JP2011174119A5 - - Google Patents

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Publication number
JP2011174119A5
JP2011174119A5 JP2010037922A JP2010037922A JP2011174119A5 JP 2011174119 A5 JP2011174119 A5 JP 2011174119A5 JP 2010037922 A JP2010037922 A JP 2010037922A JP 2010037922 A JP2010037922 A JP 2010037922A JP 2011174119 A5 JP2011174119 A5 JP 2011174119A5
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JP
Japan
Prior art keywords
plating layer
microstructure
layer
forming
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010037922A
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English (en)
Japanese (ja)
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JP5744407B2 (ja
JP2011174119A (ja
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Priority to JP2010037922A priority Critical patent/JP5744407B2/ja
Priority claimed from JP2010037922A external-priority patent/JP5744407B2/ja
Publication of JP2011174119A publication Critical patent/JP2011174119A/ja
Publication of JP2011174119A5 publication Critical patent/JP2011174119A5/ja
Application granted granted Critical
Publication of JP5744407B2 publication Critical patent/JP5744407B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010037922A 2010-02-23 2010-02-23 マイクロ構造体の製造方法 Expired - Fee Related JP5744407B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010037922A JP5744407B2 (ja) 2010-02-23 2010-02-23 マイクロ構造体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010037922A JP5744407B2 (ja) 2010-02-23 2010-02-23 マイクロ構造体の製造方法

Publications (3)

Publication Number Publication Date
JP2011174119A JP2011174119A (ja) 2011-09-08
JP2011174119A5 true JP2011174119A5 (enExample) 2013-04-11
JP5744407B2 JP5744407B2 (ja) 2015-07-08

Family

ID=44687237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010037922A Expired - Fee Related JP5744407B2 (ja) 2010-02-23 2010-02-23 マイクロ構造体の製造方法

Country Status (1)

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JP (1) JP5744407B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5627247B2 (ja) * 2010-02-10 2014-11-19 キヤノン株式会社 マイクロ構造体の製造方法および放射線吸収格子
JP5804726B2 (ja) * 2011-02-24 2015-11-04 キヤノン株式会社 微細構造体の製造方法
JP6149343B2 (ja) * 2012-03-26 2017-06-21 コニカミノルタ株式会社 格子および格子ユニットならびにｘ線用撮像装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002313233A (ja) * 2001-04-10 2002-10-25 Sumitomo Metal Mining Co Ltd ダブルテープ式アパチャーグリルの検査方法
ITTO20030167A1 (it) * 2003-03-06 2004-09-07 Fiat Ricerche Procedimento per la realizzazione di emettitori nano-strutturati per sorgenti di luce ad incandescenza.
JP5773624B2 (ja) * 2010-01-08 2015-09-02 キヤノン株式会社 微細構造体の製造方法

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