JP2011181529A - 有機ｅｌ装置の製造方法 - Google Patents
有機ｅｌ装置の製造方法 Download PDFInfo
- Publication number
- JP2011181529A JP2011181529A JP2011136431A JP2011136431A JP2011181529A JP 2011181529 A JP2011181529 A JP 2011181529A JP 2011136431 A JP2011136431 A JP 2011136431A JP 2011136431 A JP2011136431 A JP 2011136431A JP 2011181529 A JP2011181529 A JP 2011181529A
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- JP
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- Prior art keywords
- oxide layer
- layer
- organic
- pixel electrode
- org
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000010410 layer Substances 0.000 claims abstract description 267
- 239000012044 organic layer Substances 0.000 claims abstract description 56
- 238000004140 cleaning Methods 0.000 claims abstract description 48
- 239000010408 film Substances 0.000 description 71
- 238000005401 electroluminescence Methods 0.000 description 55
- 238000000034 method Methods 0.000 description 39
- 230000005525 hole transport Effects 0.000 description 36
- 239000010409 thin film Substances 0.000 description 30
- 239000000758 substrate Substances 0.000 description 24
- 229910010272 inorganic material Inorganic materials 0.000 description 14
- 238000005192 partition Methods 0.000 description 14
- 150000002484 inorganic compounds Chemical class 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 230000007547 defect Effects 0.000 description 8
- 150000002894 organic compounds Chemical class 0.000 description 8
- 238000002161 passivation Methods 0.000 description 8
- 238000007789 sealing Methods 0.000 description 8
- 101100451713 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) HTL1 gene Proteins 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 6
- 238000001035 drying Methods 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 3
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 206010040844 Skin exfoliation Diseases 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- -1 molybdenum oxide Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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- Electroluminescent Light Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011136431A JP2011181529A (ja) | 2011-06-20 | 2011-06-20 | 有機ｅｌ装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011136431A JP2011181529A (ja) | 2011-06-20 | 2011-06-20 | 有機ｅｌ装置の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009153913A Division JP2011009639A (ja) | 2009-06-29 | 2009-06-29 | 有機ｅｌ装置及びその製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012098891A Division JP5377705B2 (ja) | 2012-04-24 | 2012-04-24 | 有機ｅｌ装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011181529A true JP2011181529A (ja) | 2011-09-15 |
| JP2011181529A5 JP2011181529A5 (enExample) | 2011-10-27 |
Family
ID=44692783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011136431A Pending JP2011181529A (ja) | 2011-06-20 | 2011-06-20 | 有機ｅｌ装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011181529A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105720214A (zh) * | 2013-01-16 | 2016-06-29 | 柯云 | 一种有机电致发光器件的制备方法 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000091067A (ja) * | 1998-09-10 | 2000-03-31 | Pioneer Electronic Corp | 有機エレクトロルミネッセンス素子とその製造方法 |
| JP2001035667A (ja) * | 1999-07-27 | 2001-02-09 | Tdk Corp | 有機ｅｌ素子 |
| JP2003031360A (ja) * | 2001-07-11 | 2003-01-31 | Tdk Corp | 有機ｅｌ素子およびその製造方法 |
| JP2007288074A (ja) * | 2006-04-19 | 2007-11-01 | Matsushita Electric Ind Co Ltd | 有機エレクトロルミネッセント素子およびその製造方法 |
| JP2007533104A (ja) * | 2004-04-12 | 2007-11-15 | イーストマン コダック カンパニー | 短絡が減少したｏｌｅｄデバイス |
| WO2008149498A1 (ja) * | 2007-05-31 | 2008-12-11 | Panasonic Corporation | 有機ｅｌ素子、およびその製造方法 |
| JP2009044101A (ja) * | 2007-08-10 | 2009-02-26 | Sumitomo Chemical Co Ltd | 金属ドープモリブデン酸化物層を含む有機エレクトロルミネッセンス素子及び製造方法 |
-
2011
- 2011-06-20 JP JP2011136431A patent/JP2011181529A/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000091067A (ja) * | 1998-09-10 | 2000-03-31 | Pioneer Electronic Corp | 有機エレクトロルミネッセンス素子とその製造方法 |
| JP2001035667A (ja) * | 1999-07-27 | 2001-02-09 | Tdk Corp | 有機ｅｌ素子 |
| JP2003031360A (ja) * | 2001-07-11 | 2003-01-31 | Tdk Corp | 有機ｅｌ素子およびその製造方法 |
| JP2007533104A (ja) * | 2004-04-12 | 2007-11-15 | イーストマン コダック カンパニー | 短絡が減少したｏｌｅｄデバイス |
| JP2007288074A (ja) * | 2006-04-19 | 2007-11-01 | Matsushita Electric Ind Co Ltd | 有機エレクトロルミネッセント素子およびその製造方法 |
| WO2008149498A1 (ja) * | 2007-05-31 | 2008-12-11 | Panasonic Corporation | 有機ｅｌ素子、およびその製造方法 |
| JP2009044101A (ja) * | 2007-08-10 | 2009-02-26 | Sumitomo Chemical Co Ltd | 金属ドープモリブデン酸化物層を含む有機エレクトロルミネッセンス素子及び製造方法 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105720214A (zh) * | 2013-01-16 | 2016-06-29 | 柯云 | 一种有机电致发光器件的制备方法 |
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