JP2011226833A - Pressure sensor and probe card inspection apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simple-structured inspection apparatus capable of performing highly accurate inspection while allowing easy replacement of a component to be pressed to a probe.SOLUTION: A pressure sensing apparatus includes: a contact pin having a tip to contact with an inspection target; a chuck device to releasably hold the contact pin so that the tip faces upward; and a support device to support the chuck device, the support device having a pressure sensor element to receive via the chuck device a pressing force exerted on the contact pin. The chuck device includes: a pair of chuck blocks to hold the contact pin; a moving unit to move the chuck blocks in a first direction in which the chuck blocks move close to or apart from each other, the moving unit being supported by the support device; and an electrical insulation member provided between the chuck blocks for preventing electrical short-circuit between the chuck blocks.

Description

  The present invention relates to an apparatus for sensing pressure acting on an object to be inspected, such as a probe, and an apparatus for inspecting a probe card using the apparatus.

  Probe cards used for electrical testing of integrated circuits, etc. are generally affected by variations in the height position of the probe tip, contact state with the electrode, and the tip of the probe (needle tip) during its production, after production, and during its use. It is inspected whether the pressure (needle pressure) and the resistance value of the test signal circuit are good or bad.

  As one of inspection apparatuses that sense pressure acting on the tip of a probe, there is a technique described in Patent Document 1. In this prior art, an X, Y, and Z stage is disposed below the probe card, a probe contact top is disposed on the stage, and a pressure sensor element having a diaphragm portion is embedded in the probe contact top.

  The conventional inspection apparatus moves the pressure sensor element in the X, Y, and Z directions with respect to the probe card by the stage, presses the pressure sensor element against the tip of the probe, and acts on the pressure sensor element at that time. The needle pressure is measured by detecting the pressing force to be performed as an electrical signal, and the resistance value is measured by detecting the current flowing between the probe and the pressure sensor element. The movement of the pressure sensor element, the pressing of the pressure sensor element against the probe, and the detection of the pressure are performed for each probe.

  In the inspection apparatus as described above, since the pressure sensor element is generally repeatedly pressed against the tip of the probe tip, it is inevitable that the pressure sensor element is pressed against the probe tip. In addition, in a device that must measure minute needle pressure and resistance with high accuracy, such as a pressure sensing device used in a probe card inspection device, not only must a high-precision pressure sensing device be used. The pressure sensor element must be replaced frequently.

  However, in the conventional inspection apparatus as described above, since the pressure sensor element is embedded in the probe contact top, the probe contact top embedded with the pressure sensor element itself is expensive, and such an expensive probe contact top is not provided. By exchanging the pressure sensor element, the pressure sensor element must be exchanged, and therefore the cost for exchanging the pressure sensor element is increased.

  A pressure sensing device capable of measuring a minute needle pressure with high accuracy is commercially available. However, such a device has a complicated structure and is delicate, so that it easily breaks and is cumbersome to handle. Therefore, it is difficult to replace a member pressed against the probe.

Japanese Patent No. 2638556

  An object of the present invention is to make it possible to easily replace a member pressed against a probe even though it can be detected with high accuracy with a simple structure.

  A pressure sensing device according to the present invention supports a contact pin having a tip that comes into contact with an object to be inspected, a chuck device that releasably holds the contact pin so that the tip is located upward, and the chuck device. A support device including a pressure sensor element that receives a pressing force acting on the contact pin via the chuck device. The chuck device is a pair of chuck pieces for gripping the contact pins, a moving device for moving the chuck pieces in a first direction that is close to each other, the moving device supported by the support device, And an electrically insulating member that is disposed between the chuck pieces and prevents the chuck pieces from being electrically short-circuited.

  One of the chuck pieces has a first protrusion on the upper side protruding toward the other chuck piece, and the other chuck piece protrudes toward the one chuck piece. May be provided at the bottom. The contact pin has a lower end placed on the upper surface of the second projecting portion and is gripped by the upper portions of both chuck pieces so as to extend in the vertical direction, and has a tip projecting upward from both chuck pieces. It may be.

  The electrical insulating member may be disposed on one of the chuck pieces. In addition, the electrical insulating member may be disposed at each of one side and the other side in a second direction intersecting the first direction with respect to a gripping position of the contact pin by the chuck piece. .

  The moving device is disposed between the cylinder supported by the support device, a lifting rod that is lifted and lowered with respect to the cylinder, and the cylinder and the lifting rod, and is synchronized with the lifting motion of the lifting rod. A lifting member that is lifted and lowered reversely to the lifting and lowering movement of the lifting rod, and a pair of moving members that are disposed on the cylinder at an interval in the first direction, wherein the lifting rod and the lifting member A pair of motion members that are moved in a direction away from each other by an up and down motion may be provided, and each chuck piece may be coupled to the motion member.

  Each moving member is a swinging member disposed at an upper portion of the cylinder so as to be angularly rotatable around an axis extending in a second direction intersecting the first direction, and the lifting rod and the lifting / lowering member A swing member that is swung by the member, and a slider that is disposed above the cylinder so as to be movable in the first direction, and is coupled to the swing member so as to swing the swing member. Accordingly, a slider moved in the first direction may be provided, and each chuck piece may be coupled to the slider.

  Each of the elevating rod and the elevating member may have an abutting portion that abuts on one side portion and the other side portion in the first direction with respect to the swing center of the swing member.

  The elevating member is located in the inner space of the cylinder, and extends outwardly in opposite directions from a cylindrical portion disposed around the elevating rod and an upper end portion of the cylindrical portion, and the swinging member And a pair of extensions that abut the member.

  The inspection apparatus can further include a wiring coupling member disposed on the corresponding chuck piece, which attaches each of the pair of wires to each chuck piece.

  A probe card inspection apparatus according to the present invention is located on a card base having a card receiving portion for detachably receiving a probe card, a stage disposed below the card base, and a lower side of the card base. And a pressure sensing device as described above supported by the stage. The stage moves the pressure sensing device three-dimensionally with respect to the probe card.

  The contact pin is pressed against an object to be inspected, such as a probe, at the needle tip. Thereby, the pressing force acting on the contact pin is transmitted to the pressure sensor element provided in the support device via the chuck device. Therefore, the pressing force can be obtained easily and with high accuracy as an electrical signal corresponding to the deformation amount of the pressure sensor element.

  Since both chuck pieces are electrically separated by the electrical insulating member, the resistance value of the electric signal path passing through the probe and the pressure sensor element is determined by connecting the electric signal conductor to each chuck piece. Can be obtained easily and with high accuracy by connecting to the detection circuit by the Kelvin connection method.

  Since both chuck pieces can be displaced in the direction away from each other by the moving device, the contact pins can be replaced while maintaining the chuck pieces in a separated state, and contact pins can be easily replaced. And with high accuracy.

  As described above, according to the present invention, a minute needle pressure and resistance value, such as the needle pressure and resistance value of an integrated circuit inspection probe, can be measured with high accuracy with a simple structure. The member pressed by the probe can be easily replaced.

It is a front view which shows one Example by the cross section of one Example of the inspection apparatus of the probe card based on this invention. In the inspection apparatus shown in FIG. 1, it is a figure which shows the state which moved both the card stand and the connection apparatus in the direction which approaches, and connected both. In the inspection apparatus shown in FIG. 1, it is a figure which shows the state which moved both the connection apparatus and the circuit apparatus in the direction which approaches, and connected both. It is a perspective view which shows one Example of the 1st drive device which moves a card stand and a connection apparatus. It is a longitudinal cross-sectional view of the 1st drive device shown in FIG. It is sectional drawing which shows one Example of the coupling tool which connects the cylinder mechanism and suction tool in a 1st drive device, (A) is a figure for demonstrating the swing operation | movement of a coupling tool, (B () Is a figure for demonstrating the eccentric operation | movement of a coupling tool. It is a front view which shows one Example of the 2nd drive device which moves a connection apparatus and a circuit apparatus. It is a perspective view of the 2nd drive device shown in FIG. It is a perspective view showing one example of a pressure sensing device concerning the present invention. It is a front view of a pressure sensing device. It is a side view which shows a part of pressure sensing apparatus in a cross section. It is a top view of a pressure sensing device. It is a longitudinal cross-sectional view which shows one Example of the moving apparatus which moves a chuck | zipper piece, (A) shows the state of a moving apparatus when the holding | grip of the contact pin by a chuck | zipper piece is cancelled | released, (B) The state of the moving device when the contact pin is gripped is shown. It is a front view of the support device used with a pressure sensing device. It is a figure which shows one Example of the holding piece when a contact pin is hold | gripped with a chuck piece, and its vicinity, Comprising: (A) is a top view, (B) is obtained along 15B-15B of (A). FIG. It is a figure which shows one Example of the holding piece when the holding | grip of the contact pin by a chuck piece is cancelled | released, Comprising: (A) is a top view, (B) is along 16B-16B of (A). FIG.

  Referring to FIG. 1, an inspection apparatus 10 is used as an apparatus for performing an electrical test of a probe card 12 used in a so-called probing apparatus for performing an electrical test of a semiconductor integrated circuit or the like.

  In the probe card 12, a plurality of contacts, that is, probes 16 are arranged on the lower surface of the probe board 14 so that the needle tip is on the probe board 14 made of a wiring board using a material such as resin or ceramic. In addition, a plurality of first connection portions (not shown) electrically connected to the probe 16 via internal wiring (not shown) are provided on the upper surface of the substrate 14. Examples of such a probe card 12 include various types described in JP-A-4-51536, JP-A-2009-13640, JP-A-2007-278862, and the like.

  The inspection apparatus 10 is disposed above the card base 20 so as to be electrically connectable and detachable to the frame 18, the card base 20 that horizontally supports the probe card 12, and the probe card 12 disposed on the card base 20. The connection device 22, the circuit device 24 disposed above the connection device 22 so as to be electrically connectable to and disconnectable from the connection device 22, and the card base 20 and the connection device 22 are moved in a direction away from each other. A plurality of first driving devices 26, a plurality of second driving devices 28 that move the connecting device 22 and the circuit device 24 in a direction away from each other, a stage 30 disposed below the card base 20, and And a pressure sensing device 32 that is supported by the stage 30 and senses pressure (needle pressure) acting on the needle tip of the probe 16.

  The card base 20 is horizontally supported by the frame 18 so as to form a space in which the stage 30 and the pressure sensing device 32 are disposed below. The card base 20 also includes an annular card holder that detachably supports the probe card 12, that is, a card receiving portion 34, on the upper side of the center portion of the flat rectangular base plate 36 that is horizontally supported by the frame 18.

  The base plate 36 has an opening 36 a having a substantially same inner diameter as that of the card receiving portion 34 in the central region. The card receiving portion 34 is disposed on the base plate 36 coaxially with the opening 36a. The probe card 12 is horizontally detachably attached to the card receiving portion 34 so that the probe tip of the probe 16 is exposed downward via the card holder 36 and the opening 36a.

  The connection device 22 has a plurality of first connection members 38 that can be electrically connected to the probe 16 so as to act as a relay device between the probe card 12 and the circuit device 24. A disk-shaped repeater provided on the base member, that is, a connector 40, and a plate-shaped connector table 42 that supports the connector 40 in the central region so that the connector 40 is positioned above the probe card 12. I have. The connection device 22 is supported horizontally by the base plate 36 via the first drive device 26 so as to be movable up and down with respect to the card base 20.

  In the illustrated example, each first connecting member 38 passes through the connecting device 40 in the thickness direction (vertical direction), and the upper end portion is exposed on the upper surface of the connecting device 40 and the lower end portion is formed. It protrudes from the lower surface of the connector 40. The upper end portion and the lower end portion of each first connection member 38 are electrically connected to the second connection portion and the second connection portion that are releasably pressed by the first connection portion of the probe card 12, respectively. Used as the third connection portion.

  As each 1st connection member 38, electroconductive connection pins, such as a pogo pin and a rod-shaped pin, can be used. However, instead of such connection pins, second and third connection members in the form of connection lands are provided on the upper and lower surfaces of the connector 40, respectively, and the second and third connection members are mutually connected. An internal wiring that is electrically connected may be provided in the connector 40, and the second and third connection members and the internal wiring may be used as the first connection member.

  In the illustrated example, the connecting device 22 includes two or more first drives arranged at equiangular intervals around the θ axis extending in the vertical direction (that is, the Z direction) through the center of the annular card receiving portion 34. The device 26 is moved up and down with respect to the card base 20 while being kept horizontal.

  Each first drive unit 26 uses an elevating mechanism 44 such as a pneumatic jack, a hydraulic jack, a screw jack or the like as a drive source. In the illustrated example, the elevating mechanism 44 uses a cylinder mechanism that utilizes a pressurized fluid such as pressurized oil or air.

  As shown in FIGS. 4 and 5, such an elevating mechanism 44 includes a cylinder 44a and a piston rod, that is, an elevating rod 44b. The elevating mechanism 44 of each first drive device 26 is detachably attached to the card base 20 so that the elevating rod 44b protrudes upward from the cylinder 44a.

  The cylinder 44a has holes 46a and 46b for connecting a pressurized fluid supply source (not shown) for moving the lifting rod 44b back and forth with respect to the cylinder 44a and the internal space of the cylinder 44a. The hole 46a communicates with the internal space above the piston 44c (the space on the lifting rod 44b side), and the hole 46b communicates with the internal space below the piston 44c (the space opposite to the lifting rod 44b side). Yes.

  At the upper end of the lifting rod 44b, a disc-shaped suction tool 48 that sucks the lower surface of the circuit device 24 so as to be releasable has three axes (that is, an X-axis, a Y-axis, and a Z-axis) ) Is mounted so as to be angularly rotatable around.

  The suction tool 48 has a flat circular recess 48a that opens upward in the central region, an annular groove 48b that extends around the recess 48a and opens upward, and has an O-ring in the groove 48b. 52 is arranged. The recess 48a communicates with a decompression tank (not shown) connected to the vacuum source via a communication passage 48c, and acts as an adsorbing portion that adsorbs the lower surface of the circuit device 24 in a releasable manner.

  As shown in FIGS. 5 and 6, the connector 50 includes a connecting rod 54 having a male screw portion 54 a and a spherical head portion 54 b at the lower end portion and the upper end portion, and a head portion 54 b that can be relatively displaced in three dimensions. And a fitting member 58 fitted to the coupling member 56 so as to be capable of two-dimensional relative displacement in a horizontal plane (that is, the XY plane).

  The connection tool 50 is removably attached to the lower side of the suction tool 48 at the upper end portion of the fitting member 58 with the male screw portion 54a of the connection rod 54 screwed into the female screw hole of the lifting rod 44b from above.

  As shown in FIG. 1, the relative position in the height direction of the connection device 22 and the connector 40 with respect to the probe card 12 placed on the card base 20 is the θ axis line described above on the base plate 36 of the card base 20. Defined and maintained by a reference block 60 arranged at equiangular intervals around.

  Each reference block 60 includes a columnar base 60a supported by the base plate 36, and positioning pins 60b supported by the base 60a so as to extend upward from the base 60a. Such a reference block 60 positions the connector 40 in the horizontal direction with respect to the probe card 12 by receiving the positioning pin 60 b in the positioning hole 42 a provided in the connector table 42.

  The height dimension from the card base 20 to the upper end of the base 60 a is the same for all the reference blocks 60. Therefore, when the connection device 22 is sucked by the suction tool 48 and lowered by the first driving device 26, the lower surface of the connector base 42 comes into contact with the upper end of the base 60a. Thereby, the height position of the connection device 22 from the card base 20 is kept constant.

  Each first driving device 26 receives the lower surface of the connector base 42 on the upper surface of the suction tool 48, and the recess 48 a communicates with the above-described decompression tank, thereby attracting the connection device 22 to the upper surface of the suction tool 48. To do. In this state, all the first drive devices 26 are driven in synchronization, whereby the connection device 22 is raised and lowered with respect to the card base 20.

  When the connecting device 22 is lowered toward the card base 20, each positioning pin 60 b is received in the positioning hole 42 a of the connector base 42. At this time, even if the connecting device 22 is inclined or displaced with respect to the card base 20, the connecting pin 22b is received in the positioning hole 42a of the connector base 42, so that the connecting device 22 is connected to the card base 20 and thus the probe card 12. On the other hand, it is corrected to a correct posture and positioned correctly.

  In the connector 50, the connecting rod 54 and the coupling member 56 are coupled to the head 54b so as to be relatively displaceable three-dimensionally, and the coupling member 56 and the fitting member 58 are two-dimensionally in a horizontal plane. The connection device 22 adsorbed to the adsorbing tool 48 and the adsorbing tool 48 is angled around the above three axes with respect to the lifting rod 44b and the probe card 12. And can be displaced two-dimensionally in a horizontal plane.

  From the above, the coupling member 56 and the fitting member 58 absorb the displacement of the connecting device 22 with respect to the card base 20. When the connecting device 22 is positioned with respect to the card base 20 by the reference block 60, the connecting device 22 is displaced as follows and is corrected to the correct posture with respect to the card base 20, and is correctly positioned.

  When the connecting device 22 is inclined with respect to the card base 20, as shown in FIG. 6A, in the connecting device 22, the coupling member 56 and the fitting member 58 are displaced in three dimensions with respect to the connecting rod 54. By doing so, it is corrected so as to be parallel to the card base 20. Further, when the connecting device 22 is displaced in the horizontal plane with respect to the card base 20, as shown in FIG. 6B, the connecting device 22 has a coupling member 56 and a fitting member 58 with respect to the connecting rod 54. By being displaced two-dimensionally in the horizontal plane, it is moved relative to the card base 20 and is maintained in the correct position.

  6A and 6B, the connecting rod 54 is shown to be displaced with respect to the coupling member 56 and the fitting member 58, but the cylinder 44 is actually supported by the card base 20. Therefore, the coupling member 56 and the fitting member 58 are displaced with respect to the connecting rod 54 as described above.

  Referring again to FIG. 1, the circuit device 24 includes a plate-like unit base 62 and a plurality of tester units 64 supported by the unit base 62, and also includes a plurality of second driving devices 28. The base plate 36 of the card base 20 is supported horizontally.

  The unit base 62 is made of an electrically insulating material and has a plurality of second wiring members 66 that can be electrically connected to the first connecting member 38 of the connecting device 22. The second wiring member 66 protrudes downward from the lower surface of the unit base 62.

  Each tester unit 64 generates a test electrical signal to be supplied to the probe card 12, and receives a response signal obtained from the probe 16 when the test electrical signal is supplied to the probe 16, and processes this response signal. It is a device. Such a tester unit 64 generally includes a signal generation circuit for generating a test electrical signal, a processing circuit for processing a response signal, and the like, and such various circuits are connected to a plurality of circuits such as a wiring board. Place on the substrate (not shown). Those circuit boards are accommodated in a case.

  In the illustrated example, the circuit device 24 is moved up and down with respect to the card base 20 by two or more second driving devices 28 arranged at equiangular intervals around the θ axis, and is two-dimensionally in the horizontal plane. It is supported so as to be movable. Each of the second drive devices 28 includes a column 68 extending upward from the base plate 36 of the card base 20 and an L-shaped bracket 70 provided on the column 68 so as to be movable up and down by a lifting mechanism (not shown). It is supported by the base 20.

  As shown in FIGS. 7 and 8, each second driving device 28 includes a guide base 72 that is supported by the bracket 70 so as not to move, and an X slider 74 that is supported by the guide base 72 so as to be movable in the X direction. The Y slider 76 is supported by the X slider 74 so as to be movable in the Y direction, and the elevating mechanism 78 is supported by the Y slider 76 and moves the circuit device 24 up and down with respect to the card base 20.

  The guide stand 72 has a U-shaped bracket 72a that opens upward attached to the upper side of the bracket 70, and an X rail 72b that extends in the X direction is attached to the upper side of the bracket 72a.

  The X slider 74 is a U-shaped bracket 74 a that opens upward, a Y rail 74 b that is attached to the upper side of the bracket 74 a and extends in the Y direction, and is fitted to the X rail 72 b so as to be movable in the X direction. And a guide 74c attached to the head.

  The Y slider 76 includes a plate-shaped bracket 76a and a guide 76b that is attached to the lower side of the bracket 76a and is fitted to the Y rail 74b so as to be movable in the Y direction.

  The X slider 74 and the Y slider 76 are coupled to the guide table 72 and the X slider 74 so as not to rotate angularly about an axis extending in the X direction and about an axis extending in the Y direction, respectively.

  The elevating mechanism 78 is a known mechanism using a drive source 78a and an elevating rod 78b moved up and down by the drive source 78a, such as a pressure fluid type jack and a screw type jack. The drive source 78a is supported by the bracket 76a of the Y slider 76 so as to extend.

  The elevating mechanism 78 is also coupled to the unit base 62 of the circuit device 24 so as to be angularly rotatable about three axes intersecting each other by a connector 80 attached to the upper end of the elevating rod 78b.

  As the connector 80, the thing similar to what is shown, for example in FIGS. 5-7 can be used. However, in the case of the second drive device 28, the X slider 74 and the Y slider 76 that support the elevating mechanism 78 can move two-dimensionally in the horizontal plane, and thus the coupling member 56 and the fitting member 58 cannot move. The unit table 62 may be disabled from two-dimensional movement in the horizontal plane.

  The relative positioning between the card base 20 and the probe card 12 and the circuit device 24, particularly the unit base 62, includes a plurality of positioning pins 82 extending upward from the card base 36 and a plurality of positioning pins 84 extending upward from the connector 42. And done. The circuit device 24 has positioning holes 86 and 88 in the unit base 62 for receiving the positioning pins 82 and 84.

  From the above, when the circuit device 24 is positioned with respect to the card base 20 and the connection device 22 by the positioning pins 82 and 84, the circuit device 24 may be inclined with respect to the card base 20 and the connection device 22, or Even if it is displaced in the horizontal plane, it is displaced with respect to the card base 20 and the connection device 22 in the same manner as the connection device 22 with respect to the card base 20, and is corrected to a correct posture, thereby being correctly positioned.

  Referring again to FIG. 1, the inspection stage 30 is supported by the frame 18 to move the pressure sensing device 32 in the Y direction, and supported by the Y driving mechanism 30 a to move the pressure sensing device 32 to X. This is a known mechanism including an X drive mechanism 30b that moves in the direction and a Z drive mechanism 30c that is supported by the X drive mechanism 30b and moves the pressure sensing device 32 in the Z direction (vertical direction). The pressure sensing device 32 is supported by the Z drive mechanism 30c.

  As shown in FIGS. 9 to 13, the pressure sensing device 32 is capable of removing the contact pin 200, which is a sensing needle formed from a thin metal wire pressed against the tip of the probe 16, that is, the needle tip. A chuck device 202 for holding the chuck device 202 and a support device 204 for supporting the chuck device 202 are included.

  The chuck device 202 includes a pair of chuck pieces 206 and 207 separated in a first direction (Y direction or X direction) that are close to each other so as to grip the contact pins, and the chuck pieces 206 and 207 in the first direction. The chuck piece 206, 207 is electrically short-circuited between the chuck device 206, 207 and the moving device 208, which is movably supported and moved in the first direction and moved in the first direction. And a pair of electrically insulating members 210 that prevent this, and is supported by the supporting device 204 in the moving device 208.

  Each of the chuck pieces 206 and 207 is a trapezoidal plate-like member having conductivity, and is attached to the moving device 208 by a plurality of screw members 212 with one surface in the thickness direction facing each other. Yes. As shown in FIG. 15B, one chuck piece 206 has a protruding portion 206a protruding on the other chuck piece 207 side, and the other chuck piece 207 is on the one chuck piece 206 side. A projecting portion 207a projecting at the bottom is provided at the bottom.

  The contact pin 200 has a lower end placed on an upward stepped portion on the upper surface of the protruding portion 207a and is releasably held by the upper portions of the chuck pieces 206 and 207 so as to extend in the vertical direction. , 207 project upward. As described later, when a pressing force acts on the contact pin 200, the pressing force is reliably transmitted to the chuck pieces 206 and 207 even if the contact pin 200 is not firmly held.

  The electrically insulating member 210 is made of an elastically deformable rubber material and is formed in a plate shape, and is between the chuck pieces 206 and 207 and intersects the first direction with respect to the gripping position of the contact pin 200 by the chuck pieces 206 and 207. Are arranged on one side and the other side in the second direction. Both electrical insulating members 210 are attached to either one of the chuck pieces 206 and 207, and always prevent the chuck pieces 206 and 207 from short-circuiting.

  As shown in FIGS. 9 to 14, the moving device 208 includes a thick plate-like cylinder 214 supported by the support device 204, an elevating rod 216 disposed so as to be movable up and down in the cylinder 214, and the cylinder 214 and the elevating rod 216. And a pair of swinging members 220 supported on the upper portion of the cylinder 214 so as to be angularly rotatable (that is, swingable) about an axis extending in the second direction. And a pair of sliders 222 coupled to the swing member 220 and moved in the first direction as the corresponding swing member 220 swings.

  As shown in FIG. 13, the cylinder 214 has an internal space 214a and an upper U-shaped groove 214b that opens upward and extends in the first direction. The groove 214b communicates with the upper part of the internal space 214a. The lower ends of the elevating rod 216 and the elevating member 218 are received in the groove 214b and the internal space 214a so as to be elevable.

  In the illustrated example, the elevating rod 216 is a so-called piston rod including a piston 216a located in the internal space 214a of the cylinder 214 and a rod 216b extending upward from the piston 216a. The rod 216b reaches the groove 214b from the internal space 214a. The upper end of the lifting rod 216 is located in the groove 214 b of the cylinder 214.

  The elevating member 218 is located in the inner space 214a of the cylinder 214 and is disposed around the rod 216b. The elevating member 218 extends outward in opposite directions from the upper end of the cylindrical portion 218a and swings. 220 and a pair of extension portions 218b that abut on the lower portion of 220. The extension 218 b of the elevating member 218 is also located in the groove 214 b of the cylinder 214.

  The cylinder 214 has holes 214c and 214d for connecting a pressurized fluid supply source (not shown) for moving the lifting rod 216 and the lifting member 218 up and down relative to the cylinder 214 and the internal space 214a. The hole 214c communicates with the internal space above the piston 216a (space on the cylindrical portion 218a side), and the hole 214d communicates with the internal space below the piston 214a (space on the side opposite to the cylindrical portion 218a side). Has been.

  Each swing member 220 is swingably attached to the upper end portion of the cylinder 214 by a pivot 224 extending in the direction of the second axis, and is located on the inner side in the first direction with respect to the swing center of the swing member 220. The lower surface portion is in contact with the upper end of the rod 216b, and the lower surface portion on the outer side in the first direction with respect to the swing center is in contact with the upper end of the extension portion 218b.

  Each slider 222 has a main portion 226 having a recess 226a that opens downward, and a mounting portion 228 that protrudes upward from the upper surface of the main portion 226, and the top of the corresponding swing member 220 is recessed. The main portion 226 is coupled to the corresponding swing member 220 by a coupling pin 230 that is received at the location 222a and extends in the second direction.

  Both sliders 222 are commonly coupled to a common guide 232 extending in the first direction. As a result, both sliders 222 are allowed to move in the first direction, but cannot be displaced in the second direction.

  Both attachment portions 228 have a plate shape that protrudes upward from the upper surface of the corresponding main portion 226 and extends in the second direction, and one side surface in the thickness direction is opposed. Each of the chuck pieces 206 and 207 is attached to the other side surface of the attachment portion 228 in the thickness direction by the screw member 212 described above.

  In the illustrated example, the swing member 220 and the slider 222 that make a pair act as a moving member that is moved away from each other by the lifting and lowering motion of the lifting rod 216 and the lifting member 218.

  A wiring 234 is attached to each of the chuck pieces 206 and 207 by a wiring coupling member 236 such as a screw member. Each wiring 234 is connected to a processing circuit (not shown) that measures the resistance value of the electric path for the test signal. Such an electric circuit extends from the above-described processing circuit to the above-described processing circuit via the internal wiring provided on the probe substrate 14 of the probe card 12, the probe 16, the contact pin 200, and the like.

  In the chuck device 202 as described above, when the hole 214c communicates with the supply source of the pressurized fluid and the hole 214d is released, the lifting rod 216 is lowered as shown in FIG. The elevating member 218 is raised. As a result, both the swinging members 220 are swung so that the coupling pin 230 moves in the close direction, and both the sliders 220 and the chuck pieces 206, 207 are moved in the close direction, so that the chuck pieces 206, 207 are moved. Grips the contact pin 200 as shown in FIGS. 15 (A) and 15 (B).

  On the other hand, when the hole 214d is communicated with the supply source of the pressurized fluid and the hole 214d is released, the lifting rod 216 is lifted as shown in FIG. Is lowered. As a result, both the swinging members 220 swing so that the coupling pin 230 moves away from each other, both the sliders 220 and the chuck pieces 206 and 207 move away from each other, and the chuck pieces 206 and 207 move. The gripping of the contact pin 200 is released.

  As described above, the lifting / lowering motions of the lifting / lowering rod 216 and the lifting / lowering member 218 are opposite to each other, although they are synchronized with each other. As a result, both swinging members 220 swing greatly and reliably. Even when the chuck piece 206 is moved in the direction in which the contact pin 200 is removed, the chuck pieces 206 and 207 are prevented from being short-circuited by the electrical insulating member 210 existing between the chuck pieces 206 and 207. Is done.

  As shown in FIG. 11 and FIG. 14, the support device 204 has an upward surface 240 that receives the lower surface of the cylinder 214 of the chuck device 202 and an upper surface 240 that extends upward from the upper surface 240 and a back surface of the cylinder 214 of the chuck device 202. The front surface 242 has an L shape.

  The support device 204 is also formed by first and second members 250 and 252 that are divided by a pair of U-shaped slits 244 that are spaced apart from each other left and right and a pair of slits 246 that are spaced vertically. Yes. Each of the slits 244 and 246 penetrates the support device 32 in the thickness direction (second direction) thereof.

  Of the slits 246 that are separated from each other in the vertical direction, the upper slit 246 extends in the first direction, and the lower slit 246 extends in the first direction that opens upward and in a U-shape. . 14, one end and the other end in the first direction of each slit 246 are bifurcated, and each end of each slit 244 is a bifurcated branch of the slit 246. Located between the parts.

  Between each end portion of each slit 244 and the bifurcated branch portion of the slit 246, a thin-walled portion that continues integrally with the first and second members 250 and 252 as shown by reference numeral 14A in FIG. Has been. As a result, the first and second members 250 and 252 are formed by the above-described four thin-walled portions (the bifurcated branch portion of the slit 244 and the end portion of the slit 246 positioned between the bifurcated branch portions). Part) are integrally coupled so as to be elastically deformable in the vertical direction.

  The cylinder 214 of the chuck device 202 is attached to the second member 252 with a plurality of bolts 254 such that the lower surface thereof is placed on the upward surface 240 and the back surface of the cylinder 214 is in contact with the forward surface 242. . In the illustrated example, the second member 252 is attached to the second member 252 by two bolts 254 that pass through the second member 252 in the second direction at intervals in the first direction and are screwed into the cylinder 214. Yes.

  The pressing force acting on the contact pin 200 is transmitted to the second member 252 of the support device 204 via the chuck pieces 206 and 207 of the chuck device 202, the slider 222, and the cylinder 214. As a result, the second member 252 is displaced downward with respect to the first member 250.

  The pressure sensor element 256 is arranged between the first and second members 250 and 252 so that when the second member 252 is displaced downward by the pressing force acting on the contact pin 200, the pressure sensor element 256 responds to the pressing force. Is attached. In the illustrated example, the pressure sensor element 256 is a strain sensor that generates distortion due to a pressing force acting on the pressure sensor element 256, and an electrical signal obtained by the strain sensor is supplied to a detection circuit (not illustrated) via a wiring (not illustrated).

  The pressure sensing device 32 as described above is attached to the Z drive mechanism 30c of the stage 30 in the support device 204 so that the contact pin 200 extends in the vertical direction.

  In the inspection apparatus 10, as shown in FIG. 1, the pressure sensing device 32 is always lowered, and the connection device 22 and the circuit device 24 are connected to the card by the first and second driving devices 26 and 28, respectively. The base 20 and the connecting device 22 are raised to a position that is largely separated upward.

  In the above state, the probe card 12 to be tested is set in the card receiving portion 34. In this state, the connecting device 22 is lowered by the first driving device 26 and is electrically connected to the probe card 12 as shown in FIG. 2, and the circuit device 24 is lowered by the second driving device 28. The connection device 22 is electrically connected. Either the connection device 22 or the circuit device 24 may be lowered first or simultaneously.

  When the connecting device 22 is lowered, the connecting device 22 is forcibly pulled down because it is adsorbed by the adsorbing tool 48 of the first driving device 26. Thereby, in addition to the pulling-down force by the 1st drive device 26, the connection device 22's own weight acts as a force which descends the connection device 22, Therefore The connection device 22 will fall reliably. Further, when the connecting device 22 is lowered, even if the connecting device 22 is inclined or displaced with respect to the card base 20, the connecting device 50 and the positioning pin 60b of the reference block 60 function as described above. The correct posture with respect to the card base 20 and the correct positioning are obtained.

  When the circuit device 24 is lowered, the circuit device 24 is connected to the second drive device 28 by the connector 80 of the second drive device 28. Therefore, the circuit device 24 is not only pushed down by the weight of the circuit device 24 but also the second drive device 28. It is forcibly pulled down by the drive device 28. Thereby, the connecting device 22 is surely lowered.

  Further, even when the circuit device 24 is lowered, the circuit device 24 is inclined or displaced with respect to the card base 20 and the connection device 22 by the functions of the guide base 72, the X slider 74, the Y slider 76, and the coupling tool 80. The base 20 and the connection device 22 are parallel to each other and are correctly positioned by the positioning pins 82 and 84.

  As a result, each probe 16 of the probe card 12 is electrically connected to a corresponding circuit of the tester unit 64 via the connector 40 and the unit base 62.

  In the above state, the pressure sensing device 32 is moved and raised in the horizontal plane by the stage 30, the contact pin 200 is moved below the tip of the predetermined probe 16, and the contact pin 200 is moved to the probe 16. Is pressed against the needle tip. In this state, a predetermined test signal is supplied from the tester unit 64 to the probe 16, and a response signal from the probe 16 is returned to the tester unit 64.

  The pressure sensing device 32 detects the needle pressure of the probe 16 as an electrical signal corresponding to the pressure acting on the pressure sensor element 256 via the contact pin 200 when the contact pin 200 is pressed against the needle tip of the probe 16. And output. The electrical signal at this time is detected as a needle pressure signal representing the needle pressure by a detection circuit (not shown). This needle pressure signal is supplied to the tester unit 64 or another circuit.

  When a predetermined test signal is supplied to the probe 16, the tester unit 64 or other circuit measures the resistance value of the signal path between the tester unit 64 and the contact pin 200 of the pressure sensing device 32, and measures the measured resistance. The quality of the probe 16 is determined using the value, the needle pressure, the test signal, the response signal, and the like.

  The pressure sensing device 32 is moved up and down and the pressure sensing device 32 is moved in the horizontal plane for each probe 16. Thereby, all the probes 16 are inspected.

  After all probes 16 on the probe card 12 have been inspected, the pressure sensing device 32 is lowered and at least the connecting device 22 is raised relative to the card base 20 for testing a new probe card 12 that has not been inspected. The probe card is exchanged.

  According to said inspection apparatus 10, there exist the following technical effects.

  Since the pressing force acting on the contact pin 200 is transmitted to the pressure sensor element 256 via the chuck device, the pressing force can be obtained easily and with high accuracy as an electric signal corresponding to the deformation amount of the pressure sensor element 256. Can do.

  Since the lower end of the contact pin 200 is placed on the upper surface of the projecting portion 207a of the chuck piece 207, when the pressing force acts on the contact pin 200, the pressing force is applied even if the contact pin 200 is not firmly held. Then, it is reliably transmitted to the chuck pieces 206 and 207 and is transmitted to the pressure sensor element 256.

  Further, since the chuck pieces 206 and 207 are electrically separated by the electric insulating member 210, the resistance value of the electric path of the electric signal passing through the probe 16 and the pressure sensor element 256 is electrically supplied to the chuck pieces 206 and 207, respectively. By connecting the signal wiring 234 and connecting both the wirings 234 to the detection circuit by the Kelvin connection technique, it can be obtained easily and with high accuracy.

  Further, since the chuck pieces 206 and 207 can be displaced in the direction away from each other by the moving device 208, the contact pins 200 can be replaced while the chuck pieces 206 and 207 are kept apart. In addition, the contact pin 200 can be replaced easily and with high accuracy.

  As a result, although the needle pressure and resistance values as small as the needle pressure and resistance value of the integrated circuit inspection probe 16 can be measured with high accuracy with a simple structure, they are pressed by the probe 16. The contact pin 200 can be easily replaced.

  In the above-described embodiment, the circuit device 24 may be disposed at another location without being disposed above the connection device 22. In this case, the connection device 22 and the circuit device 24 are electrically connected by an appropriate means such as a cable.

  The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit described in the claims.

DESCRIPTION OF SYMBOLS 10 Inspection apparatus 12 Probe card 14 Probe board 16 Probe 18 Frame 20 Card stand 22 Connection apparatus 24 Circuit apparatus 26 1st drive apparatus 28 2nd drive apparatus 30 Stage 32 Pressure sensing apparatus 200 Contact pin 202 Chuck apparatus 204 Support apparatus 206 , 207 Chuck pieces 206a, 207a Protruding portion 208 Moving device 210 Electrical insulation member 214 Cylinder 216 Lifting rod 218 Lifting member 218a Tubular portion 218b Extension portion 220 Oscillating member (motion member)
222 Slider (moving member)
224 Axis 226 Main part 228 Mounting part 230 Connecting pin

Claims (9)

A contact pin having a tip that comes into contact with a device to be inspected, a chuck device that releasably holds the contact pin so that the tip is located above, and a support device that supports the chuck device, the contact pin Including a pressure sensor element that receives a pressing force acting on the chuck device via the chuck device,
The chuck device is a pair of chuck pieces for gripping the contact pins, a moving device for moving the chuck pieces in a first direction that is close to each other, the moving device supported by the support device, An electrical insulation member disposed between the chuck pieces to prevent the chuck pieces from being electrically short-circuited.   One of the chuck pieces has a first protrusion on the upper side protruding toward the other chuck piece, and the other chuck piece protrudes toward the one chuck piece. The contact pin is releasably gripped by the upper portions of both chuck pieces in a state of extending in the vertical direction with the lower end placed on the upper surface of the second protrusion. The pressure sensing device according to claim 1, wherein the pressure sensor protrudes upward from both chuck pieces.   2. The electrical insulating member is disposed at each of a location on one side and a location on the other side in a second direction intersecting the first direction with respect to a gripping position of the contact pin by the chuck piece. Or the pressure sensing apparatus of 2. The moving device is disposed between the cylinder supported by the support device, a lifting rod that is lifted and lowered with respect to the cylinder, and the cylinder and the lifting rod, and is synchronized with the lifting motion of the lifting rod. A lifting member that is lifted and lowered reversely to the lifting and lowering movement of the lifting rod, and a pair of moving members that are disposed on the cylinder at an interval in the first direction, wherein the lifting rod and the lifting member A pair of moving members that are moved in a direction away from each other by the up and down movement,
The pressure sensing device according to claim 1, wherein each chuck piece is coupled to the moving member. Each moving member is a swinging member disposed at an upper portion of the cylinder so as to be angularly rotatable around an axis extending in a second direction intersecting the first direction, and the lifting rod and the lifting / lowering member A swing member that is swung by the member, and a slider that is disposed above the cylinder so as to be movable in the first direction, and is coupled to the swing member so as to swing the swing member. And a slider that is moved in the first direction.
The pressure sensing device according to claim 4, wherein each chuck piece is coupled to the slider.   The said raising / lowering rod and the said raising / lowering member respectively have the contact part contact | abutted by the site | part of the one side and the other side in the said 1st direction regarding the rocking | swiveling center of the said rocking | swiveling member. The pressure sensing device as described.   The elevating member is located in the inner space of the cylinder, and extends outwardly in opposite directions from a cylindrical portion disposed around the elevating rod and an upper end portion of the cylindrical portion, and the swinging member The pressure sensing device according to claim 5 or 6, comprising a pair of extensions that abut against the member.   The pressure sensing device according to any one of claims 1 to 7, further comprising: a wiring coupling member disposed on a corresponding chuck piece for attaching each of the pair of wires to each chuck piece. A card base having a card receiving part for detachably receiving the probe card;
A stage disposed below the card stand;
The pressure sensing device according to any one of claims 1 to 8, wherein the pressure sensing device is supported by the stage so as to be positioned below the card base,
The stage is a probe card inspection apparatus that three-dimensionally moves the pressure sensing device relative to the probe card.

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