JP5617653B2 - Plating equipment - Google Patents

Description

The present invention relates to a plating apparatus for performing a plating treatment while conveying the very thin long sheet-like workpieces flexible at a constant speed as the flexible substrate, in particular, plating without generating slack in the workpiece The present invention relates to an improvement of a plating apparatus that can perform the phenomenon that the workpiece is detached from the lower end conveyance clamp group in the plating tank.

  In recent years, electronic devices have increasingly used flexible substrates that are extremely thin and flexible. Corresponding to such a flexible substrate, Patent Document 1 discloses that a long sheet-like workpiece (substrate material) wound on a reel is continuously arranged with its width direction set in the vertical direction (that is, with the workpiece surface set in the vertical direction). A plating tank is placed between the workpiece supply device that supplies the workpiece and the workpiece winding device that continuously winds the workpiece on the reel with the width direction set to the vertical direction, and the workpiece (substrate material) is long. An apparatus for performing a plating process in a sheet form has been proposed.

  However, since the plating apparatus described in Patent Document 1 has a structure in which only the upper end of a long sheet-like workpiece (substrate material) is clamped and transported, the workpiece is wide and extremely thick. If it is thin, there is a problem that tarmi occurs in the work during the process of transferring the work or the process of plating, making it difficult to stably transfer the work in the vertical direction. It was.

  In view of this, the present applicant has proposed a chemical processing apparatus provided with a work transfer device for transferring while clamping the lower end of the long sheet-like workpiece in addition to the upper end of the long sheet-like workpiece (substrate material). (See Patent Document 2).

  That is, the chemical processing apparatus proposed by the present applicant includes a workpiece supply device that continuously feeds a long sheet-shaped workpiece wound on a reel with its width direction set up and down, and the workpiece in the width direction. Chemical treatment for the workpiece winding device that is continuously wound on a reel in the vertical direction, and the workpiece that is disposed between the workpiece supply device and the workpiece winding device and that is conveyed with its width direction being the vertical direction A chemical treatment tank having a top and bottom conveyance clamp group that clamps the upper and lower ends of the workpiece when the workpiece is loaded into the chemical treatment tank, and the upper and lower conveyance clamp groups are independently driven. A pair of endless belts are attached at equal intervals, and the workpiece is conveyed with its width direction being set up and down while clamping the workpiece for each fixed size. A workpiece transfer device is provided in which the upper and lower transfer clamps are sequentially opened at the time of carrying out the chemical treatment tank and only the workpiece that has been chemically processed is wound up on the reel of the workpiece take-up device with its width direction set to the vertical direction. Was.

  And according to the said chemical processing apparatus with which the workpiece conveyance apparatus was attached, since it has the structure conveyed while clamping the upper end and lower end of a long sheet-like workpiece, respectively, the width | variety of the said workpiece | work is wide, and thickness is extremely Even when the workpiece is thin, there is an advantage that it is difficult for the workpiece to be damaged during the step of carrying the workpiece or the step of performing the chemical treatment. In particular, a structure in which the upper end transport clamp group is fixedly attached to the upper endless belt disposed on the upper side, and the lower end transport clamp group is mounted on the lower endless belt disposed on the lower side so as to be movable in the vertical direction. In this case, the workpiece is transported while applying a force in the vertical direction due to the weight of the lower-end transport clamp group. Thus, it has the advantage that it can be conveyed.

  However, in the above-described chemical processing apparatus according to Patent Document 2 in which the lower end conveyance clamp group is attached to the lower endless belt in a state in which the lower end conveyance clamp group is movable in the vertical direction, the force in the vertical direction acting on the workpiece is subjected to the lower end conveyance clamp. Since it is determined by the weight of the group, it is difficult to obtain an optimum force for preventing workpiece tarmi when a large buoyancy acts on the upper / lower end conveyance clamp group or the workpiece in the chemical treatment tank. Therefore, in order to cope with this problem, the present applicant provides an urging means for urging each lower end conveyance clamp in a vertically downward direction between the lower endless belt and each lower end conveyance clamp. A chemical processing apparatus capable of arbitrarily adjusting the vertical force to be applied has also been proposed (see Patent Document 3).

By the way, depending on the characteristics of the plating solution contained in the chemical treatment tank (hereinafter described as a plating treatment tank) , the friction coefficient between the workpiece and the lower end conveyance clamp group in the plating treatment tank is lowered. Due to this, in the plating apparatus in which the lower end transport clamp group is attached to the lower endless belt so as to be movable in the vertical direction, the lower end transport clamp group is caused by its own weight in the plating tank. When sinking, the lower end of the workpiece may come off from the lower end conveyance clamp. Therefore, work slack is generated in the plating treatment tank, the problem of plating is not done sufficiently present.

JP 2006-193794 A JP 2009-120889 A Japanese Patent Application No. 2010-1111068

The present invention has been made paying attention to such problems, and the problem is that even when the width of the long sheet-like workpiece is wider and the thickness is thinner, it is stable without causing workpiece tarmi. and to provide a plating apparatus capable of performing plating Te.

That is, the invention according to claim 1
A workpiece supply device that continuously feeds a long sheet-shaped workpiece wound around a reel with its width direction set up and down, and a workpiece winding that winds the workpiece continuously around the reel with its width direction set up and down and winding device, plating processing tank and the plating processing tank of the workpiece for performing a plating process on arranged and the workpiece to be conveyed by the width in the vertical direction between the workpiece feeder and the work take-up device It has upper and lower end conveyance clamp groups that clamp the upper and lower ends of the workpiece at the time of loading, and the upper and lower end conveyance clamp groups are attached to a pair of independently driven endless belts at equal intervals to clamp the workpiece for each fixed size. upper and lower ends transporting clamps during plating bath carry-out of the work conveys with its width direction in the vertical direction is being sequentially opened plating process while A workpiece conveying device for winding only the workpiece on the reel of the workpiece winding device with its width direction set to the vertical direction, and an upper end conveying clamp group is fixedly attached to the upper endless belt, and the lower endless belt In the plating apparatus in which the lower end conveyance clamp group is attached to be movable in the vertical direction,
Lower limit position regulating means for regulating the movement limit position of the lower end transport clamp group in the plating treatment tank is characterized in that is provided along the moving direction of the lower end transport clamp group plating bath bottom,
The invention according to claim 2
In the plating apparatus according to the invention of claim 1,
A first elongated plate material in which a plurality of elongated holes extending in the width direction are provided at substantially equal intervals in the length direction, and a bolt for fixing the position is fitted in a portion corresponding to the elongated hole. And a second elongated plate member having a plurality of insertion holes into which nuts for fixing the position fixing bolt tips are incorporated, and adjusting the height direction position of the first elongated plate member with respect to the second elongated plate member After that, the position fixing bolt is inserted into the insertion hole of the second long plate material from the long hole side of the first long plate material, and the nut incorporated in the second long plate material The lower limit position restricting means is configured by fixing the tip of the position fixing bolt,
The invention according to claim 3
In the plating apparatus according to claim 1 or 2,
A counterbore portion is formed at each opening edge of the elongated hole of the first elongated plate member and the insertion hole of the second elongated plate member.

The invention according to claim 4
In the plating apparatus according to any one of claims 1 to 3,
An urging means for urging each lower end conveyance clamp vertically downward is provided between the lower endless belt and each lower end conveyance clamp,
The invention according to claim 5
In the plating apparatus according to the invention of claim 4,
An upper member and a lower member that are detachably attached to the lower endless belt, and a slide block that moves up and down a gap provided between the upper member and the lower member and to which the lower end conveyance clamp is fixed. A compression spring provided in a gap between the upper member and the slide block and biasing the slide block from the upper member side toward the lower member side; and provided in the gap between the upper member and the lower member; The urging means is composed of a compression spring and a shaft for guiding the slide block.

Next, the invention according to claim 6 is:
In the plating apparatus according to any one of claims 1 to 5,
The transport position in the plating bath to be carried and the upper end is unloaded conveyed clamped group of plating bath, the transport reference position than the displacement rail plating to displace upward side after unloaded before loading of the upper conveyor clamping group It is provided in the tank and has a structure in which the work is transported in the plating tank while applying tension to the upper end of the work.

According to the plating apparatus according to the present invention,
Since the lower limit position regulating means for regulating the movement limit position of the lower end transport clamp group in the plating treatment tank, is provided along the moving direction of the lower end transport clamp group plating bath bottom, the plating treatment tank Thus, even when the friction coefficient between the workpiece and the lower end conveyance clamp group is lowered, the workpiece is not detached from the lower end conveyance clamp.

For this reason, it is possible to stably perform the plating process on the workpiece regardless of the characteristics of the processing liquid contained in the plating tank.

The side view of the plating processing apparatus which concerns on this invention. The top view of the plating processing apparatus which concerns on this invention. Explanatory drawing which shows the state by which the upper end conveyance clamp of the workpiece conveyance apparatus integrated in the plating apparatus which concerns on this invention was open | released. Explanatory drawing which shows the state by which the lower end conveyance clamp of the workpiece conveyance apparatus was open | released. Explanatory drawing which shows the state which the upper end and lower end of a workpiece | work are clamped and conveyed by the up-and-down conveyance clamp of a workpiece conveyance apparatus, respectively. Explanatory drawing which shows the state by which a workpiece | work upper end and a lower end are each clamped and conveyed by the up-and-down conveyance clamp of the workpiece conveyance apparatus which has a lower limit position control means of a lower-end conveyance clamp group in the bottom face in a plating processing tank. FIG. 7A is a configuration explanatory view of the lower limit position restricting means, the main part of which is composed of the first long plate material and the second long plate material, and FIG. 7B is the first long plate material. Front view.

  Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a side view of the plating apparatus according to the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a diagram illustrating that the upper end clamp of the work conveying apparatus incorporated in the plating apparatus is opened. FIG. 4 is an explanatory view showing a state in which the lower end conveyance clamp of the workpiece conveying device is opened, and FIG. 5 is an example in which the upper end and the lower end of the workpiece are clamped by the upper and lower end conveying clamps of the workpiece conveying device. FIG. 6 shows a state in which the upper and lower ends of the workpiece are clamped and conveyed by the upper and lower conveyance clamps of the workpiece conveyance device having the lower limit position regulating means of the lower-end conveyance clamp group on the bottom surface of the plating treatment tank. FIG. 7 (A) is an explanatory diagram of the lower limit position restricting means, the main part of which is composed of the first long plate material and the second long plate material, and FIG. Long shape It is a front view of the wood.

First, as shown in FIGS. 1 and 2, a plating apparatus according to the present invention is a workpiece supply device 2 that continuously feeds a long sheet-like workpiece 1 wound around a reel with its width direction set to the vertical direction. And a work take-up device 3 that continuously winds the work 1 on a reel with the width direction thereof being an up-down direction, and the work 1 is disposed between the work supply device 2 and the work take-up device 3. A plating tank 4 for performing plating processing, and an untreated workpiece 1 is loaded into the plating tank 4 with its width direction set up and down, and the processed work 1 is carried out with its width direction set up and down. The main part is comprised with the workpiece conveyance apparatus 20 to perform.

That is, a workpiece supply device 2 for supplying a long sheet-like workpiece 1 wound on a reel, a workpiece winding device 3 for winding the workpiece 1 on a reel, and the workpiece supply device 2 and the workpiece winding device 3. There is provided a plating tank 4 disposed between them, and this plating tank 4 is constituted by a plurality of tanks according to necessary processes. Further, since the workpiece 1 is continuously conveyed from the workpiece supply device 2 to the workpiece take-up device 3 with its width direction set to the vertical direction, the upper end and the lower end of the workpiece 1 are clamped at the time of loading into the plating tank 4. A workpiece transfer device 20 is provided for transferring the workpiece.

  The workpiece transfer device 20 is arranged to face a plurality of upper end transfer clamps 5 for clamping the upper end of the workpiece 1 and a plurality of lower end transfer clamps 6 for clamping the lower end of the workpiece 1 and an upper pulley 101 covered with rubber through a predetermined distance. An upper endless belt 81 wound between the upper pulley 121 and attached to the upper end conveying clamp 5 group, and a lower pulley 122 disposed opposite to the lower pulley 102 covered with rubber through a predetermined distance. A lower endless belt 82 wound around and attached to the lower end transport clamp 6 group, and provided on the upper pulley 101 and the lower pulley 102, respectively, and independently drives the upper endless belt 81 and the lower endless belt 82. A pair of upper and lower independent servo motors 91, 92 and the endless belts 81, 82 A photoelectric sensor 11 that detects a mark (not shown) attached to each endless belt and is provided in the vicinity thereof to detect the amount of movement of each endless belt, and outer peripheral surfaces of the upper pulley 101 and the lower pulley 102 The upper end transport clamp 5 group and the lower end transport clamp 6 group are provided at a timing when rollers 21 and 22 (see FIGS. 3 and 4) provided along the vicinity and attached to the upper end transport clamp 5 group and the lower end transport clamp 6 group contact each other. Each of the clamps is provided with an arc-shaped contact plate 7 that is opened.

Then, when the work 1 is loaded into the plating tank 4, the rollers 21 and 22 attached to the upper end conveyance clamp 5 group and the lower end conveyance clamp 6 group are pressed against the abutting plate 7 and opened, At the timing when the contact between the rollers 21 and 22 and the contact plate 7 is completed and each clamp is closed, the upper end and the lower end of the work 1 supplied from the work supply device 2 with the width direction set in the vertical direction are the upper end conveyance clamps. The 5 group and the lower end transport clamp 6 group are smoothly clamped, and the upper end transport clamp 5 group and the lower end transport clamp 6 group are attached to a pair of endless belts 81 and 82 that are independently driven at regular intervals, respectively. While the workpiece 1 is clamped, the workpiece 1 is carried into the plating tank 4 with its width direction set to the vertical direction.

Further, at the time of plating tank 4 out of the work 1 which is plating treatment, each clamp rollers 21 and 22 attached to the upper end transport clamp 5 group and lower conveying clamp 6 group devoted successively pressed to the contact plate 7 Only the workpiece 1 that has been opened and plated is wound on the reel of the workpiece winding device 3 with its width direction set to the vertical direction.

  The upper end endless belt 81 and the lower end endless belt 82 to which the upper end transport clamp 5 group and the lower end transport clamp 6 group are attached are directly connected to the servo motors 91 and 92 which are independently driven and the servo motors 91 and 92. The rubber-coated upper pulley 101 and lower pulley 102 rotate without slipping, and the mark provided on each endless belt is detected by the photoelectric sensor 11 and converted into a moving amount of each endless belt. The upper and lower conveying clamps 5 and 6 are controlled by the servo motors 91 and 92 which are independent from each other on the upper and lower sides, and the workpiece 1 is conveyed while the upper and lower conveying clamps 5 and 6 are synchronized. It becomes possible to do.

  By the way, the interval between the upper end conveyance clamp 5 group attached to the upper endless belt 81 and the lower end conveyance clamp 6 group attached to the lower endless belt 82 is mechanically constant corresponding to the width dimension of the long sheet-like workpiece 1. It is difficult to arrange them at intervals of machine assembly accuracy. For this reason, as shown in FIG. 3, with respect to the upper end transport clamp 5 group, the upper end transport clamp 5 group is fixed to the upper endless belt 81 using a stopper 200 as a reference position during transport. When transported to the position of the upper pulley 101 of the covering, the position is regulated by the groove 13 provided in the upper pulley 101 so as to be a reference position during the transport of the upper pulley 101. On the other hand, with respect to the lower end conveying clamp 6 group attached to the lower endless belt 82, the lower endless belt 82 can be adjusted as shown in FIG. The lower end conveyance clamps 6 are attached to be movable in the vertical direction, and the lower end conveyance clamps 6 are directed vertically downward between the lower endless belt 82 and the lower end conveyance clamps 6. The following biasing means for biasing is provided. That is, as shown in FIGS. 4 and 5, the urging means includes an upper member 30 a and a lower member 30 b that are detachably attached to the upper end side and the lower end side of the lower endless belt 82 using the stoppers 200. And the slide block 31 that moves in the vertical direction between the upper member 30a and the lower member 30b and to which the lower end conveyance clamp 6 is fixed, and is provided in the gap between the upper member 30a and the slide block 31 and the slide. A compression spring 30 for urging the block 31 from the upper member 30a side toward the lower member 30b side, and the compression spring 30 and the slide block 31 provided in the gap between the upper member 30a and the lower member 30b. And a type of compression spring 30 provided in the gap between the upper member 30a and the slide block 31. It is possible to arbitrarily adjust the force in the vertical direction to act on the workpiece 1 by the appropriate changes.

  In FIGS. 4 and 5, the upper member 30a and the lower member 30b are each composed of separate plate-like members, and the compression spring 30 can be replaced by removing the upper member 30a, which is a separate member. However, the structure is not necessarily limited to such a structure. For example, the U-shaped lower member 30b is composed of a strip-shaped plate material and a pair of plate materials extending from both ends thereof toward the upper member 30a side. It is good also as a frame-shaped attachment material which has a rectangular-shaped opening part in the center by the lower member 30b and plate-shaped upper member 30a which are formed, and a lower member of a frame-shaped attachment material Only 30b may be detachably attached to the lower end side of the lower endless belt 82 using the stopper 200.

  In addition, in order for the both ends of the long sheet-like workpiece 1 in the width direction to be transported while being pulled by the upper end transport clamp 5 group and the lower end transport clamp 6 group, a pair of clamp tips in the upper end transport clamp 5 is illustrated. 3 is made of an elastic material having a substantially J-shaped cross section, and when the upper end of the long sheet-like workpiece 1 is clamped, the clamp tip is elastically deformed to pull up the upper end of the workpiece 1 vertically upward. May be.

Further, in this plating apparatus, the work 1 is carried into and out of the plating tank 4 while applying tension to the upper end of the long sheet-like work 1 and is carried into and out of the plating tank 4. Displacement rail 40 (see FIG. 5) for displacing the transport position of the upper end transport clamp 5 group in the plating tank 4 to the upper side from the transport reference position before and after the upper end transport clamp 5 group is carried in is plated. It is provided along the moving direction of the upper end conveyance clamp 5 group in the tank 4. In addition, about the said displacement rail 40 provided in the plating processing tank 4, a displacement rail is comprised by several rails, the conveyance reference position before carrying in of the upper end conveyance clamp 5 group and after carrying out, and the conveyance position by the displacement rail 40, and It is preferable to adjust so that the displacement of the sheet 1 is made smooth, and the work 1 can be adjusted while adjusting the position of the displacement rail 40 in the height direction with a bolt or the like to give tension to the upper end of the long sheet-like work 1. It is desirable to be conveyed in the plating tank 4.

  By adopting the above-described configuration, the position of the upper end of the workpiece 1 when the long sheet-shaped workpiece 1 is conveyed is determined by the upper end conveying clamp 5 group, and the lower end conveying clamp 6 group follows the workpiece 1 while following the width of the workpiece 1. Since the workpiece 1 can be conveyed while applying a force in the vertically downward direction and tensioning both ends with the width direction of the workpiece 1 being the vertical direction, it is possible to eliminate workpiece tarmi during workpiece conveyance. It becomes. However, since it is necessary to determine the position of the lower end transport clamp 6 group with respect to the lower end transport clamp 6 group before the start of clamping where the workpiece 1 does not exist, a dedicated bearing 14 is provided in the lower end transport clamp 6 group as shown in FIG. A positioning plate 15 for determining the position of the lower end conveyance clamp 6 group is attached to the lower end clamp position before the start of clamping.

Further, in the plating apparatus, in order to avoid due to the reduction of friction coefficient in the plating tank 4 from the bottom conveying clamp 6 to a phenomenon in which the workpiece 1 is deviated, plating processing tank as shown in FIG. 6 4 is provided with a plate-like lower limit position restricting means 300 on the inner bottom surface, and the bearing 14 of the lower end transport clamp 6 group is engaged with the lower limit position restricting means 300 to move the lower end transport clamp 6 group in the plating tank 4. The lower limit position is regulated. That is, even when the friction coefficient of the workpiece 1 and the lower conveying clamp 6 group was reduced by plating tank 4 by the characteristics whether the treatment liquid contained in the plating treatment tank 4, the lower end of the plating tank 4 Since the downward displacement of the conveyance clamp 6 group is restricted, the workpiece 1 is not detached from the lower-end conveyance clamp 6 and the workpiece 1 can be stably plated .

In this plating apparatus, the lower limit position restricting means 300 is constituted by a single plate-like member, but the configuration of the lower limit position restricting means 300 is arbitrary, and the height is obtained by combining a plurality of plate-like members. It may be configured such that the direction restriction position can be adjusted, or may be configured such that the lower end transport clamp 6 group is sequentially displaced in the vertical direction over the moving direction of the lower end transport clamp 6 group. That is, if the phenomenon that the lower end of the work 1 is disengaged from the lower end conveyance clamp 6 due to the reduction of the friction coefficient or the like in the plating treatment tank 4 can be avoided, the configuration of the lower limit position regulating means 300 is arbitrary as exemplified below. It is.

  For example, as shown in FIGS. 7A to 7B, a pair of second long plate members 300a and a first long plate member 300b constitute a main body of the lower limit position restricting means 300, and the first long plate member There is a structure in which the plate member 300b is provided so as to be movable upward with respect to the second long plate member 300a and the regulation position in the height direction can be adjusted. Specifically, as shown in FIG. 7B, a first elongated plate material in which a plurality of elongated holes 301b extending in the width direction are provided at substantially equal intervals in the length direction (three in FIG. 7B). 300b and a plurality of nuts 303 that are provided at positions corresponding to the elongated holes 301b and into which the position fixing bolts 302 are inserted and that fix the tips of the position fixing bolts 302 are incorporated (in FIG. The structure which comprises the main body of the lower limit position control means 300 with the 2nd elongate board | plate material 300a which has the insertion hole 301a of 3 according to the number of the holes 301b is illustrated. And after adjusting the height direction position of the 1st elongate board | plate material 300b with respect to the 2nd elongate board | plate material 300a and setting to a desired control position, from the said elongate hole 301b side of the 1st elongate board | plate material 300b. The position fixing bolt 302 is inserted into the insertion hole 301a of the second long plate member 300a, and the tip of the position fixing bolt 302 is fixed by the nut 303 incorporated in the second long plate member 300a. The position regulating means 300 can be configured. In addition, as for each opening edge part of the said insertion hole 301a and the elongate hole 301b, it is desirable to provide the counterbore (counterbore) part 305 as shown to FIG. 7 (A)-(B).

According to the plating apparatus of the present invention, the upper and lower ends of the long sheet-like workpiece are clamped, and the lower end side of the workpiece is conveyed in a state where it is pulled vertically downward by an appropriate pulling force in the plating treatment tank. Therefore, even when the workpiece width is wide and the thickness is extremely thin, the workpiece can be stably plated without causing workpiece tarmi. Therefore, it has industrial applicability for use in plating apparatuses for flexible substrates.

DESCRIPTION OF SYMBOLS 1 Work 2 Work supply apparatus 3 Work winding apparatus 4 Plating processing tank 5 Upper end conveyance clamp 6 Lower end conveyance clamp 7 Abutting plate 11 Photoelectric sensor 13 Groove 14 Bearing 15 Positioning plate 20 Work conveyance apparatus 21 Roller 22 Roller 30 Compression spring 30a Upper member 30b Lower member 31 Slide block 32 Shaft 40 Divided transport rail 81 Upper endless belt 82 Lower endless belt 91 Servo motor 92 Servo motor 101 Upper pulley covered with rubber 102 Lower pulley 121 covered with rubber Upper pulley 122 Lower pulley 200 Stopper 300 Lower limit position regulating means 300a Second elongated plate member 300b First elongated plate member 301a Insertion hole 301b Elongate hole 302 Position fixing bolt 303 Nut 305 Counterbore part

Claims (6)

A workpiece supply device that continuously feeds a long sheet-shaped workpiece wound around a reel with its width direction set up and down, and a workpiece winding that winds the workpiece continuously around the reel with its width direction set up and down and winding device, plating processing tank and the plating processing tank of the workpiece for performing a plating process on arranged and the workpiece to be conveyed by the width in the vertical direction between the workpiece feeder and the work take-up device It has upper and lower end conveyance clamp groups that clamp the upper and lower ends of the workpiece at the time of loading, and the upper and lower end conveyance clamp groups are attached to a pair of independently driven endless belts at equal intervals to clamp the workpiece for each fixed size. upper and lower ends transporting clamps during plating bath carry-out of the work conveys with its width direction in the vertical direction is being sequentially opened plating process while A workpiece conveying device for winding only the workpiece on the reel of the workpiece winding device with its width direction set to the vertical direction, and an upper end conveying clamp group is fixedly attached to the upper endless belt, and the lower endless belt In the plating apparatus in which the lower end conveyance clamp group is attached to be movable in the vertical direction,
Lower limit position regulating means for regulating the movement limit position of the lower end transport clamp group in the plating treatment tank, and being provided along the moving direction of the lower end transport clamp group plating bath bottom Plating equipment. A first elongated plate material in which a plurality of elongated holes extending in the width direction are provided at substantially equal intervals in the length direction, and a bolt for fixing the position is fitted in a portion corresponding to the elongated hole. And a second elongated plate member having a plurality of insertion holes into which nuts for fixing the position fixing bolt tips are incorporated, and adjusting the height direction position of the first elongated plate member with respect to the second elongated plate member After that, the position fixing bolt is inserted into the insertion hole of the second long plate material from the long hole side of the first long plate material, and the nut incorporated in the second long plate material 2. The plating apparatus according to claim 1, wherein the lower limit position restricting means is configured by fixing a tip of a position fixing bolt. The counterbore part is formed in each opening edge part of the elongate hole of said 1st elongate board | plate material, and the insertion hole of a 2nd elongate board | plate material. Plating equipment. 4. An urging means for urging each lower end conveyance clamp vertically downward is provided between the lower endless belt and each lower end conveyance clamp. The plating apparatus as described. An upper member and a lower member that are detachably attached to the lower endless belt, and a slide block that moves up and down a gap provided between the upper member and the lower member and to which the lower end conveyance clamp is fixed. A compression spring provided in a gap between the upper member and the slide block and biasing the slide block from the upper member side toward the lower member side; and provided in the gap between the upper member and the lower member; 5. The plating apparatus according to claim 4, wherein the urging means is constituted by a compression spring and a shaft for guiding the slide block. The transport position in the plating bath to be carried and the upper end is unloaded conveyed clamped group of plating bath, the transport reference position than the displacement rail plating to displace upward side after unloaded before loading of the upper conveyor clamping group The plating apparatus according to any one of claims 1 to 5, wherein the plating apparatus is configured to be provided in the tank and transported in the plating tank while applying tension to the upper end of the workpiece.

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