JPH03277505A - Manufacture of ceramic green sheet - Google Patents
Manufacture of ceramic green sheetInfo
- Publication number
- JPH03277505A JPH03277505A JP7686790A JP7686790A JPH03277505A JP H03277505 A JPH03277505 A JP H03277505A JP 7686790 A JP7686790 A JP 7686790A JP 7686790 A JP7686790 A JP 7686790A JP H03277505 A JPH03277505 A JP H03277505A
- Authority
- JP
- Japan
- Prior art keywords
- drying
- slurry
- ceramic green
- green sheet
- front chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000001035 drying Methods 0.000 claims abstract description 31
- 239000002002 slurry Substances 0.000 claims abstract description 20
- 239000002904 solvent Substances 0.000 claims abstract description 11
- 238000001816 cooling Methods 0.000 claims abstract description 3
- 238000007606 doctor blade method Methods 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 1
- 238000005336 cracking Methods 0.000 abstract description 3
- 239000013557 residual solvent Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 238000000935 solvent evaporation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 101100313164 Caenorhabditis elegans sea-1 gene Proteins 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Producing Shaped Articles From Materials (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、高密度実装の回路基板などに用いられるセラ
ミックグリーンシートの製造方法に係り、特に、幅が広
く肉薄で、セラミックグリーンシートを高歩留まりで製
造する方法に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing ceramic green sheets used for high-density packaging circuit boards, etc. This invention relates to a method of manufacturing with high yield.
従来のセラミックグリーンシートの製造方法は、例えば
、ドクターブレード法のようにセラミック主材、焼結助
剤等の無機物粉末と、有機バインダ。Conventional methods for producing ceramic green sheets include, for example, the doctor blade method, which uses a ceramic main material, an inorganic powder such as a sintering aid, and an organic binder.
可塑剤等の有機物と、多量の溶剤とを混合したスラリを
、キャリアフィルム上に設置されたドクターブレードを
設けたダムへ注入し、ドクターブレードとキャリアフィ
ルムとの間隙よりスラリを通過させ、キャリアフィルム
を一定方向へ移動させ、その上にスラリを所定の厚みで
塗布し、これを乾燥固化させるようにしていた。A slurry made by mixing an organic substance such as a plasticizer with a large amount of solvent is injected into a dam equipped with a doctor blade installed on the carrier film, and the slurry is passed through the gap between the doctor blade and the carrier film to remove the carrier film. was moved in a certain direction, a slurry was applied on top of it to a predetermined thickness, and the slurry was dried and solidified.
ドクターブレード法では、溶剤を自然乾燥させると時間
かかるので、通常、高温下で強制的に乾燥させるように
していた。しかし、乾燥が急激すぎると、溶剤蒸発によ
るグリーンシートの収縮が局部的にアンバランスになり
、グリーンシートにひび割れが発生するという問題があ
った。In the doctor blade method, it takes a long time to dry the solvent naturally, so it is usually forced to dry at high temperatures. However, if the drying is too rapid, the shrinkage of the green sheet due to solvent evaporation becomes locally unbalanced, causing the problem that cracks occur in the green sheet.
このため、例えば、特開昭６２−１５８００３号公報に
記載のように、熱風が、直接、グリーンシートに当らな
いように溶剤蒸気透過性フィルムの上から供給し、高温
、高溶剤濃度の雰囲気で乾燥させたり、また、特開昭６
３−２９０７０７号公報に記載のように、数十〜２００
Ｔｏｒｒの減圧下で乾燥させたりして、急激な乾燥を緩
和し、ひび割れを防止するようにしていた。For this reason, for example, as described in JP-A No. 62-158003, hot air is supplied from above the solvent vapor permeable film to prevent it from directly hitting the green sheet, and in an atmosphere of high temperature and high solvent concentration. It can be dried or
As described in Publication No. 3-290707, several tens to 200
Drying under reduced pressure of Torr was used to alleviate rapid drying and prevent cracking.
特開昭６２−１５８００３号公報に記載の方をでは、ス
ラリ内の溶剤量のばらつきのため、まノ特開昭６３−２
９０７０７号公報に記載の方法二は、乾燥炉内を所定の
低圧に保持することが困ｌであるため、ひび割れを充分
に除去できず、まノセラミックグリーンシートの未乾燥
部分が発生］るという問題などが残されていた。In the method described in JP-A-62-158003, due to the variation in the amount of solvent in the slurry, Mano JP-A-63-2
In method 2 described in Publication No. 90707, it is difficult to maintain the inside of the drying oven at a predetermined low pressure, so cracks cannot be removed sufficiently, resulting in undried parts of the manoceramic green sheets. Problems remained.
本発明の目的は、ひび割れを防止し、歩留ま−の良い、
肉薄、幅広のセラミックグリーンシー１の製造方法を提
供す４ることにある。The purpose of the present invention is to prevent cracks and provide high yield.
An object of the present invention is to provide a method for manufacturing a thin and wide ceramic green sea 1.
本発明は、この目的を達成するために、ドグ６−ブレー
ド法によりキャリアフィルム上に塗布したスラリを乾燥
炉により乾燥させるセラミッククリーンシート製造装置
において、上記ドクターフレードから乾燥炉に至るまで
の間を低温雰囲気に保持するようにした。In order to achieve this object, the present invention provides a ceramic clean sheet manufacturing apparatus in which a slurry coated on a carrier film by the dog 6-blade method is dried in a drying oven. was kept in a low-temperature atmosphere.
スラリ内の溶剤蒸発速度は温度が高いほど速く、温度が
低いほど遅い。本発明のセラミックグリーンシート製造
装置は塗布直後の溶剤蒸発速度が遅いので、急激な乾燥
はなく、ひび割れの発生がない。The rate of solvent evaporation in the slurry is faster as the temperature is higher and slower as the temperature is lower. Since the ceramic green sheet manufacturing apparatus of the present invention has a slow solvent evaporation rate immediately after application, there is no rapid drying and no cracking occurs.
［実施例〕 以下、第１図は本発明の実施例を示す図である。[Example〕 Hereinafter, FIG. 1 is a diagram showing an embodiment of the present invention.
第１図において、前室１２および冷気供給管１３が本発
明に関する部分である。In FIG. 1, the front chamber 12 and the cold air supply pipe 13 are the parts related to the present invention.
ベルトコンベア６により右方向に搬送されるキャリアフ
ィルム５の左端部にスラリ２を収容するダム３、および
、ドクターブレード１が設けられ、ドクターブレード１
とキャリアフィルム５の間隙からスラリ２がキャリアフ
ィルム５上に押しだされる。A dam 3 that accommodates the slurry 2 and a doctor blade 1 are provided at the left end of the carrier film 5 that is conveyed rightward by the belt conveyor 6.
The slurry 2 is pushed out onto the carrier film 5 from the gap between the carrier film 5 and the carrier film 5.
キャリアフィルム５上に塗布されたスラリ２は前室１２
、乾燥炉７，８を順次通過して乾燥される。The slurry 2 coated on the carrier film 5 is placed in the front chamber 12.
, drying ovens 7 and 8 successively.
給気管１１から高温乾燥空気が乾燥炉８に供給され、排
気管１０から排気されると同時に、その一部が乾燥炉７
にも供給され、排気管９から排気される。給気管１１か
ら供給された高温乾燥空気の一部はさらに前室１２にも
供給される。High-temperature dry air is supplied from the air supply pipe 11 to the drying furnace 8 and exhausted from the exhaust pipe 10, and at the same time, a part of it is supplied to the drying furnace 7.
It is also supplied to the exhaust pipe 9 and exhausted from the exhaust pipe 9. A portion of the high temperature dry air supplied from the air supply pipe 11 is further supplied to the front chamber 12.
例えば、スラリ２の粘度を１００００〜１５０００ｃＰ
、ドクターブレード１とキャリアフィルム５のすきまを
０． ６ｍｍ、キャリアフィルム５の速度を毎分０．２
ｍ、乾燥炉８の温度を８０℃とした場合、乾燥炉８から
は厚さが０．２５ｍｍのセラミックグリーンシート４が
取り出される。For example, set the viscosity of slurry 2 to 10,000 to 15,000 cP.
, the gap between the doctor blade 1 and the carrier film 5 is set to 0. 6 mm, and the speed of carrier film 5 is 0.2 per minute.
m, when the temperature of the drying oven 8 is 80° C., a ceramic green sheet 4 with a thickness of 0.25 mm is taken out from the drying oven 8.
この乾燥過程で、スラリ内の溶剤の大部分が前室１２お
よび乾燥炉７の中で蒸発し、残存する溶剤が乾燥炉８で
取り除かれる。During this drying process, most of the solvent in the slurry is evaporated in the front chamber 12 and the drying oven 7, and the remaining solvent is removed in the drying oven 8.
セラミックグリーンシート４のひび割れは前室１２およ
び乾燥炉７の乾燥条件により発生するので、本発明では
冷気供給管工３から室温より低く冷却された空気を前室
１２に供給し、前室１２の温度を乾燥炉７よりも下げる
ようにした。Cracks in the ceramic green sheet 4 occur due to the drying conditions of the front chamber 12 and the drying oven 7, so in the present invention, air cooled below room temperature is supplied from the cold air supply pipe 3 to the front chamber 12, The temperature was set lower than that of drying oven 7.
第２図は前室１２の温度を変えたときの前室温度とセラ
ミックグリーンシート１ｍあたりのひび割れ長さの関係
についての実験結果である。前室の温度が低いほど、セ
ラミックグリーンシートのひび割れ長さが短くなること
を示している。FIG. 2 shows the experimental results regarding the relationship between the temperature of the front chamber 12 and the crack length per meter of ceramic green sheet when the temperature of the front chamber 12 was changed. This shows that the lower the temperature in the front chamber, the shorter the crack length in the ceramic green sheet.
冷気供給管１３から冷却された空気の供給がない場合、
前室１２の温度は２６〜２８℃になり、セラミックグリ
ーンシート１ｍあたりのひび割れ長さは０．０５ｍ以上
であった。冷気供給管１３から冷却空気を供給して、前
室１２の温度を２０℃以下に保持することにより、セラ
ミックグリーンシートのひび割れ長さを０，０１ｍ以下
にすることができた。When there is no supply of cooled air from the cold air supply pipe 13,
The temperature of the front chamber 12 was 26 to 28°C, and the crack length per 1 m of ceramic green sheet was 0.05 m or more. By supplying cooling air from the cold air supply pipe 13 and maintaining the temperature of the front chamber 12 at 20° C. or less, the length of cracks in the ceramic green sheet could be reduced to 0.01 m or less.
本発明によれば、セラミックグリーンシートの製造過程
におけるスラリ内の溶剤の急激な乾燥を抑制することが
できるので、セラミックグリーンシートのひび割れ、乾
燥不良などの発生を防ぐことができ、その製造歩留まり
を向上させることができる。According to the present invention, it is possible to suppress the rapid drying of the solvent in the slurry during the manufacturing process of ceramic green sheets, so it is possible to prevent the occurrence of cracks and drying defects in the ceramic green sheets, and to improve the manufacturing yield. can be improved.
第１図は本発明の実施例を示す側面図、第２図は本発明
の実施例における前室温度とセラミックグリーンシート
のひび割れ長さの関係についての実験結果を示した特性
図である。
１・・・ドクターブレード、２・・・スラリ、３・・・
ダム、４・・・セラミックグリーンシート、５・・・キ
ャリアフィルム、６・・・ベルトコンベア、７，８・・
・乾燥炉、９．１０・・・排気管、１１・・・給気管、
１２・・・前室、１３・・・冷気供給管。FIG. 1 is a side view showing an embodiment of the present invention, and FIG. 2 is a characteristic diagram showing experimental results regarding the relationship between the front room temperature and the crack length of the ceramic green sheet in the embodiment of the present invention. 1...Doctor blade, 2...Slurry, 3...
Dam, 4... Ceramic green sheet, 5... Carrier film, 6... Belt conveyor, 7, 8...
・Drying oven, 9.10...exhaust pipe, 11...air supply pipe,
12... Front chamber, 13... Cold air supply pipe.
Claims (1)
トの製造方法において、 キャリアフィルム上に塗布したスラリから溶剤を蒸発さ
せてセラミックグリーンシートを乾燥する乾燥工程で、
ドクターブレードと自然乾燥炉中との間の前室を冷却す
ることを特徴とするセラミックグリーンシートの製造方
法。[Claims] 1. In the method for producing ceramic green sheets by the doctor blade method, in the drying step of drying the ceramic green sheets by evaporating the solvent from the slurry applied on the carrier film,
A method for producing a ceramic green sheet, characterized by cooling a front chamber between a doctor blade and a natural drying oven.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7686790A JPH03277505A (en) | 1990-03-28 | 1990-03-28 | Manufacture of ceramic green sheet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7686790A JPH03277505A (en) | 1990-03-28 | 1990-03-28 | Manufacture of ceramic green sheet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03277505A true JPH03277505A (en) | 1991-12-09 |
Family
ID=13617599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7686790A Pending JPH03277505A (en) | 1990-03-28 | 1990-03-28 | Manufacture of ceramic green sheet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03277505A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102202464A (en) * | 2010-03-22 | 2011-09-28 | 三星电机株式会社 | Device for producing ceramic green sheet |
| CN102476947A (en) * | 2010-11-26 | 2012-05-30 | 三星电机株式会社 | Ceramic green sheet drying apparatus and method of fabricating ceramic green sheet using the same |
-
1990
- 1990-03-28 JP JP7686790A patent/JPH03277505A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102202464A (en) * | 2010-03-22 | 2011-09-28 | 三星电机株式会社 | Device for producing ceramic green sheet |
| CN102476947A (en) * | 2010-11-26 | 2012-05-30 | 三星电机株式会社 | Ceramic green sheet drying apparatus and method of fabricating ceramic green sheet using the same |
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