JP2011176147A5 - - Google Patents

Download PDF

Info

Publication number
JP2011176147A5
JP2011176147A5 JP2010039386A JP2010039386A JP2011176147A5 JP 2011176147 A5 JP2011176147 A5 JP 2011176147A5 JP 2010039386 A JP2010039386 A JP 2010039386A JP 2010039386 A JP2010039386 A JP 2010039386A JP 2011176147 A5 JP2011176147 A5 JP 2011176147A5
Authority
JP
Japan
Prior art keywords
circular waveguide
plasma processing
plasma
electric field
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010039386A
Other languages
English (en)
Japanese (ja)
Other versions
JP5667368B2 (ja
JP2011176147A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010039386A priority Critical patent/JP5667368B2/ja
Priority claimed from JP2010039386A external-priority patent/JP5667368B2/ja
Publication of JP2011176147A publication Critical patent/JP2011176147A/ja
Publication of JP2011176147A5 publication Critical patent/JP2011176147A5/ja
Application granted granted Critical
Publication of JP5667368B2 publication Critical patent/JP5667368B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010039386A 2010-02-24 2010-02-24 プラズマ処理装置 Expired - Fee Related JP5667368B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010039386A JP5667368B2 (ja) 2010-02-24 2010-02-24 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010039386A JP5667368B2 (ja) 2010-02-24 2010-02-24 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2011176147A JP2011176147A (ja) 2011-09-08
JP2011176147A5 true JP2011176147A5 (https=) 2013-04-04
JP5667368B2 JP5667368B2 (ja) 2015-02-12

Family

ID=44688746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010039386A Expired - Fee Related JP5667368B2 (ja) 2010-02-24 2010-02-24 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP5667368B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7074795B2 (ja) * 2020-04-21 2022-05-24 宏碩系統股▲フン▼有限公司 合成ダイヤモンドの製造装置及びこれに用いられるマイクロ波発射モジュール

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567586A (ja) * 1991-09-09 1993-03-19 Nec Corp Ｅｃｒプラズマエツチング装置
JPH0673567A (ja) * 1992-08-28 1994-03-15 Hitachi Ltd マイクロ波プラズマ処理装置
JPH07263187A (ja) * 1994-03-18 1995-10-13 Hitachi Ltd プラズマ処理装置

Similar Documents

Publication Publication Date Title
Morgan et al. The diameter of the commuting graph of a finite group with trivial centre
EP3348582A4 (en) CARBON NANOTUBLE DISSANGE LIQUID AND MANUFACTURING METHOD THEREFOR
WO2013002655A3 (en) Improved medical tubing
CA150511S (en) Hose assembly
CA150513S (en) Hose connector
JP2012075930A5 (ja) パイルマット及び吸水方法
EP2775734A3 (en) Acoustic apparatus
JP2011176146A5 (https=)
WO2011084690A3 (en) Apparatus and method to support a tubular member
JP2010203763A5 (https=)
JP2016057142A5 (https=)
JP2011176147A5 (https=)
USD723159S1 (en) Oxygen tube headband
JP2017178387A5 (https=)
JP2013108179A5 (https=)
IL241308B (en) Surface-treated qualified cellulose from chemical kraft fibers and methods for its production and use
EA201690711A1 (ru) Ингалятор аромата
JP2012228637A5 (https=)
CN204578799U (zh) 一种发热针结构
FR2972858B1 (fr) Synthetiseur d'impedance coaxial
TWD145679S (zh) 鼓風機
JP2016531601A5 (https=)
CN204179328U (zh) 一种检波器插头外套
CN204096896U (zh) 一种起吊装置
CN203144290U (zh) 一种玻纤管除毛装置