JP2011155150A - Grooving tool and method of grooving thin-film solar cell using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a grooving tool that prevents irregular peeling by a friction resistance from occurring easily, has a low load, and scrapes off a thin film smoothly, and to provide a grooving method using the grooving tool. <P>SOLUTION: The grooving tool 8 is formed so that a plurality of recesses 82 and projections 83 are aligned alternately at a lower end of a blade body 81. The height of the projections is set so that projections before and after the projection positioned at the center are positioned at an upper part gradually, and left/right side faces 86, 87 of the projections are formed in parallel. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a groove processing method for manufacturing an integrated thin film solar cell and a groove processing tool used for the groove processing.

  In a thin film solar cell, an integrated structure in which a plurality of unit cells are connected in series on a substrate is generally used.

  A method for producing a conventional chalcopyrite compound integrated thin film solar cell will be described. FIG. 8 is a schematic view showing a manufacturing process of a CIGS thin film solar cell. First, as shown in FIG. 8A, a Mo electrode layer 2 to be a lower electrode on the plus side is formed by sputtering on an insulating substrate 1 made of soda lime glass (SLG) or the like, and then a light absorption layer is formed. A groove S for lower electrode separation is formed on the previous thin film solar cell substrate by scribing.

  Thereafter, as shown in FIG. 8B, a light absorption layer 3 made of a compound semiconductor (CIGS) thin film is formed on the Mo electrode layer 2 by vapor deposition, sputtering, or the like, and further made of a ZnO thin film thereon. The insulating layer 4 is formed. And for the inter-electrode contact that reaches the Mo electrode layer 2 by scribing at a position that is a predetermined distance in the lateral direction from the groove S for separating the lower electrode with respect to the thin film solar cell substrate before forming the transparent electrode layer A groove M1 is formed.

  Subsequently, as shown in FIG. 8C, a transparent electrode layer 5 as an upper electrode made of a ZnO: Al thin film is formed on the insulating layer 4, and each functional layer necessary for power generation using photoelectric conversion is formed. An electrode separation groove M2 reaching the lower Mo electrode layer 2 is formed by scribing, using the solar cell substrate provided.

  In the process of manufacturing the integrated thin film solar cell described above, a laser scribing method and a mechanical scribing method have been used as a technique for processing the grooves M1 and M2 by scribing.

  In the laser scribing method, as disclosed in, for example, Patent Document 1, a groove for electrode separation is formed by irradiating laser light emitted by exciting an Nd: YAG crystal with a continuous discharge lamp such as an arc lamp. . In this method, when a groove is formed on the thin-film solar cell substrate after the light absorption layer is formed, the photoelectric conversion characteristics of the light absorption layer 3 may be deteriorated by the heat of the laser light during scribing.

  For example, as disclosed in Patent Documents 2 and 3, the mechanical scribing method is performed by pressing a cutting edge of a groove processing tool such as a metal needle (needle) having a tapered tip against a substrate while applying a predetermined pressure. This is a technique for processing a groove for electrode separation by moving the electrode. At present, this mechanical scribing method is often performed.

JP-A-11-31815 JP 2002-094089 A JP 2004-115356 A

  The groove machining tool used in the conventional mechanical scribing method has a tapered needle shape as disclosed in Patent Document 2 and Patent Document 3, but strictly speaking, it is a thin film solar cell. The portion to be press-contacted has a truncated cone shape whose tip is horizontally cut so as to be flat in order to increase the contact area.

By scribing using a frusto-conical groove processing tool, the tip portion has a large contact area with the substrate, so that the groove processing can be performed relatively stably. However, when the depth of the groove to be processed becomes a little deeper, the contact area between the tapered surface of the frustoconical side and the substrate increases during scribing, the frictional resistance increases, and the thin film is scraped at once with a single cutting edge. Since it is a thing, the load with respect to a blade edge becomes large. The increase in the frictional resistance and load on the cutting edge may cause the thin film to peel off irregularly and remove even unnecessary portions, which may reduce the characteristics and yield of the solar cell. In addition, the increase in frictional resistance and load has a problem in that the spillage and wear of the blade edge are promoted and the life of the grooving tool is shortened.
Accordingly, the first object of the present invention is to prevent irregular peeling due to frictional resistance from occurring, so that the contact area between the blade edge and the substrate does not increase even when the depth of the groove to be processed is slightly deeper. Another object of the present invention is to provide a grooving tool capable of smoothly cutting a thin film with a low load, and a grooving method using the grooving tool.

  In addition, when the cutting edge is worn, it is economical if the grooving tool can be removed from the holder, polished and repaired, and reused. The diameter will change. In solar cell substrates, it is important to maintain the scribe line width constant to achieve the quality (photoelectric conversion efficiency, etc.) planned in the product design and to improve the quality uniformity (reproducibility). For this purpose, it is necessary to make the degree of peeling of the thin film constant.

  Accordingly, a second object of the present invention is to provide a grooving tool for a thin film solar cell that can be reused by maintaining the line width of the scribe line constant by polishing even with a cutting edge that has already been worn. There is to do.

  The groove processing tool for an integrated thin film solar cell of the present invention, which has been made to solve the above problems, is formed at the lower end of the blade body so that a plurality of concave portions and convex portions are alternately arranged in a line. The height of the part is arranged so that the front and rear convex parts are gradually positioned higher than the central convex part, and the left and right side surfaces of the convex part are formed in parallel.

Moreover, the groove processing method of the integrated thin film solar cell according to the present invention made to solve the above problems, while pressing with the cutting edge of the groove processing tool along the scribe line of the integrated thin film solar cell substrate, A groove processing method for an integrated thin film solar cell in which a scribe line is formed on a solar cell by relatively moving a solar cell substrate or a groove processing tool, and the groove processing tool is a blade attached to a holder of a scribing device A plurality of concave portions and convex portions are formed in a row at the lower end of the body body, and the height of the convex portions is arranged so that the front and rear convex portions are gradually positioned higher than the central convex portion. In addition, a groove having different depths depending on a plurality of protrusions in one movement is used by using the protrusions with the left and right side surfaces formed in parallel, and arranging the cutting edge of the groove processing tool in the moving direction. Process simultaneously It is way.
The height and number of protrusions of the protrusions are set according to the depth of the groove to be machined, whereby two to four cutting edges that are different from the shallow part to the deep part of the groove when grooving is performed. The thin film is made to be cut sequentially. Thereby, the groove processing is performed little by little with a plurality of cutting edges so that the frictional resistance and the load are not increased.

In the integrated thin film solar cell manufacturing method of the present invention, when grooving is performed, a groove processing tool having a shape in which a plurality of convex portions are formed as cutting edges is used, and the direction in which the convex portions are aligned is a moving direction. Since the groove processing is performed simultaneously with the plurality of convex portions, the groove portion is gradually scraped with the plurality of convex portions.
That is, among the plurality of convex portions, the groove processing is sequentially performed from the convex portion on the front side in the traveling direction, thereby reducing the frictional resistance during the groove processing and eliminating the occurrence of irregular thin film peeling, A straight and clean scribe line can be formed.
In addition, since the left and right side surfaces of the convex part of the grooving tool are formed by a pair of parallel surfaces, even if the top surface of the convex part is polished, it changes to the left and right width dimensions of the blade when the cutting edge is worn. Thus, even after polishing, the groove width to be scribed can be maintained the same as that before polishing, and can be reused by polishing repair, which is economical.
Also, since the front and rear convex portions are gradually positioned higher than the central convex portion, for example, when the front convex portion is worn, the rear convex portion is on the front side. By reversing and attaching the grooving tool, it can be used without polishing, or it is processed with the convex part at the front part when the grooving tool moves forward, and the convex part at the rear part when returning By machining with this, machining can be performed by reciprocating movement of the grooving tool, and the machining time can be shortened.

(Means and effects for solving other problems)

Of the convex portions that are continuous in the shape of a gear, the front and rear convex portions are preferably formed symmetrically with respect to the central convex portion.
Therefore, when reciprocating the grooving tool for grooving, or when mounting in a reversed state and grooving, the frictional resistance and load during cutting by the front and rear projections are the same under the same conditions. Can be machined.

The perspective view which shows one Embodiment of the scribing apparatus for integrated type thin film solar cells using the groove processing tool concerning this invention. The perspective view of the principal part of the groove processing tool concerning this invention. The front view of the principal part of the said groove processing tool. The side view of the principal part of the said groove processing tool. Explanatory drawing which shows the state at the time of the groove processing by the groove processing tool concerning this invention. The side view of the principal part which shows the other Example of the groove processing tool concerning this invention. The side view of the principal part which shows another Example of the groove processing tool concerning this invention. The schematic diagram which shows the manufacturing process of a general CIGS type thin film solar cell.

Hereinafter, details of the present invention will be described in detail with reference to the drawings showing embodiments thereof.
Initially, the whole structure of the scribe device which attaches the grooving tool of this invention is demonstrated.
FIG. 1 is a perspective view showing an embodiment of an integrated thin film solar cell scribing apparatus using a groove processing tool according to the present invention. The scribing device includes a table 18 that is movable in a substantially horizontal direction (Y direction) and that can rotate 90 degrees and an angle θ in a horizontal plane. The table 18 substantially serves as a means for holding the solar cell substrate W. Form.

  A bridge 19 composed of support pillars 20, 20 on both sides of the table 18 and guide bars 21 extending in the X direction is provided so as to straddle the table 18. The holder support 23 is attached to be movable along a guide 22 formed on the guide bar 21, and moves in the X direction by the rotation of the motor 24.

A scribe head 7 is provided on the holder support 23, and a groove processing tool 8 for scribing the thin film surface of the solar cell substrate W placed on the table 18 is held below the scribe head 7. A holder 9 is provided. The holder 9 can adjust the attachment angle, and the angle between the groove processing tool 8 and the solar cell substrate W can be adjusted by adjusting the attachment angle.

  Cameras 10 and 11 are provided on pedestals 12 and 13 that can move in the X and Y directions, respectively. The pedestals 12 and 13 move along a guide 15 extending in the X direction on the support base 14. The cameras 10 and 11 can be moved up and down by manual operation, and the focus of imaging can be adjusted. Images taken by the cameras 10 and 11 are displayed on the monitors 16 and 17.

The solar cell substrate W placed on the table 18 has a scribe line or the like that is formed in the previous process and can be observed from the surface. Therefore, when scribing the solar cell substrate W, the scribe line formed in the previous process is used as a mark for specifying the scribe position. For example, when grooves for upper and lower electrode contacts are formed on the solar cell substrate W on which the light absorption layer 3 and the insulating layer 4 are formed on the scribed lower electrode layer (Mo electrode layer) 2, the lower electrode layer 2 The scribe line formed in the above is used as a mark for specifying the groove forming position.
That is, the position of the solar cell substrate W is adjusted by imaging the scribe line formed on the lower electrode layer 2 by the cameras 10 and 11. Specifically, the scribe line formed on the lower electrode layer 2 is imaged with the cameras 10 and 11 by imaging the scribe line formed on the lower electrode layer 2 that can be observed from the surface of the solar cell substrate W supported by the table 18. Identify the location. Based on the position of the scribe line formed in the specified lower electrode layer, the position (scribe position) where the upper and lower electrode contact grooves are to be formed is determined, and the position of the solar cell substrate W is adjusted to determine the scribe position. adjust.

  Each time the table 18 is moved at a predetermined pitch in the Y direction, the holder 9 is lowered and moved in the X direction in a state where the convex portion 83 of the groove processing tool 8 is pressed against the surface of the solar cell substrate W. The surface of the substrate W is scribed along the X direction. When the surface of the solar cell substrate W is scribed along the Y direction, the table 18 is rotated 90 degrees and the same operation as described above is performed.

Next, the grooving tool according to the present invention will be described.
2 to 5 show an embodiment of the grooving tool 8 according to the present invention. FIG. 2 is a perspective view, FIG. 3 is a front view, and FIG. 4 is a side view. FIG. 5 shows a state during groove processing.
This grooving tool 8 includes a cylindrical blade body 81 and a cutting edge region 85 integrally formed at the lower end thereof by electric discharge machining or the like, and is made of cemented carbide or diamond (sintered diamond (PCD) or the like). ) And other hard materials. The blade edge region 85 is formed in a plate shape having side surfaces 86 and 87 parallel to each other, and a plurality of concave portions 82 and convex portions 83 are alternately formed in a line at the lower end of the blade edge region 85. ing.

The height of the plurality of convex portions 83 is arranged such that the front and rear convex portions gradually become higher from the central convex portion, and when performing the groove processing, the convex portion positioned in the forward direction of the groove processing tool The thin film is sequentially cut by a plurality of convex portions 83 having different heights from the central portion to the convex portion located at the center.
In the present embodiment, as shown in FIG. 4, the projections are arranged symmetrically in the front-rear direction so that the front and rear projections gradually become higher from the central projection along the line A1 that draws a gentle arc. May be formed along a wide-angle V-shaped line A2. Further, the lower surface of the convex portion 83 is formed along the arc-shaped line A1 or the V-shaped line A2, but as shown in FIG. 7, with the groove machining tool 8 attached to the scribe device, You may form so that it may become parallel to the surface of the solar cell substrate W.
Further, in this embodiment, as shown in FIG. 4, the pitches P1, P2, P3, and P4 of the plurality of convex portions 83 that are continuous in a gear shape range from the pitch P1 of the central portion to P4 on the front end side and the rear end side. It is formed so as to become gradually smaller. However, these pitches can be formed at equal intervals.

When attaching the groove processing tool 8 to the holder 9, as shown in FIG. 5, the direction in which the protrusions 83 are arranged is directed to the traveling direction side with respect to the solar cell substrate W. In this embodiment, grooving is performed simultaneously with 4 to 5 cutting edges. Therefore, the diameter of the cylindrical blade body 81 and the dimensions and the number of the concave portions 82 and the convex portions 83 formed at the lower end thereof are set in accordance with the depth and width of the groove to be processed.
Specifically, for example, the left and right width L1 of the blade edge region 85 including the concave portion 82 and the convex portion 83 is preferably 50 to 60 μm, but can be set to 25 to 80 μm according to the required groove width of the scribe. The effective height of the cutting edge region 85, that is, the maximum height H of the left and right side surfaces 86 and 87 of the cutting edge region is preferably about 0.5 mm. Furthermore, the diameter of the cylindrical blade body 81 is preferably set so that the overall length L2 of the concave portion 82 and the convex portion 83 in the blade edge region is about 2 to 3 mm. Moreover, although the number of the recessed part 82 and the convex part 83 was nine in the implementation drawing, it may be more or less than that. In addition, the blade body 81 of the grooving tool 8 is not limited to a columnar shape, and may be formed with a square or polygonal cross section.

In the above configuration, when the groove processing is performed, as shown in FIG. 5, the thin film made of the light absorption layer 3 and the insulating layer 4 of the substrate W is gradually scraped by the plurality of convex portions 83.
That is, among the cutting edges of the plurality of convex portions 83 acting in contact with the substrate W, the upper cutting edge on the front side in the advancing direction is gradually scraped by the cutting edge on the lower stage side, whereby the frictional resistance at the time of grooving In addition, the load is remarkably reduced and the occurrence of irregular thin film peeling can be eliminated, and a straight and clean scribe line can be formed.

  In addition, since the left and right side surfaces 86 and 87 of the convex portion 83 of the grooving tool are formed in parallel to each other, even if the top surface of the convex portion 83 is polished when the blade edge is worn, the left and right width dimensions of the blade are reduced. There is no change, and the groove width to be scribed can be maintained the same as that before polishing even after polishing, and it can be reused by polishing repair, which is economical.

Further, among the convex portions 83 that are continuous in a gear shape, the convex portions before and after the central convex portion are arranged so that the front and rear convex portions are gradually positioned higher, and the front and rear convex portions are front and rear with the central convex portion as a boundary. Since it is formed symmetrically, for example, when the front projection is worn, it can be used without polishing by reversing and attaching the groove processing tool so that the rear projection is on the front side it can.
In addition, by processing with the convex part at the front part during the forward movement of the grooving tool and processing with the convex part at the rear part during the backward movement, the groove with the same dimension can be processed by the reciprocating movement of the grooving tool. And the processing time can be shortened.

  In the above embodiment, the scribing process is executed by moving the scribe head 7 in the X direction. However, since it is sufficient that the scribe head 7 and the solar cell substrate W can move relative to each other, the solar cell substrate W is fixed. The scribing head 7 may be moved in the X direction and the Y direction in the state where it is applied, or only the solar cell substrate W may be moved in the X direction and the Y direction without moving the scribing head 7.

  As mentioned above, although the typical Example of this invention was described, this invention is not necessarily limited only to said Example structure. For example, in the embodiment, the angle of the cutting edge in the convex portion 83 of the grooving tool 8 is formed with an obtuse angle slightly larger than the right angle to ease the difficulty in manufacturing the tool, but it can also be formed at a right angle. Others The present invention can be appropriately modified and changed within the scope of achieving the object and without departing from the scope of the claims.

  INDUSTRIAL APPLICABILITY The present invention can be applied to a method for manufacturing an integrated thin film solar cell using a chalcopyrite compound semiconductor film, and a groove processing tool that can be used therefor.

W Solar cell substrate 7 Scribe head 8 Groove processing tool 81 Blade body 82 Recess 83 Protrusion 85 Cutting edge regions 86 and 87 Left and right side surfaces 9 of the protrusion 9 Holder

Claims (3)

  At the lower end of the blade body, a plurality of concave portions and convex portions are alternately arranged in a line, and the height of this convex portion is such that the front and rear convex portions are gradually positioned higher than the central convex portion. A groove processing tool for an integrated thin-film solar cell, which is disposed in the left and right sides of the convex portion and is formed in parallel.   The groove processing tool for an integrated thin-film solar cell according to claim 1, wherein front and rear convex portions among the plurality of convex portions are formed symmetrically with respect to a central convex portion as a boundary.   An integrated thin film solar that forms a scribe line on a solar cell by relatively moving the solar cell substrate or the groove processing tool while pressing with a groove processing tool along a scribe planned line of the integrated thin film solar cell substrate A method for grooving a battery, wherein a grooving tool is formed at a lower end of a blade body attached to a holder of a scribing device so that a plurality of concave portions and convex portions are arranged in a row, and the height of the convex portions is , Using the one in which the front and rear convex portions are gradually positioned higher than the central convex portion, and the left and right side surfaces of the convex portion are formed in parallel, and the cutting edge of this groove processing tool is moved as described above A groove processing method for an integrated thin-film solar cell, wherein the grooves are arranged in a direction and different groove depths are simultaneously processed by a plurality of convex portions by one movement.

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