JP2011194880A - Apparatus for producing ceramic green sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus for producing a ceramic green sheet, capable of producing a zero defect thin type ceramic green sheet, the apparatus including a dry-preventing chamber disposed between a slurry-coating means and a drying means.SOLUTION: The apparatus for producing the ceramic green sheet includes a coating means 110 for coating slurry on a film, a drying means 120 for drying the slurry coated on the film, and a dry-preventing chamber 130 disposed between the coating means 110 and the drying means 120 for preventing the slurry from being dried.

Description

  The present invention relates to a ceramic green sheet manufacturing apparatus, and more particularly to a ceramic green sheet manufacturing apparatus including a drying prevention chamber disposed between a slurry applying unit and a drying unit.

  In order to develop an ultra-high capacity multilayer ceramic capacitor, it is required to make the ceramic green sheet thin and highly multilayer. However, the decrease in the thickness of the ceramic green sheet and the increase in the number of laminated ceramic green sheets are factors that increase the electrical short-circuit rate of the chip. This is because as the ceramic green sheet is made thinner, an electrical short circuit is more likely to occur even for a small defect on the ceramic green sheet.

  As a result, in order to manufacture an ultra-high capacity multilayer ceramic capacitor, it is an essential element to manufacture a thin film defect-free ceramic green sheet.

  On the other hand, a manufacturing apparatus for manufacturing a ceramic green sheet may include an application unit that applies a slurry containing ceramic powder, a binder resin, and a solvent onto a film, and a drying unit that dries the applied slurry.

  Here, when manufacturing thin ceramic green sheets with a thickness of 1um or less, the amount of solvent contained in the slurry applied on the film is also reduced, so it moves from the point where the slurry is applied by the coating device to the drying device. In the meantime, the slurry can be dried rapidly. Here, the rapid drying of the slurry may cause many defects in the ceramic green sheet.

  In addition, since the distance from an application | coating means to a drying means is long, the rapid drying of a slurry becomes further serious, and the fault generation | occurrence | production of a thin ceramic green sheet may worsen further.

  In addition, the film coated with the slurry may not only be contaminated by external foreign substances while moving from the coating unit to the drying unit, but the surface properties of the slurry coated by the external wind may deteriorate.

  In addition, the solvent volatilized from the slurry may remain in the working chamber, which may cause the working environment to deteriorate.

JP 2004-090466 A

  Accordingly, the present invention has been derived to solve the problems occurring in the ceramic green sheet manufacturing apparatus, and specifically includes a drying prevention chamber disposed between the drying means in the slurry application means. An object of the present invention is to provide a ceramic green sheet manufacturing apparatus capable of manufacturing a defect-free thin ceramic green sheet.

  An object of the present invention is to provide a ceramic green sheet manufacturing apparatus. The ceramic green sheet manufacturing apparatus includes: an application unit that applies a slurry on a film; a drying unit that dries the slurry applied on the film; and a drying unit that is disposed between the application unit and the drying unit. An anti-drying chamber may be included to prevent

  Here, the inside of the anti-drying chamber can maintain the vapor pressure higher than the atmospheric pressure.

  In addition, the inside of the drying prevention chamber can maintain the concentration of the solvent volatilized from the slurry below the lower limit of combustion or the lower limit of explosion of the solvent.

  The drying unit may include an exhaust unit and an intake unit arranged according to the moving direction of the film.

  In addition, it may further include a vacuum roll disposed inside the anti-drying chamber.

  Another object of the present invention is to provide a ceramic green sheet manufacturing apparatus. The ceramic green sheet manufacturing apparatus includes: an application unit for applying a slurry on a film; a drying unit for drying the slurry applied on the film; and an external gas disposed between the application unit and the drying unit. And an anti-drying chamber including an exhaust port for exhausting internal gas to the outside.

  Here, a valve capable of adjusting the opening and closing of the suction port and the exhaust port may be further included.

  The exhaust port and the suction port may be arranged at the upper end of the drying prevention chamber sequentially in the moving direction of the film coated with the slurry.

  The external gas can be an inert gas.

  In addition, the concentration of the solvent volatilized from the slurry can maintain the combustion lower limit value or the explosion lower limit value of the solvent inside the drying prevention chamber.

  Another object of the present invention is to provide a ceramic green sheet manufacturing apparatus. The ceramic green sheet manufacturing apparatus includes: an application unit that applies a slurry on a film; a drying unit that dries the slurry applied on the film; and an opening formed at least on one surface between the application unit and the drying unit. A drying prevention chamber for preventing drying of the slurry; and a vapor pressure adjustment control means for adjusting the opening and closing of the opening to maintain the vapor pressure inside the drying prevention chamber higher than atmospheric pressure; Can be included.

  Here, the vapor pressure adjustment control unit may have an elliptical roll shape, and may include a slit part having a plurality of slits and a blocking part connected to the slit part.

  In addition, a driving roller disposed inside both sides of the vapor pressure adjustment control unit and adjusting opening / closing of the opening through rotation of the vapor pressure adjustment control unit may be included.

  The vapor pressure adjustment control means includes a first slit portion having a plurality of first slits; and a second slit corresponding to the first slit, and moves to the left and right on the first slit portion to move the first slit portion. A second slit portion capable of covering or opening one slit.

  Further, the concentration of the solvent volatilized from the slurry inside the drying prevention chamber can maintain the combustion lower limit value or the explosion lower limit value of the solvent.

  The ceramic green sheet manufacturing apparatus of the present invention includes a drying prevention chamber for preventing the slurry from being dried between the coating unit and the drying unit, thereby enabling manufacturing of a defect-free thin green sheet.

  Moreover, the ceramic green sheet manufacturing apparatus can prevent the slurry from being contaminated by external foreign substances by including the drying prevention chamber.

  Further, the ceramic green sheet manufacturing apparatus includes the drying prevention chamber, so that the inside of the working chamber can be prevented from being contaminated by the solvent volatilized from the slurry.

  Moreover, the drying prevention chamber can be prevented from burning or exploding from the solvent by being provided with a vapor pressure adjustment control means.

1 is a partial schematic view of a ceramic green sheet manufacturing apparatus according to a first embodiment of the present invention. FIG. 5 is a schematic view of a drying prevention chamber provided in a ceramic green sheet manufacturing apparatus according to a second embodiment of the present invention. FIG. 6 is a schematic view of a drying prevention chamber provided in a ceramic green sheet manufacturing apparatus according to a third embodiment of the present invention. FIG. 6 is a schematic view of a drying prevention chamber provided in a ceramic green sheet manufacturing apparatus according to a fourth embodiment of the present invention. It is a photograph of the ceramic green sheet of the comparative example manufactured from the ceramic green sheet manufacturing apparatus which is not equipped with the drying prevention chamber. It is a photograph of the ceramic green sheet of the present invention manufactured from a ceramic green sheet manufacturing apparatus equipped with a dry prevention chamber.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings of a ceramic green sheet manufacturing apparatus. The embodiments introduced below are provided as examples for sufficiently conveying the idea of the present invention to those skilled in the art. Therefore, the present invention is not limited to the examples described below, and may be embodied in other forms. In the drawings, the size and thickness of the device may be exaggerated for convenience. Like reference numerals refer to like elements throughout the specification.

  FIG. 1 is a partial schematic view of a ceramic green sheet manufacturing apparatus according to a first embodiment of the present invention.

  Referring to FIG. 1, the ceramic green sheet manufacturing apparatus according to the first embodiment of the present invention includes a coating unit 110, a drying unit 120, and a drying prevention chamber 130 disposed between the coating unit 110 and the drying unit 120. Can do.

  The coating unit 110 can serve to apply a slurry S containing ceramic powder, a binder resin and a solvent on the film F. Here, any ceramic powder, binder resin, and solvent can be used as long as they are materials that normally form a green sheet. Moreover, although the material of the film F can be PET, for example, the Example of this invention is not limited to this.

  The application unit 110 can apply the slurry S by spraying it onto the film F. However, the embodiment of the present invention is not limited to this. For example, the application unit 110 may be a doctor blade device, a roll coating device, a reverse coating device, a slit die coating device, or the like.

  Here, the slurry S applied on the film F can be formed thin, for example, to a thickness of 1 μm or less.

  The application of the slurry S can be performed on the film F perpendicular to the ground. However, the embodiment of the present invention is not limited to this.

  The film F coated with the slurry S can be moved to the drying means 120 by the vacuum roll 140. Here, the vacuum roll 140 may include a number of vacuum holes. At this time, after applying a vacuum through the vacuum hole, the film F coated with the slurry S is moved from the vertical or inclined state to the drying unit 120 with respect to the vacuum roll 140 by rotating the vacuum roll 140. Can be moved.

  The drying means 120 can dry the slurry S applied on the film F to form the ceramic green sheet G. At this time, the drying unit 120 may include a heating unit for drying the slurry.

  In addition, the drying unit 120 may include an exhaust unit 121 and an intake unit 122 that are sequentially arranged in the moving direction of the film F. That is, the exhaust part 121 can be arranged near the inlet 123 for the film F, and the intake part 122 can be arranged near the outlet 124 for the film F. Thereby, an airflow in the direction opposite to the moving direction of the film can be generated inside the drying means 120, and the solvent concentration inside the drying means 120 can be made constant for each region. This is because the concentration of the solvent volatilized from the slurry S may be higher at the input port 123 than at the discharge port 124 of the drying unit 120, so that a defect may occur in the green sheet.

  Here, although the drying unit 120 is illustrated as having a single drying chamber, the embodiment of the present invention is not limited to this, and for example, the drying unit may include two or more drying chambers.

  The drying prevention chamber 130 can be disposed between the coating unit 110 and the drying unit 120. The anti-drying chamber 130 may have a vapor pressure higher than atmospheric pressure in order to prevent unstable drying of the slurry S. At that time, the vapor pressure can be increased by adjusting the concentration of the solvent volatilized from the slurry S. That is, the vapor pressure can be increased by increasing the solvent concentration.

  Thereby, since the thickness of the slurry S apply | coated on the film F is small, the rapid drying of the slurry S which generate | occur | produces can be prevented. That is, the slurry S applied on the film F can be dried only by the drying means 120, the drying control of the slurry S becomes possible, and a thin ceramic green sheet having no defects is manufactured. Can do.

  In addition to this, when the concentration of the solvent volatilized from the slurry S in the drying prevention chamber 130 continuously increases, combustion and explosion may easily occur. Thereby, in order to prevent combustion and explosion, the solvent concentration inside the drying prevention chamber can be maintained below the combustion lower limit value or the explosion lower limit value of the solvent. At this time, the combustion lower limit value or the explosion lower limit value of the solvent concentration can be made different depending on the type of the solvent. For example, when the weight ratio of toluene in the solvent and the weight ratio of ethanol is 1: 1, the lower explosion limit value of the solvent can be set to 2.25 vol%, so that the inside of the drying prevention chamber 130 is 2.25 vol% or less. Can be maintained. At this time, in order to stably prevent the explosion, the solvent concentration inside the drying prevention chamber 130 can be maintained at 50% or less of the lower limit of explosion of the solvent, that is, 1.13 vol% or less.

  Therefore, as in the first embodiment of the present invention, it is disposed between the slurry applying means and the slurry drying means, and is provided with a drying prevention chamber for preventing the slurry from being dried. Instability of initial drying due to foreign matter and wind from the outside can be suppressed. That is, a defect-free thin green sheet can be manufactured through the ceramic green sheet manufacturing apparatus according to the first embodiment of the present invention.

  Hereinafter, a ceramic green sheet manufacturing apparatus according to a second embodiment of the present invention will be described with reference to FIG. Here, except for the anti-drying chamber having the exhaust port and the intake port, the configuration is the same as that of the first embodiment described above, and therefore, a duplicate description is omitted, and only the anti-drying chamber is shown in FIG. .

  FIG. 2 is a schematic view of a drying prevention chamber provided in a ceramic green sheet manufacturing apparatus according to a second embodiment of the present invention.

  Referring to FIG. 2, the ceramic green sheet manufacturing apparatus according to the second embodiment of the present invention prevents the drying of the slurry S between the coating unit 110 for applying the slurry S and the drying unit 120 for drying the slurry S. An anti-drying chamber 230 can be included.

  The drying prevention chamber 230 can prevent the slurry S from drying in the drying prevention chamber 230 by maintaining the internal vapor pressure higher than the atmospheric pressure.

  The vapor pressure can be adjusted through the concentration of the solvent volatilized from the slurry S. However, if the vapor pressure is adjusted only through the solvent concentration, it is not only easy to control the vapor pressure inside the anti-drying chamber, but it may take a lot of time to increase the vapor pressure.

  In order to solve this problem, the anti-drying chamber 230 may include a suction port 231. The suction port 231 can inject a gas for increasing the vapor pressure into the anti-drying chamber 230 to easily increase the vapor pressure inside the anti-drying chamber 230 from the atmospheric pressure. Here, an inert gas that does not chemically affect the slurry, such as nitrogen, argon, helium, and neon, can be used as the gas.

  In addition, if the solvent concentration inside the drying prevention chamber 230 is a certain concentration or more, combustion or explosion may occur. In this case, the solvent concentration inside the drying prevention chamber 230 can be maintained at 50% or less with respect to the combustion lower limit value or the explosion lower limit value for more stable management.

  As a result, when the solvent concentration in the drying prevention chamber 230 increases to a certain concentration or more, an exhaust port 232 for discharging the internal gas to the outside can be provided. In addition to this, the vapor pressure higher than the atmospheric pressure can be maintained by diluting the solvent concentration through the gas introduced from the suction port 231.

  Here, the suction port 231 and the exhaust port 232 can be respectively provided with valves 233 that can be opened and closed. Thus, the solvent concentration inside the drying prevention chamber 230 can be kept constant by operating the valve 233.

  The exhaust port 232 and the suction port 231 are sequentially arranged in the moving direction of the film F coated with the slurry S. The anti-drying chamber 230 may be disposed at the upper end. Here, the flow direction of the gas through the exhaust port 232 and the suction port 231 can be opposite to the moving direction of the film F coated with the slurry S. Thereby, the gradient of the solvent concentration generated for each region in the drying prevention chamber 230 can be reduced, and the stability of the initially applied slurry S can be ensured. This is because the solvent concentration inside the drying prevention chamber 230 may be higher in the vicinity of the film F inlet 234 than in the vicinity of the outlet 235. Confirmation required

  Therefore, as in the second embodiment of the present invention, the anti-drying chamber includes an inlet and an exhaust for introducing an inert gas, so that the vapor pressure inside the anti-drying chamber can be easily controlled, It is possible to effectively prevent combustion or explosion due to the volatilized solvent.

  Hereinafter, a ceramic green sheet manufacturing apparatus according to a third embodiment of the present invention will be described with reference to FIG. Here, except for the anti-drying chamber provided with the exhaust port and the intake port, the structure is the same as that of the second embodiment described above, and therefore, a duplicate description is omitted, and only the anti-drying chamber is shown in FIG. .

  FIG. 3 is a schematic view of a drying prevention chamber provided in a ceramic green sheet manufacturing apparatus according to a third embodiment of the present invention.

  Referring to FIG. 3, the ceramic green sheet manufacturing apparatus according to the third embodiment of the present invention includes a coating unit 110, a drying unit 120, and a drying prevention chamber 330 disposed between the coating unit 110 and the drying unit 120. it can.

  The anti-drying chamber 330 may include an opening 331 opened on the upper surface.

  Vapor pressure adjustment control means 335 can be provided in the opening 331.

  The vapor pressure adjustment control means 335 can adjust the opening / closing of the opening 331. Here, the vapor pressure adjustment control means 335 may have an elliptical roll shape. In this case, the vapor pressure adjustment control unit 335 may include a slit part 332 including a large number of slits 333 and a blocking part 334 disposed extending from the slit part 332.

  In addition, drive rollers 336 for rotationally driving the vapor pressure adjustment control means 335 can be disposed inside both sides of the roll.

  Here, the vapor pressure adjustment control unit 335 can rotate to adjust the area of the slit portion 332 disposed in the opening 331. That is, the vapor pressure adjustment control means 335 can adjust the opening / closing of the opening 331 by rotation to control the internal vapor pressure. For example, when the vapor pressure is lower than the atmospheric pressure inside the drying prevention chamber 330, the vapor pressure adjustment control unit 335 can rotate so that the blocking unit 334 is disposed in the opening 331. Thereby, the vapor pressure inside the drying prevention chamber 330 can be increased by the solvent volatilized from the slurry S. On the other hand, when the concentration of the solvent volatilized from the slurry S within the drying prevention chamber 330 is equal to or higher than a certain level, the vapor pressure adjustment control unit 335 is rotated so that the slit 332 is disposed in the opening 331. Can do. As a result, the solvent is released to the outside inside the drying prevention chamber 330, and combustion or explosion can be prevented. In this case, when the solvent is discharged to the outside, the area of the slit portion 332 disposed in the opening 331 can be adjusted to adjust the solvent discharge speed.

  Accordingly, the vapor pressure adjustment control unit 335 adjusts the vapor pressure inside the drying prevention chamber 330 so as to be maintained higher than the atmospheric pressure, and serves to prevent the slurry S from drying inside the drying prevention chamber 330. Can do. Further, the vapor pressure adjustment control means 335 volatilizes from the slurry S inside the drying prevention chamber 330 in order to prevent combustion or explosion from occurring due to the solvent volatilized from the slurry S inside the drying prevention chamber 330. It can play the role of maintaining the solvent concentration below the lower limit of combustion or the lower limit of explosion.

  Therefore, as in the embodiment of the present invention, the drying prevention chamber includes the vapor pressure adjustment control means, thereby preventing unstable initial drying of the slurry and producing a good quality green sheet. Can prevent combustion or explosion that may occur.

  Hereinafter, a ceramic green sheet manufacturing apparatus according to a fourth embodiment of the present invention will be described with reference to FIG. Here, except for the vapor pressure adjustment control means, the configuration is the same as that of the third embodiment described above, and therefore, a duplicate description is omitted, and only the drying prevention chamber is shown in FIG.

  FIG. 4 is a schematic view of a drying prevention chamber provided in a ceramic green sheet manufacturing apparatus according to a fourth embodiment of the present invention.

  Referring to FIG. 4, the ceramic green sheet manufacturing apparatus according to the fourth embodiment of the present invention includes a coating unit 110, a drying unit 120, and a drying prevention chamber 430 disposed between the coating unit 110 and the drying unit 120. it can.

  Vapor pressure adjustment control means 436 for adjusting the internal vapor pressure can be disposed in the opening 431 of the drying prevention chamber 430.

  The vapor pressure adjustment control unit 436 may include a first slit part 432 including a large number of first slits 433 and a second slit part 434 including a large number of second slits 435 corresponding to the first slits 433. The first slit portion 432 and the second slit portion 434 may have a flat substrate shape. The 1st slit part 432 and the 2nd slit part 434 can be arrange | positioned so that it may mutually overlap. Here, the second slit portion 434 can move left and right on the first slit portion 432. At this time, the first slit 433 of the first slit part 432 can be covered or opened by the movement of the second slit part 434.

  Here, the vapor pressure adjustment control unit 436 can control the vapor pressure inside the drying prevention chamber 430 by adjusting the opening and closing of the first slit 433. For example, when the vapor pressure is lower than the atmospheric pressure inside the drying prevention chamber 430, the second slit portion 434 can move to cover the first slit 433. Accordingly, the opening of the drying prevention chamber 430 is blocked from the outside, and the vapor pressure inside the drying prevention chamber 430 can be increased by the solvent volatilized from the slurry S. On the other hand, when the concentration of the solvent volatilized from the slurry S is greater than or equal to a certain level in the drying prevention chamber 430, the second slit portion 434 moves so that the first slit 433 and the second slit 435 overlap each other. The first slit 433 can be opened. Accordingly, the solvent inside the drying prevention chamber 430 is discharged to the outside through the first and second slits 433 and 435, and combustion or explosion due to the solvent can be prevented. At this time, when the solvent is discharged to the outside, the opening / closing degree of the first slit 433 can be adjusted to control the solvent discharge speed.

  Accordingly, the vapor pressure adjustment control unit 436 adjusts the vapor pressure inside the drying prevention chamber 430 so as to be maintained higher than the atmospheric pressure, and serves to prevent drying of the slurry inside the drying prevention chamber 430. Can do. Further, the vapor pressure adjustment control means 436 serves to prevent the combustion or explosion caused by the solvent by maintaining the concentration of the solvent volatilized from the slurry in the drying prevention chamber 430 below the combustion lower limit value or the explosion lower limit value. it can.

  In the embodiment of the present invention, it has been described that the second slit portion 434 moves and adjusts the opening and closing of the first slit 433, but is not limited thereto. For example, the first slit portion 432 can be moved while the second slit portion 434 is fixed, or all of the first and second slit portions 432 and 434 can be moved.

  Therefore, as in the embodiment of the present invention, the drying prevention chamber is provided with the vapor pressure adjustment control means, thereby preventing unstable initial drying of the slurry and producing a good quality green sheet. Combustion or explosion that can occur in the prevention chamber can be prevented.

  Hereinafter, the surface of the ceramic green sheet with and without the drying prevention chamber is observed with reference to FIGS.

  FIG. 5 is a photograph of a comparative ceramic green sheet manufactured from a ceramic green sheet manufacturing apparatus that does not have a drying prevention chamber.

  FIG. 6 is a photograph of the ceramic green sheet of the present invention manufactured from a ceramic green sheet manufacturing apparatus having a drying prevention chamber.

  Here, the solvent concentration inside the drying prevention chamber was maintained at 0.23 vol%.

  As shown in FIGS. 5 and 6, it was confirmed that many defects appeared on the surface of the ceramic green sheet of the comparative example as compared with the ceramic green sheet according to the present invention.

  In the ceramic green sheet manufacturing apparatus of the present invention, a thin green sheet having no defects can be manufactured by providing a drying prevention chamber disposed between the coating unit and the drying unit to prevent drying of the slurry. .

DESCRIPTION OF SYMBOLS 110 Application | coating means 120 Drying means 130, 230, 330, 430 Drying prevention chamber 231 Intake port 232 Exhaust port 335, 436 Vapor pressure adjustment control means 332 Slit part 334 Blocking part 432 1st slit part 434 2nd slit part

Claims (15)

Application means for applying a slurry onto the film;
A ceramic green sheet manufacturing apparatus comprising: a drying unit that dries the slurry applied on the film; and a drying prevention chamber disposed between the coating unit and the drying unit for preventing the slurry from drying.   The ceramic green sheet manufacturing apparatus according to claim 1, wherein the inside of the drying prevention chamber is maintained at a vapor pressure higher than atmospheric pressure.   The ceramic green sheet manufacturing apparatus according to claim 1, wherein the concentration of the solvent volatilized from the slurry maintains the combustion lower limit value or the explosion lower limit value of the solvent inside the drying prevention chamber.   The ceramic green sheet manufacturing apparatus according to claim 1, wherein the drying unit includes an exhaust unit and an intake unit arranged according to a moving direction of the film.   2. The ceramic green sheet manufacturing apparatus according to claim 1, further comprising a vacuum roll disposed inside the anti-drying chamber. Application means for applying a slurry onto the film;
A drying means for drying the slurry coated on the film; and a drying means disposed between the coating means and the drying means, for providing an external gas inside and an exhaust port for discharging the internal gas to the outside. Prevention chamber;
Including ceramic green sheet manufacturing equipment.   The ceramic green sheet manufacturing apparatus according to claim 6, further comprising a valve capable of adjusting opening and closing of the suction port and the exhaust port.   The ceramic green sheet manufacturing apparatus according to claim 6, wherein the exhaust port and the suction port are sequentially arranged at an upper end of the drying prevention chamber in a moving direction of the film to which the slurry is applied.   The ceramic green sheet manufacturing apparatus according to claim 6, wherein the external gas is an inert gas.   The ceramic green sheet manufacturing apparatus according to claim 6, wherein the concentration of the solvent volatilized from the slurry maintains the combustion lower limit value or the explosion lower limit value of the solvent inside the drying prevention chamber. Application means for applying a slurry onto the film;
A drying means for drying the slurry applied on the film;
A drying prevention chamber disposed between the coating means and the drying means and having an opening on at least one surface thereof to prevent drying of the slurry; and opening and closing of the opening to adjust the inside of the drying prevention chamber. Means for controlling the vapor pressure to maintain the vapor pressure higher than atmospheric pressure;
Including ceramic green sheet manufacturing equipment.   The ceramic green sheet manufacturing apparatus according to claim 11, wherein the vapor pressure adjustment control unit has an elliptical roll shape, and includes a slit part having a plurality of slits and a blocking part connected to the slit part.   The ceramic green sheet manufacturing apparatus according to claim 11, further comprising a driving roller disposed inside both sides of the vapor pressure adjustment control unit and configured to adjust opening and closing of the opening through rotation of the vapor pressure adjustment control unit. The vapor pressure adjustment control means includes
A first slit portion having a plurality of first slits; and a second slit corresponding to the first slit, and moving left and right on the first slit portion to cover or open the first slit. A second slit portion capable of
The ceramic green sheet manufacturing apparatus of Claim 11 containing these.   The ceramic green sheet manufacturing apparatus according to claim 11, wherein the concentration of the solvent volatilized from the slurry maintains the combustion lower limit value or the explosion lower limit value of the solvent inside the drying prevention chamber.

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