15 Positioning plate 20 Work conveyance apparatus 21 Roller 22 Roller 30 Compression spring 30a Upper member , Lower member 31 Slide block 32 Shaft 40 Divided transport rail 81 Upper endless belt 82 Lower endless belt 91 Servo motor 92 Servo motor 101 Upper pulley covered with rubber 102 Lower pulley 121 covered with rubber Upper pulley 122 Lower pulley 200 Stopper

Claims

A workpiece supply device that continuously feeds a long sheet-shaped workpiece wound around a reel with its width direction set up and down, and a workpiece winding that winds the workpiece continuously around the reel with its width direction set up and down A chemical treatment tank that performs chemical treatment on the workpiece that is disposed between the workpiece take-up device, the workpiece supply device, and the workpiece take-up device and that has its width direction set in the vertical direction; It has upper and lower end conveyance clamp groups that clamp the upper and lower ends of the workpiece at the time of loading, and the upper and lower end conveyance clamp groups are attached to a pair of independently driven endless belts at equal intervals to clamp the workpiece for each fixed size. While the workpiece is transported with its width direction set up and down, the upper and lower end transport clamps are opened sequentially when the workpiece is unloaded in the chemical treatment tank. In the chemical treatment system and a workpiece transfer device for wound on the reel of the work take-up device with its width direction in the vertical direction,
The upper end transport clamp group is fixedly attached to the upper endless belt disposed on the upper side, and the lower end transport clamp group is attached to the lower endless belt disposed on the lower side so as to be movable in the vertical direction. A chemical processing apparatus, characterized in that an urging means is provided between the lower endless belt and each lower end conveyance clamp for urging each lower end conveyance clamp vertically downward.

An upper member and a lower member that are detachably attached to the lower endless belt, and a slide block that moves up and down a gap provided between the upper member and the lower member and to which the lower end conveyance clamp is fixed. A compression spring provided in a gap between the upper member and the slide block and biasing the slide block from the upper member side toward the lower member side; and provided in the gap between the upper member and the lower member; 2. The chemical processing apparatus according to claim 1, wherein the biasing means is constituted by a compression spring and a shaft for guiding the slide block.

A pair of clamp tips in the upper end transport clamp is made of an elastic material having a substantially J-shaped cross section, and when the upper end of the workpiece is clamped, the clamp tip is elastically deformed to pull up the upper end of the workpiece vertically upward. The chemical processing apparatus according to claim 1 or 2, wherein

A displacement rail that displaces the transfer position in the chemical treatment tank of the upper end transfer clamp group carried into and out of the chemical treatment tank upward from the transfer reference position before and after the upper end transfer clamp group is carried in is chemically processed. The chemical processing apparatus according to claim 1, 2 or 3, wherein the chemical processing apparatus is provided in the tank and has a structure in which the work is conveyed through the chemical processing tank while applying tension to the upper end of the work.