JP2011142141A5

JP2011142141A5 - Holder maintenance device and holder maintenance method

Info

Publication number: JP2011142141A5
Application number: JP2010000818A
Authority: JP
Filing date: 2010-01-05
Publication date: 2013-03-07

Claims

A holder maintenance device for use in a substrate stacking apparatus for bonding two semiconductor substrates stacked on each other to each other, and for maintaining a substrate holder for holding and transporting at least one of the two semiconductor substrates,
A holder rack that accommodates the substrate holder;
A transport unit for unloading the substrate holder from the holder rack;
A maintenance unit for maintaining the substrate holder transported by the transport unit;
Holder maintenance device provided with

The holder maintenance device according to claim 1, wherein the maintenance unit has a dust detection device that detects dust attached to the substrate holder.

3. The dust detection apparatus according to claim 2, further comprising: a light source for illuminating the substrate holder; an imaging unit for imaging reflected light from the substrate holder; and an image processing unit for processing an image captured by the imaging unit. Holder maintenance device as described.

The holder maintenance device according to claim 3, wherein the imaging unit is disposed at a position to receive scattered light from the substrate holder.

The holder maintenance device according to claim 3 or 4, wherein the image processing unit detects the size and position of the dust by processing an image captured by the imaging unit.

The holder maintenance device according to any one of claims 2 to 5, wherein the dust detection device detects the other surface after completing detection of one surface of the substrate holder.

The holder maintenance device according to claim 6, wherein the transport unit reverses the substrate holder whose detection is completed by the dust detection device, and carries the substrate holder into the dust detection device again.

The holder maintenance device according to any one of claims 2 to 7, wherein the maintenance unit has a cleaning device that cleans the substrate holder.

The holder maintenance device according to claim 8, wherein the cleaning device includes a fluid ejecting unit that ejects a fluid toward the substrate holder.

The cleaning apparatus has a pressure regulator that regulates the pressure of the fluid injected from the fluid injector.
10. The holder maintenance device according to claim 9, wherein the pressure adjustment unit adjusts the pressure in accordance with the degree of adhesion of the dust to the substrate holder.

The cleaning apparatus has a gas injection unit for injecting a gas to the substrate holder,
The fluid ejecting unit cleans the substrate holder by ejecting a liquid to the substrate holder, and the gas ejecting unit removes the liquid by ejecting the gas after cleaning by the fluid ejecting unit. The holder maintenance device according to 9 or 10.

The maintenance unit has a cleaning device for cleaning the substrate holder.
The holder maintenance device according to claim 5, wherein the cleaning device cleans the position detected by the image processing unit.

The holder maintenance according to any one of claims 8 to 12, wherein the maintenance unit has a drying device for drying the substrate holder after cleaning by the cleaning device when a liquid is used for cleaning by the cleaning device. apparatus.

The holder maintenance device according to claim 13, wherein the drying device is any one of a baking device which heats the substrate holder, a centrifugal drying device, and a spin drying device.

The transport unit carries the substrate holder into the dust detection device after the cleaning, and transports the substrate holder from the dust detection device to the drying device when dust is not detected, and dust is detected. In the case, the holder maintenance device according to claim 13 or 14, wherein the substrate holder is transported from the dust detection device to the cleaning device.

The holder maintenance device according to any one of claims 1 to 15, wherein the transport unit transports the substrate holder, for which the maintenance in the maintenance unit is completed, to the holder rack.

A holder maintenance method for use in a substrate stacking apparatus for bonding two semiconductor substrates stacked on each other to hold and transport at least one of the two semiconductor substrates.
A transfer step of unloading the substrate holder from a holder rack that accommodates the substrate holder;
A maintenance step of maintaining the substrate holder transferred at the transfer step;
Holder maintenance method including.

The holder maintenance method according to claim 17, wherein the maintenance step includes a dust detection step of detecting dust attached to the substrate holder.

The holder maintenance method according to claim 18, wherein the dust detection step detects the size and position of the dust.

20. The holder maintenance method according to claim 18, wherein in the dust detection step, after detection of one surface of the substrate holder is completed, detection of the other surface is performed.

21. The holder maintenance method according to any one of claims 18 to 20, wherein the maintenance step includes a cleaning step of cleaning the substrate holder.

The holder maintenance method according to claim 21, wherein the cleaning step includes a fluid injection step of injecting a fluid toward the substrate holder.

The cleaning step includes a pressure adjustment step of adjusting the pressure of fluid injected in the fluid injection step, and the pressure adjustment step adjusts the pressure in accordance with the degree of adhesion of the dust to the substrate holder. 22. The holder maintenance method described in 22.

The cleaning step comprises a gas injection step of injecting a gas onto the substrate holder,
The fluid injection step cleans the substrate holder by injecting a liquid onto the substrate holder, and the gas injection step removes the liquid by injecting the gas after cleaning by the fluid injection step. The holder maintenance method as described in 22 or 23.

The maintenance step includes a cleaning step of cleaning the substrate holder.
The holder maintenance method according to claim 19, wherein the cleaning step cleans the position detected in the dust detection step.

26. The holder maintenance according to any one of claims 21 to 25, wherein the maintenance step includes a drying step of drying the substrate holder after cleaning by the cleaning step when a liquid is used for cleaning in the cleaning step. Method.

The holder maintenance according to claim 26, wherein the dust detection step is performed again after the cleaning step, the drying step is performed if dust is not detected, and the cleaning step is performed again if dust is detected. Method.

28. The holder maintenance method according to any one of claims 17 to 27, including the step of transporting the substrate holder, for which the maintenance in the maintenance stage is completed, to the holder rack.